JP2008514003A - ポリシリコンゲルマニウムゲートスタック及びその形成方法 - Google Patents
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 64
- 238000000034 method Methods 0.000 title claims description 57
- 229920005591 polysilicon Polymers 0.000 title abstract description 6
- 229910052732 germanium Inorganic materials 0.000 title description 13
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 title description 12
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims abstract description 34
- 238000000151 deposition Methods 0.000 claims description 58
- 239000000758 substrate Substances 0.000 claims description 19
- 239000004065 semiconductor Substances 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 6
- 239000000377 silicon dioxide Substances 0.000 claims description 4
- 235000012239 silicon dioxide Nutrition 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 2
- 239000002019 doping agent Substances 0.000 abstract description 17
- 230000015572 biosynthetic process Effects 0.000 abstract description 7
- 239000010408 film Substances 0.000 description 44
- 230000008021 deposition Effects 0.000 description 34
- 230000008569 process Effects 0.000 description 28
- 239000007789 gas Substances 0.000 description 24
- 230000003746 surface roughness Effects 0.000 description 18
- 238000011065 in-situ storage Methods 0.000 description 13
- 238000000137 annealing Methods 0.000 description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- 239000002245 particle Substances 0.000 description 11
- 229910052710 silicon Inorganic materials 0.000 description 11
- 239000010703 silicon Substances 0.000 description 11
- 239000012071 phase Substances 0.000 description 8
- 230000007704 transition Effects 0.000 description 8
- 239000003085 diluting agent Substances 0.000 description 7
- 230000006911 nucleation Effects 0.000 description 7
- 238000010899 nucleation Methods 0.000 description 7
- 229910004298 SiO 2 Inorganic materials 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 230000006870 function Effects 0.000 description 6
- 238000012545 processing Methods 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 4
- 239000002800 charge carrier Substances 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 230000010354 integration Effects 0.000 description 3
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 3
- 239000011856 silicon-based particle Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000001953 recrystallisation Methods 0.000 description 2
- 229910021332 silicide Inorganic materials 0.000 description 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 2
- 239000007790 solid phase Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- ZSBXGIUJOOQZMP-JLNYLFASSA-N Matrine Chemical compound C1CC[C@H]2CN3C(=O)CCC[C@@H]3[C@@H]3[C@H]2N1CCC3 ZSBXGIUJOOQZMP-JLNYLFASSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 230000001351 cycling effect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000010574 gas phase reaction Methods 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000012163 sequencing technique Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
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Abstract
【選択図】 図1
Description
[0001]本発明の実施形態は半導体デバイスのためのポリシリコンゲルマニウム(ポリSiGe)ゲートスタック及びその形成方法に関する。
[0002]トランジスタドライブ電流、つまり、CMOS(相補形金属酸化膜半導体)デバイスのスイッチング速度は反転キャパシタンスの増大とともに増加する。反転キャパシタンスを制限する要因の1つは反転中の従来のポリSiゲート電極における電荷キャリアの枯渇である。高性能論理回路に用いられるCMOSデバイスに関して、代替的ゲート電極材料はポリシリコン(又はポリSi)の枯渇を回避する必要がある。
