JP2016063111A - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
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- JP2016063111A JP2016063111A JP2014190929A JP2014190929A JP2016063111A JP 2016063111 A JP2016063111 A JP 2016063111A JP 2014190929 A JP2014190929 A JP 2014190929A JP 2014190929 A JP2014190929 A JP 2014190929A JP 2016063111 A JP2016063111 A JP 2016063111A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 81
- 238000004519 manufacturing process Methods 0.000 title claims description 47
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 89
- 239000001301 oxygen Substances 0.000 claims abstract description 89
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 89
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 42
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 23
- 229910052787 antimony Inorganic materials 0.000 claims abstract description 20
- 229910052785 arsenic Inorganic materials 0.000 claims abstract description 20
- 229910052698 phosphorus Inorganic materials 0.000 claims abstract description 20
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims abstract description 18
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims abstract description 18
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims abstract description 18
- 239000011574 phosphorus Substances 0.000 claims abstract description 18
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 15
- 229910052684 Cerium Inorganic materials 0.000 claims abstract description 14
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 claims abstract description 14
- 229910052691 Erbium Inorganic materials 0.000 claims abstract description 14
- 229910052693 Europium Inorganic materials 0.000 claims abstract description 14
- 229910052688 Gadolinium Inorganic materials 0.000 claims abstract description 14
- 229910052689 Holmium Inorganic materials 0.000 claims abstract description 14
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 14
- 229910052765 Lutetium Inorganic materials 0.000 claims abstract description 14
- 229910052779 Neodymium Inorganic materials 0.000 claims abstract description 14
- 229910052777 Praseodymium Inorganic materials 0.000 claims abstract description 14
- 229910052772 Samarium Inorganic materials 0.000 claims abstract description 14
- 229910052771 Terbium Inorganic materials 0.000 claims abstract description 14
- 229910052775 Thulium Inorganic materials 0.000 claims abstract description 14
- 229910052769 Ytterbium Inorganic materials 0.000 claims abstract description 14
- 229910052805 deuterium Inorganic materials 0.000 claims abstract description 14
- 239000001257 hydrogen Substances 0.000 claims abstract description 14
- 229910052747 lanthanoid Inorganic materials 0.000 claims abstract description 14
- 150000002602 lanthanoids Chemical class 0.000 claims abstract description 14
- 229910052746 lanthanum Inorganic materials 0.000 claims abstract description 14
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims abstract description 14
- 229910052706 scandium Inorganic materials 0.000 claims abstract description 14
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 claims abstract description 14
- 229910052727 yttrium Inorganic materials 0.000 claims abstract description 14
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims abstract description 14
