CN101382580B - 探测器装置以及探测方法 - Google Patents

探测器装置以及探测方法 Download PDF

Info

Publication number
CN101382580B
CN101382580B CN2008102118163A CN200810211816A CN101382580B CN 101382580 B CN101382580 B CN 101382580B CN 2008102118163 A CN2008102118163 A CN 2008102118163A CN 200810211816 A CN200810211816 A CN 200810211816A CN 101382580 B CN101382580 B CN 101382580B
Authority
CN
China
Prior art keywords
measuring head
probe
maintaining part
detector
main body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN2008102118163A
Other languages
English (en)
Chinese (zh)
Other versions
CN101382580A (zh
Inventor
雨宫大作
雨宫浩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of CN101382580A publication Critical patent/CN101382580A/zh
Application granted granted Critical
Publication of CN101382580B publication Critical patent/CN101382580B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
CN2008102118163A 2007-09-03 2008-09-03 探测器装置以及探测方法 Active CN101382580B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007228078A JP5076750B2 (ja) 2007-09-03 2007-09-03 プローブ装置及びプローブ方法
JP2007228078 2007-09-03
JP2007-228078 2007-09-03

Publications (2)

Publication Number Publication Date
CN101382580A CN101382580A (zh) 2009-03-11
CN101382580B true CN101382580B (zh) 2011-07-20

Family

ID=40462527

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2008102118163A Active CN101382580B (zh) 2007-09-03 2008-09-03 探测器装置以及探测方法

Country Status (4)

Country Link
JP (1) JP5076750B2 (ja)
KR (1) KR101025389B1 (ja)
CN (1) CN101382580B (ja)
TW (1) TWI453846B (ja)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101688049B1 (ko) 2010-12-03 2016-12-20 삼성전자 주식회사 테스터 및 그 테스터를 포함한 테스트 장치
CN102507996B (zh) * 2011-09-27 2014-02-26 沈玉良 探针卡升降机构
KR101958856B1 (ko) * 2012-06-08 2019-03-15 스티칭 컨티뉴테이트 베이제르트 엔지니어링 프로브 장치
CN103575294B (zh) * 2012-07-27 2016-02-24 中国航空工业第六一八研究所 硅微陀螺芯片探针卡
JP6054150B2 (ja) 2012-11-22 2016-12-27 日本電子材料株式会社 プローブカードケース及びプローブカードの搬送方法
KR101380375B1 (ko) 2013-04-25 2014-04-02 성정임 평판 디스플레이 패널 검사용 프로브장치
JP6041175B2 (ja) 2015-03-30 2016-12-07 株式会社東京精密 プローバ
CN105080803B (zh) * 2015-08-21 2018-08-07 京东方科技集团股份有限公司 基板承载结构、减压干燥设备及减压干燥方法
KR102446953B1 (ko) * 2016-02-24 2022-09-23 세메스 주식회사 정렬 지그 및 이를 이용하여 테스트 헤드를 프로브 스테이션에 정렬하는 방법
JP6885456B2 (ja) * 2017-02-22 2021-06-16 新東工業株式会社 テストシステム
JP7267058B2 (ja) * 2019-03-26 2023-05-01 東京エレクトロン株式会社 検査装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2965174B2 (ja) * 1991-07-05 1999-10-18 株式会社東京精密 半導体素子検査装置
JP3095318B2 (ja) * 1993-11-25 2000-10-03 東京エレクトロン株式会社 被検査体のテスト装置
JP2967798B2 (ja) * 1993-12-16 1999-10-25 株式会社東京精密 ウエハプローバ
JP2967860B2 (ja) * 1994-11-15 1999-10-25 株式会社東京精密 ウエハプローバ
JPH1050778A (ja) * 1996-08-03 1998-02-20 Tokyo Electron Ltd 重量物移動装置及び検査装置
US6048750A (en) 1997-11-24 2000-04-11 Micron Technology, Inc. Method for aligning and connecting semiconductor components to substrates
KR19990028749U (ko) * 1997-12-27 1999-07-15 구본준 반도체 프로버장비
US6441629B1 (en) 2000-05-31 2002-08-27 Advantest Corp Probe contact system having planarity adjustment mechanism

Also Published As

Publication number Publication date
JP2009060037A (ja) 2009-03-19
KR101025389B1 (ko) 2011-03-29
TW200935535A (en) 2009-08-16
TWI453846B (zh) 2014-09-21
KR20090024056A (ko) 2009-03-06
JP5076750B2 (ja) 2012-11-21
CN101382580A (zh) 2009-03-11

Similar Documents

Publication Publication Date Title
CN101382580B (zh) 探测器装置以及探测方法
US6501289B1 (en) Inspection stage including a plurality of Z shafts, and inspection apparatus
CN101515016B (zh) 探测装置和探测方法
CN101685132A (zh) 探测装置
TWI285932B (en) Electron beam test system with integrated substrate transfer module
US10416229B2 (en) Wafer inspection method and wafer inspection device
CN106847723A (zh) 具有一探针装置的测试***及转位机构
KR101784187B1 (ko) 반도체 웨이퍼 프로버
JP5517344B2 (ja) プローブカードの搬送機構、プローブカードの搬送方法及びプローブ装置
KR101696682B1 (ko) 전자부품 핸들링 장치 및 전자부품 시험장치
CN105452887A (zh) 探针装置
CN101769987A (zh) 探测器装置
KR100878211B1 (ko) 프로브스테이션 및 이를 이용한 웨이퍼 검사방법
KR20100101451A (ko) 반도체 디바이스 테스트 장치 및 방법
US20080297185A1 (en) Multi probe card unit, probe test device including the multi probe card unit, and methods of fabricating and using the same
KR970011745B1 (ko) 전기적 프로우빙 시험 장치
KR102413393B1 (ko) 검사 장치
CN102116835A (zh) 探测装置以及衬底运送方法
KR100206641B1 (ko) 핸들러의 로터리 아암 및 디바이스척부의 구조
JP5137965B2 (ja) 搬送装置および電子部品ハンドリング装置
CN111727363B (zh) 轮辋更换装置、轮胎试验装置及轮辋更换方法
CN115308677A (zh) 一种用于电能表计量误差的自动检定***
KR100833286B1 (ko) 웨이퍼 공급장치 및 이를 이용한 웨이퍼 공급방법
KR20170110863A (ko) 테스터기가 가변되는 칩 검사장치
KR20230158112A (ko) 처리 장치 및 기판 반송 방법

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant