TW564486B - Gallium nitride based diodes with low forward voltage and low reverse current operation - Google Patents
Gallium nitride based diodes with low forward voltage and low reverse current operation Download PDFInfo
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- TW564486B TW564486B TW091116362A TW91116362A TW564486B TW 564486 B TW564486 B TW 564486B TW 091116362 A TW091116362 A TW 091116362A TW 91116362 A TW91116362 A TW 91116362A TW 564486 B TW564486 B TW 564486B
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- gallium nitride
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- 229910002601 GaN Inorganic materials 0.000 title claims description 56
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 title claims description 23
- 230000004888 barrier function Effects 0.000 claims abstract description 79
- 229910052751 metal Inorganic materials 0.000 claims abstract description 57
- 239000002184 metal Substances 0.000 claims abstract description 57
- 230000005641 tunneling Effects 0.000 claims abstract description 28
- 239000000463 material Substances 0.000 claims abstract description 23
- 150000002739 metals Chemical class 0.000 claims abstract description 5
- 239000000758 substrate Substances 0.000 claims description 18
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 239000011810 insulating material Substances 0.000 claims description 5
- 150000004767 nitrides Chemical class 0.000 claims description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 3
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 239000011651 chromium Substances 0.000 claims description 3
- 229910052733 gallium Inorganic materials 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 2
- 230000002708 enhancing effect Effects 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 239000010936 titanium Substances 0.000 claims description 2
