WO2010134415A9 - 半導体装置およびその製造方法 - Google Patents
半導体装置およびその製造方法 Download PDFInfo
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- WO2010134415A9 WO2010134415A9 PCT/JP2010/057112 JP2010057112W WO2010134415A9 WO 2010134415 A9 WO2010134415 A9 WO 2010134415A9 JP 2010057112 W JP2010057112 W JP 2010057112W WO 2010134415 A9 WO2010134415 A9 WO 2010134415A9
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 50
- 238000000034 method Methods 0.000 title claims description 16
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 91
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 89
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 53
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- 239000010936 titanium Substances 0.000 claims abstract description 34
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- 229910000838 Al alloy Inorganic materials 0.000 claims abstract description 20
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 20
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 20
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 18
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 13
- 239000010703 silicon Substances 0.000 claims abstract description 13
- 238000004519 manufacturing process Methods 0.000 claims description 31
- 230000004888 barrier function Effects 0.000 claims description 27
- 230000015572 biosynthetic process Effects 0.000 claims description 27
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- 229910052758 niobium Inorganic materials 0.000 claims description 6
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 6
- 229910052715 tantalum Inorganic materials 0.000 claims description 6
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 6
- 229910052721 tungsten Inorganic materials 0.000 claims description 6
- 239000010937 tungsten Substances 0.000 claims description 6
- 238000012545 processing Methods 0.000 claims description 5
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 4
- WEAMLHXSIBDPGN-UHFFFAOYSA-N (4-hydroxy-3-methylphenyl) thiocyanate Chemical compound CC1=CC(SC#N)=CC=C1O WEAMLHXSIBDPGN-UHFFFAOYSA-N 0.000 claims description 3
- VKTGMGGBYBQLGR-UHFFFAOYSA-N [Si].[V].[V].[V] Chemical compound [Si].[V].[V].[V] VKTGMGGBYBQLGR-UHFFFAOYSA-N 0.000 claims description 3
- CFJRGWXELQQLSA-UHFFFAOYSA-N azanylidyneniobium Chemical compound [Nb]#N CFJRGWXELQQLSA-UHFFFAOYSA-N 0.000 claims description 3
- SKKMWRVAJNPLFY-UHFFFAOYSA-N azanylidynevanadium Chemical compound [V]#N SKKMWRVAJNPLFY-UHFFFAOYSA-N 0.000 claims description 3
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 claims description 3
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 3
- 229910021341 titanium silicide Inorganic materials 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 claims description 3
- -1 tungsten nitride Chemical class 0.000 claims description 3
- 229910021342 tungsten silicide Inorganic materials 0.000 claims description 3
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims description 3
- ZVWKZXLXHLZXLS-UHFFFAOYSA-N zirconium nitride Chemical compound [Zr]#N ZVWKZXLXHLZXLS-UHFFFAOYSA-N 0.000 claims description 3
- 229910021355 zirconium silicide Inorganic materials 0.000 claims description 3
- 239000007772 electrode material Substances 0.000 abstract description 16
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- 238000009413 insulation Methods 0.000 description 5
- 229910000943 NiAl Inorganic materials 0.000 description 4
- NPXOKRUENSOPAO-UHFFFAOYSA-N Raney nickel Chemical compound [Al].[Ni] NPXOKRUENSOPAO-UHFFFAOYSA-N 0.000 description 4
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/0445—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising crystalline silicon carbide
- H01L21/0455—Making n or p doped regions or layers, e.g. using diffusion
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/0445—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising crystalline silicon carbide
- H01L21/048—Making electrodes
- H01L21/0485—Ohmic electrodes
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- H—ELECTRICITY
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
- H01L29/1608—Silicon carbide
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/45—Ohmic electrodes
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66015—Multistep manufacturing processes of devices having a semiconductor body comprising semiconducting carbon, e.g. diamond, diamond-like carbon, graphene
- H01L29/66037—Multistep manufacturing processes of devices having a semiconductor body comprising semiconducting carbon, e.g. diamond, diamond-like carbon, graphene the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66053—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide
- H01L29/66068—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
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- H—ELECTRICITY
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/80—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier
- H01L29/808—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier with a PN junction gate, e.g. PN homojunction gate
Definitions
- the present invention relates to a semiconductor device and a manufacturing method thereof. More specifically, the present invention relates to a semiconductor device provided with electrodes and wiring, which can stably maintain a low electric resistance for a long period of time using silicon carbide as a semiconductor, and a method for manufacturing the same.
- SiC silicon carbide
- Ni (nickel) -based electrode material is used, and ohmic contact is achieved by joining with nickel silicide silicided by performing alloying heat treatment (heat treatment at about 1000 ° C.). It has gained.
- p-type SiC it is possible to keep the contact resistance low by using Ti (titanium) / Al (aluminum) or an AlSi alloy (Non-Patent Document 1).
- An SiC vertical MOSFET used for controlling a large current often realizes an ohmic contact by using a Ni-based or NiSi-based material as a source electrode disposed in a source region of n-type SiC.
- a large number of one unit forming a MOSFET is arranged in parallel, and a predetermined electric circuit is formed by internal wiring.
- Al can be used as an ohmic electrode material and at the same time as an internal wiring.
- SiC it is difficult to use Al in common for the ohmic electrode and the internal wiring because it is difficult to obtain good ohmic contact between SiC and Al below the melting point of Al.
- the Ni-based or NiSi-based material is not used for the internal wiring because the electrical resistance is not so low and it is difficult to obtain an appropriate wire.
- the Ni-based material is difficult to obtain a good ohmic contact with the p-type SiC.
- an Al-based (Al, AlSi alloy, AlSiCu alloy, etc.) material is often used for internal wiring.
- an intermetallic compound having a high electric resistance such as NiAl 3
- NiAl 3 an intermetallic compound having a high electric resistance
- Satoshi Tanimoto 4 others, “Ohmic contact formation technology of SiC devices”, IEICE Transactions, Institute of Electronics, Information and Communication Engineers, April 2003, Vol. J86-C, no. 4, p359-367 Satoshi Tanimoto and 4 others “Realization of semiconductor SiC high-temperature and high-reliability contacts with Al wiring”, Summary of Autumn Meeting of the Japan Society of Applied Physics 5a-ZN-10, September 2007, p. 420
- An object of the present invention is to provide a silicon carbide semiconductor device and a method for manufacturing the same.
- the semiconductor device of the present invention is a silicon carbide semiconductor device including a contact electrode and a wiring that is electrically connected to the contact electrode.
- the contact electrode is formed of an alloy containing titanium, aluminum, and silicon, and is in contact with silicon carbide.