ステップ1:0.2slmのSi2H6、2.0slmのSiH4、0.0slmの希釈剤N2、0.4トール、520℃、30秒間。
ステップ2:0.0slmのSi2H6、2.0slmのSiH4、0.0slmの希釈剤N2、0.4トール、520℃、150秒間。
ステップ1:0.15slmのSi2H6、2.3slmの希釈剤N2、0.4トール、520℃、30秒間。
ステップ2:2.0slmのSiH4、0.0slmの希釈剤N2、0.4トール、520℃、60秒間。
2.0slmのSiH4、0.12slmのGeH4、0.0slmの希釈剤N2、0.4トール、520℃、600秒。
GeH4:SiH4のフロー比は、膜におけるGe含量を純粋なα-Siから約50原子%Geに調整するために変えることができる(図3を参照のこと)。図3は、GeH4/SiH4比の関数としてポリSiGeのGe含量と堆積速度を示すグラフである。
100オングストロームのα-Siを堆積させるために、2.0slmのSiH4、0.0slmの希釈剤のN2、0.4トール、520℃、420秒間。
本実施例において、堆積温度は、α-Siシード層と、ポリSiGeとα-Si界面層が全て、ポリSiの堆積のために温度を上昇させる前と同じ温度で堆積されるようにポリSiGeと同じであるように選ばれる。
1000オングストロームのポリSiを堆積させるために、2.0slmのSiH4、0.0slmの希釈剤のN2、0.4トール、630℃、420秒間。
Claims (20)
- 半導体MOSデバイスのゲートスタックであって、
前記半導体MOSデバイスの半導体基板上に形成された誘電体膜と、
該誘電体膜上に形成された第1のα-Si層と、
該第1のα-Si層上に形成されたポリSiGe層と、
該ポリSiGe層上に形成された第2のα-Si層と、
該第2のα-Si層上に形成されたポリSi層と、
を備えた前記デバイス。 - 該誘電体膜が、異なる材料の第1誘電体膜と第2誘電体膜を備えている、請求項1記載のデバイス。
- 該第2のα-Si層が該第1のα-Si層より厚い、請求項1記載のデバイス。
- 該第1のα-Si層の厚さが約30オングストローム〜約50オングストロームである、請求項3記載のデバイス。
- 該ポリSiGe層におけるGe含量が約5原子%〜約40原子%である、請求項3記載のデバイス。
- 該ポリSiGe層の厚さが約300オングストローム〜約1000オングストロームである、請求項5記載のデバイス。
- 該第2のα-Si層の厚さが約50オングストローム〜約300オングストロームである、請求項3記載のデバイス。
- 該ポリSi層の厚さが約300オングストローム〜約1500オングストロームである、請求項3記載のデバイス。
- 該誘電体層が、二酸化シリコンと酸窒化物を含んでいる、請求項1記載のデバイス。
- 基板上にα-Si層を堆積させる方法であって、
該基板をチャンバ内に配置するステップと、
第1のSi含有ソースガスを該チャンバに導入するステップと、
約50オングストローム未満の厚さのα-Si層が前記基板上に堆積されるまで、第2のSi含有ソースガスを該チャンバに導入するステップと、
を含む前記方法。 - 該第1のSi含有ガスがSi2H6である、請求項10記載の方法。
- 該第1のSi含有ガスが非反応性ガスで希釈されている、請求項11記載の方法。
- 該非反応性ガスが、N2、Ar、H2、He、又はそれらの組合わせを含んでいる、請求項12記載の方法。
- 該第2のSi含有ガスがSiH4である、請求項10記載の方法。
- 該第1のSi含有ソースガスと該第2のSi含有ソースガスが、混合物として該チャンバに導入される、請求項10記載の方法。
- 該第1のSi含有ソースガスが導入された後、該第2のSi含有ソースガスが所定の時間導入される、請求項10記載の方法。
- 基板上にゲートスタックを形成する方法であって、
該基板の最上部に誘電体薄層を堆積させるステップと、
該誘電体膜上に第1のα-Si層を堆積させるステップと、
該第1のα-Si層上にポリSiGe層を堆積させるステップと、
該ポリSiGe層上に第2のα-Si層を堆積させるステップと、
該第2のα-Si層上にポリSi層を堆積させるステップと、
を含む前記方法。 - 該第1のα-Si層と、該ポリ-SiGe層と、該第2のα-Si層が同一温度で堆積される、請求項17記載の方法。
- 該第1のα-Si層の厚さが約50オングストローム〜約300オングストロームである、請求項18記載の方法。
- 該第2のα-Si層の厚さが約30オングストローム〜約50オングストロームである、請求項18記載の方法。
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US10/943,424 US20060060920A1 (en) | 2004-09-17 | 2004-09-17 | Poly-silicon-germanium gate stack and method for forming the same |
PCT/US2005/031953 WO2006033838A2 (en) | 2004-09-17 | 2005-09-07 | Poly-silicon-germanium gate stack and method for forming the same |
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US (2) | US20060060920A1 (ja) |
EP (1) | EP1805802A2 (ja) |
JP (1) | JP2008514003A (ja) |
KR (1) | KR20070050493A (ja) |
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US7166528B2 (en) * | 2003-10-10 | 2007-01-23 | Applied Materials, Inc. | Methods of selective deposition of heavily doped epitaxial SiGe |
KR100618869B1 (ko) * | 2004-10-22 | 2006-09-13 | 삼성전자주식회사 | 커패시터를 포함하는 반도체 소자 및 그 제조방법 |
US7235492B2 (en) * | 2005-01-31 | 2007-06-26 | Applied Materials, Inc. | Low temperature etchant for treatment of silicon-containing surfaces |
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US7354848B2 (en) | 2008-04-08 |
US20060060920A1 (en) | 2006-03-23 |
KR20070050493A (ko) | 2007-05-15 |
CN101027779A (zh) | 2007-08-29 |
EP1805802A2 (en) | 2007-07-11 |
US20060231925A1 (en) | 2006-10-19 |
WO2006033838A2 (en) | 2006-03-30 |
WO2006033838A3 (en) | 2006-12-21 |
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