CN102458800B - 压印用模具及其制造方法 - Google Patents
压印用模具及其制造方法 Download PDFInfo
- Publication number
- CN102458800B CN102458800B CN200980159699.3A CN200980159699A CN102458800B CN 102458800 B CN102458800 B CN 102458800B CN 200980159699 A CN200980159699 A CN 200980159699A CN 102458800 B CN102458800 B CN 102458800B
- Authority
- CN
- China
- Prior art keywords
- superficial layer
- mould
- side chain
- micro pattern
- imprint mold
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
- B29C33/3842—Manufacturing moulds, e.g. shaping the mould surface by machining
- B29C33/3857—Manufacturing moulds, e.g. shaping the mould surface by machining by making impressions of one or more parts of models, e.g. shaped articles and including possible subsequent assembly of the parts
- B29C33/3878—Manufacturing moulds, e.g. shaping the mould surface by machining by making impressions of one or more parts of models, e.g. shaped articles and including possible subsequent assembly of the parts used as masters for making successive impressions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L33/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides or nitriles thereof; Compositions of derivatives of such polymers
- C08L33/04—Homopolymers or copolymers of esters
- C08L33/06—Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, which oxygen atoms are present only as part of the carboxyl radical
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Mathematical Physics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009-137553 | 2009-06-08 | ||
JP2009137553 | 2009-06-08 | ||
PCT/JP2009/068383 WO2010143321A1 (ja) | 2009-06-08 | 2009-10-27 | インプリント用モールドおよびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102458800A CN102458800A (zh) | 2012-05-16 |
CN102458800B true CN102458800B (zh) | 2014-04-23 |
Family
ID=43308585
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200980159699.3A Expired - Fee Related CN102458800B (zh) | 2009-06-08 | 2009-10-27 | 压印用模具及其制造方法 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP5329661B2 (ko) |
KR (1) | KR101355036B1 (ko) |
CN (1) | CN102458800B (ko) |
TW (1) | TWI461277B (ko) |
WO (1) | WO2010143321A1 (ko) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5463072B2 (ja) * | 2009-05-12 | 2014-04-09 | ニッタ株式会社 | 微細構造の製造方法 |
JP5463087B2 (ja) * | 2009-06-22 | 2014-04-09 | ニッタ株式会社 | 微細構造の製造方法 |
JP2012143915A (ja) * | 2011-01-10 | 2012-08-02 | Scivax Kk | インプリント用型 |
JP6304735B2 (ja) * | 2013-05-10 | 2018-04-04 | ニッタ株式会社 | インプリント用レジスト材およびそれを用いた微細構造の製造方法 |
JP7245973B2 (ja) * | 2019-02-04 | 2023-03-27 | パナソニックIpマネジメント株式会社 | パターンの形成方法および装置 |
CN110316694B (zh) * | 2019-07-09 | 2022-03-15 | 嘉兴学院 | 一种具有微纳米形态模具的加工方法 |
CN113189840A (zh) * | 2021-04-16 | 2021-07-30 | 深圳先进技术研究院 | 微纳结构制作方法及微纳结构制作装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1917999A (zh) * | 2004-02-04 | 2007-02-21 | 住友重机械工业株式会社 | 加压成形装置、模具及加压成形方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5139676B2 (ko) * | 1972-09-01 | 1976-10-29 | ||
JPS63202685A (ja) * | 1987-02-18 | 1988-08-22 | Nitto Electric Ind Co Ltd | アクリル系剥離剤 |
JP2904786B2 (ja) * | 1987-07-17 | 1999-06-14 | 大日本印刷株式会社 | 熱離型剤 |
TW440519B (en) * | 1999-04-23 | 2001-06-16 | Dainippon Printing Co Ltd | Shaped sheet and method for producing the same |
JP4394248B2 (ja) * | 1999-04-23 | 2010-01-06 | 大日本印刷株式会社 | 賦型シート及びその製造方法 |
KR100568581B1 (ko) * | 2003-04-14 | 2006-04-07 | 주식회사 미뉴타텍 | 미세패턴 형성 몰드용 조성물 및 이로부터 제작된 몰드 |
TWI280159B (en) * | 2005-03-29 | 2007-05-01 | Li Bing Huan | Method for fabricating nano-adhesive |
JP2009001002A (ja) * | 2007-05-24 | 2009-01-08 | Univ Waseda | モールド、その製造方法および転写微細パターンを有する基材の製造方法 |
JP5002422B2 (ja) * | 2007-11-14 | 2012-08-15 | 株式会社日立ハイテクノロジーズ | ナノプリント用樹脂スタンパ |
-
2009
- 2009-10-27 WO PCT/JP2009/068383 patent/WO2010143321A1/ja active Application Filing
- 2009-10-27 CN CN200980159699.3A patent/CN102458800B/zh not_active Expired - Fee Related
- 2009-10-27 KR KR1020117028874A patent/KR101355036B1/ko active IP Right Grant
- 2009-10-27 JP JP2011518202A patent/JP5329661B2/ja active Active
- 2009-11-10 TW TW098138018A patent/TWI461277B/zh active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1917999A (zh) * | 2004-02-04 | 2007-02-21 | 住友重机械工业株式会社 | 加压成形装置、模具及加压成形方法 |
Non-Patent Citations (2)
Title |
---|
JP特开2001-1402A 2001.01.09 |
JP特开2006-27294A 2006.10.12 |
Also Published As
Publication number | Publication date |
---|---|
TWI461277B (zh) | 2014-11-21 |
WO2010143321A1 (ja) | 2010-12-16 |
JP5329661B2 (ja) | 2013-10-30 |
JPWO2010143321A1 (ja) | 2012-11-22 |
TW201043427A (en) | 2010-12-16 |
KR20120014022A (ko) | 2012-02-15 |
KR101355036B1 (ko) | 2014-01-24 |
CN102458800A (zh) | 2012-05-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140423 Termination date: 20191027 |