- 229910052692 Dysprosium Inorganic materials 0.000 claims abstract description 13
- 229910052731 fluorine Inorganic materials 0.000 claims abstract description 13
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000011737 fluorine Substances 0.000 claims abstract description 12
- 229910052799 carbon Inorganic materials 0.000 claims description 61
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 59
- 238000010438 heat treatment Methods 0.000 claims description 28
- 230000003647 oxidation Effects 0.000 claims description 25
- 238000007254 oxidation reaction Methods 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 23
- 230000015572 biosynthetic process Effects 0.000 claims description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 8
- 229910002808 Si–O–Si Inorganic materials 0.000 claims description 4
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- 238000000151 deposition Methods 0.000 claims 1
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- 229910010271 silicon carbide Inorganic materials 0.000 description 118
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 110
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- 239000012535 impurity Substances 0.000 description 38
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 20
- 229910052710 silicon Inorganic materials 0.000 description 19
- 239000010703 silicon Substances 0.000 description 19
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 16
- 230000004888 barrier function Effects 0.000 description 12
- 229910052782 aluminium Inorganic materials 0.000 description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
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- 238000006243 chemical reaction Methods 0.000 description 4
- 238000005468 ion implantation Methods 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 3
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 3
- 239000000969 carrier Substances 0.000 description 3
- 230000007812 deficiency Effects 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 239000011229 interlayer Substances 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 125000004430 oxygen atom Chemical group O* 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 150000001721 carbon Chemical class 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 125000001153 fluoro group Chemical group F* 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
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- 229910052786 argon Inorganic materials 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010893 electron trap Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
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Classifications
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- H01L29/7395—Vertical transistors, e.g. vertical IGBT
- H01L29/7396—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions
- H01L29/7397—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions and a gate structure lying on a slanted or vertical surface or formed in a groove, e.g. trench gate IGBT
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Abstract
【解決手段】実施形態の半導体装置は、SiC層と、ゲート電極と、SiC層とゲート電極との間に設けられるゲート絶縁膜と、SiC層とゲート絶縁膜との間に設けられ、N(窒素)、P(リン)、As(ヒ素)、Sb(アンチモン)、Sc(スカンジウム)、Y(イットリウム)、La(ランタン)、ランタノイド(Ce、Pr、Nd、Pm、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、Yb、Lu)、H(水素)、D(重水素)、F(フッ素)の群から選ばれる少なくとも一つの元素を含有する第1の領域と、SiC層の第1の領域側に設けられ、元素の濃度よりも高い酸素濃度を有する第2の領域と、を備える。