- the wiring is formed of aluminum or an aluminum alloy, and the contact electrode is brought into contact with the contact electrode. And conducting.
- an alloy containing titanium, aluminum, and silicon (hereinafter referred to as a TiAlSi alloy) and aluminum or an aluminum alloy (AlSi alloy, AlSiCu alloy, etc.) are in direct contact with each other, so that the contact electrode and the wiring are connected. And become conductive.
- TiAlSi alloys and Al, AlSi alloys, or AlSiCu alloys are less likely to form intermetallic compounds that increase electrical resistance.
- Silicon carbide is often used in a high-temperature environment due to its own heat generation or other factors because of its high heat resistance, due to its high heat resistance. For this reason, depending on the combination of the electrode material and the wiring material, an intermetallic compound that increases the electrical resistance may occur.
- the TiAlSi alloy can contain other elements such as C mixed during the production.
- a barrier layer is interposed between the contact electrode and the wiring so that the contact electrode and the wiring do not directly contact each other, and the wiring and the contact electrode can be brought into conduction by contacting the barrier layer.
- the electrode material and the wiring material are less likely to generate an intermetallic compound that increases electrical resistance, but are unstable due to the presence of a conductive barrier layer between the contact electrode and the wiring. Factors can be further reduced.
- the adhesion between the contact electrode and the wiring can be improved by forming a thin barrier layer of about several nanometers such as Ti that improves the adhesion. In other words, the ultrathin layer provided for improving adhesion is also included in the barrier layer.
- the barrier layer is made of ⁇ titanium (Ti), tantalum (Ta), tungsten (W), niobium (Nb), vanadium (V), zirconium (Zr), titanium nitride, tantalum nitride, tungsten nitride, niobium Nitride, vanadium nitride, zirconium nitride, titanium silicide, tantalum silicide, tungsten silicide, niobium silicide, vanadium silicide, zirconium silicide ⁇ .
- the barrier layer in addition to the action of blocking the diffusion of the element of the electrode material or the wiring material, which leads to the formation of an intermetallic compound, one of the following actions (1) to (4) Can be obtained.
- Mitigation of strain caused by difference in thermal expansion coefficient (4) Improvement of electromigration resistance
- the above contact electrode can be in ohmic contact with silicon carbide. Thereby, a contact electrode can be arrange
- the contact electrode can be in ohmic contact with both the n-type region and the p-type region of silicon carbide.
- the contact electrode when the contact electrode is a source electrode or a drain electrode, and the contact electrode is a source electrode, the source electrode is a contact region to a source region and an inversion portion forming region having a conductivity type opposite to the source region.
- a structure of a MOSFET in which both are in contact and the wiring is a source internal wiring or a drain wiring can be employed.
- the semiconductor device can have a JFET configuration in which the contact electrode is a source electrode, a gate electrode, and a drain electrode, and the wiring is a source wiring, a gate wiring, and a drain wiring.
- the contact electrode is a source electrode, a gate electrode, and a drain electrode
- the wiring is a source wiring, a gate wiring, and a drain wiring.
- the method of manufacturing a semiconductor device of the present invention includes a step of preparing a substrate, a step of forming a silicon carbide epitaxial layer on the substrate, and an electrode of an alloy containing titanium, aluminum, and silicon on the silicon carbide epitaxial layer. And a wiring formed of aluminum or an aluminum alloy is provided in contact with the electrode.
- the junction between the wiring and the electrode having a low contact resistance can be maintained over a long period of time with a low electrical resistance. That is, it is possible to prevent generation of an intermetallic compound that reacts with the electrode material and the wiring material to increase the electrical resistance.
- a titanium layer is formed on the silicon carbide epitaxial layer, an aluminum layer is then formed on the titanium layer, and a silicon layer is further formed on the aluminum layer, or titanium,
- An aluminum and silicon laminate or a mixed layer of titanium, aluminum and silicon can be formed and alloyed by heat treatment. Thereby, an electrode having low contact resistance with silicon carbide can be obtained with certainty.
- a step of forming a barrier layer in contact with the alloy electrode is provided, and the wiring can be provided in contact with the barrier layer. Even without a barrier layer, the interfacial resistance of (electrode / wiring) can be sufficiently reduced over a long period of time. Further, by providing the barrier layer as described above, it is possible to block the diffusion of the element of the electrode material or the wiring material, which causes the generation of an intermetallic compound. A specific material such as titanium or titanium nitride is used for the barrier layer. As a result, at least one of the following (1) to (4) can be improved.
- the barrier layer is often made as thin as several nm to several tens of nm
- Processing by improving selectivity of anisotropic etching (3) Alleviation of distortion due to difference in thermal expansion coefficient, and (4) Improvement of electromigration resistance.
- An n-type region and a p-type region of the silicon carbide are formed in the silicon carbide epitaxial layer at the time of or after the formation of the silicon carbide epitaxial layer or before the formation of the alloy electrode. It can be formed in ohmic contact with both of the regions. As a result, it is possible to avoid deterioration in dimensional accuracy associated with resist pattern formation while reducing the number of manufacturing steps. As a result, a reduction in manufacturing cost, an improvement in dimensional accuracy, an improvement in manufacturing yield, and the like can be obtained.
- both the n-type region and the p-type region of the silicon carbide are formed in the silicon carbide epitaxial layer.
- the first alloy electrode in ohmic contact with the n-type region and the second alloy electrode in ohmic contact with the p-type region can be formed of the same material at the same processing opportunity.
- the present invention when the electrode material and the material of the internal wiring are different, there is no risk of a failure at the contact interface between these different metals, and high reliability (maintenance of initial low electrical resistance, etc.) is obtained even after long-term use.
- a silicon carbide semiconductor device or the like can be obtained.
- FIG. 2 is a diagram showing a state in which a gate electrode is formed on a thermal oxide film to be a gate oxide film in the manufacture of the MOSFET of FIG. 1. It is a figure which shows the state which deposited the interlayer insulation film. It is a figure which shows the state which removed the interlayer insulation film and thermal oxide film of the area
- FIG. 1 is a cross-sectional view showing a MOSFET of a semiconductor device according to Embodiment 1 of the present invention.
- the MOSFET in the present embodiment uses silicon carbide (SiC) as a semiconductor, and includes an n + type SiC substrate 11 and an n type SiC layer (drift layer) 12 epitaxially grown thereon.
- the thickness of the n-type SiC layer (drift layer) 12 is preferably 10 ⁇ m, for example, and the n-type impurity concentration is preferably about 1 ⁇ 10 16 cm ⁇ 3 .
- p body 13 On the surface 12 a side of SiC epitaxial layer 12, p body 13, n + SiC source region 14, and p + SiC region 18 provided in contact with source region 14 are located. The p body 13 is interposed between the (n + source region 14 / p + region 18) and the drift layer region 12.
