JP2022513997A - 極紫外線マスク吸収体、及びその製造のためのプロセス - Google Patents
極紫外線マスク吸収体、及びその製造のためのプロセス Download PDFInfo
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- 239000000758 substrate Substances 0.000 claims abstract description 53
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims abstract description 43
- 229910052715 tantalum Inorganic materials 0.000 claims abstract description 38
- 238000005546 reactive sputtering Methods 0.000 claims abstract description 17
- 238000000151 deposition Methods 0.000 claims description 45
- 239000002250 absorbent Substances 0.000 claims description 38
- 230000002745 absorbent Effects 0.000 claims description 38
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 36
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 35
- 230000008021 deposition Effects 0.000 claims description 34
- 239000010409 thin film Substances 0.000 claims description 25
- 229910052757 nitrogen Inorganic materials 0.000 claims description 15
- 238000005240 physical vapour deposition Methods 0.000 claims description 15
- 238000004544 sputter deposition Methods 0.000 claims description 15
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 12
- 229910052786 argon Inorganic materials 0.000 claims description 6
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 5
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- 238000009751 slip forming Methods 0.000 claims 1
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- 238000001755 magnetron sputter deposition Methods 0.000 description 7
- 238000012545 processing Methods 0.000 description 7
- 239000010408 film Substances 0.000 description 6
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 5
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- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 3
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- 238000000231 atomic layer deposition Methods 0.000 description 2
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- 229910052799 carbon Inorganic materials 0.000 description 2
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- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- WOUPYJKFGJZQMH-UHFFFAOYSA-N [Nb].[Ru] Chemical compound [Nb].[Ru] WOUPYJKFGJZQMH-UHFFFAOYSA-N 0.000 description 1
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- 239000002241 glass-ceramic Substances 0.000 description 1
- 238000004050 hot filament vapor deposition Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000007737 ion beam deposition Methods 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- OUFGXIPMNQFUES-UHFFFAOYSA-N molybdenum ruthenium Chemical compound [Mo].[Ru] OUFGXIPMNQFUES-UHFFFAOYSA-N 0.000 description 1
- 229910000484 niobium oxide Inorganic materials 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- -1 oxides Substances 0.000 description 1
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- 229910001925 ruthenium oxide Inorganic materials 0.000 description 1
- AJTVWPGZWVJMEA-UHFFFAOYSA-N ruthenium tungsten Chemical compound [Ru].[Ru].[W].[W].[W] AJTVWPGZWVJMEA-UHFFFAOYSA-N 0.000 description 1
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 230000005469 synchrotron radiation Effects 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/54—Absorbers, e.g. of opaque materials
- G03F1/58—Absorbers, e.g. of opaque materials having two or more different absorber layers, e.g. stacked multilayer absorbers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0891—Ultraviolet [UV] mirrors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/22—Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/22—Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof
