JP2009123900A - 不揮発性半導体記憶装置 - Google Patents
不揮発性半導体記憶装置 Download PDFInfo
- Publication number
- JP2009123900A JP2009123900A JP2007295962A JP2007295962A JP2009123900A JP 2009123900 A JP2009123900 A JP 2009123900A JP 2007295962 A JP2007295962 A JP 2007295962A JP 2007295962 A JP2007295962 A JP 2007295962A JP 2009123900 A JP2009123900 A JP 2009123900A
- Authority
- JP
- Japan
- Prior art keywords
- nitride
- film
- wirings
- variable resistance
- protective film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 16
- 230000001681 protective effect Effects 0.000 claims abstract description 64
- 150000001768 cations Chemical class 0.000 claims abstract description 10
- 150000004767 nitrides Chemical class 0.000 claims description 30
- 230000008859 change Effects 0.000 claims description 15
- 238000007254 oxidation reaction Methods 0.000 claims description 10
- 238000006722 reduction reaction Methods 0.000 claims description 9
- 150000001450 anions Chemical class 0.000 claims description 6
- 150000001875 compounds Chemical class 0.000 abstract description 25
- 230000005012 migration Effects 0.000 abstract description 13
- 238000013508 migration Methods 0.000 abstract description 13
- 239000002131 composite material Substances 0.000 abstract description 9
- 230000007704 transition Effects 0.000 abstract description 9
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 230000002401 inhibitory effect Effects 0.000 abstract 1
- 239000010408 film Substances 0.000 description 173
- 239000010410 layer Substances 0.000 description 97
- 229910044991 metal oxide Inorganic materials 0.000 description 39
- 150000004706 metal oxides Chemical class 0.000 description 39
- 150000002500 ions Chemical class 0.000 description 37
- 238000000034 method Methods 0.000 description 34
- -1 chalcogenide compound Chemical class 0.000 description 32
- 230000008569 process Effects 0.000 description 31
- 229910052751 metal Inorganic materials 0.000 description 30
- 239000002184 metal Substances 0.000 description 30
- 239000011229 interlayer Substances 0.000 description 26
- LSGOVYNHVSXFFJ-UHFFFAOYSA-N vanadate(3-) Chemical compound [O-][V]([O-])([O-])=O LSGOVYNHVSXFFJ-UHFFFAOYSA-N 0.000 description 24
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 22
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 22
- 239000011777 magnesium Substances 0.000 description 22
- 239000000463 material Substances 0.000 description 21
- 229910052749 magnesium Inorganic materials 0.000 description 20
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 18
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 18
- 238000000151 deposition Methods 0.000 description 17
- 229910052814 silicon oxide Inorganic materials 0.000 description 17
- 229910052581 Si3N4 Inorganic materials 0.000 description 16
- 229910052791 calcium Inorganic materials 0.000 description 16
- 239000011575 calcium Substances 0.000 description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 15
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 15
- 229910052710 silicon Inorganic materials 0.000 description 15
- 239000010703 silicon Substances 0.000 description 15
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 14
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 14
- 230000004888 barrier function Effects 0.000 description 14
- 239000010949 copper Substances 0.000 description 14
- 229910052746 lanthanum Inorganic materials 0.000 description 14
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 14
- 230000014759 maintenance of location Effects 0.000 description 14
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 14
- 229910052720 vanadium Inorganic materials 0.000 description 14
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 12
- 229910052788 barium Inorganic materials 0.000 description 12
- 229910002113 barium titanate Inorganic materials 0.000 description 12
- XBJJRSFLZVLCSE-UHFFFAOYSA-N barium(2+);diborate Chemical compound [Ba+2].[Ba+2].[Ba+2].[O-]B([O-])[O-].[O-]B([O-])[O-] XBJJRSFLZVLCSE-UHFFFAOYSA-N 0.000 description 12
- 230000008021 deposition Effects 0.000 description 12
- 229910052744 lithium Inorganic materials 0.000 description 12
- IDBFBDSKYCUNPW-UHFFFAOYSA-N lithium nitride Chemical compound [Li]N([Li])[Li] IDBFBDSKYCUNPW-UHFFFAOYSA-N 0.000 description 12