- PCTMTFRHKVHKIS-BMFZQQSSSA-N (1s,3r,4e,6e,8e,10e,12e,14e,16e,18s,19r,20r,21s,25r,27r,30r,31r,33s,35r,37s,38r)-3-[(2r,3s,4s,5s,6r)-4-amino-3,5-dihydroxy-6-methyloxan-2-yl]oxy-19,25,27,30,31,33,35,37-octahydroxy-18,20,21-trimethyl-23-oxo-22,39-dioxabicyclo[33.3.1]nonatriaconta-4,6,8,10 Chemical compound C1C=C2C[C@@H](OS(O)(=O)=O)CC[C@]2(C)[C@@H]2[C@@H]1[C@@H]1CC[C@H]([C@H](C)CCCC(C)C)[C@@]1(C)CC2.O[C@H]1[C@@H](N)[C@H](O)[C@@H](C)O[C@H]1O[C@H]1/C=C/C=C/C=C/C=C/C=C/C=C/C=C/[C@H](C)[C@@H](O)[C@@H](C)[C@H](C)OC(=O)C[C@H](O)C[C@H](O)CC[C@@H](O)[C@H](O)C[C@H](O)C[C@](O)(C[C@H](O)[C@H]2C(O)=O)O[C@H]2C1 PCTMTFRHKVHKIS-BMFZQQSSSA-N 0.000 claims 1
- 238000009413 insulation Methods 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- -1 sharp Chemical compound 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 239000010937 tungsten Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 abstract description 19
- 229910052782 aluminium Inorganic materials 0.000 description 10
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 10
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 10
- 238000010586 diagram Methods 0.000 description 10
- 230000001965 increasing effect Effects 0.000 description 7
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 6
- 229910010271 silicon carbide Inorganic materials 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 238000001465 metallisation Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 241000219112 Cucumis Species 0.000 description 1
- 235000015510 Cucumis melo subsp melo Nutrition 0.000 description 1
- 229910018540 Si C Inorganic materials 0.000 description 1
- FJJCIZWZNKZHII-UHFFFAOYSA-N [4,6-bis(cyanoamino)-1,3,5-triazin-2-yl]cyanamide Chemical compound N#CNC1=NC(NC#N)=NC(NC#N)=N1 FJJCIZWZNKZHII-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- AJGDITRVXRPLBY-UHFFFAOYSA-N aluminum indium Chemical compound [Al].[In] AJGDITRVXRPLBY-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 210000004508 polar body Anatomy 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/47—Schottky barrier electrodes
- H01L29/475—Schottky barrier electrodes on AIII-BV compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/872—Schottky diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/872—Schottky diodes
- H01L29/8725—Schottky diodes of the trench MOS barrier type [TMBS]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/88—Tunnel-effect diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