- a source contact electrode 16 is provided so as to contact both the source region 14 and the p + region 18.
- a source internal wiring 19 is provided in contact with the source contact electrode 16.
- Gate oxide film 15 is located on surface 12 a of the SiC epitaxial layer including source region 14 / p body 13.
- a gate electrode 17 made of doped polysilicon having conductivity is located on the gate oxide film 15, and the interlayer insulating film 21 covers and insulates the gate electrode 17.
- a source internal wiring 19 that is electrically connected to the source contact electrode 16 is provided.
- the source internal wiring 19 is covered with a passivation protection film 29 to protect the whole.
- an n-type inversion layer R is formed or disappeared in the p body 13 immediately below the gate oxide film 15 (source contact electrode 16-inversion layer R-drift layer region 12-drain electrode).
- 20) Controls on / off of a large current through the path.
- a voltage is applied to the p body 13 through the p + region 18.
- the p + region 18 can be regarded as a contact region to the inversion layer forming region 13.
- the n + SiC substrate 11 forms a drain region, and a drain electrode 20 is provided on the back surface 11 b of the n + SiC substrate 11.
- the source contact electrode 16 is formed of an alloy (TiAlSi alloy) containing Ti, Al, and Si.
- the source internal wiring 19 is formed of Al or an Al alloy (AlSi alloy, AlSiCu alloy, etc.).
- nickel (Ni) is used for the source contact electrode 16 as in the prior art, it reacts with Al usually used for internal wiring or Al in an Al alloy by using for a long time, and thus has a high electric resistance such as NiAl 3 . There was a risk of forming intermetallic compounds.
- the n + source region 14 and the p body 13 must be kept at the same potential. Therefore, the source contact electrode 16 is required to be electrically connected to both the n + source region 14 and the p + region 18 while reducing the contact resistance. Furthermore, in the MOSFET 10, there is a demand for reducing the contact resistance between the n + source region 14 and the source contact electrode 16 as much as possible in order to reduce the on-resistance. In the present embodiment, this requirement is satisfied by using the above-described TiAlSi alloy for the source contact electrode 16 and making ohmic contact with both the n + source region 14 and the p + region 18. As a result, the MOSFET 10 can reduce the number of resist pattern formations and improve the dimensional accuracy. As a result, the manufacturing process can be simplified, the yield can be improved, and the degree of integration can be improved.
- DMOS Double-Diffused MOSFET
- the MOSFET 10 controls on / off of a large current as follows. In a state where a voltage equal to or lower than the threshold value is applied to the gate electrode 17, inversion electrons are not induced in the p body 13 immediately below the gate oxide film 15, and a non-conductive (off) state. When a voltage exceeding a threshold value is applied to the gate electrode 17, an n-type inversion layer R is formed in a portion (thin layer) of the p body 13 that is in contact with the gate oxide film 15. Through this n-type inversion layer R, an electron flow path that connects the n + source region 14 and the n-type SiC drift layer region 12 is formed. As a result, a large current can flow between the source and the drain.
- FIG. 2 is a flowchart showing a method for manufacturing MOSFET 10 of the semiconductor device according to the present embodiment.
- FIG. 3 is a flowchart showing a method for manufacturing the source contact electrode 16 and the source internal wiring 19.
- the steps from the preparation of the n + -type SiC substrate 11 substrate (step S1) to the formation of the gate insulating film 15 (step S7) can be performed using a known manufacturing method.
- n + type SiC substrate 11 Preparation of n + type SiC substrate 11 (step S1) ⁇ Deposition of n type SiC epitaxial layer 12 serving as a drift layer on n + type SiC substrate 11 (step S2) ⁇ n type SiC epitaxial layer 12 is formed Formation of p body 13 in the region (step S3) ⁇ formation of n + type region 14 serving as a source region (step S4) ⁇ formation of p + type region 18 (step S5) ⁇ 1700 ° C. in an argon (Ar) atmosphere Activation annealing treatment (step S6) that is heated to about 30 minutes and held for about 30 minutes ⁇ formation of gate insulating film (thermal oxide film) 15a (step S7).
- argon (Ar) atmosphere Activation annealing treatment
- the thermal oxide film 23 is formed on the back surface 11b of the n + -type SiC substrate 11. This thermal oxide film 23 functions as a protective film for the n + -type SiC substrate 11.
- a gate electrode 17 is formed (step S8).
- the gate electrode 17 is made of polysilicon, Al or the like, and extends from one source region 14 to the other source region 14 with a thermal oxide film 15a serving as a gate oxide film interposed therebetween.
- an impurity such as P is set at a high concentration exceeding 1 ⁇ 10 20 cm ⁇ 3 in order to ensure electronic conductivity.
- the thickness of the deposited polysilicon film is preferably about 50 nm.
- an interlayer insulating film 21 is formed (step S9).
- Interlayer insulating film 21 is formed of a SiO 2 film having a thickness of about 1 ⁇ m by, for example, a CVD method so as to cover gate electrode 17 and oxide film 15a.
- a resist pattern 91 having an opening in a region where the source contact electrode 16 is formed is formed.
- interlayer insulating film 21 and gate oxide film 15a in the region where the source contact electrode is to be formed are partially removed by, for example, RIE, and the epitaxial layer in the portion where the source contact electrode is to be formed is removed. Expose the surface area.
- the source contact electrode 16 is formed (step S10).
- the resist pattern 91 is removed, the layer on the resist film deposited at the time of forming the source contact electrode is lifted off.
- the drain electrode 20 is formed of the same material as the source contact electrode 16 as shown in FIG. 7 (step S11). Both the electrodes 16 and 20 form a TiAlSi alloy electrode.
- FIG. 3 is a more detailed flowchart for manufacturing the electrode of this TiAlSi alloy. As shown in S10a or S11a to S10c or S11c of FIG.
- the Ti film, the Al film, and the Si film are applied to both the surface 12a of the SiC epitaxial layer 12 and the back surface 11b of the SiC substrate 11 as described above. Are stacked in the above order.
- a lamination method a sputtering method or the like is preferably used.
- the source contact electrode 16 is formed, the Ti film, the Al film, and the Si film stacked on the resist film are removed (lifted off) by removing the resist film 91 as described above. .
- the resist film 91 as described above.
- FIG. 7 shows a state after the alloying process is performed and the material for forming the source contact electrode 16 and the drain electrode 20 is made of a TiAlSi alloy.
- the source internal wiring 19 is formed (step S12).
- the source internal wiring 19 of Al or Al alloy of conductive metal is formed on the source contact electrode 16 of TiAlSi alloy, for example, by vapor deposition.
