CN101180229A - 工件收纳装置及工件收纳方法 - Google Patents

工件收纳装置及工件收纳方法 Download PDF

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Publication number
CN101180229A
CN101180229A CNA2006800181072A CN200680018107A CN101180229A CN 101180229 A CN101180229 A CN 101180229A CN A2006800181072 A CNA2006800181072 A CN A2006800181072A CN 200680018107 A CN200680018107 A CN 200680018107A CN 101180229 A CN101180229 A CN 101180229A
Authority
CN
China
Prior art keywords
substrate
workpiece
buffer zone
side buffer
moving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2006800181072A
Other languages
English (en)
Chinese (zh)
Inventor
北泽保良
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Shinko Electric Co Ltd
Original Assignee
Shinko Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinko Electric Co Ltd filed Critical Shinko Electric Co Ltd
Publication of CN101180229A publication Critical patent/CN101180229A/zh
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Robotics (AREA)
CNA2006800181072A 2005-06-23 2006-06-20 工件收纳装置及工件收纳方法 Pending CN101180229A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP183446/2005 2005-06-23
JP2005183446A JP4941627B2 (ja) 2005-06-23 2005-06-23 ワーク収納装置

Publications (1)

Publication Number Publication Date
CN101180229A true CN101180229A (zh) 2008-05-14

Family

ID=37570436

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2006800181072A Pending CN101180229A (zh) 2005-06-23 2006-06-20 工件收纳装置及工件收纳方法

Country Status (5)

Country Link
JP (1) JP4941627B2 (ko)
KR (1) KR100934809B1 (ko)
CN (1) CN101180229A (ko)
TW (1) TW200738538A (ko)
WO (1) WO2006137407A1 (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108100666A (zh) * 2016-11-25 2018-06-01 日本电产三协株式会社 基板供给装置的控制方法及基板供给回收装置的控制方法
CN112969655A (zh) * 2018-11-14 2021-06-15 株式会社大福 物品搬运设备

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010070328A (ja) * 2008-09-19 2010-04-02 Sinfonia Technology Co Ltd 被搬送物仕分け装置及び被搬送物仕分け方法
JP5218000B2 (ja) 2008-12-12 2013-06-19 株式会社Ｉｈｉ 基板保管供給システム
JP5394969B2 (ja) * 2010-03-30 2014-01-22 大日本スクリーン製造株式会社 基板処理装置、基板処理システム、および基板処理方法
JP5348290B2 (ja) * 2012-07-17 2013-11-20 東京エレクトロン株式会社 基板処理装置、基板処理方法及び記憶媒体

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59227612A (ja) * 1983-06-07 1984-12-20 Matsushita Electric Ind Co Ltd 回路基板のバツフアストツカ−装置
JPH02207547A (ja) * 1989-02-07 1990-08-17 Tokyo Electron Ltd 処理方法
JPH07257756A (ja) * 1994-03-18 1995-10-09 Hitachi Metals Ltd 粉粒体の投入切り出し制御方法
JP4184486B2 (ja) * 1998-07-09 2008-11-19 大日本印刷株式会社 バッファ装置
JP3915415B2 (ja) * 2001-03-02 2007-05-16 株式会社ダイフク 板状体搬送装置
JP2004207279A (ja) * 2002-12-20 2004-07-22 Rorze Corp 薄板状物製造設備

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108100666A (zh) * 2016-11-25 2018-06-01 日本电产三协株式会社 基板供给装置的控制方法及基板供给回收装置的控制方法
CN112969655A (zh) * 2018-11-14 2021-06-15 株式会社大福 物品搬运设备
CN112969655B (zh) * 2018-11-14 2022-09-02 株式会社大福 物品搬运设备

Also Published As

Publication number Publication date
KR20080004620A (ko) 2008-01-09
WO2006137407A1 (ja) 2006-12-28
KR100934809B1 (ko) 2009-12-31
JP4941627B2 (ja) 2012-05-30
TW200738538A (en) 2007-10-16
JP2007001716A (ja) 2007-01-11

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Application publication date: 20080514