JP6068918B2 - 半導体装置およびその製造方法 - Google Patents
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- 239000004065 semiconductor Substances 0.000 title claims description 61
- 238000004519 manufacturing process Methods 0.000 title description 25
- 239000000758 substrate Substances 0.000 claims description 54
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 25
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 9
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 9
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000011229 interlayer Substances 0.000 description 56
- 229910052751 metal Inorganic materials 0.000 description 23
- 239000002184 metal Substances 0.000 description 23
- 238000000034 method Methods 0.000 description 17
- 210000000746 body region Anatomy 0.000 description 16
- 239000010410 layer Substances 0.000 description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 14
- 229910052782 aluminium Inorganic materials 0.000 description 14
- 239000012535 impurity Substances 0.000 description 13
- 238000005275 alloying Methods 0.000 description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 8
- 238000000137 annealing Methods 0.000 description 8
- 238000005530 etching Methods 0.000 description 8
- 239000010936 titanium Substances 0.000 description 8
- 235000012239 silicon dioxide Nutrition 0.000 description 7
- 239000000377 silicon dioxide Substances 0.000 description 7
- 229910052719 titanium Inorganic materials 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- MAKDTFFYCIMFQP-UHFFFAOYSA-N titanium tungsten Chemical compound [Ti].[W] MAKDTFFYCIMFQP-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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Description
まず、本実施の形態に係る半導体装置としてのMOSFET1の構造について説明する。図1を参照して、MOSFET1は、炭化珪素からなる基板10と、ゲート絶縁膜20と、ゲート電極30と、層間絶縁膜40と、バッファ膜51と、ソース電極52と、ソース配線60と、ドレイン電極70とを備えている。基板10は、ベース基板11と、半導体層(導電領域)12とを含み、また半導体層12には、ドリフト領域13と、ボディ領域14と、ソース領域15と、コンタクト領域16とが形成されている。また、MOSFET1には、ゲート絶縁膜20と層間絶縁膜40とを貫通し、基板10の主表面10Aを露出させるコンタクトホール80がゲート電極30から離れて形成されている。
次に、図2を参照して、本発明の実施の形態2に係る半導体装置およびその製造方法について説明する。本実施の形態に係る半導体装置は、基本的には、実施の形態1に係る半導体装置と同等の構成を備えるが、バッファ膜51が隣り合う複数のコンタクトホール80に挟まれた層間絶縁膜40の部分を覆うように形成される点で異なる。本実施の形態に係る半導体装置としてのMOSFET1においては、コンタクトホール80は複数形成され、複数のコンタクトホール80のうちの1つの側壁面80A上の底面80Bから層間絶縁膜40の上面40A上をわたって複数のコンタクトホール80のうちの他の1つの側壁面80A上の底面80Bにまで延在している。つまり、バッファ膜51の端部は、層間絶縁膜40の上面40A上に形成されない。
次に、本発明の実施の形態3に係る半導体装置およびその製造方法について説明する。図4を参照して、本実施の形態に係る半導体装置は、基本的には、実施の形態1に係る半導体装置と同等の構成を備えるが、バッファ膜51において、コンタクトホール80の底面80Bと反対側に位置する端部51Aが側壁面80A上に形成されており、層間絶縁膜40上に位置するソース電極52の端部52Aは、バッファ膜51の端部51Aよりコンタクトホール80の底面80B側に形成されている点で異なる。本実施の形態に係る半導体装置としてのMOSFET1においては、バッファ膜51およびソース電極52は、層間絶縁膜40の上面40A上に形成されていない。
Claims (6)
- 炭化珪素からなる基板と、
前記基板の表面上に形成され、SiO 2 を含む絶縁膜と、
Alを含まないバッファ膜と、
Alを含む電極とを備え、
前記基板は導電領域を有し、
前記絶縁膜を貫通し、前記基板の表面を露出させるコンタクトホールが前記導電領域上に複数形成されており、
前記バッファ膜は、前記コンタクトホールの側壁面上において底面から上方に向けて延在し、
前記電極は、前記コンタクトホールの前記底面内で前記導電領域と接触するように形成され、かつ前記絶縁膜上に前記バッファ膜を介して形成されており、