- 239000011572 manganese Substances 0.000 description 12
- IHIXIJGXTJIKRB-UHFFFAOYSA-N trisodium vanadate Chemical compound [Na+].[Na+].[Na+].[O-][V]([O-])([O-])=O IHIXIJGXTJIKRB-UHFFFAOYSA-N 0.000 description 12
- AKJVMGQSGCSQBU-UHFFFAOYSA-N zinc azanidylidenezinc Chemical compound [Zn++].[N-]=[Zn].[N-]=[Zn] AKJVMGQSGCSQBU-UHFFFAOYSA-N 0.000 description 12
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 11
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 11
- 238000005530 etching Methods 0.000 description 11
- 239000010936 titanium Substances 0.000 description 11
- 229910052802 copper Inorganic materials 0.000 description 10
- 230000000694 effects Effects 0.000 description 10
- 229910021645 metal ion Inorganic materials 0.000 description 10
- MEFBJEMVZONFCJ-UHFFFAOYSA-N molybdate Chemical compound [O-][Mo]([O-])(=O)=O MEFBJEMVZONFCJ-UHFFFAOYSA-N 0.000 description 10
- 239000002253 acid Substances 0.000 description 8
- 239000011651 chromium Substances 0.000 description 8
- 229910052759 nickel Inorganic materials 0.000 description 8
- 239000010955 niobium Substances 0.000 description 8
- 230000003647 oxidation Effects 0.000 description 8
- 229910052706 scandium Inorganic materials 0.000 description 8
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 description 8
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 8
- 239000010409 thin film Substances 0.000 description 8
- 229910052727 yttrium Inorganic materials 0.000 description 8
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 8
- 238000009413 insulation Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 230000009467 reduction Effects 0.000 description 7
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 6
- 229910002902 BiFeO3 Inorganic materials 0.000 description 6
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 6
- 229910004829 CaWO4 Inorganic materials 0.000 description 6
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 6
- 229910003334 KNbO3 Inorganic materials 0.000 description 6
- 229910003327 LiNbO3 Inorganic materials 0.000 description 6
- 229910020700 Na3VO4 Inorganic materials 0.000 description 6
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 6
- YDADSACUMGYURZ-UHFFFAOYSA-N [O-2].[Fe+2].[Bi+3] Chemical compound [O-2].[Fe+2].[Bi+3] YDADSACUMGYURZ-UHFFFAOYSA-N 0.000 description 6
- WRLYUMPZTCHRDL-UHFFFAOYSA-N [Si].[Eu].[La] Chemical compound [Si].[Eu].[La] WRLYUMPZTCHRDL-UHFFFAOYSA-N 0.000 description 6
- TVGGZXXPVMJCCL-UHFFFAOYSA-N [Si].[La] Chemical compound [Si].[La] TVGGZXXPVMJCCL-UHFFFAOYSA-N 0.000 description 6
- RIKIVTUJEVHYKJ-UHFFFAOYSA-N [V+5].[V+5].[O-][Cr]([O-])(=O)=O.[O-][Cr]([O-])(=O)=O.[O-][Cr]([O-])(=O)=O.[O-][Cr]([O-])(=O)=O.[O-][Cr]([O-])(=O)=O Chemical compound [V+5].[V+5].[O-][Cr]([O-])(=O)=O.[O-][Cr]([O-])(=O)=O.[O-][Cr]([O-])(=O)=O.[O-][Cr]([O-])(=O)=O.[O-][Cr]([O-])(=O)=O RIKIVTUJEVHYKJ-UHFFFAOYSA-N 0.000 description 6
- CXOWYMLTGOFURZ-UHFFFAOYSA-N azanylidynechromium Chemical compound [Cr]#N CXOWYMLTGOFURZ-UHFFFAOYSA-N 0.000 description 6
- NWAIGJYBQQYSPW-UHFFFAOYSA-N azanylidyneindigane Chemical compound [In]#N NWAIGJYBQQYSPW-UHFFFAOYSA-N 0.000 description 6
- QCLQZCOGUCNIOC-UHFFFAOYSA-N azanylidynelanthanum Chemical compound [La]#N QCLQZCOGUCNIOC-UHFFFAOYSA-N 0.000 description 6
- GPBUGPUPKAGMDK-UHFFFAOYSA-N azanylidynemolybdenum Chemical compound [Mo]#N GPBUGPUPKAGMDK-UHFFFAOYSA-N 0.000 description 6
- CFJRGWXELQQLSA-UHFFFAOYSA-N azanylidyneniobium Chemical compound [Nb]#N CFJRGWXELQQLSA-UHFFFAOYSA-N 0.000 description 6
- SKKMWRVAJNPLFY-UHFFFAOYSA-N azanylidynevanadium Chemical compound [V]#N SKKMWRVAJNPLFY-UHFFFAOYSA-N 0.000 description 6
- AJXBBNUQVRZRCZ-UHFFFAOYSA-N azanylidyneyttrium Chemical compound [Y]#N AJXBBNUQVRZRCZ-UHFFFAOYSA-N 0.000 description 6
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 6
- WEUCVIBPSSMHJG-UHFFFAOYSA-N calcium titanate Chemical compound [O-2].[O-2].[O-2].[Ca+2].[Ti+4] WEUCVIBPSSMHJG-UHFFFAOYSA-N 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 6
- DTDCCPMQHXRFFI-UHFFFAOYSA-N dioxido(dioxo)chromium lanthanum(3+) Chemical compound [La+3].[La+3].[O-][Cr]([O-])(=O)=O.[O-][Cr]([O-])(=O)=O.[O-][Cr]([O-])(=O)=O DTDCCPMQHXRFFI-UHFFFAOYSA-N 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 229910052742 iron Inorganic materials 0.000 description 6
- 229910001337 iron nitride Inorganic materials 0.000 description 6