- the TiAlSi alloy is made into a conductor having good conductivity by the alloying treatment, and an electrical connection with low contact resistance can be obtained by contact with Al or Al alloy having good conductivity. That is, the contact of (TiAlSi alloy / Al or Al alloy) can realize a contact with low electrical resistance.
- Ni that is in ohmic contact with the n-type SiC region is not used as the material of the source contact electrode.
- an intermetallic compound having a high electric resistance such as NiAl 3 is not generated during use as in the case of contact between the source contact electrode and the source internal wiring, that is, contact between Ni and Al or Ni and Al alloy.
- a combination of the source contact electrode 16 and the source internal wiring 19 that can maintain a low contact resistance over a long period of time can be obtained.
- the passivation protective film 29 is deposited on the wafer in the state of FIG. 8, the semiconductor device 10 of FIG. 1 can be obtained.
- the SiC MOSFET 10 in the present embodiment has the following advantages.
- a metal that increases electrical resistance even when used for a long period of time by combining the source contact electrode 16 made of TiAlSi alloy and the source internal wiring 19 made of Al or Al alloy that conducts the source contact electrode 16 No intermetallic compound is formed.
- the source electrode having a low electric resistance can be stably maintained for a long time.
- one type of source contact electrode 16 called a TiAlSi alloy can make ohmic contact with both the source n + SiC region 14 and the p + type region 18, the manufacturing process can be simplified.
- advantages (improving integration, improving yield, improving quality) by improving dimensional accuracy by reducing the number of resist film formations can be obtained.
- the n-type drain electrode 20 can also be formed of a TiAlSi alloy in parallel with the source contact electrode 16 on the same occasion. This can also simplify the manufacturing process.
- the conductivity type is determined so that the n-channel is formed.
- the conductivity type may be determined in reverse to the above description so that the p-channel is formed.
- an IGBT Insulated Gate Bipolar Transistor in which the conductivity of the n + SiC substrate 11 in the MOSFET 10 is p + may be used.
- FIG. 9 is a diagram showing a SiC MOSFET which is a semiconductor device according to the second embodiment of the present invention.
- the difference from the first embodiment is that a barrier layer 25 is interposed between the source contact electrode 16 and the source internal wiring 19.
- the source contact electrode 16 is formed of TiAlSi alloy
- the source internal wiring 19 is formed of Al or Al alloy. Since both metals do not react to produce an intermetallic compound with high electrical resistance, the barrier layer 25 is less necessary to block diffusion of both elements.
- the barrier layer 25 may be a Ti layer having a thickness of about several nm mainly for the purpose of improving the adhesion between the source contact electrode 16 and the source internal wiring 19.
- the barrier layer 25 has a thickness of several tens to several thousand nm in order to cope with the high temperature of the use environment and prevent the reaction between the source contact electrode 16 and the source internal wiring 19 more reliably. It may be a layer of the following material.
- the barrier layer 25 includes ⁇ titanium (Ti), tantalum (Ta), tungsten (W), niobium (Nb), vanadium (V), zirconium (Zr), titanium nitride, tantalum nitride, tungsten nitride, niobium nitride. , Vanadium nitride, zirconium nitride, titanium silicide, tantalum silicide, tungsten silicide, niobium silicide, vanadium silicide, zirconium silicide ⁇ .
- the manufacturing method is modified as follows in the MOSFET manufacturing process of the first embodiment.
- a resist pattern is formed to form a barrier.
- Layer 25 is formed on source contact electrode 16.
- the film formation method depends on the material, but in the case of metal, it is preferable to form the film by sputtering. In the case of nitride or silicide, it is preferable to use the CVD method.
- a source internal wiring 19 can be provided so as to cover the barrier layer 25 and the interlayer insulating film 21.
- the following advantages can be obtained by interposing the barrier layer 25 between the source contact electrode 16 and the source internal wiring 19. (1) Improvement of adhesion by using a thin Ti film or the like (2) Improvement of workability by improving etching selectivity in RIE or the like (3) Mitigation of difference in thermal expansion between source contact electrode 16 and source internal wiring 19
- FIG. 10 is a cross-sectional view showing a junction field effect transistor JFET 30 which is a semiconductor device according to Embodiment 3 of the present invention.
- the SiC / JFET 30 has the following epitaxial multilayer structure.
- the first p-type layer 32 is preferably about 10 ⁇ m thick and the p-type impurity concentration is about 7.5 ⁇ 10 15 cm ⁇ 3 , for example.
- the n-type layer 33 may have a thickness of about 0.45 ⁇ m and an n-type impurity concentration of about 2 ⁇ 10 17 cm ⁇ 3 .
- the second p-type layer 34 is preferably about 0.25 ⁇ m thick and has a p-type impurity concentration of about 2 ⁇ 10 17 cm ⁇ 3 , for example. Regions 35, 36, and 37 that protrude from the surface 34 a of the second p-type layer 34 to the n-type layer 33 through the second p-type layer are provided. An n-type layer 33 having a sufficient thickness is interposed between the bottom tips of the protruding regions 35, 36, and 37 and the first p-type layer 32. A region protruding downward (toward the SiC substrate 31) in the central portion is a p + type gate region 36, and is electrically connected to the gate contact electrode 41 / gate internal wiring 46.
- a gate electrode 62 is formed by the gate contact electrode 41 / gate internal wiring 46.
- the n + drain region 37 is electrically connected to the drain contact electrode 42 / drain internal wiring 47.
- a drain electrode 63 is formed by the drain contact electrode 42 / drain internal wiring 47.
- the n + source region 35 is electrically connected to the source contact electrode 39 / source internal wiring 45.
- the n-type impurity concentration is 1 ⁇ 10 20 cm ⁇ 3 , which is several orders of magnitude higher than the n-type impurity concentration of the n-type layer 33.
- the p-type impurity concentration is 1 ⁇ 10 18 cm ⁇ 3 , which is several orders of magnitude higher than the p-type impurity concentrations of the first p-type layer 32 and the second p-type layer 34.
- the JFET 30 has a groove 71 provided on the end side of the n + source region 35, and has a p + potential holding region 43 protruding from the bottom 71 a of the groove 71 through the n-type layer 33 and protruding from the first p-type layer 32.
- the first p-type layer 32 having a sufficient thickness is interposed between the bottom end of the p + potential holding region 43 and the n-type substrate 31.
- the p + potential holding region 43 is electrically connected to the potential holding contact electrode 44 / source internal wiring 45.
- the p-type impurity concentration is 1 ⁇ 10 18 cm ⁇ 3 .
- a source electrode 61 is formed by the source contact electrode 39, the potential holding contact electrode 44, and the source internal wiring 45. According to the structure of the source electrode 61, the n + type source region 35 and the p + type potential holding region 43 are kept at the same potential.