- G03F1/24—Reflection masks; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/52—Reflectors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/54—Absorbers, e.g. of opaque materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/7095—Materials, e.g. materials for housing, stage or other support having particular properties, e.g. weight, strength, conductivity, thermal expansion coefficient
- G03F7/70958—Optical materials or coatings, e.g. with particular transmittance, reflectance or anti-reflection properties
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
- G21K1/062—Devices having a multilayer structure
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- Environmental & Geological Engineering (AREA)
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- Spectroscopy & Molecular Physics (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Optics & Photonics (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Physical Vapour Deposition (AREA)
- Plasma & Fusion (AREA)
Abstract
Description
Claims (15)
- 極紫外線(EUV)マスクブランクを製造する方法であって、
基板上に反射層の多層スタックを形成することであって、当該反射層の多層スタックが、複数の反射層ペアを含む、反射層の多層スタックを形成することと、
前記反射層の多層スタック上にキャッピング層を形成することと、
窒化タンタル(TaN)を含む吸収層を形成するために、最初に堆積チャンバ内でタンタルの薄膜を堆積し、前記タンタルの薄膜を堆積した後に、次いで、前記堆積チャンバ内に窒素を流すことによって、前記キャッピング層上に吸収層を形成すること
を含む方法。 - 前記タンタルの薄膜が、約1nmから3nmの範囲の厚さを有する、請求項1に記載の方法。
- 前記堆積チャンバ内に窒素を流すことが、20℃から30℃の範囲の温度で行われる、請求項2に記載の方法。
- 10nmから83nmの範囲の厚さを有する窒化タンタル層を形成するために、最初に堆積チャンバ内で前記タンタルの薄膜を堆積し、前記タンタルの薄膜を堆積した後に、次いで、前記堆積チャンバ内に窒素を流すことを、繰り返すことをさらに含む、請求項3に記載の方法。
- 前記窒化タンタル層の厚さが、30nmから70nm若しくは40から60nmの範囲であるか、又は56nmである、請求項3に記載の方法。
- 前記窒化タンタル層を形成するために、最初に堆積チャンバ内で前記タンタルの薄膜を堆積し、前記タンタルの薄膜を堆積した後に、次いで、前記堆積チャンバ内に窒素を流すプロセスが、20から30回又は22から25回繰り返される、請求項5に記載の方法。
- タンタル金属の薄膜を堆積することが、前記堆積チャンバ内に窒素を流すことなく行われる、請求項1に記載の方法。
- 前記タンタルの薄膜が、物理的気相堆積チャンバ内で堆積される、請求項3に記載の方法。
- 前記タンタルの薄膜は、不活性ガスを用いた非反応性スパッタリングプロセスを使用して堆積される、請求項11に記載の方法。
- アルゴンプラズマを使用してタンタルターゲットをスパッタリングすることによって、1nmから2nmの範囲の厚さを有するタンタルの層を連続的に形成することと、前記タンタルターゲットのスパッタリングを終了し、プラズマが存在しない状態で前記物理的気相堆積チャンバ内に窒素ガスを流すことを含む、請求項11に記載の方法。
- 前記窒化タンタル層が、56nmの厚さを有する層において13.5nmのUV光に曝露された場合、2%未満の反射率を示す、請求項11に記載の方法。
- 前記窒化タンタル層が、アモルファスである、請求項14に記載の方法。
- 基板、
前記基板上の反射層の多層スタックであって、反射層ペアを含む複数の反射層を含む、反射層の多層スタック、
前記反射層の多層スタック上のキャッピング層、及び
非反応性スパッタリングによって形成されたアモルファスTaNを含む吸収層
を含む、極紫外線(EUV)マスクブランク。 - 前記吸収層が、56nmの厚さを有する吸収層において13.5nmのUV光に曝露された場合、2%未満の反射率を示す、請求項13に記載の極紫外線(EUV)マスクブランク。
- 吸収層が、56nmの厚さを有する吸収層において13.5nmのUV光に曝露された場合、1.9%未満、1.8%未満、又は1.6%未満の反射率を示す、請求項13に記載の極紫外線(EUV)マスクブランク。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
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US201862783504P | 2018-12-21 | 2018-12-21 | |
US62/783,504 | 2018-12-21 | ||
US16/720,520 US11194244B2 (en) | 2018-12-21 | 2019-12-19 | Extreme ultraviolet mask absorber and processes for manufacture |
US16/720,520 | 2019-12-19 | ||
PCT/US2019/067751 WO2020132391A1 (en) | 2018-12-21 | 2019-12-20 | Extreme ultraviolet mask absorber and processes for manufacture |
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JP2022513997A true JP2022513997A (ja) | 2022-02-09 |
JP7192127B2 JP7192127B2 (ja) | 2022-12-19 |
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US (1) | US11194244B2 (ja) |
JP (1) | JP7192127B2 (ja) |
KR (1) | KR20210092340A (ja) |
WO (1) | WO2020132391A1 (ja) |
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JP2015073013A (ja) * | 2013-10-03 | 2015-04-16 | 旭硝子株式会社 | Euvリソグラフィ用反射型マスクブランクの製造方法 |
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JP7192127B2 (ja) | 2022-12-19 |
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WO2020132391A1 (en) | 2020-06-25 |
US20200201167A1 (en) | 2020-06-25 |
US11194244B2 (en) | 2021-12-07 |
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