【選択図】図1
Description
本実施形態の半導体装置は、SiC層と、ゲート電極と、SiC層とゲート電極との間に設けられるゲート絶縁膜と、SiC層とゲート絶縁膜との間に設けられ、N(窒素)、P(リン)、As(ヒ素)、Sb(アンチモン)、Sc(スカンジウム)、Y(イットリウム)、La(ランタン)、ランタノイド(Ce、Pr、Nd、Pm、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、Yb、Lu)、H(水素)、D(重水素)、F(フッ素)の群から選ばれる少なくとも一つの元素を含有する第1の領域(界面領域)と、SiC層の第1の領域側に設けられ、上記元素の濃度よりも高い酸素濃度を有する第2の領域(酸素領域)と、を備える。
本実施形態の半導体装置の製造方法は、酸素領域を形成する前に、SiC層の表面に膜厚5nm以下の熱酸化膜を形成しないこと以外は、第1の実施形態と同様である。したがって、第1の実施形態と重複する内容については、記述を省略する。
本実施形態の半導体装置の製造方法は、SiC層を熱酸化してゲート絶縁膜を形成し、ゲート絶縁膜を形成した後に、酸素を含有する雰囲気中、SiCの酸化量が1nm未満となる条件で第1の熱処理を行い、SiC層に酸素を含む酸素領域を形成し、酸素領域を形成した後に、酸素領域表面に、N(窒素)、P(リン)、As(ヒ素)、Sb(アンチモン)、Sc(スカンジウム)、Y(イットリウム)、La(ランタン)、ランタノイド(Ce、Pr、Nd、Pm、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、Yb、Lu)、H(水素)、D(重水素)、F(フッ素)の群から選ばれる少なくとも一つの元素を含有する界面領域を形成し、ゲート絶縁膜上にゲート電極を形成する。酸素領域形成前に、ゲート絶縁膜を熱酸化により形成すること以外は、第1の実施形態と同様である。したがって、第1の実施形態と重複する内容については、記述を省略する。
本実施形態の半導体装置は、トレンチゲート型のMISFETであること以外は、第1の実施形態と同様である。したがって、第1の実施形態と重複する内容については記述を省略する。
本実施形態の半導体装置は、MISFETではなく、IGBTであること以外は、第1の実施形態と同様である。したがって、第1の実施形態と重複する内容については記述を省略する。
16 pウェル領域(SiC層)
28 ゲート絶縁膜
30 ゲート電極
40 界面領域(第1の領域)
60 酸素領域(第2の領域)
62 熱酸化膜
100 MISFET(半導体装置)
200 MISFET(半導体装置)
300 IGBT(半導体装置)
Claims (19)
- SiC層と、
ゲート電極と、
前記SiC層と前記ゲート電極との間に設けられるゲート絶縁膜と、
前記SiC層と前記ゲート絶縁膜との間に設けられ、N(窒素)、P(リン)、As(ヒ素)、Sb(アンチモン)、Sc(スカンジウム)、Y(イットリウム)、La(ランタン)、ランタノイド(Ce、Pr、Nd、Pm、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、Yb、Lu)、H(水素)、D(重水素)、F(フッ素)の群から選ばれる少なくとも一つの元素を含有する第1の領域と、
前記SiC層の前記第1の領域側に設けられ、前記元素の濃度よりも高い酸素濃度を有する第2の領域と、
を備える半導体装置。 - 前記SiC層はp型である請求項1記載の半導体装置。
- 前記第1の領域と前記第2の領域の境界と、前記第1の領域の前記元素の濃度のピーク位置との距離は5nm以下である請求項1又は請求項2記載の半導体装置。
- 前記第2の領域の酸素濃度が1×1016cm−3以上1×1021cm−3以下である請求項1乃至請求項3いずれか一項記載の半導体装置。
- 前記第2の領域にSi−O−Si結合がある請求項1乃至請求項4いずれか一項記載の半導体装置。
- 前記第2の領域中の酸素がSiC格子の炭素を置換している請求項1乃至請求項4いずれか一項記載の半導体装置。
- 前記第1の領域の前記元素のピーク濃度が1×1018cm−3以上1×1023cm−3以下である請求項1乃至請求項6いずれか一項記載の半導体装置。
- 前記ゲート絶縁膜はシリコン酸化膜である請求項1乃至請求項7いずれか一項記載の半導体装置。
- 酸素を含有する雰囲気中、SiCの酸化量が1nm未満となる条件で第1の熱処理を行い、SiC層に酸素を含む第2の領域を形成し、
前記第2の領域を形成した後に、前記第2の領域上に、N(窒素)、P(リン)、As(ヒ素)、Sb(アンチモン)、Sc(スカンジウム)、Y(イットリウム)、La(ランタン)、ランタノイド(Ce、Pr、Nd、Pm、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、Yb、Lu)、H(水素)、D(重水素)、F(フッ素)の群から選ばれる少なくとも一つの元素を含有する第1の領域を形成し、
前記SiC層上にゲート絶縁膜を堆積し、
前記ゲート絶縁膜上にゲート電極を形成する半導体装置の製造方法。 - 前記第2の領域を形成する前に、前記SiC層に膜厚5nm以下の熱酸化膜を、更に形成する請求項9記載の半導体装置の製造方法。
- 前記SiC層はp型である請求項9又は請求項10記載の半導体装置の製造方法。
- 前記第1の領域の形成は、前記SiC層の窒化による請求項9乃至請求項11いずれか一項記載の半導体装置の製造方法。
- 前記第1の熱処理の温度は900℃以下である請求項9乃至請求項12いずれか一項記載の半導体装置の製造方法。
- 前記第1の領域の形成の後に、酸素を含有する雰囲気中、SiCの酸化量が1nm未満となる条件で第2の熱処理を、更に行う請求項9乃至請求項13いずれか一項記載の半導体装置の製造方法。
- SiC層を熱酸化してゲート絶縁膜を形成し、
前記ゲート絶縁膜を形成した後に、酸素を含有する雰囲気中、SiCの酸化量が1nm未満となる条件で第1の熱処理を行い、前記SiC層に酸素を含む第2の領域を形成し、
前記第2の領域を形成した後に、前記ゲート絶縁膜と前記第2の領域の間に、N(窒素)、P(リン)、As(ヒ素)、Sb(アンチモン)、Sc(スカンジウム)、Y(イットリウム)、La(ランタン)、ランタノイド(Ce、Pr、Nd、Pm、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、Yb、Lu)、H(水素)、D(重水素)、F(フッ素)の群から選ばれる少なくとも一つの元素を含有する第1の領域を形成し、
前記ゲート絶縁膜上にゲート電極を形成する半導体装置の製造方法。 - 前記SiC層はp型である請求項15記載の半導体装置の製造方法。
- 前記第1の領域の形成は、前記SiC層の窒化による請求項15又は請求項16記載の半導体装置の製造方法。
- 前記第1の熱処理の温度は900℃以下である請求項15乃至請求項17いずれか一項記載の半導体装置の製造方法。
- 前記第1の領域の形成の後に、酸素を含有する雰囲気中、SiCの酸化量が1nm未満となる条件で第2の熱処理を、更に行う15乃至請求項18いずれか一項記載の半導体装置の製造方法。
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