- the space between the contact electrodes 44, 39, 41, and 42 is covered with an oxide film 38 to ensure insulation between the contact electrodes.
- the space between the internal wirings 45, 46, and 47 is covered and filled with a passivation film 64, for example, a SiO 2 film, to ensure insulation.
- the passivation film 64 not only insulates between the internal wirings 45, 46, and 47 but also insulates from the outside and protects the JFET 30 from the external environment.
- the above contact electrodes that is, the source contact electrode 39, the potential holding region contact electrode 44, the gate contact electrode 41, and the drain contact electrode 42 are all formed of the TiAlSi alloy described above. Since the p + drain region 36 is of p conductivity type, and the n + source region 35 and the n + drain region 37 are of n conductivity type, the n type region and the p type region are made of electrodes of different materials as in the prior art. When it is formed with a very large number of man-hours. For example, when the source contact electrode 39 and the drain contact electrode 42 are formed of Ni and the gate contact electrode 41 is formed of a Ti / Al laminated body, the following problems occur.
- the contact electrodes 39 and 42 are formed by vapor deposition or the like. Then, after removing the mask, it is necessary to form a mask for forming the gate contact electrode 41, and to form the contact electrode 41 by vapor deposition or the like. When such a manufacturing process is adopted, the number of steps increases and an alignment error occurs in mask formation twice. This causes a decrease in yield, deterioration in integration, and the like. On the other hand, as described above, all the contact electrodes 39, 41, 42, 44 can be formed of the same TiAlSi alloy. For this reason, the contact electrodes 39, 41, 42, and 44 can be collectively formed by forming the mask once.
- the source internal wiring 45, the gate internal wiring 46, and the drain internal wiring 47 are all formed of the same Al or Al alloy. As a result, the combination of all the contact electrodes 39, 41, 42, 44 and the internal wirings 45, 46, 47 does not produce an intermetallic compound or the like that increases the electrical resistance even when used for a long time.
- the region sandwiched between the p + -type gate region 36 and the n + -type drain region 37 has a drift region in the n-type layer 33 between the region and the first p-type layer 32. Is formed. A channel region is formed between the p + gate region 36 and the first p-type layer 32.
- the voltage of the gate contact electrode 62 is 0 V, the reverse bias voltage is not sufficiently applied to the pn junction, the drift region and the channel region are not depleted, and the n + source region 35 and the n + drain region 37 are electrically Connected state (on state). Therefore, electrons move from the n + source region 35 toward the n + drain region 37.
- a reverse bias voltage is sufficiently applied to the pn junction which is the interface between the p + gate region 36 and the n-type layer 33, and the depletion layer has a lower impurity concentration. It spreads over the mold layer 33. As a result, the channel region and the drift region are depleted, the n + source region 35 and the n + drain region 37 are electrically cut off, and no current flows (OFF state).
- the JFET 30 performs current on / off control by the above-described mechanism.
- the JFET 30 in FIG. 10 is manufactured through a known semiconductor device manufacturing process.
- groove portion 71 has a structure that was not found in MOSFET 10 of the first embodiment, for example, a mask layer having an opening in a portion corresponding to groove portion 71 is provided on surface 34a of second p-type layer 34, and SF 6 It can be formed by dry etching using a gas. Thereafter, an n + source region or the like is formed by ion implantation.
- n + source region 35 and n + drain region 37 are formed by forming an oxide film pattern ⁇ implanting n-type impurities as described in the first embodiment.
- the p + gate region 36 and the p + potential holding region 43 are the same in that ion implantation is performed using the oxide film pattern as a mask, except that the kind of impurities is different. However, when the depth of the p + potential holding region 43 formed in the trench is shallower than the p + gate region 36, ion implantation is performed at different opportunities. Thereafter, the activation annealing process at about 1700 ° C. for 30 minutes in an inert atmosphere such as argon is the same as in the first and second embodiments.
- the oxide film 38 is formed as a field oxide film by processing at 1300 ° C. for 30 minutes in an oxygen atmosphere after activation annealing.
- a resist pattern having openings at portions corresponding to the four contact electrodes 39, 41, 42, and 44 is formed on the oxide film 38, and the resist pattern is used as a mask, and the opening position is oxidized by RIE or the like.
- the film 38 is removed.
- a TiAlSi mixed film is formed by mixed sputtering in which Ti, Al, and Si are simultaneously sputtered.
- a Ti film / Al film / Si film is laminated.
- the TiAlSi mixed film on the resist film is lifted off, and then an alloying process is performed so that the TiAlSi mixed film becomes a TiAlSi alloy.
- heating is performed in a temperature range of 550 ° C. to 1200 ° C., preferably in a temperature range of 900 ° C. to 1100 ° C., in an inert atmosphere such as argon. For example, it is heated to 1000 ° C. and held for 10 minutes or less, for example, 2 minutes.
- four contact electrodes 39, 41, 42, and 44 are formed which are in ohmic contact with the underlying semiconductor layer by forming the resist pattern once.
- a source wiring 45, a gate wiring 46, and a drain wiring 47 are formed. These wirings are formed by forming a resist pattern having an opening in a portion where each wiring is to be formed and evaporating Al or an Al alloy. After depositing Al or Al alloy, the resist pattern is removed to lift off Al or Al alloy on the resist pattern. According to the above manufacturing method, the four types of contact electrodes 39, 41, 42, and 44 are all formed of a TiAlSi alloy, and the wirings 45, 46, and 47 are formed of Al or an Al alloy. For this reason, an intermetallic compound having a high electrical resistance such as NiAl 3 is not generated.
- the present invention in a silicon carbide semiconductor device, when the electrode material is different from the material of the internal wiring, there is no risk of malfunction at the contact interface of these dissimilar metals, and high reliability (contact A semiconductor device or the like can be obtained. Moreover, since the TiAlSi alloy used for the contact electrode can make ohmic contact with both p-type SiC and n-type SiC, the number of resist pattern formations can be reduced compared to the case where the contact electrode material is changed according to the conductivity type. it can. As a result, it is possible to suppress the deterioration of dimensional accuracy accompanying the formation of the resist pattern, and to improve the dimensional accuracy and the manufacturing yield.
