JPS5727999A - Vapor phase growing method for gan - Google Patents
Vapor phase growing method for ganInfo
- Publication number
- JPS5727999A JPS5727999A JP9915080A JP9915080A JPS5727999A JP S5727999 A JPS5727999 A JP S5727999A JP 9915080 A JP9915080 A JP 9915080A JP 9915080 A JP9915080 A JP 9915080A JP S5727999 A JPS5727999 A JP S5727999A
- Authority
- JP
- Japan
- Prior art keywords
- gan
- substrates
- inlet
- temp
- grown
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9915080A JPS5727999A (en) | 1980-07-18 | 1980-07-18 | Vapor phase growing method for gan |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9915080A JPS5727999A (en) | 1980-07-18 | 1980-07-18 | Vapor phase growing method for gan |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5727999A true JPS5727999A (en) | 1982-02-15 |
Family
ID=14239653
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9915080A Pending JPS5727999A (en) | 1980-07-18 | 1980-07-18 | Vapor phase growing method for gan |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5727999A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6252255B1 (en) * | 1998-06-26 | 2001-06-26 | Sharp Kabushiki Kaisha | Crystal growth method for nitride semiconductor, nitride light emitting device, and method for producing the same |
KR100472630B1 (ko) * | 2002-08-12 | 2005-03-10 | 엘지전자 주식회사 | 복수의 질화물 기판 성장 장치 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5948793A (ja) * | 1982-09-13 | 1984-03-21 | 株式会社日立メデイコ | 画像の表示装置 |
-
1980
- 1980-07-18 JP JP9915080A patent/JPS5727999A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5948793A (ja) * | 1982-09-13 | 1984-03-21 | 株式会社日立メデイコ | 画像の表示装置 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6252255B1 (en) * | 1998-06-26 | 2001-06-26 | Sharp Kabushiki Kaisha | Crystal growth method for nitride semiconductor, nitride light emitting device, and method for producing the same |
US6685773B2 (en) | 1998-06-26 | 2004-02-03 | Sharp Kabushiki Kaisha | Crystal growth method for nitride semiconductor, nitride semiconductor light emitting device, and method for producing the same |
KR100472630B1 (ko) * | 2002-08-12 | 2005-03-10 | 엘지전자 주식회사 | 복수의 질화물 기판 성장 장치 |
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