JP3992681B2 - 超高精度供給装置 - Google Patents
超高精度供給装置 Download PDFInfo
- Publication number
- JP3992681B2 JP3992681B2 JP2003503396A JP2003503396A JP3992681B2 JP 3992681 B2 JP3992681 B2 JP 3992681B2 JP 2003503396 A JP2003503396 A JP 2003503396A JP 2003503396 A JP2003503396 A JP 2003503396A JP 3992681 B2 JP3992681 B2 JP 3992681B2
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- Prior art keywords
- hinge
- base
- arc
- hinge member
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000006073 displacement reaction Methods 0.000 claims description 19
- 239000000463 material Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q16/00—Equipment for precise positioning of tool or work into particular locations not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/50—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism
- B23Q1/54—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism two rotating pairs only
- B23Q1/5406—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism two rotating pairs only a single rotating pair followed perpendicularly by a single rotating pair
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/48—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs
- B23Q1/4852—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs a single sliding pair followed perpendicularly by a single rotating pair
- B23Q1/4866—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs a single sliding pair followed perpendicularly by a single rotating pair followed perpendicularly by a single sliding pair
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
- B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
- B23Q1/626—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair followed perpendicularly by a single sliding pair
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S248/00—Supports
- Y10S248/913—Two axis article engaging means, e.g. x - y device
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/20—Control lever and linkage systems
- Y10T74/20207—Multiple controlling elements for single controlled element
- Y10T74/20341—Power elements as controlling elements
- Y10T74/20354—Planar surface with orthogonal movement only
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
Claims (4)
- 超高精度供給装置であって、
ベースと前記ベースの上部に移動可能に配置される動作ステージとの間に、前記ベースに平行に配置されたアクチュエータと、
円弧ヒンジを有し、一端が前記アクチュエータの一端に固定され、他端が前記ベースに固定された第1ヒンジ部材と、
円弧ヒンジを有し、一端が前記アクチュエータの他端に固定された第2ヒンジ部材と、
前記第2ヒンジ部材が貫通して嵌入される穴が形成された本体と、前記本体の上部に形成された第1円弧ヒンジ、および前記本体の下部に形成された第2円弧ヒンジを有し、上端が前記動作ステージに固定された第3ヒンジ部材と、
ノッチ・ヒンジを有し、前記第2ヒンジ部材の他端および前記第3ヒンジ部材の下端が固定され、前記ベースに固定されたレバー部材と
を備え、
前記アクチュエータの変位が、前記第1ヒンジ部材の前記円弧ヒンジ、前記第2ヒンジ部材の前記円弧ヒンジ、並びに前記第1円弧ヒンジおよび前記第2円弧ヒンジのたわみによって前記動作ステージに伝達される
超高精度供給装置。 - 前記第1ヒンジ部材は、前記第1ヒンジ部材と前記ベースとの間に設置された固定ブロックによって前記ベースに固定され、
前記第2ヒンジ部材は、前記第2ヒンジ部材の前記円弧ヒンジが前記ベースに平行な方向である平行方向に沿って配置されるべく、前記レバー部材に固定され、
前記第3ヒンジ部材は、前記第1円弧ヒンジおよび前記第2円弧ヒンジが前記ベースに垂直な方向である垂直方向に沿って配置されるべく、前記レバー部材に固定され、
前記ノッチ・ヒンジは、前記第2ヒンジ部材の前記円弧ヒンジの前記平行方向に延長する直線から所定距離だけ離れており、前記第1円弧ヒンジおよび前記第2円弧ヒンジの前記垂直方向に延長する直線から所定距離だけ離れている
請求項1に記載の装置。 - 前記ベースに垂直な方向である垂直方向における前記第2ヒンジ部材の前記円弧ヒンジの中心を通り前記ベースに平行な方向である平行方向に延長する直線と、前記垂直方向における前記ノッチ・ヒンジの中心との間の垂直距離をaとし、前記平行方向における前記第1円弧ヒンジおよび前記第2円弧ヒンジの中心を通り前記垂直方向に延長する直線と、前記平行方向における前記ノッチ・ヒンジの中心との間の水平距離をbとした場合、b=2aを満たすように構成される
請求項2に記載の装置。 - 前記レバー部材は、
前記第2ヒンジ部材の他端が固定されて前記ベースに垂直な垂直部分、および前記第3ヒンジ部材の下端が固定されて前記ベースに平行な水平部分を含む第1レバーと、
前記ノッチ・ヒンジを介して前記第1レバーの前記ベースに平行な方向に接続され、前記垂直部分に垂直に配置されて前記ベースに固定された第2レバーと
を有する請求項1に記載の装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2001-0028892A KR100396021B1 (ko) | 2001-05-25 | 2001-05-25 | 초정밀 이송장치 |
PCT/KR2001/001339 WO2002100591A1 (en) | 2001-05-25 | 2001-08-06 | Ultra-precision feeding apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004528190A JP2004528190A (ja) | 2004-09-16 |
