JP5634033B2 - 樹脂封止型半導体装置とその製造方法 - Google Patents
樹脂封止型半導体装置とその製造方法 Download PDFInfo
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- JP5634033B2 JP5634033B2 JP2009108812A JP2009108812A JP5634033B2 JP 5634033 B2 JP5634033 B2 JP 5634033B2 JP 2009108812 A JP2009108812 A JP 2009108812A JP 2009108812 A JP2009108812 A JP 2009108812A JP 5634033 B2 JP5634033 B2 JP 5634033B2
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Description
この場合、リードフレームが薄くなると、半導体チップや受動素子のダイボンドやワイヤボンデングの際の力により、リードフレームが変形する恐れがある。この問題に対して、吊りリードを設けて、当該吊りリードをパッケージの外部に配置される、頑強なリードフレームの外枠に接続し、機械的強度を補強して対処している。
本発明の第1の実施形態について、以下に、図面に従って説明する。
まず、リードフレーム1を準備して、大電流が流れ、発熱量も多いパワー系半導体チップ2を、ハンダプリフォーム等を使用して、リードフレーム1の、パワー系半導体チップ2を搭載すべきアイランド13にダイボンドする。この場合、リードフレーム1はCu素材にNiメッキ等をしたものが使用される。また、コントローラ用半導体チップ3は、消費電力も小さいことからAgペースト等で、コントローラ用半導体チップ3が搭載されるべきアイランド13にダイボンドされる。チップコンデンサ4のような受動素子も、同様に、Agペーストでリードフレーム1のアイランド13及びインナーリード1bに接着される。Agペーストで接着する場合は、リードフレーム1もAgメッキ等がされる。
第2の実施形態についての説明に先立ち、樹脂封止工程及びリードフレーム1の外枠8の切断工程について、その内容と問題点について検討する。樹脂封止工程では図4に示すように、樹脂封止装置の上金型100と下金型101の間の空間に、Alワイヤ6a等でワイヤボンディングされた半導体チップ2等が搭載されたリードフレーム1を挟み込み、樹脂注入を行う。図4では、左側のタイバー11が上金型100と下金型101に挟まれ、ダムバーとしての役割を果たし、樹脂が左側から樹脂パッケージ12の外部に流出するのを阻止している。また、右側はリードフレーム1の外枠8が上金型100と下金型101に挟まれ、樹脂が右側から樹脂パッケージ12の外部に流出するのを阻止している。手前側、奥側も同様に外枠8により樹脂が樹脂パッケージ12の外部に流出するのを阻止している。
そして、樹脂パッケージ12の端部に接する、上金型100と下金型101に挟まれたリードフレーム1の外枠8には、当該外枠8の内側から外側に向かう切欠き15,16が形成されているのが示されている。
1a アウターリード
1b インナーリード
2 パワー系半導体チップ
3 コントローラ用半導体チップ
4 チップコンデンサ
5a,5b,5c 吊りリード
6a,6b Alワイヤ
7a,7b,7c Alワイヤ
8 リードフレーム外枠
9,10 連結リード
11 タイバー
12 樹脂パッケージ
13 アイランド
14a,14b,14c リードフレームのワイヤボンディング部
15,16 切欠き
17,18 樹脂バリ
100 上金型
101 下金型
Claims (3)
- リードフレーム上のアイランドに半導体チップをダイボンドする工程と、
前記半導体チップと前記リードフレームのワイヤボンディング部をAlワイヤで超音波ワイヤボンディングする工程と、
前記半導体チップがダイボンドされた前記リードフレームを樹脂封止する工程と、を有し、
前記リードフレーム上のワイヤボンディング部が前記超音波の振動方向に延在し、前記超音波ワイヤボンディング工程において、前記ワイヤボンディング部は前記アイランド内に形成され、前記ワイヤボンディング部は、第1の方向に延びて前記リードフレームの外枠と連結する第1の連結リードと、前記第1の方向と異なる第2の方向に延びて前記リードフレームの外枠と連結する第2の連結リードを有し、前記第1及び第2の連結リードは、前記樹脂封止する工程により樹脂の中に埋め込まれることを特徴とする樹脂封止型半導体装置の製造方法。 - 前記リードフレームを樹脂封止した後に、前記リードフレームの外枠を切断する工程を備えることを特徴とする請求項1に記載の樹脂封止型半導体装置の製造方法。
- 外枠が切断されたリードフレームのアイランド上にダイボンドされた半導体チップと、
前記半導体チップとAlワイヤで超音波ワイヤボンディングされた前記リードフレーム上のワイヤボンディング部と、
前記リードフレームを樹脂封止する樹脂パッケージと、を備え、
前記リードフレーム上の前記ワイヤボンディング部が、前記Alワイヤのボンディング方向に延在し、前記半導体チップと前記リードフレームをAlワイヤで超音波ワイヤボンディングする工程において、前記ワイヤボンディング部は前記アイランド内に形成され、前記ワイヤボンディング部は、第1の方向に延びて前記リードフレームの外枠と連結する第1の連結リードと、前記第1の方向と異なる第2の方向に延びて前記リードフレームの外枠と連結する第2の連結リードを有し、前記第1及び第2の連結リードは、前記樹脂パッケージの中に埋め込まれたことを特徴とする樹脂封止型半導体装置。
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CN201110157820.8A CN102244016B (zh) | 2008-08-29 | 2009-08-28 | 树脂密封型半导体装置及其制造方法、引线框 |
CN2009101681273A CN101661893B (zh) | 2008-08-29 | 2009-08-28 | 树脂密封型半导体装置及其制造方法、引线框 |
US12/549,762 US8704342B2 (en) | 2008-08-29 | 2009-08-28 | Resin sealing type semiconductor device and method of manufacturing the same, and lead frame |
US14/192,250 US9171761B2 (en) | 2008-08-29 | 2014-02-27 | Resin sealing type semiconductor device and method of manufacturing the same, and lead frame |
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US20100052125A1 (en) | 2010-03-04 |
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