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- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Electrodes Of Semiconductors (AREA)
Description
564486 A7 ___B7 五、發明説明(1 ) 發明背景 發明領域 本發明係關於二極體,更明破地說,係關於顯示出改善 的順向電壓和逆向漏電電流特性之氮化鎵基底之二極體。 相關技藝說明 整流二極體是低電壓轉換、電源供應、電源轉換器和相 關的應用中最廣為使用的元件之一。要達到最有效率的操 作,最好能使二極體有低開啟狀態電壓(0·1_0·2伏特或更 低)、低逆向漏電電流、高電壓阻斷能力(20-30伏特)和高 轉換速度。 最常見的二極體是由具有引入不純成分的矽(Si)來調整 ,在一控制的模式下,該二極體的操作特性所製成的卯接 面二極體。二極體也可以由例如砷化鎵(GaAs)和碳化矽 (Si C)等其他半導體材料來形成。接面二極體的一個缺點是 在順向傳導期間,二極體的電力損失在大電流量時會變得 袓當大。 蕭特基障壁二極體是一種特別型式的整流二極體,其由 一可整流的金屬-半導體障壁區域所構成,而非一 pn接面 。當金屬接觸半導體,一障壁區域會被形成在兩者之間的 接面處。當被正確地製造時,該障壁區域會將電荷儲存效 應降到最小並藉由縮短關閉(turn-off )時間來促進二極體 的轉換(L.P. Hunter在半導體元件(Semiconductor Dev ices)第卜10頁(1970年)之半導體材料、元件、和電路 物理一文)。常見的蕭特基二極體具有比pn接面二極體低的 • 5- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐) ~ ' 564486 A7 B7 五、發明説明(4 ) — " ~ 該基材的一側上。歐姆金屬接觸係包含在該n+氮化鎵層上 ,與該η-氮化鎵層隔離,並且一蕭特基金屬層係被包含在 該η-氮化鎵層上。要被整流的訊號通過該蕭特基金屬和歐 姆金屬接觸施加至該二極體。當該蕭特基金屬被沈積在該 η-氮化鎵層上時,一障壁潛能便形成在該η-氮化鎵在兩者 之間的表面上。該蕭特基金屬層有一功函數,其決定了該 障壁潛能~的高度。 使用可以降低蕭特基障壁潛能的金屬會導致低的Vf,但 也會導致不想要的在Irev上的增加。本發明的第二實施例藉 由在該二極體的表面上包含一溝槽結構來降低Irev。本結構 防止了該創新的二極體在逆向偏壓下電場的增加。因此, 蕭特基障壁潛能降低了,因而有助於降低“ev。 該溝槽結構較佳者形成在該η -氮化嫁層上,而且含有一 些在相鄰溝槽之間具有平台區域的互相平行、間距相等的 溝槽。每一個溝槽都有一絕緣層在其側壁和底表面上。一 連續的蕭特基金屬層係在該溝槽結構上,覆蓋該絕緣層和 溝槽之間的平台。或者,每一個溝槽的側壁和底表面可以 用金屬而非絕緣體來覆蓋,並且該金屬與該蕭特基金屬是 電氣隔離的。該平台區域選用的摻雜濃度和寬度可在該金 屬-半導體接觸下產生想要的電場重分配。 本發明之第三實施例提供一具有起因於電子穿隧過該障 壁潛能,而非越過它,之低Vf之氮化鎵穿隧二極體。本實 施例有一基材,其具有夾在該基材和一n-氮化鎵層之間的 n+氮化鎵層。一氮化鋁鎵(A1GaN)障壁層係被包含在該n — * 3 · 本紙張尺度適用中® s家標準(CNS) ^規格(21GX 297公愛)~ ---
裝 訂
564486
氮化鎵層之相對於該0+氮化鎵層的一側上。一歐姆接觸被 包含在該0+氮化嫁層上,並且一頂部接觸係被包含在該氮 化銘嫁層上。要被整流的訊號通過該歐姆和頂部接觸被施 加0
在該障壁層不同的厚度和鋁莫耳分量導致不同的順向和 逆向操作特性下,該障壁層的設計可將順向穿隧可能性最 大化。在一特定的厚度和鋁莫耳分量下,該二極體有低的 vf和低的Irev。使用較厚的障壁層和/或增加鋁莫耳濃度則 降低了 Vf並增加了 Irev。當厚度或莫耳分量進一步增加,該 裝 創新的二極體會呈現歐姆操作特性,或變成一傳統的蕭特 基二極體。 本發明之這些和其他進一步的特色和優點由如下的詳細 說明,與伴隨的圖示一起,對那些熟知技藝者來說會變得 顯而易見,其中·· 訂