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- UKDIAJWKFXFVFG-UHFFFAOYSA-N potassium;oxido(dioxo)niobium Chemical compound [K+].[O-][Nb](=O)=O UKDIAJWKFXFVFG-UHFFFAOYSA-N 0.000 description 6
- FKHIFSZMMVMEQY-UHFFFAOYSA-N talc Chemical compound [Mg+2].[O-][Si]([O-])=O FKHIFSZMMVMEQY-UHFFFAOYSA-N 0.000 description 6
- PBYZMCDFOULPGH-UHFFFAOYSA-N tungstate Chemical compound [O-][W]([O-])(=O)=O PBYZMCDFOULPGH-UHFFFAOYSA-N 0.000 description 6
- JRFBNCLFYLUNCE-UHFFFAOYSA-N zinc;oxygen(2-);titanium(4+) Chemical compound [O-2].[O-2].[O-2].[Ti+4].[Zn+2] JRFBNCLFYLUNCE-UHFFFAOYSA-N 0.000 description 6
- 229910052726 zirconium Inorganic materials 0.000 description 6
- ZVWKZXLXHLZXLS-UHFFFAOYSA-N zirconium nitride Chemical compound [Zr]#N ZVWKZXLXHLZXLS-UHFFFAOYSA-N 0.000 description 6
- 229910000166 zirconium phosphate Inorganic materials 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 230000001590 oxidative effect Effects 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 5
- 229910052719 titanium Inorganic materials 0.000 description 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 5
- 229910052721 tungsten Inorganic materials 0.000 description 5
- 239000010937 tungsten Substances 0.000 description 5
- ZSLUVFAKFWKJRC-IGMARMGPSA-N 232Th Chemical compound [232Th] ZSLUVFAKFWKJRC-IGMARMGPSA-N 0.000 description 4
- 229910052684 Cerium Inorganic materials 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 4
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 4
- 229910052691 Erbium Inorganic materials 0.000 description 4
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 4
- 229910012616 LiTi2O4 Inorganic materials 0.000 description 4
- 229910012946 LiV2O5 Inorganic materials 0.000 description 4
- 229910052765 Lutetium Inorganic materials 0.000 description 4
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 4
- 229910017666 MgVO3 Inorganic materials 0.000 description 4
- 229910052779 Neodymium Inorganic materials 0.000 description 4
- 229910020608 PbNbO3 Inorganic materials 0.000 description 4
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 4
- 229910052776 Thorium Inorganic materials 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 4
- 239000012790 adhesive layer Substances 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 238000000137 annealing Methods 0.000 description 4
- 229910052787 antimony Inorganic materials 0.000 description 4
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 4
- 229910052797 bismuth Inorganic materials 0.000 description 4
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 4
- 229910052793 cadmium Inorganic materials 0.000 description 4
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 4
- DNWNZRZGKVWORZ-UHFFFAOYSA-N calcium oxido(dioxo)vanadium Chemical compound [Ca+2].[O-][V](=O)=O.[O-][V](=O)=O DNWNZRZGKVWORZ-UHFFFAOYSA-N 0.000 description 4
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 4
- 229910017052 cobalt Inorganic materials 0.000 description 4
- 239000010941 cobalt Substances 0.000 description 4
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 description 4
- 229910052733 gallium Inorganic materials 0.000 description 4
- 229910052732 germanium Inorganic materials 0.000 description 4
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 4
- 229910052735 hafnium Inorganic materials 0.000 description 4
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 229910052738 indium Inorganic materials 0.000 description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 4
- OHSVLFRHMCKCQY-UHFFFAOYSA-N lutetium atom Chemical compound [Lu] OHSVLFRHMCKCQY-UHFFFAOYSA-N 0.000 description 4
- HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 description 4
- 229910052748 manganese Inorganic materials 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 4
- 229910052758 niobium Inorganic materials 0.000 description 4
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 4
- 229910052762 osmium Inorganic materials 0.000 description 4
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 229910052707 ruthenium Inorganic materials 0.000 description 4
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 4
- 229910052715 tantalum Inorganic materials 0.000 description 4
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 4
