TW200738538A - Apparatus for receiving workpiece and method of receiving thereof - Google Patents

Apparatus for receiving workpiece and method of receiving thereof

Info

Publication number
TW200738538A
TW200738538A TW095122286A TW95122286A TW200738538A TW 200738538 A TW200738538 A TW 200738538A TW 095122286 A TW095122286 A TW 095122286A TW 95122286 A TW95122286 A TW 95122286A TW 200738538 A TW200738538 A TW 200738538A
Authority
TW
Taiwan
Prior art keywords
substrates
receiving
substrate
substrate cassette
order
Prior art date
Application number
TW095122286A
Other languages
Chinese (zh)
Inventor
Yasuyoshi Kitazawa
Original Assignee
Shinko Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinko Electric Co Ltd filed Critical Shinko Electric Co Ltd
Publication of TW200738538A publication Critical patent/TW200738538A/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Robotics (AREA)

Abstract

The invention is directed to a substrate receiving apparatus 1 for receiving a substrate that is a workpiece. The substrate receiving apparatus 1 includes a first substrate cassette 10 for receiving substrates from a top slot thereof downward in the order of the substrates that are conveyed in, a conveyor 3 for conveying out the substrates stored in the slots of the first substrate cassette 10 in the order of a bottom slot thereof upward, and a second substrate cassette 20 for storing the substrates carried in by the conveyor 3 from a top slot thereof downward in the order of the carried-in substrates. When the substrates are transferred from the first substrate cassette 10 to the second substrate cassette 20, the order of the substrates to be placed and stored in the slots of the second substrate cassette 20 is reversed. Accordingly, when the substrates are carried out from the second substrate cassette 20, the carrying out is conducted in the same order as that of the substrates conveyed in the first substrate cassette 10.
TW095122286A 2005-06-23 2006-06-21 Apparatus for receiving workpiece and method of receiving thereof TW200738538A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005183446A JP4941627B2 (en) 2005-06-23 2005-06-23 Work storage device

Publications (1)

Publication Number Publication Date
TW200738538A true TW200738538A (en) 2007-10-16

Family

ID=37570436

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095122286A TW200738538A (en) 2005-06-23 2006-06-21 Apparatus for receiving workpiece and method of receiving thereof

Country Status (5)

Country Link
JP (1) JP4941627B2 (en)
KR (1) KR100934809B1 (en)
CN (1) CN101180229A (en)
TW (1) TW200738538A (en)
WO (1) WO2006137407A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010070328A (en) * 2008-09-19 2010-04-02 Sinfonia Technology Co Ltd Sorting device of article to be conveyed and sorting method of the article to be conveyed
JP5218000B2 (en) 2008-12-12 2013-06-19 株式会社Ｉｈｉ Substrate storage and supply system
JP5394969B2 (en) * 2010-03-30 2014-01-22 大日本スクリーン製造株式会社 Substrate processing apparatus, substrate processing system, and substrate processing method
JP5348290B2 (en) * 2012-07-17 2013-11-20 東京エレクトロン株式会社 Substrate processing apparatus, substrate processing method, and storage medium
JP2018083700A (en) * 2016-11-25 2018-05-31 日本電産サンキョー株式会社 Method of controlling substrate supply device and method of controlling substrate supply/recovery device
JP7134071B2 (en) * 2018-11-14 2022-09-09 株式会社ダイフク Goods transport equipment

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59227612A (en) * 1983-06-07 1984-12-20 Matsushita Electric Ind Co Ltd Buffer stocker device for circuit board
JPH02207547A (en) * 1989-02-07 1990-08-17 Tokyo Electron Ltd Processing method
JPH07257756A (en) * 1994-03-18 1995-10-09 Hitachi Metals Ltd Control method for picking out powdery-granular material
JP4184486B2 (en) * 1998-07-09 2008-11-19 大日本印刷株式会社 Buffer device
JP3915415B2 (en) * 2001-03-02 2007-05-16 株式会社ダイフク Plate-shaped body transfer device
JP2004207279A (en) * 2002-12-20 2004-07-22 Rorze Corp Sheet-shaped object manufacturing facility

Also Published As

Publication number Publication date
KR20080004620A (en) 2008-01-09
WO2006137407A1 (en) 2006-12-28
KR100934809B1 (en) 2009-12-31
JP4941627B2 (en) 2012-05-30
CN101180229A (en) 2008-05-14
JP2007001716A (en) 2007-01-11

Similar Documents

Publication Publication Date Title
TW200642933A (en) Substrate carrying device
TW200738538A (en) Apparatus for receiving workpiece and method of receiving thereof
TW200614400A (en) Method of and apparatus for mounting an electronic part to a substrate
DE602004014420D1 (en) Apparatus for transporting substrate holders
MY146842A (en) Supply mechanism for the chuck of an integrated circuit dicing device
GB2433512A (en) Polar semiconductive hole transporting material
DE50309971D1 (en) Transport crate for transporting high quality, highly sensitive objects
TW200720271A (en) DNA-PK inhibitors
HK1144235A1 (en) Method for picking up semiconductor chips from a wafer table and mounting the removed semiconductor chips on a substrate
MX2007012248A (en) Tray stacking device.
TW200631123A (en) Fixation carrier, production method of fixation carrier, use method of fixation carrier, and substrate reception container
WO2007150039A3 (en) Method and apparatus for transporting substrates
EP2184233A3 (en) Apparatus for packaging articles and method for same
TW200603328A (en) Apparatus for carrying substrates and method of carrying substrates
WO2007001179A3 (en) Method and device for supplying and discharging carriers with electronic components
PL1595825T3 (en) Chain conveyor for transporting plate-like workpieces
PL1588971T3 (en) Method and apparatus for handling of printed products
WO2010071609A3 (en) System and processing of a substrate
ATE410539T1 (en) METHOD AND DEVICE FOR FEEDING LARGELY RECTANGULAR ITEMS OF LAUNDRY TO A CONVEYOR
WO2009023685A3 (en) Coated fasteners
WO2008008834A3 (en) Method and apparatus for vertical wafer transport, buffer and storage
ATE554033T1 (en) FEEDING STATION FOR ITEMS IN AUTOMATIC PALLETIZING DEVICES
ATE469748T1 (en) FEEDING DEVICE FOR FLAT SUBSTRATES, INJECTION MOLDING APPARATUS AND METHOD FOR FEEDING FLAT SUBSTRATES
TW200517318A (en) Method and apparatus for transporting articles
MX2019011149A (en) Printing apparatus.