線 圖示簡單說明 圖1係本發明之一氮化鎵蕭特基二極體實施例之剖面圖; 圖2係一圖表顯示一般金屬的功函數與其原子序的關係; 圖3係圖1中所示之二極體的能帶圖; 圖4係圖1之氮化鎵蕭特基二極體的另一個實施例之剖面 圖,具有一溝槽結構以降低逆向漏電電流; 圖5係本發明之一穿隧二極體實施例之剖面圖; 圖6係圖5之穿隧二極體具有22埃的厚度和30%的鋁莫耳 分量時之能帶圖; 圖7係一圖表顯示具有圖6之能帶圖之該創新的穿隧二極 -9- 本紙張尺度適用中國國家標準(CNS) A4规格(21〇x 297公釐) 564486 A7 B7 五、發明説叼(6 體之電壓/電流特性; 圖8係圖5之穿隧二極體具有30埃的厚度和30%的鋁莫耳 分量時之能帶圖; 圖9係一圖表顯示具有圖8之能帶圖之該創新的穿隧二極 體之電壓/電流特性; 圖10係圖5之穿隧二極體具有38埃的厚度和30 %的鋁莫 耳分量時·之能帶圖; 圖11係一圖表顯示具有圖10之能帶圖之該創新的穿隧二 極體之電壓/電流特性;及 圖12係本發明之一穿隧二極體實施例之剖面圖,具有一 溝槽結構以降低逆向漏電電流。 發明詳細說明 圖1顯示一根據本發明所製造的具有降低的金屬至半導 體障壁潛能的蕭特基二極體10。該創新的二極體係由皿族 氮化物基底材料系統或其他費米能階不固定在其表面能態 的材料系統所形成。m族氮化物是指那些由氮和週期表之 瓜族内的元素,通常是鋁(A1)、鎵(Ga)和銦(In)所形成的 半導體化合物。該詞也指三元(ternary)和特(tertiary) 化合物,例如氮化鋁鎵和氮化鋁銦鎵(AlInGaN)。對於該創 新的二極體來說較佳的材料是氮化鎵和氮化鋁鎵。 該創新的二極體10含有一基材11,其若不是藍寶石 (Al2〇3)、矽,就是碳化矽,且較佳的基材是一 4H多型結構 (polytype)的碳化矽。其他多型結構的碳化矽也可以被使 用,包含3C、6H和15R多型結構。二AlxGai N緩衝層12(其 -10 - 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公董)
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564486 A7 Γ____ Β7_ 五、發明説明(1 ) ~ —-— 個實施例中,一個或多個歐姆接觸可以被包含在沒有被Μ 氮化鎵層12所覆蓋的基材的表面上。這種實施例在基材並 非η型的情況下是特別適用的。一蕭特基金屬層16被包含在 該η-氮化鎵層13相對於該“氮化鎵層12的一側上。 金屬的功函數是將一個電子從金屬取出至一空軌域所需 要的能量,而材料之費米能階是有5〇%找到帶電載子的可能 性的能階半導體的電子親和力是空能階和傳導帶能階之 間的差異。 如上所述’氮化鎵的表面費米能階是不固定的,因此有 不同功函數的蕭特基金屬會導致不同的障壁潛能。障壁潛 能係利用公式估計: 障壁高度=功函數-半導體的電子親和力 圖2係一圖表20顯示各種金屬表面在空軌域内之金屬功 函數21與個別金屬原子序22之間的關係。應該選擇可以提 供低的蕭特基障壁潛能和低的Vf,但足夠高以使逆向電流 維持在低的程度,之金屬。例如,若被選擇的金屬具有與 半導體之電子親和力相當的功函數,障壁潛能會接近零。 這導致Vf接近零,同時也增加了二極體的逆向電流,使得 該二極體在本質上成為歐姆的並且無法提供整流的作用。 許多不同的金屬可以被使用以達到低的障壁高度,較佳 的金屬包括鈦(4.6功函數)23、鉻(4· 7) 24、鈮(4.3) 25 、錫(4.4) 26、鶴(4.6) 27和鈕(4·3) 28。鉻24導致可接 受的障壁潛能並且可藉由傳統的方法輕易地沈積。 圖3顯示該創新的簫特基障壁二極體由垂直線穿過該二 -12· 本紙張尺度適财S S家料(CNS) Α4麟(21G X 297公董)~~一 " 564486 A7 B7 五、發明説明 但是,如上所討論,降低障壁能階也會增加逆向漏電電 流。當該半導體相對於該金屬是正的時(逆向偏堡),該障 壁之半導體侧相對於該金屬側是低的,以至於電子能夠自 由流動通過該障壁的頂部無阻礙地到達該半導體。在該金 屬中存在的高於該障壁頂部的電子的數量與該半導體内的 電子總數比較起來通常是非常少的。結果導致非常低的電 流特性。β當電壓足夠大到可以切斷所有的電子流動時,電 流會飽和。障壁潛能越低,需要用來使電流飽和的逆向偏 屋就越低。 圖4顯示該創新的I化嫁蕭特基二極體的另一個實施 例,其利用降低障壁高度來處理增加的逆向電流的問題。 該一極體40與上面的實施例是相似的,具有一相似的基材 41、η +氮化鎵層42、和歐姆金屬接觸43a和43b,它們也可 以被包含在該基材的表面上。其也具有一 n-氮化鎵層44, 但是不同於此層是平面的,其具有在該n-氮化鎵層内包含 溝槽46的二維溝槽結構45。較佳的溝槽結構45包含互相平 行且間距相等並具有保留的平台區域49在相鄰的溝槽之間 的溝槽46。每一個溝槽46都有一絕緣層47來覆蓋其側壁46a 和底表面46b。許多不同的絕緣材料可以被使用,較佳的材 料是氮化矽。一蕭特基金屬層48被包含在整個溝槽結構45 上方,將該絕緣層夾在該蕭特基金屬和該溝槽側壁和底表 面之間,並覆蓋住該平台區域49。該平台區域提供該蕭特 基金屬和該η-氮化鎵層44之間的直接接觸區域。或者,每 一個溝槽可以用金屬代替絕緣鱧來覆蓋。在此實施例中, -14 - 本紙張尺度適用中國國家標準(CNS) Α4規格(2ι〇χ 297公釐) 564486 A7 B7 五、發明説明(12 至於二極鱧40,在該n +和η -層42和44被沈積在該基材上 之後’該η-氮化鎵層44藉由化學或離子研磨蝕刻來蝕刻以 形成該溝槽46。