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000002425 crystallisation Methods 0.000 description 3
- 230000008025 crystallization Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000004151 rapid thermal annealing Methods 0.000 description 3
- 229910052761 rare earth metal Inorganic materials 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000011800 void material Substances 0.000 description 3
- 229910052582 BN Inorganic materials 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 241000255969 Pieris brassicae Species 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- ZFBGUXUJXUFOLU-UHFFFAOYSA-L butanoate;lead(2+) Chemical compound [Pb+2].CCCC([O-])=O.CCCC([O-])=O ZFBGUXUJXUFOLU-UHFFFAOYSA-L 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 208000017972 multifocal atrial tachycardia Diseases 0.000 description 2
- 238000005121 nitriding Methods 0.000 description 2
- 229920000620 organic polymer Polymers 0.000 description 2
- 238000006479 redox reaction Methods 0.000 description 2
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 2
- 229910052712 strontium Inorganic materials 0.000 description 2
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 2
- RGZQGGVFIISIHZ-UHFFFAOYSA-N strontium titanium Chemical compound [Ti].[Sr] RGZQGGVFIISIHZ-UHFFFAOYSA-N 0.000 description 2
- LLZRNZOLAXHGLL-UHFFFAOYSA-J titanic acid Chemical compound O[Ti](O)(O)O LLZRNZOLAXHGLL-UHFFFAOYSA-J 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- 229910019001 CoSi Inorganic materials 0.000 description 1
- 241000877463 Lanio Species 0.000 description 1
- 229910005883 NiSi Inorganic materials 0.000 description 1
- 241001656823 Ornithostaphylos Species 0.000 description 1
- 229910004121 SrRuO Inorganic materials 0.000 description 1
- 229910004491 TaAlN Inorganic materials 0.000 description 1
- 229910010037 TiAlN Inorganic materials 0.000 description 1
- 229910008812 WSi Inorganic materials 0.000 description 1
- 238000005280 amorphization Methods 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- ZXOKVTWPEIAYAB-UHFFFAOYSA-N dioxido(oxo)tungsten Chemical group [O-][W]([O-])=O ZXOKVTWPEIAYAB-UHFFFAOYSA-N 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- YDZQQRWRVYGNER-UHFFFAOYSA-N iron;titanium;trihydrate Chemical group O.O.O.[Ti].[Fe] YDZQQRWRVYGNER-UHFFFAOYSA-N 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- SEOYNUHKXVGWFU-UHFFFAOYSA-N mu-oxidobis(oxidonitrogen) Chemical compound O=NON=O SEOYNUHKXVGWFU-UHFFFAOYSA-N 0.000 description 1
- 229910052609 olivine Inorganic materials 0.000 description 1
- 239000010450 olivine Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 229910001404 rare earth metal oxide Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/24—Multistable switching devices, e.g. memristors based on migration or redistribution of ionic species, e.g. anions, vacancies
- H10N70/245—Multistable switching devices, e.g. memristors based on migration or redistribution of ionic species, e.g. anions, vacancies the species being metal cations, e.g. programmable metallization cells
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0004—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements comprising amorphous/crystalline phase transition cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
- H01L27/101—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration including resistors or capacitors only
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B20/00—Read-only memory [ROM] devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/30—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having three or more electrodes, e.g. transistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/80—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/80—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays
- H10B63/84—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays arranged in a direction perpendicular to the substrate, e.g. 3D cell arrays
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/061—Shaping switching materials
- H10N70/063—Shaping switching materials by etching of pre-deposited switching material layers, e.g. lithography
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/883—Oxides or nitrides
- H10N70/8833—Binary metal oxides, e.g. TaOx
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/883—Oxides or nitrides