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Abstract
Description
SiCの縦型MOSFETでは、半導体、ゲート酸化膜等を含む基板材料の表面と裏面とに電極配線構造が形成される。電極の形成において、これまで膨大な使用実績のあるシリコンに比べて、SiCでは、接触抵抗を小さくできる電極材料を充分な種類見出せていない。この状況のなかで、n型SiCについては、Ni(ニッケル)系の電極材料を用い、合金化熱処理(約1000℃での熱処理)を行うことでシリサイド化したニッケルシリサイドとの接合によりオーミック接触を得ている。また、p型SiCについては、Ti(チタン)/Al(アルミニウム)、またはAlSi合金を用いることで接触抵抗を低く抑えることが可能とされている(非特許文献1)。
大電流の制御に用いられるSiCの縦型MOSFETは、n型SiCのソース領域に配置されるソース電極として、Ni系またはNiSi系材料を用いることで、オーミックコンタクトを実現する場合が多い。これは、上述の非特許文献に開示されていることと合致する。1個のチップには、MOSFETを形成する1ユニットが、多数、並列に配置され、内部配線によって、所定の電気回路が形成されている。従来のシリコン半導体装置では、たとえばAlをオーミック電極材料として用いると同時に内部配線としても共通に用いることが可能である。しかしながら、SiCの場合は、Alをオーミック電極と内部配線を共通に用いることは、Alの融点以下でSiC-Al間の良好なオーミック接触を得ることは困難であるため難しい。また、上記のNi系またはNiSi系材料は、電気抵抗がそれほど低いものではなく、また適切な線材を得ることが困難である等の理由により、内部配線に用いられない。また、Ni系材料は、上記のように、p型SiCとは良好なオーミック接触が得られにくい。SiC半導体装置の場合、内部配線には、Al系(Al、AlSi合金、AlSiCu合金など)材料を用いることが多い。この場合、長期間の使用において、内部配線に用いられる当該Al系材料と、電極に用いられるNi系またはNiSi系材料とで、電気抵抗の高い金属間化合物、たとえばNiAl3などを生じる可能性がある(非特許文献2)。
ここで、TiAlSi合金は、その他にCなど、製造途中に混入する元素を含むことができる。
(1)接触電極と配線との密着性の向上(この場合、バリア層は数nm~数十nmという薄い膜厚とすることが多い)
(2)異方性エッチングの選択性の向上による加工性の向上
(3)熱膨張率の相違に起因する歪みの緩和
(4)耐エレクトロマイグレーション性の向上
図1は、本発明の実施の形態1における半導体装置のMOSFETを示す断面図である。本実施の形態におけるMOSFETは、半導体に炭化珪素(SiC)を用いており、n+型SiC基板11と、その上にエピタキシャル成長されたn型SiC層(ドリフト層)12とを備える。n型SiC層(ドリフト層)12の厚みは、たとえば10μm、n型不純物濃度は1×1016cm-3程度とするのがよい。SiCエピタキシャル層12の表面12aの側に、pボディ13、n+SiCのソース領域14と、そのソース領域14に接して設けられたp+SiC領域18とが位置する。pボディ13は、(n+ソース領域14/p+領域18)と、ドリフト層領域12との間に介在する。
n+SiC基板11はドレイン領域を形成しており、n+SiC基板11の裏面11bには、ドレイン電極20が設けられている。
ソース接触電極16は、TiとAlとSiとを含む合金(TiAlSi合金)によって形成される。また、ソース内部配線19は、AlまたはAl合金(AlSi合金、AlSiCu合金など)によって形成される。従来のように、ソース接触電極16にニッケル(Ni)を用いた場合、長時間の使用により、内部配線に通常用いられるAlまたはAl合金中のAlと反応してNiAl3などの高電気抵抗の金属間化合物を生成する危険性があった。本実施の形態におけるように、ソース接触電極16にTiAlSi合金を用いることで、ソース内部配線19にAlまたはAl合金を用いても、電気抵抗の高い金属間化合物を生成するおそれはない。このため、長期間、高い信頼性を維持することができる。
上記の熱酸化膜15aの形成(工程S7)の際にn+型SiC基板11の裏面11b上に熱酸化膜23が形成される。この熱酸化膜23は、n+型SiC基板11の保護膜として機能する。
このあと、図4に示すように、ゲート電極17を形成する(工程S8)。ゲート電極17は、ポリシリコン、Alなどからなり、ゲート酸化膜となる熱酸化膜15aを介在させて一方のソース領域14から他方のソース領域14上にわたって延在する。ゲート電極の素材としてポリシリコンを用いる場合、電子導電性を確保するため、Pなどの不純物が1×1020cm-3を超える高い濃度となるようにする。堆積するポリシリコン膜の厚みは50nm程度とするのがよい。
このあと、図5に示すように、層間絶縁膜21を形成する(工程S9)。層間絶縁膜21は、ゲート電極17および酸化膜15aを覆うように、たとえばCVD法によって、厚み約1μmのSiO2膜によって形成される。次いで、図6に示すように、ソース接触電極16を形成する領域に開口部を有するレジストパターン91を形成する。そのレジストパターン91をマスクとして用いて、たとえばRIEによって、ソース接触電極を形成する領域の層間絶縁膜21およびゲート酸化膜15aを部分的に除去して、ソース接触電極を形成する部分のエピタキシャル層の表面領域を露出させる。
このあと、図6に示すように、ソース接触電極16を形成する(工程S10)。次いで、レジストパターン91を除去すると、ソース接触電極形成時に堆積されたレジスト膜上の層はリフトオフされる。次いで、n+型SiC基板11の裏面11bを露出させて清浄化した後、図7に示すように、ドレイン電極20を、ソース接触電極16と同じ材料によって形成する(工程S11)。
上記の両方の電極16,20ともに、TiAlSi合金の電極を形成する。図3は、このTiAlSi合金の電極を製造するためのより詳しいフローチャートである。図3のS10aまたはS11a~S10cまたはS11cに示すように、Ti膜、Al膜、およびSi膜を、SiCエピタキシャル層12の表面12a、およびSiC基板11の裏面11bの両方の面に、上記3種類の層を上記順序で積層する。積層方法は、スパッタリング法などを用いるのがよい。次いで、たとえばソース接触電極16を形成するときは、上述のように、レジスト膜91を除去することで、レジスト膜上に積層されていた、Ti膜、Al膜,Si膜を除去(リフトオフ)する。これによって、図7に示すように、ゲート酸化膜15から露出するSiCエピタキシャル層12の表面12a、およびSiC基板11の裏面11b、の面上に、Ti膜、Al膜、Si膜からなる3層膜が残る。