該η-氮化鎵層44為了歐姆金屬43a和43b進 一步被蝕刻至該n+氮化鎵層42的位置。該氮化矽絕緣層47 然後被沈積在整個溝槽結構45的上方,且將該氮化矽層在 該平台49的部分蝕刻掉。作為最後一個步驟,一連績的蕭 特基金屬3 48利用標準金屬化技術被形成在該溝槽結構45 的上方,覆蓋該絕緣層47和暴露出來的溝槽平台49。該歐 姆金屬也利用標準金屬化技術被形成在該n+氮化鎵層42上 。在溝槽係被金屬覆蓋的溝槽二極體的實施例中,該金屬 也可以利用標準金屬化技術來沈積。 穿隧二極體 圖5顯示該創新的二極體之另一個實施例50,其中Vf是低 的,因為在順向偏壓下電子穿隧通過該障壁區域。藉由穿 隧通過該障壁,電子不需要藉由傳統熱電子放射越過該障 壁的方式來通過該障壁。 與圖1和圖4中的實施例相同,該創新的穿隧二極體50係 由Π[族氮化物基底材料系統所形成,並且較佳者是由氮化 鎵、氮化鋁鎵、或氮化銦鎵形成,但是其他的材料系統也 可以作用。極性和非極性材料的合併可以被使用,包括極 性材料在極性材料上和極性材料在非極性材料上。這些材 料的一些例子包括複合極性氧化物,例如鈦酸錄、銳酸經 、鈦酸鉛錘,以及非複合/二元氧化物,例如氧化鋅。材料 可以被用在矽或任何矽/介電質堆疊,只要穿隧電流是許可 -16- 本紙張尺度適用中國國家標準(CNS) A4規格(210X 297公釐) 564486 A7 B7 五、發明説明( 的。 該二極體50具有一個若不是由藍寶石、碳化矽,就是由 矽所組成的基材51,其中基於上面所述的原因,碳化矽是 較佳的基材材料。該基材具有一n+氮化鎵層52在其上,和 一 η-氮化鎵層53在該n+氮化鎵層52相對於該基材51的一側 上。一氮化鋁鎵障壁層54被包含在該n-氮化鎵層相對於該 η+氮化嫁·模板層52的一側上。在該二極體5〇的邊緣上,該 障壁層54和η-氮化鎵層53被向下蝕刻至該η+氮化鎵層52處 ’並且歐姆金屬接觸55a和55b被包含在該層52上之蝕刻的 區域内。如前面的結構般,該歐姆接觸也可以被包含在該 基材的表面上。一金屬接觸層56係被包含在該氮化鋁鎵障 壁層54上相對於該η-氮化鎵層53之一側上。要被整流的訊 號通過該歐姆接觸55a和55b以及頂部金屬接觸56被施加。 該氮化鋁鎵障壁層54扮演穿隧障壁的角色。穿隧通過障 壁是一個量子力學的現象,並且層54的厚度和鋁莫耳分量 兩者皆可以被改變以最大化順向穿隧可能性。氮化鋁鎵一 氮化嫁材料系統具有内喪的壓電應力,其導致壓電偶極。 通常壓電應力和誘導電荷兩者會隨著障壁層的厚度而增加 。在順向偏壓時,來自該壓電電荷的電子加強了穿隨,因 為它們對傳導來說是有助益的,以至於可以發生穿隨的能 態數量增加了。因此該創新的穿隧二極體可以由其他顯出 此型式的壓電電荷的極性材料來製造。 但是’在逆向偏壓下該壓電電荷也容許逆向漏電電流的 增加。該障壁層的厚度越厚或增加的銘莫耳分量越多,會 -17- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐)
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564486 A7 B7
導致較低的Vf但是也導致增加的I rev。因此,對該障壁層之 一特疋的銘莫耳分量有一最大的障壁層厚度以達到低Vf和 相對低的Irev之操作特性。 圖6-11顯示該創新的二極體在具有30%的鋁之三種不同 的氮化鋁鎵障壁層厚度下之整流特性。每一個厚度都有一 能帶圖和一相應的電壓對電流作圖。 圖6顯呆該穿隧二極體50具有22埃厚的障壁層54之能帶 圖60。其在該障壁層63和該η-氮化鎵半導體層62之間的接 面處顯示出典型的障壁潛能61。該頂部接觸金屬64係在該 障壁層63相對於該半導體層之一側上。圖7顯示一圖表70 繪製出圖6中之二極體相應的電流對電壓特性。其具有一約 在0· 1伏特之Vf71和低逆向電流(Ifev)72。 圖8顯示相同的穿隧二極體具有30埃厚的障壁層之能帶 圖80。增加的障壁層厚度增加了障壁區域的壓電電荷,因 此增強了通過該障壁的穿隧。這降低了在該障壁層82和該 η-氮化鎵層83之間接面處之障壁潜能81。當施加順向偏壓 時電荷不需要克服該障壁,大幅地降低了二極體的Vf。但 是,該降低的障壁也容許了逆向漏電電流(Irev)的增加。圖 9是一圖表90顯示Vf91比圖7中的Vf要低。並且,92與圖 7中的相較是增加的。 圖10顯示相同的穿隧二極體具有38埃厚的障壁層之能帶 圖100。再一次,增加的障壁層厚度增加了障壁區域的壓電 電荷。在此厚度下,在該障壁層102和η-氮化鎵層之間的障 壁潛能101縮小接近該障壁層和η-氮化鎵層之間接面處,這 • 18 - 本紙張尺度適用中國國家標準(CNS) Α4規格(210X 297公釐)