- H10N70/8836—Complex metal oxides, e.g. perovskites, spinels
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Semiconductor Memories (AREA)
Abstract
【解決手段】複数の第1の配線27と、これら複数の第1の配線27と交差する複数の第2の配線36と、第1及び第2の配線27,36の交差部で両配線間に接続され、遷移元素となる陽イオンを含む複合化合物であって陽イオンの移動により抵抗値が変化し、この抵抗値の変化で情報を記憶する可変抵抗素子31を含むメモリセルMCと、可変抵抗素子31の側面を覆い可変抵抗素子31の側面での陽イオンの移動を抑制する保護膜33とを備えた。
【選択図】図9
Description
[全体構成]
図1は、本発明の第1の実施の形態に係る不揮発性メモリのブロック図である。
図2は、メモリセルアレイ1の一部の斜視図、図3は、図2におけるI−I′線で切断して矢印方向に見たメモリセル1つ分の断面図である。
上記第1の実施形態では、2元系金属酸化膜の可変抵抗素子について説明したが、本実施形態では、3元系以上の金属酸化膜からなる可変抵抗素子を使用した例について説明する。ZnMnO,MgMnOのような3元系以上の金属酸化膜では酸化をしすぎることで、Oが増え、Rsetが上がる。また、還元しすぎることでもOがなくなり、Rsetが上がる場合が考えられる。また、その他の金属イオンの量が変わることによってRsetが変わってくる。これは金属イオンと酸素イオンがどのように結合するかによって伝導体になるか、絶縁体になるかが変わるためである。このように、3元系以上の金属酸化膜ではOイオンと金属イオンの最適化とその組成が変わらないようなイオン移動抑制膜としての保護膜が必要となる。
上述した第1の実施形態では、イオン移動抑制膜としての保護膜33として酸化膜を使用したが、第3の実施形態では、2元系金属酸化膜の保護膜33として窒化膜を使用する。可変抵抗素子材料の側壁を窒化することで、それ以上の金属酸化膜の酸化を避け、安定したRsetを得ることができる。また、側壁を窒化しておくことで抵抗変化素子の抵抗値が変化しづらくなり、Data Retentionに対する改善も行うことができる。
上記第3の実施形態では、2元系金属酸化膜の可変抵抗素子について説明したが、本実施形態では、3元系以上の金属酸化膜からなる可変抵抗素子を使用した例について説明する。ZnMnO,MgMnOのような3元系以上の金属酸化膜では酸化をしすぎることで、Oが増え、Rsetが上がる。また、還元しすぎることでもOがなくなり、Rsetが上がる場合が考えられる。また、その他の金属イオンの量が変わることによってRsetが変わってくる。これは金属イオンと酸素イオンがどのように結合するかによって伝導体になるか、絶縁体になるかが変わるためである。このように、3元系以上の金属酸化膜ではOイオンと金属イオンの最適化とその組成が変わらないようなイオン移動抑制膜としての保護膜が必要となる。
上述した各実施形態では、イオン移動抑制膜として保護膜が酸化膜又は窒化膜の単一の薄膜により形成されていたが、保護膜を複数の薄膜により多層構造で形成するようにしても良い。図19は、保護膜33,43の2層構造により形成された例を示している。このように、例えば、ONやNOやONO、ONONO等のように複数の薄膜を形成することにより、保護膜としてより良いものを形成可能である。これにより、薄膜内でバンドエンジニアリングされることにより、外部からの電子の進入等を防ぐことができ、金属酸化膜の更なる安定化を図ることができる。このように2元系又は3元系以上の金属酸化物に対して保護膜として複数の薄膜化形成を行うことで、Rsetの最適化を行うことができ、金属酸化膜の側壁リーク電流を減少させることができ、かつ、データ保持性(Data Retention)に対する改善も行うことができる。
上述した第1〜第5の実施形態では、イオン移動抑制膜としての保護膜33を酸化又は窒化により形成したが、2元系及び3元系以上のどちらの金属酸化膜においても、保護膜を堆積プロセスにより形成することが可能である。このときのプロセスフローを図20A及び図20Bに示す。他の実施形態と同様に、可変抵抗素子のポストアニール(S11)を実行したのち、第1のエッチングを行い(S12)、これにより可変抵抗素子材料が露出されるので、ここで第1の保護膜堆積を行う(S41)。温度は可変である。これにより、図13のような保護膜となる層33aの堆積が可能となる。また、図20Bに示すように、第2のエッチング加工(S17)の後も、上記と同様のプロセスにて第2の保護膜堆積を行う(S42)。
以上の実施形態では、保護膜として酸化膜又は窒化膜を形成又は堆積させたが、本実施形態では、保護膜として共有結合を有する材料を使用する。この材料により、2元系、3元系以上のどちらの金属酸化膜においても、保護膜の形成を行うことが可能である。すなわち保護膜の役割としては酸素イオンの出し入れ、その他の金属イオンの出し入れを防ぐことにある。つまり、イオンが動きにくくなるような膜を形成すればよい。このときの保護膜として共有結合を持つ材料を使用すると、共有結合していることにより、保護膜自体の劣化がなくなり、イオンの移動経路がなくなり、金属酸化膜の劣化をなくすことができる。このような保護膜としては、例えば、SiO2やダイアモンド、炭素、DLC(Diamond like Carbon)等を使用することができる。
以上の実施形態では、保護膜として酸化膜又は窒化膜を形成又は堆積させるか、共有結合を有する材料を使用したが、本実施形態では、イオンの価数が高いものを使用する。この材料により、2元系、3元系以上のどちらの金属酸化膜においても、保護膜の形成を行うことが可能である。すなわち、保護膜の役割としては酸素イオンの出し入れ、その他の金属イオンの出し入れを防ぐことにある。つまり、イオンが動きにくくなるような膜を形成すればよい。このときの保護膜としてイオンの価数が高いものを使用すれば、イオンの価数が高いことにより、保護膜自体のイオンが動きにくく、イオンの移動経路がなくなり、金属酸化膜のイオンの移動を防ぎ、劣化をなくすことができる。このような保護膜としては、例えばAl2O3やAlN等を使用することができる。
以上の実施形態では、第1及び第2のエッチングで形成された可変抵抗素子の側面部に保護膜となる薄膜を形成してから、溝部41,42の間を第2及び第3の層間絶縁膜34,35で埋めるようにしているが、この第2及び第3の層間絶縁膜34,35自体を金属酸化膜の保護膜として機能させるようにしても良い。
Claims (5)
- 複数の第1の配線と、
これら複数の第1の配線と交差する複数の第2の配線と、
前記第1及び第2の配線の交差部で両配線間に接続され、抵抗値の変化で情報を記憶する可変抵抗素子を含むメモリセルと、
前記可変抵抗素子の側面を覆い前記可変抵抗素子の側面での陽イオンの移動を抑制する保護膜と
を備えたことを特徴とする不揮発性半導体記憶装置。 - 複数の第1の配線と、
これら複数の第1の配線と交差する複数の第2の配線と、
前記第1及び第2の配線の交差部で両配線間に接続され、抵抗値の変化で情報を記憶する可変抵抗素子を含むメモリセルと、
前記可変抵抗素子の側面を覆い前記可変抵抗素子の側面での還元反応、酸化反応及び陰イオンの移動の少なくとも一つを抑制する保護膜と
を備えたことを特徴とする不揮発性半導体記憶装置。 - 前記保護膜は、酸化膜であることを特徴とする請求項1又は2記載の不揮発性半導体記憶装置。
- 前記保護膜は、窒化膜であることを特徴とする請求項1又は2記載の不揮発性半導体記憶装置。
- 前記保護膜は、多層膜であることを特徴とする請求項1又は2記載の不揮発性半導体記憶装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007295962A JP5175525B2 (ja) | 2007-11-14 | 2007-11-14 | 不揮発性半導体記憶装置 |
TW097140479A TWI433362B (zh) | 2007-11-14 | 2008-10-22 | Nonvolatile semiconductor memory device |
KR1020080112599A KR101046495B1 (ko) | 2007-11-14 | 2008-11-13 | 불휘발성 반도체 기억 장치 |
US12/271,434 US8575589B2 (en) | 2007-11-14 | 2008-11-14 | Nonvolatile semiconductor memory device and method of manufacturing the same |
KR1020110016914A KR101107481B1 (ko) | 2007-11-14 | 2011-02-25 | 불휘발성 반도체 기억 장치 |
KR1020110097509A KR101107383B1 (ko) | 2007-11-14 | 2011-09-27 | 불휘발성 반도체 기억 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007295962A JP5175525B2 (ja) | 2007-11-14 | 2007-11-14 | 不揮発性半導体記憶装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009123900A true JP2009123900A (ja) | 2009-06-04 |
JP5175525B2 JP5175525B2 (ja) | 2013-04-03 |
Family
ID=40622864