JP3992681B2 true JP3992681B2 (ja) | 2007-10-17 |
Family
ID=19709932
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003503396A Expired - Fee Related JP3992681B2 (ja) | 2001-05-25 | 2001-08-06 | 超高精度供給装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US6860020B2 (ja) |
JP (1) | JP3992681B2 (ja) |
KR (1) | KR100396021B1 (ja) |
WO (1) | WO2002100591A1 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7126674B2 (en) * | 2004-06-14 | 2006-10-24 | Asml Netherlands B.V. | Positioning device and device manufacturing method |
JP2006170971A (ja) * | 2004-12-10 | 2006-06-29 | Korea Electronics Telecommun | 駆動ヘッド及びそれを備えた個人用原子顕微鏡 |
US7239107B1 (en) * | 2006-02-24 | 2007-07-03 | The Board Of Trustees Of The University Of Illinois | Flexure stage |
US8069748B1 (en) | 2007-05-24 | 2011-12-06 | Prefix Corporation | XY linear slide mechanism |
US8310128B2 (en) * | 2008-05-07 | 2012-11-13 | The Board Of Trustees Of The University Of Illinois | High precision silicon-on-insulator MEMS parallel kinematic stages |
DE202008008821U1 (de) * | 2008-08-28 | 2010-02-11 | STABILA Messgeräte Gustav Ullrich GmbH | Laservorrichtung |
US20100275717A1 (en) * | 2009-04-30 | 2010-11-04 | Benoit Poyet | Precision positioning device |
CN103824601A (zh) * | 2014-02-24 | 2014-05-28 | 中国科学院光电技术研究所 | 一种分体式带行程放大功能的柔性铰链 |
CN103990998B (zh) * | 2014-05-20 | 2017-01-25 | 广东工业大学 | 基于应力刚化原理的刚度频率可调二维微动平台 |
US9874435B2 (en) | 2014-05-22 | 2018-01-23 | Samsung Electronics Co., Ltd. | Measuring system and measuring method |
CN108418464B (zh) * | 2018-05-14 | 2024-01-19 | 西安科技大学 | 一种精密缩小柔性微动*** |
JP7501189B2 (ja) | 2020-07-20 | 2024-06-18 | ブラザー工業株式会社 | 制御装置、工作機械、制御方法、及び制御プログラム |
KR102566361B1 (ko) | 2021-07-23 | 2023-08-11 | (주)신일팜글라스 | 정밀 이송장치 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5812335A (ja) * | 1981-07-15 | 1983-01-24 | Hitachi Ltd | 微,粗動テ−ブル |
JPS5972727A (ja) | 1982-10-19 | 1984-04-24 | Matsushita Electric Ind Co Ltd | 位置合わせ用テ−ブル |
JPH01244514A (ja) * | 1988-03-26 | 1989-09-28 | Omron Tateisi Electron Co | 可動体の位置決め制御方法 |
JPH06204107A (ja) * | 1992-12-25 | 1994-07-22 | Canon Inc | 位置決めステージ装置 |
JPH0786377A (ja) * | 1993-09-10 | 1995-03-31 | Canon Inc | 位置決め装置 |
JPH08190430A (ja) * | 1995-01-12 | 1996-07-23 | Matsushita Electric Ind Co Ltd | 位置決めテーブル |
JP2967264B2 (ja) | 1996-03-25 | 1999-10-25 | セイコー精機株式会社 | 超精密位置決め装置 |
JP3772315B2 (ja) * | 1996-03-29 | 2006-05-10 | 太平洋セメント株式会社 | 圧電ユニット及びそれを用いた移動テーブル |
JPH09300162A (ja) * | 1996-05-08 | 1997-11-25 | Olympus Optical Co Ltd | 精密駆動機構 |
JPH1177473A (ja) * | 1997-09-03 | 1999-03-23 | Nikon Corp | 送り装置 |
DE19962247A1 (de) * | 1999-12-22 | 2001-09-20 | Agie Sa | Bewegungsübertragungsvorrichtung |
US6434845B1 (en) * | 2000-09-05 | 2002-08-20 | University Of North Carolina At Charlotte | Dual-axis static and dynamic force characterization device |
US6817104B2 (en) * | 2002-05-15 | 2004-11-16 | Sumitomo Heavy Industries, Ltd. | X-Y stage apparatus |
KR100497729B1 (ko) * | 2003-02-21 | 2005-06-28 | 한국과학기술원 | 유연기구 메커니즘을 이용한 3축 직선운동 스테이지 |
-
2001
- 2001-05-25 KR KR10-2001-0028892A patent/KR100396021B1/ko not_active IP Right Cessation
- 2001-08-06 US US10/478,715 patent/US6860020B2/en not_active Expired - Lifetime
- 2001-08-06 JP JP2003503396A patent/JP3992681B2/ja not_active Expired - Fee Related
- 2001-08-06 WO PCT/KR2001/001339 patent/WO2002100591A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2002100591A1 (en) | 2002-12-19 |
US6860020B2 (en) | 2005-03-01 |
JP2004528190A (ja) | 2004-09-16 |
KR100396021B1 (ko) | 2003-08-27 |
US20040149067A1 (en) | 2004-08-05 |
KR20020090396A (ko) | 2002-12-05 |
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