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線 564486 A7 B7 五、發明説明(15 ) 導致對於順向和逆向偏壓兩者的電荷來說皆沒有障壁。圖 11顯示一相應的電流對電壓特性之圖表110。反應順向和逆 向偏壓,該二極體100經受了立即的順向和逆向電流,使得 該二極體本質上變為歐姆的。 在該障壁層中的鋁莫耳濃度不同的情況下,要達到圖6 至11中所示的特性時該層的厚度就會不同。 圖12顯#示具有一溝槽結構121以降低漏電電流之創新的 穿隧二極體120。如上面的蕭特基二極體40,該溝槽結構包 含一些互相平行、間距相等的溝槽122,但是在這個二極鱧 中,它們被蝕刻穿過該氮化鋁鎵障壁層123和該η-氮化鎵層 124,至該η+氮化鎵層125(ΑΡ氮化鎵模板)。在相鄰的溝槽 122之間有平台區域126。溝槽側壁和底表面具有一絕緣層 127,並有頂部蕭特基金屬層128覆蓋住整個溝槽結構121 。該溝槽結構與上面實施例中所述者以同樣的方式作用, 降低了逆向電流。這對具有對順向電壓的反應導致立即的 順向電流的障壁層厚度之穿隧二極體來說是有用的。藉由 使用溝槽結構,該二極體也可以有改善的逆向漏電電流。 也如同上述般,溝槽側壁和底表面也可以被一金屬覆蓋, 只要其與該蕭特基金屬層128隔離開來。 雖然本發明已參考特定的較佳實施樣態以相當程度的細 節被描述,其他變化型式是可能的。因此,附加的申請專 利範圍之精神和範圍不應該被限制在說明書内所述的較佳 實施樣態。 -19- 本紙張尺度適用中國國家標準(CNS) Α4規格(210 X 297公釐)
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Claims (1)
- :5^486;;: Ά繁丨091116362號專利申請案 g 中:文申請專利範圍替換本(92年8月)冗 六、申請專利範圍 1 · 一種Π族氮化物基底之二極體,包含·· 一 n+摻雜的氮化鎵層(42); 一在该n+氮化鎵層(42)上之η-摻雜的氮化鎵層(44); 一在該η·摻雜的氮化鎵層(44)上之蕭特基金屬層 (Schottky metal layer)(48),其具有一功函數,該n—氮 化鎵層(44)與該蕭特基金屬(48)形成一接面,該接面具 有一依賴於該蕭特基金屬(48)之該功函數的障壁潛能能 階(3 3) ’該障壁潛能能階是夠低的以允許該二極體以低 順向電壓操作;及 一在該η-層(44)之表面上的溝槽結構(45),該二極體 在逆向偏壓下經受一逆向漏電電流,該溝槽結構(45)降 低逆向漏電電流的量。 2·如申請專利範圍第1項之二極體,其中該η-摻雜的氮化 鎵層(44)具有一電子親和力,該障壁潛能(33)大概相當 於遠蕭特基金屬功函數減去該電子親和力。 3. 如申請專利範圍第丨項之二極體,其中該蕭特基金屬 (48)係選自含有鈦、鉻、銳、錫、鎢和組的族群的金屬 之一。 4. 如申請專利範圍第丨項之二極體,其中該溝槽結構(45) 含有複數個在相鄰的溝槽之間具有平台區域(49)的溝槽 (46),該溝槽(46)具有用一絕緣材料(47)塗覆之側^ I (46a)和一底表面(46b),該蕭特基金屬層(48)覆蓋該溝 j 槽(46)和平台區域(49),該絕緣材料(47)被夾在該蕭特 ί 基金屬層(48)和該側壁(46a)和底表面(46b)之間。 564486ABCD 5 ·如申請專利範圍第4項之二極體,i 士 ^ 其中該絕緣材料(47) 被一具有南功函數的金屬所取代。 6. —種穿隧二極體,包含·· 一 n+摻雜層(52); 一鄰接於該n+摻雜層(52)之n-摻雜層(53); 一鄰接於該η-摻雜層(53)之障壁層(54),在相對於該 η+層(52)的一側上;及 一在该障壁層(54)相對於該n-摻雜層(53)的一側上之 金屬層(56),該η-摻雜層(53)與該障壁層(5句形成一接 面,其具有一起因於電子在順向偏壓下穿隧通過該障 壁潛旎(8 1)而導致該二極體之開啟狀態電壓是低的之障 壁潛能(81)。 7·如申請專利範圍第6項之二極體,其中該障壁層(54)具 有壓電偶極,其藉由增強電子穿隧來降低該二極體之 開啟狀態電壓。 8 ·如申請專利範圍第6項之二極體,其中壓電偶極的數量 Ik著遠Ρ平壁層厚度的增加而增加,同時仍然允許穿随 電流。 9 ·如申請專利範圍第6項之二極體,進一步包含一溝槽結 構(121)在該障壁和n_摻雜層(54、53)内,該二極體在逆 向偏壓下經受一逆向漏電電流,該溝槽結構(12 1)降低 了該逆向漏電電流的量。 1〇·如申請專利範圍第6項之二極體,其中該溝槽結構(121) 在該障壁和該n —層(123、124)内包含複數個在相鄰的溝 564486 A8 B8 C8 D8 p六、申請專利範圍 — 槽(122)之間具有平台區域(126)的溝槽(122),每一個該 溝槽(122)具有用一絕緣材料(127)塗覆之側壁和一底表 面,該金屬層(128)覆蓋該溝槽(122)和平台區域(126), 該絕緣材料(127)被夾在該金屬層(126)和該側壁和底表 面之間。 -3 - 未紙彔尺度適用+國國家標準(CNS) A4規格(210 X 297公釐)