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007295962A Active JP5175525B2 (ja) | 2007-11-14 | 2007-11-14 | 不揮発性半導体記憶装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8575589B2 (ja) |
JP (1) | JP5175525B2 (ja) |
KR (3) | KR101046495B1 (ja) |
TW (1) | TWI433362B (ja) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010287683A (ja) * | 2009-06-10 | 2010-12-24 | Toshiba Corp | 不揮発性記憶装置及びその製造方法 |
JP2011129705A (ja) * | 2009-12-17 | 2011-06-30 | Toshiba Corp | 半導体記憶装置 |
US8450714B2 (en) | 2010-03-19 | 2013-05-28 | Kabushiki Kaisha Toshiba | Semiconductor memory device including variable resistance element or phase-change element |
US8502183B2 (en) | 2010-03-23 | 2013-08-06 | Kabushiki Kaisha Toshiba | Semiconductor memory device including memory cell having rectifying element and switching element |
JP2013225668A (ja) * | 2012-03-23 | 2013-10-31 | Toshiba Corp | 不揮発性半導体記憶装置及びその製造方法 |
US8861257B2 (en) | 2010-11-24 | 2014-10-14 | Panasonic Corporation | Nonvolatile memory element, manufacturing method thereof, nonvolatile memory device, and design support method for nonvolatile memory element |
KR20150081737A (ko) * | 2014-01-06 | 2015-07-15 | 삼성전자주식회사 | 고정 양전하 함유층을 가지는 반도체 소자 |
US9214628B2 (en) | 2010-12-03 | 2015-12-15 | Panasonic Intellectual Property Management Co., Ltd. | Nonvolatile memory element, nonvolatile memory device, and manufacturing method for the same |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8172275B2 (en) * | 2003-08-21 | 2012-05-08 | Charlotte Pipe And Foundry Company | Composite polymeric transition pipe fitting for joining polymeric and metallic pipes |
KR100983175B1 (ko) * | 2008-07-03 | 2010-09-20 | 광주과학기술원 | 산화물막과 고체 전해질막을 구비하는 저항 변화 메모리소자, 및 이의 동작방법 |
FR2934711B1 (fr) * | 2008-07-29 | 2011-03-11 | Commissariat Energie Atomique | Dispositif memoire et memoire cbram a fiablilite amelioree. |
JP5531296B2 (ja) * | 2008-09-02 | 2014-06-25 | 株式会社東芝 | 不揮発性半導体記憶装置 |
KR101486984B1 (ko) * | 2008-10-30 | 2015-01-30 | 삼성전자주식회사 | 가변 저항 메모리 소자 및 그 형성방법 |
JP5388710B2 (ja) * | 2009-06-12 | 2014-01-15 | 株式会社東芝 | 抵抗変化メモリ |
JP2011003719A (ja) * | 2009-06-18 | 2011-01-06 | Toshiba Corp | 抵抗変化メモリ |
DE102010011646A1 (de) * | 2010-03-10 | 2011-09-15 | Technische Universität Bergakademie Freiberg | Verfahren zur Herstellung eines nichtflüchtigen elektronischen Datenspeichers auf Grundlage eines kristallinen Oxids mit Perowskitstruktur |
US20130009128A1 (en) * | 2010-03-31 | 2013-01-10 | Gilberto Ribeiro | Nanoscale switching device |
US9343672B2 (en) * | 2011-06-07 | 2016-05-17 | Samsung Electronics Co., Ltd. | Nonvolatile memory devices, nonvolatile memory cells and methods of manufacturing nonvolatile memory devices |
JP2013069922A (ja) | 2011-09-22 | 2013-04-18 | Toshiba Corp | 不揮発性半導体記憶装置の製造方法及び不揮発性半導体記憶装置 |
KR101305845B1 (ko) * | 2011-11-16 | 2013-09-06 | 엘지이노텍 주식회사 | 태양전지 및 이의 제조방법 |
JP2014011391A (ja) | 2012-07-02 | 2014-01-20 | Toshiba Corp | 半導体記憶装置 |
KR20140068627A (ko) * | 2012-11-28 | 2014-06-09 | 삼성전자주식회사 | 가변저항막을 갖는 저항 메모리 소자 및 그 제조방법 |
US9583538B2 (en) * | 2013-02-28 | 2017-02-28 | Kabushiki Kaisha Toshiba | Semiconductor memory device having crossing interconnects separated by stacked films |
US9111941B2 (en) * | 2013-03-15 | 2015-08-18 | Globalfoundries Singapore Pte. Ltd. | Non-volatile memory device with TSI/TSV application |
CN104051491B (zh) * | 2013-03-15 | 2017-06-06 | 新加坡商格罗方德半导体私人有限公司 | 具有贯穿硅中介/硅导孔应用的非易失性内存器件 |
JP2016018964A (ja) * | 2014-07-10 | 2016-02-01 | 株式会社東芝 | 磁気抵抗効果素子 |
KR102321605B1 (ko) * | 2015-04-09 | 2021-11-08 | 삼성전자주식회사 | 반도체 장치의 레이아웃 설계 방법 및 그를 이용한 반도체 장치의 제조 방법 |
US10204920B2 (en) | 2015-04-09 | 2019-02-12 | Samsung Electronics Co., Ltd. | Semiconductor device including polygon-shaped standard cell |
WO2017052526A1 (en) * | 2015-09-23 | 2017-03-30 | Hewlett Packard Enterprise Development Lp | Sidewall anti-cation-diffusion barrier |
US20190181337A1 (en) * | 2016-09-25 | 2019-06-13 | Intel Corporation | Barriers for metal filament memory devices |
JP6666285B2 (ja) * | 2017-03-03 | 2020-03-13 | 株式会社東芝 | 放射線検出器 |
US11183390B2 (en) * | 2017-08-15 | 2021-11-23 | Nokomis, Inc. | Method of enhancing a DLC coated surface for enhanced multipaction resistance |
JP6487090B1 (ja) * | 2018-03-19 | 2019-03-20 | 株式会社東芝 | 不揮発性記憶装置及びその製造方法 |
JP2021089905A (ja) * | 2018-03-20 | 2021-06-10 | キオクシア株式会社 | 半導体記憶装置 |