次に、Arなどの不活性雰囲気中で、550℃~1200℃の温度域、好ましくは900℃~1100℃の温度域に、10分間以下の時間保持する。たとえば1000℃程度に2分間程度保持する(合金化処理)。この合金化処理によって、ソース接触電極の側については、Ti膜、Al膜、Si膜およびSiCエピタキシャル層12が合金化され、当該ソース接触電極16が形成される(工程S10d)。また、ドレイン電極の側については、Ti膜、Al膜、Si膜、およびSiC基板11が合金化され、当該ドレイン電極20が形成される(工程S11d)。図7は、合金化処理を行って、ソース接触電極16およびドレイン電極20を形成する材料をTiAlSi合金としたあとの状態を示す。
図8の状態のウエハにパッシベーション保護膜29を堆積すると、図1の半導体装置10を得ることができる。
(1)TiAlSi合金によるソース接触電極16と、そのソース接触電極16に導通をとる、AlまたはAl合金のソース内部配線19との組み合わせによって、長期間使用しても、電気抵抗の増大をもたらす金属間化合物は生じない。この結果、低い電気抵抗のソース電極を長期間、安定して維持することができる。
(2)TiAlSi合金という1種類のソース接触電極16によって、ソースn+SiC領域14およびp+型領域18の両方にオーミック接触することができるので、製造工程を簡単化することができる。さらにレジスト膜の形成回数の減少による寸法精度の向上による利点(集積度の向上、歩留まり向上、品質向上)を得ることができる。
n型ドレイン電極20についても、ソース接触電極16と、同じ機会に並行して、TiAlSi合金によって形成することができる。これによる製造工程の簡単化も得ることができる。本実施の形態では、nチャネルが形成されるように導電型を定めたが、pチャネルが形成されるように導電型を上述した内容と逆に定めてもよい。また、MOSFET10におけるn+SiC基板11の導電性をp+としたIGBT(Insulated Gate Bipolar Transistor)であってもよい。
図9は、本発明の実施の形態2における半導体装置であるSiCのMOSFETを示す図である。実施の形態1との相違は、ソース接触電極16と、ソース内部配線19との間に、バリア層25を介在させた点にある。その他の構成は、実施の形態1と同じである。本発明においては、ソース接触電極16はTiAlSi合金で形成され、ソース内部配線19はAlまたはAl合金で形成される。両者の金属が反応して電気抵抗が高い金属間化合物を生成することはないので、バリア層25は、両者の元素の拡散をブロックする必要度は小さい。このため、バリア層25を、ソース接触電極16およびソース内部配線19の密着性向上を主目的として、数nm程度の厚みのTi層としてもよい。また、使用環境の高温化などに対処し、ソース接触電極16とソース内部配線19との反応を、より確実に防止することを目的に、バリア層25は数十nm~数千nmの厚みの次の材料の層であってもよい。すなわち、
バリア層25は{チタン(Ti)、タンタル(Ta)、タングステン(W)、ニオブ(Nb)、バナジウム(V)、ジルコニウム(Zr)、チタン窒化物、タンタル窒化物、タングステン窒化物、ニオブ窒化物、バナジウム窒化物、ジルコニウム窒化物、チタン珪化物、タンタル珪化物、タングステン珪化物、ニオブ珪化物、バナジウム珪化物、ジルコニウム珪化物}の少なくとも一種の層であってもよい。
(1)薄いTi膜等を用いることで、密着性の向上
(2)RIE等におけるエッチング選択性の向上による加工性向上
(3)ソース接触電極16とソース内部配線19の熱膨張差の緩和
図10は、本発明の実施の形態3における半導体装置である接合型電界効果トランジスタJFET30を示す断面図である。SiC・JFET30は、次のエピタキシャル積層構造を持つ。(n型基板31/第1のp型層32/n型層33/第2のp型層34)
第1のp型層32は、たとえば厚み10μm程度、p型不純物濃度は7.5×1015cm-3程度とするのがよい。n型層33は、たとえば厚み0.45μm程度、n型不純物濃度2×1017cm-3程度とするのがよい。第2のp型層34は、たとえば厚み0.25μm程度、p型不純物濃度2×1017cm-3程度とするのがよい。
第2のp型層34の表面34aから、当該第2のp型層を貫通して、n型層33に突き出る領域35,36,37を備える。突き出た領域35,36,37の底部先端と、第1のp型層32との間には、十分な厚みのn型層33が介在するようにする。
中央部において下方に(SiC基板31に向かって)突き出る領域は、p+型ゲート領域36であり、ゲート接触電極41/ゲート内部配線46と電気的に接続されている。ゲート接触電極41/ゲート内部配線46によってゲート電極62が形成される。また、n+ドレイン領域37は、ドレイン接触電極42/ドレイン内部配線47に電気的に接続されている。ドレイン接触電極42/ドレイン内部配線47によって、ドレイン電極63が形成される。n+ソース領域35は、ソース接触電極39/ソース内部配線45と電気的に接続される。
n+ソース領域35およびn+ドレイン領域37においては、たとえばn型不純物濃度1×1020cm-3であり、n型層33のn型不純物濃度よりも数オーダー高い。p+ゲート領域36においては、たとえばp型不純物濃度1×1018cm-3であり、第1のp型層32および第2のp型層34のp型不純物濃度よりも数オーダー高い。
接触電極44,39,41,42の間は、酸化膜38によって被覆され、接触電極間の絶縁性が確保されている。内部配線45,46,47の間は、パッシベーション膜64、たとえばSiO2膜によって被覆、充填され、絶縁性が確保されている。パッシベーション膜64は、内部配線45,46,47の間の絶縁だけでなく、外部との絶縁をし、かつJFET30を外部環境から保護する。
また、ソース内部配線45、ゲート内部配線46、およびドレイン内部配線47は、すべて、同一のAlまたはAl合金で形成されている。これによって、すべての接触電極39,41,42,44と、内部配線45,46,47との組み合わせにおいて、長期間使用しても、電気抵抗を増大させる金属間化合物などを生じない。
ゲート接触電極41に負電圧を印加してゆくと、p+ゲート領域36とn型層33との界面であるpn接合に逆バイアス電圧が充分かかり、空乏層が、不純物濃度が低いほうのn型層33に広がってゆく。この結果、チャネル領域およびドリフト領域は空乏化され、n+ソース領域35とn+ドレイン領域37とは電気的に遮断され、電流は流れない(オフ状態)。
JFET30は、上記の機構によって、電流のオンオフ制御を行う。
溝部71は、実施の形態1のMOSFET10にはなかった構造であるが、たとえば溝部71に対応する部分に開口を有するマスク層を、第2のp型層34の表面34aに設けて、SF6ガスを用いたドライエッチングによって形成することができる。
このあとn+ソース領域等のイオン注入による形成を行う。たとえば、n+ソース領域35およびn+ドレイン領域37は、実施の形態1で説明したように、酸化膜パターンの形成→n型不純物のイオン注入、により形成される。p+ゲート領域36およびp+電位保持領域43についても、不純物の種類が異なるだけで、酸化膜パターンをマスクとして用いてイオン注入する点では同じである。ただし、溝部に形成されるp+電位保持領域43の深さがp+ゲート領域36よりも浅い場合には、機会を分けてイオン注入することになる。このあと、アルゴンなどの不活性雰囲気中で1700℃×30分間程度の活性化アニール処理を行うことは、実施の形態1,2と同様である。