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2002
- 2002-06-06 US US10/163,944 patent/US6949774B2/en not_active Expired - Lifetime
- 2002-07-08 EP EP02798906A patent/EP1410445B1/en not_active Expired - Lifetime
- 2002-07-08 JP JP2003529535A patent/JP4874518B2/ja not_active Expired - Lifetime
- 2002-07-08 EP EP11154411.0A patent/EP2315256B1/en not_active Expired - Lifetime
- 2002-07-08 CN CN2007101422176A patent/CN101127368B/zh not_active Expired - Lifetime
- 2002-07-08 CA CA2454310A patent/CA2454310C/en not_active Expired - Lifetime
- 2002-07-08 KR KR1020047001033A patent/KR100917699B1/ko active IP Right Grant
- 2002-07-08 AT AT02798906T patent/ATE515803T1/de not_active IP Right Cessation
- 2002-07-08 WO PCT/US2002/021702 patent/WO2003026021A2/en active Application Filing
- 2002-07-08 CN CNB028179129A patent/CN100373634C/zh not_active Expired - Lifetime
- 2002-07-23 TW TW091116362A patent/TW564486B/zh not_active IP Right Cessation
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- 2003-05-20 US US10/445,130 patent/US7476956B2/en not_active Expired - Lifetime
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Also Published As
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US20040080010A1 (en) | 2004-04-29 |
JP2005503675A (ja) | 2005-02-03 |
EP2315256A2 (en) | 2011-04-27 |
US7476956B2 (en) | 2009-01-13 |
US7994512B2 (en) | 2011-08-09 |
CA2454310C (en) | 2015-07-07 |
US20030015708A1 (en) | 2003-01-23 |
KR100917699B1 (ko) | 2009-09-21 |
WO2003026021A2 (en) | 2003-03-27 |
WO2003026021A3 (en) | 2003-11-20 |
CN101127368B (zh) | 2010-08-25 |
JP2009016875A (ja) | 2009-01-22 |
US6949774B2 (en) | 2005-09-27 |
EP1410445B1 (en) | 2011-07-06 |
ATE515803T1 (de) | 2011-07-15 |
JP5032436B2 (ja) | 2012-09-26 |
EP1410445A2 (en) | 2004-04-21 |
EP2315256A3 (en) | 2011-06-29 |
JP4874518B2 (ja) | 2012-02-15 |
CN100373634C (zh) | 2008-03-05 |
CA2454310A1 (en) | 2003-03-27 |
CN1555581A (zh) | 2004-12-15 |
US20050242366A1 (en) | 2005-11-03 |
US20030062525A1 (en) | 2003-04-03 |
EP2315256B1 (en) | 2015-04-08 |
CN101127368A (zh) | 2008-02-20 |
KR20040030849A (ko) | 2004-04-09 |
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