US10658297B2 (en) * | 2018-06-30 | 2020-05-19 | Intel Corporation | Metal-nitride-free via in stacked memory |
KR102345845B1 (ko) * | 2018-12-17 | 2021-12-31 | 세종대학교산학협력단 | 세륨 산화물막을 활성층으로 포함하는 저항 변화 메모리 소자 |
US10916698B2 (en) | 2019-01-29 | 2021-02-09 | Toshiba Memory Corporation | Semiconductor storage device including hexagonal insulating layer |
KR20200106681A (ko) * | 2019-03-05 | 2020-09-15 | 에스케이하이닉스 주식회사 | 전자 장치 및 그 제조 방법 |
KR102599124B1 (ko) * | 2019-09-03 | 2023-11-07 | 한국전자통신연구원 | 메모리 소자 |
US11411181B2 (en) | 2020-03-30 | 2022-08-09 | Taiwan Semiconductor Manufacturing Co., Ltd. | Phase-change memory device and method |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005117021A1 (en) * | 2004-05-03 | 2005-12-08 | Unity Semiconductor Corporation | Non-volatile programmable memory |
JP2007027537A (ja) * | 2005-07-20 | 2007-02-01 | Sharp Corp | 可変抵抗素子を備えた半導体記憶装置 |
WO2008001712A1 (fr) * | 2006-06-26 | 2008-01-03 | Nec Corporation | Élément de commutation, dispositif à semi-conducteurs, circuit intégré logique réinscriptible et élément de mémoire |
JP2008053709A (ja) * | 2006-08-24 | 2008-03-06 | Sharp Corp | 4f2のセルサイズで2rメモリを有する3次元rramの製造方法 |
WO2008155832A1 (ja) * | 2007-06-20 | 2008-12-24 | Fujitsu Microelectronics Limited | 半導体装置及びその製造方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6858482B2 (en) * | 2002-04-10 | 2005-02-22 | Micron Technology, Inc. | Method of manufacture of programmable switching circuits and memory cells employing a glass layer |
US7186569B2 (en) * | 2002-08-02 | 2007-03-06 | Unity Semiconductor Corporation | Conductive memory stack with sidewall |
US6858441B2 (en) | 2002-09-04 | 2005-02-22 | Infineon Technologies Ag | MRAM MTJ stack to conductive line alignment method |
KR20040054250A (ko) * | 2002-12-18 | 2004-06-25 | 삼성전자주식회사 | 상전이 메모리 셀 및 그 형성방법 |
US7606059B2 (en) * | 2003-03-18 | 2009-10-20 | Kabushiki Kaisha Toshiba | Three-dimensional programmable resistance memory device with a read/write circuit stacked under a memory cell array |
US7009278B2 (en) * | 2003-11-24 | 2006-03-07 | Sharp Laboratories Of America, Inc. | 3d rram |
US7082052B2 (en) * | 2004-02-06 | 2006-07-25 | Unity Semiconductor Corporation | Multi-resistive state element with reactive metal |
US6972985B2 (en) * | 2004-05-03 | 2005-12-06 | Unity Semiconductor Corporation | Memory element having islands |
US7348590B2 (en) * | 2005-02-10 | 2008-03-25 | Infineon Technologies Ag | Phase change memory cell with high read margin at low power operation |
US7417245B2 (en) * | 2005-11-02 | 2008-08-26 | Infineon Technologies Ag | Phase change memory having multilayer thermal insulation |
JP4238248B2 (ja) | 2005-11-11 | 2009-03-18 | シャープ株式会社 | 可変抵抗素子を備えた不揮発性半導体記憶装置の製造方法 |
JP2007184419A (ja) * | 2006-01-06 | 2007-07-19 | Sharp Corp | 不揮発性メモリ装置 |
US8896045B2 (en) | 2006-04-19 | 2014-11-25 | Infineon Technologies Ag | Integrated circuit including sidewall spacer |
US20080090400A1 (en) * | 2006-10-17 | 2008-04-17 | Cheek Roger W | Self-aligned in-contact phase change memory device |
US8097878B2 (en) * | 2007-03-05 | 2012-01-17 | Intermolecular, Inc. | Nonvolatile memory elements with metal-deficient resistive-switching metal oxides |
KR200454250Y1 (ko) | 2009-09-21 | 2011-07-22 | 안정수 | 비상구 안내 기능을 구비한 led 조명장치 |
-
2007
- 2007-11-14 JP JP2007295962A patent/JP5175525B2/ja active Active
-
2008
- 2008-10-22 TW TW097140479A patent/TWI433362B/zh active
- 2008-11-13 KR KR1020080112599A patent/KR101046495B1/ko not_active IP Right Cessation
- 2008-11-14 US US12/271,434 patent/US8575589B2/en active Active
-
2011
- 2011-02-25 KR KR1020110016914A patent/KR101107481B1/ko not_active IP Right Cessation
- 2011-09-27 KR KR1020110097509A patent/KR101107383B1/ko not_active IP Right Cessation
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005117021A1 (en) * | 2004-05-03 | 2005-12-08 | Unity Semiconductor Corporation | Non-volatile programmable memory |
JP2007536680A (ja) * | 2004-05-03 | 2007-12-13 | ユニティ・セミコンダクター・コーポレーション | 不揮発性プログラマブルメモリ |
JP2007027537A (ja) * | 2005-07-20 | 2007-02-01 | Sharp Corp | 可変抵抗素子を備えた半導体記憶装置 |
WO2008001712A1 (fr) * | 2006-06-26 | 2008-01-03 | Nec Corporation | Élément de commutation, dispositif à semi-conducteurs, circuit intégré logique réinscriptible et élément de mémoire |
JP2008053709A (ja) * | 2006-08-24 | 2008-03-06 | Sharp Corp | 4f2のセルサイズで2rメモリを有する3次元rramの製造方法 |