酸化膜38は、活性化アニール処理後に、酸素雰囲気中で1300℃×30分間の処理により、フィールド酸化膜として形成される。
このあと、4つの接触電極39,41,42,44に対応する部分に開口を有するレジストパターンを酸化膜38の上に形成して、レジストパターンをマスクとして用いて、RIE等によって開口位置の酸化膜38を除去する。その後、Tiと、Alと、Siとを同時にスパッタリングする混合スパッタリングによってTiAlSi混合膜を形成する。実施の形態1、2では、Ti膜/Al膜/Si膜を積層した。レジスト膜の除去によって、レジスト膜上のTiAlSi混合膜をリフトオフし、次いで、TiAlSi混合膜をTiAlSi合金とするための合金化処理を行う。合金化処理では、アルゴンなどの不活性雰囲気中で、550℃~1200℃の温度域、好ましくは900℃~1100℃の温度域に加熱する。たとえば1000℃に加熱して、10分間以下、たとえば2分間保持する。上記の処理によって、1回のレジストパターンの形成によって、下地の半導体層とすべてオーミック接触する、4つの接触電極39,41,42,44が形成される。
次いで、ソース配線45、ゲート配線46、ドレイン配線47を形成する。これらの配線は、各配線を形成する部分に開口を有するレジストパターンを形成し、AlまたはAl合金を蒸着することで、形成する。AlまたはAl合金を蒸着後に、レジストパターンを除去することで、レジストパターン上のAlまたはAl合金をリフトオフする。
上記の製造方法によれば、4種類の接触電極39,41,42,44は、すべてTiAlSi合金で形成し、配線45,46,47はAlまたはAl合金で形成する。このため、NiAl3のような電気抵抗が高い金属間化合物が生じることがない。
Claims (12)
- 接触電極と、該接触電極と導通する配線とを備える、炭化珪素の半導体装置であって、
前記接触電極が、チタン、アルミニウム、および珪素を含有する合金で形成され、前記炭化珪素に接触し、
前記配線は、アルミニウムまたはアルミニウム合金で形成され、前記接触電極と接触することで該接触電極と前記導通をとることを特徴とする、半導体装置。 - 前記接触電極と前記配線とが直接接触しないように、該接触電極と該配線との間にバリア層を介在させ、前記配線および接触電極は、該バリア層に接触することで前記導通をとることを特徴とする、請求項1に記載の半導体装置。
- 前記バリア層が、{チタン(Ti)、タンタル(Ta)、タングステン(W)、ニオブ(Nb)、バナジウム(V)、ジルコニウム(Zr)、チタン窒化物、タンタル窒化物、タングステン窒化物、ニオブ窒化物、バナジウム窒化物、ジルコニウム窒化物、チタン珪化物、タンタル珪化物、タングステン珪化物、ニオブ珪化物、バナジウム珪化物、ジルコニウム珪化物}のうちのいずれかであることを特徴とする、請求項2に記載の半導体装置。
- 前記接触電極は、前記炭化珪素にオーミック接触することを特徴とする、請求項1~3のいずれか1項に記載の半導体装置。
- 前記接触電極は、前記炭化珪素のn型領域およびp型領域の両方にオーミック接触することを特徴とする、請求項1~4のいずれか1項に記載の半導体装置。
- 前記半導体装置が、MOSFETであり、前記接触電極が、ソース電極またはドレイン電極であり、該接触電極がソース電極の場合、該ソース電極は、ソース領域および該ソース領域と反対導電型の反転部形成領域へのコンタクト領域の両方に接触するものであり、前記配線が、ソース内部配線またはドレイン配線であることを特徴とする、請求項1~5のいずれか1項に記載の半導体装置。
- 前記半導体装置が、JFETであり、前記接触電極が、ソース電極、ゲート電極、およびドレイン電極であり、前記配線が、ソース配線、ゲート配線、およびドレイン配線であることを特徴とする、請求項1~5のいずれか1項に記載の半導体装置。
- 基板を準備する工程と、
前記基板上に、炭化珪素エピタキシャル層を形成する工程と、
前記炭化珪素エピタキシャル層上に、チタン、アルミニウム、およびケイ素を含有する合金の電極をオーミック接触するように形成する工程と、
前記電極に接触して、アルミニウムまたはアルミニウム合金の配線を設けることを特徴とする、半導体装置の製造方法。 - 前記電極を形成する工程では、前記炭化珪素エピタキシャル層上に、(1)チタン層を形成し、次いで該チタン層上にアルミニウム層を形成し、さらに該アルミニウム層上に珪素層を形成した上で、または、(2)チタン、アルミニウムおよび珪素の混合層を形成した上で、熱処理をして合金化することを特徴とする、請求項8に記載の半導体装置の製造方法。
- 前記合金電極の形成の後、前記配線を設ける前に、前記合金電極に接触して、バリア層を形成する工程を備え、前記配線は前記バリア層に接触するように設けることを特徴とする、請求項8または9に記載の半導体装置の製造方法。
- 前記炭化珪素エピタキシャル層の形成後で、前記合金電極の形成前に、前記炭化珪素エピタキシャル層に、該炭化珪素のn型領域およびp型領域を形成し、前記合金電極を、前記n型領域およびp型領域の両方にオーミック接触するように形成することを特徴とする、請求項8~10のいずれか1項に記載の半導体装置の製造方法。
- 前記合金電極が2つ以上あり、前記炭化珪素エピタキシャル層の形成後で、前記合金電極の形成前に、前記炭化珪素エピタキシャル層に、該炭化珪素のn型領域およびp型領域の両方を形成し、前記n型領域にオーミック接触する第1の合金電極およびp型領域にオーミック接触する第2の合金電極を同じ処理機会に同じ材料で形成することを特徴とする、請求項8~10のいずれか1項に記載の半導体装置の製造方法。
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2009
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JP4858791B2 (ja) | 2012-01-18 |
JP2010272766A (ja) | 2010-12-02 |
EP2434534A1 (en) | 2012-03-28 |
US20150287598A1 (en) | 2015-10-08 |
KR20120022719A (ko) | 2012-03-12 |
CN102439699A (zh) | 2012-05-02 |
EP2434534A4 (en) | 2013-12-25 |
CA2762623A1 (en) | 2010-11-25 |
US20120007104A1 (en) | 2012-01-12 |
TW201104862A (en) | 2011-02-01 |
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