前記バッファ膜は、隣り合う複数の前記コンタクトホールに挟まれた前記絶縁膜の部分を覆うように、複数の前記コンタクトホールのうちの1つの前記底面から前記絶縁膜の上面上をわたって複数の前記コンタクトホールのうちの他の一つの前記底面にまで延在しており、
前記絶縁膜上に形成される前記電極は、前記バッファ膜の全面を覆うように形成されており、
前記電極および前記絶縁膜を覆うように形成され、前記電極を介して前記導電領域と電気的に接続される配線をさらに備えた、半導体装置。 - 炭化珪素からなる基板と、
前記基板の表面上に形成され、SiO 2 を含む絶縁膜と、
Alを含まないバッファ膜と、
Alを含む電極とを備え、
前記基板は導電領域を有し、
前記絶縁膜を貫通し、前記基板の表面を露出させるコンタクトホールが前記導電領域上に形成されており、
前記バッファ膜は、前記コンタクトホールの側壁面上において底面から上方に向けて延在し、
前記電極は、前記コンタクトホールの前記底面内で前記導電領域と接触するように形成され、かつ前記絶縁膜上に前記バッファ膜を介して形成されており、
前記バッファ膜において、前記コンタクトホールの前記底面と反対側に位置する端部は前記側壁面上に形成されており、
前記絶縁膜上に位置する前記電極の端部は、前記バッファ膜の前記端部より前記コンタクトホールの前記底面側に形成されている、半導体装置。 - 前記バッファ膜はTiNからなっている、請求項1または請求項2に記載の半導体装置。
- 前記電極はTiAlSiからなっている、請求項1〜3のいずれか1項に記載の半導体装置。
- 前記バッファ膜は、0.025μm以上0.15μm以下の厚みを有している、請求項1〜4のいずれか1項に記載の半導体装置。
- 炭化珪素からなる基板を準備する工程と、
前記基板の表面上にSiO 2 を含む絶縁膜を形成する工程と、
前記絶縁膜を貫通し、前記基板の前記表面を露出させるコンタクトホールを複数形成する工程と、
隣り合う複数の前記コンタクトホールに挟まれた前記絶縁膜の部分を覆うように、複数の前記コンタクトホールのうちの1つの前記底面から前記絶縁膜の上面上をわたって複数の前記コンタクトホールのうちの他の一つの前記底面にまで延在するようにAlを含まないバッファ膜を形成する工程と、
Alを含む電極を、前記コンタクトホールを形成することにより露出した前記基板の前記表面上に接触し、かつ前記バッファ膜の全面を覆うように前記バッファ膜を介して前記絶縁膜上に形成する工程と、
前記電極および前記絶縁膜を覆うように、前記電極を介して前記導電領域と電気的に接続される配線を形成する工程とを備える、半導体装置の製造方法。
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JP2012227653A JP6068918B2 (ja) | 2012-10-15 | 2012-10-15 | 半導体装置およびその製造方法 |
PCT/JP2013/074318 WO2014061373A1 (ja) | 2012-10-15 | 2013-09-10 | 半導体装置およびその製造方法 |
CN201380044909.0A CN104603915B (zh) | 2012-10-15 | 2013-09-10 | 半导体器件及其制造方法 |
DE112013003623.1T DE112013003623B4 (de) | 2012-10-15 | 2013-09-10 | Halbleiterbauelement und Verfahren zum Herstellen von diesem |
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JP3559971B2 (ja) | 2001-12-11 | 2004-09-02 | 日産自動車株式会社 | 炭化珪素半導体装置およびその製造方法 |
JP3623491B2 (ja) * | 2002-06-28 | 2005-02-23 | Necエレクトロニクス株式会社 | 半導体装置及びその製造方法 |
JP2010238738A (ja) | 2009-03-30 | 2010-10-21 | Toshiba Corp | 半導体装置および半導体装置の製造方法 |
JP4858791B2 (ja) * | 2009-05-22 | 2012-01-18 | 住友電気工業株式会社 | 半導体装置およびその製造方法 |
JP5860580B2 (ja) * | 2009-05-25 | 2016-02-16 | 日産自動車株式会社 | 半導体装置及びその製造方法 |
US8963163B2 (en) * | 2009-10-05 | 2015-02-24 | Sumitomo Electric Industries, Ltd. | Semiconductor device |
JP5809596B2 (ja) | 2012-05-07 | 2015-11-11 | 住友電気工業株式会社 | 半導体装置およびその製造方法 |
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2012
- 2012-10-15 JP JP2012227653A patent/JP6068918B2/ja active Active
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2013
- 2013-09-10 WO PCT/JP2013/074318 patent/WO2014061373A1/ja active Application Filing
- 2013-09-10 DE DE112013003623.1T patent/DE112013003623B4/de active Active
- 2013-09-10 CN CN201380044909.0A patent/CN104603915B/zh active Active
- 2013-10-11 US US14/052,467 patent/US20140103365A1/en not_active Abandoned
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JP2014082246A (ja) | 2014-05-08 |
US20140103365A1 (en) | 2014-04-17 |
CN104603915B (zh) | 2017-09-22 |
WO2014061373A1 (ja) | 2014-04-24 |
DE112013003623B4 (de) | 2024-06-27 |
CN104603915A (zh) | 2015-05-06 |
DE112013003623T5 (de) | 2015-04-09 |
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