WO2008155832A1 (ja) * | 2007-06-20 | 2008-12-24 | Fujitsu Microelectronics Limited | 半導体装置及びその製造方法 |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010287683A (ja) * | 2009-06-10 | 2010-12-24 | Toshiba Corp | 不揮発性記憶装置及びその製造方法 |
JP2011129705A (ja) * | 2009-12-17 | 2011-06-30 | Toshiba Corp | 半導体記憶装置 |
US8405061B2 (en) | 2009-12-17 | 2013-03-26 | Kabushiki Kaisha Toshiba | Semiconductor memory device using variable resistance element or phase-change element as memory device |
US8772748B2 (en) | 2009-12-17 | 2014-07-08 | Kabushiki Kaisha Toshiba | Semiconductor memory device using variable resistance element or phase-change element as memory device |
US8450714B2 (en) | 2010-03-19 | 2013-05-28 | Kabushiki Kaisha Toshiba | Semiconductor memory device including variable resistance element or phase-change element |
US8502183B2 (en) | 2010-03-23 | 2013-08-06 | Kabushiki Kaisha Toshiba | Semiconductor memory device including memory cell having rectifying element and switching element |
US8861257B2 (en) | 2010-11-24 | 2014-10-14 | Panasonic Corporation | Nonvolatile memory element, manufacturing method thereof, nonvolatile memory device, and design support method for nonvolatile memory element |
US9214628B2 (en) | 2010-12-03 | 2015-12-15 | Panasonic Intellectual Property Management Co., Ltd. | Nonvolatile memory element, nonvolatile memory device, and manufacturing method for the same |
JP2013225668A (ja) * | 2012-03-23 | 2013-10-31 | Toshiba Corp | 不揮発性半導体記憶装置及びその製造方法 |
KR20150081737A (ko) * | 2014-01-06 | 2015-07-15 | 삼성전자주식회사 | 고정 양전하 함유층을 가지는 반도체 소자 |
KR102185282B1 (ko) | 2014-01-06 | 2020-12-01 | 삼성전자 주식회사 | 고정 양전하 함유층을 가지는 반도체 소자 |
Also Published As
Publication number | Publication date |
---|---|
KR101107481B1 (ko) | 2012-01-19 |
US8575589B2 (en) | 2013-11-05 |
KR101046495B1 (ko) | 2011-07-04 |
KR101107383B1 (ko) | 2012-01-19 |
KR20090050004A (ko) | 2009-05-19 |
JP5175525B2 (ja) | 2013-04-03 |
KR20110033907A (ko) | 2011-04-01 |
TWI433362B (zh) | 2014-04-01 |
TW200933943A (en) | 2009-08-01 |
US20090121208A1 (en) | 2009-05-14 |
KR20110120851A (ko) | 2011-11-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5175525B2 (ja) | 不揮発性半導体記憶装置 | |
USRE45480E1 (en) | Nonvolatile semiconductor memory device and producing method thereof | |
JP5531296B2 (ja) | 不揮発性半導体記憶装置 | |
JP4945609B2 (ja) | 半導体集積回路装置 | |
US8546861B2 (en) | Resistance change memory device with three-dimensional structure, and device array, electronic product and manufacturing method therefor | |
KR101015325B1 (ko) | 반도체 기억 장치 | |
KR101127720B1 (ko) | 불휘발성 반도체 기억 장치 | |
JP5175526B2 (ja) | 不揮発性半導体記憶装置及びその製造方法 | |
US7995374B2 (en) | Semiconductor memory device, method of manufacturing the same, and method of screening the same | |
US8369127B2 (en) | Nonvolatile semiconductor memory device with transistor and variable resistor | |
US20090134431A1 (en) | Nonvolatile semiconductor storage apparatus and method of manufacturing the same | |
US20100237320A1 (en) | Nonvolatile semiconductor memory device and method for manufacturing the same | |
US20080211011A1 (en) | Nonvolatile semiconductor memory element and nonvolatile semiconductor memory device | |
US10720470B2 (en) | Variable resistance memory devices | |
JP2008160004A (ja) | 半導体記憶装置及びその製造方法 | |
TW201032315A (en) | Three-dimensional semiconductor structure and method of fabricating the same | |
US20100142262A1 (en) | Information recording and reproducing apparatus | |
JP5300839B2 (ja) | 情報記録再生装置 | |
JP5279879B2 (ja) | 不揮発性半導体記憶装置 | |
JP2010087259A (ja) | 不揮発性記憶装置の製造方法 | |
KR100993052B1 (ko) | 3차원 구조를 갖는 저항 변화 메모리 소자, 저항 변화 메모리 소자 어레이, 전자제품 및 상기 소자 제조방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20100215 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20120621 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120626 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120827 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120925 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20121122 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20121211 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130107 |
|
R151 | Written notification of patent or utility model registration |
Ref document number: 5175525 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20160111 Year of fee payment: 3 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |