WO2014050405A1 - 露光描画装置、露光描画システム、プログラム及び露光描画方法 - Google Patents

露光描画装置、露光描画システム、プログラム及び露光描画方法 Download PDF

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Publication number
WO2014050405A1
WO2014050405A1 PCT/JP2013/072818 JP2013072818W WO2014050405A1 WO 2014050405 A1 WO2014050405 A1 WO 2014050405A1 JP 2013072818 W JP2013072818 W JP 2013072818W WO 2014050405 A1 WO2014050405 A1 WO 2014050405A1
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WIPO (PCT)
Prior art keywords
exposure
information
image
job
exposed
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PCT/JP2013/072818
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English (en)
French (fr)
Japanese (ja)
Inventor
幸久 尾崎
佐藤　淳一
Original Assignee
株式会社アドテックエンジニアリング
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 株式会社アドテックエンジニアリング filed Critical 株式会社アドテックエンジニアリング
Priority to KR1020157005395A priority Critical patent/KR102119429B1/ko
Priority to CN201380049240.4A priority patent/CN104662479B/zh
Publication of WO2014050405A1 publication Critical patent/WO2014050405A1/ja

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor

Definitions

  • the present invention relates to an exposure drawing apparatus, an exposure drawing system, a program, and an exposure drawing method, and more particularly, to an exposure drawing apparatus and an exposure drawing system that draw images on both sides of a substrate to be exposed, and the exposure drawing apparatus and the exposure drawing system.
  • the present invention relates to a program to be executed and an exposure drawing method for drawing an image on both sides of a substrate to be exposed.
  • an exposure drawing apparatus that exposes a substrate to be exposed, which is a printed circuit board, to a light beam modulated based on image information and draws an image on the substrate to be exposed. Also, in order to draw an image on both surfaces of the substrate to be exposed, two exposure drawing apparatuses are arranged in parallel, one is used for drawing the first surface, and the other is drawn on the second surface opposite to the first surface.
  • An exposure and drawing system for use in the field has also been developed.
  • the substrate to be exposed is conveyed to a predetermined position of the exposure drawing device for the second surface, An image is drawn on the second surface of the substrate to be exposed by the exposure drawing apparatus.
  • Patent Document 1 discloses a throughput of a transfer process of a substrate to be exposed when images are drawn on the first surface and the second surface of the substrate to be exposed using two exposure drawing devices, respectively. An exposure drawing system with improved image quality is disclosed.
  • Each exposure drawing apparatus included in the exposure drawing system includes a stage on which the substrate to be exposed is placed, stage moving means for moving the stage linearly, and light on the first surface of the substrate to be exposed placed on the stage. And a drawing unit having beam scanning means for scanning the beam.
  • Each exposure drawing apparatus includes an upstream unit disposed on the upstream side of the drawing unit in the moving direction of the stage, and a downstream unit disposed on the downstream side of the drawing unit in the moving direction of the stage.
  • Each exposure drawing apparatus carries the substrate to be exposed onto the stage in the drawing unit by holding the substrate to be exposed in the upstream unit and moving it in the transport direction that is the same as the moving direction of the stage.
  • a carrying-in means is provided.
  • Each exposure drawing apparatus includes unloading means for unloading the exposed substrate to the downstream unit so as to hold the exposed substrate on the stage in the drawing unit and move it in the transport direction.
  • each exposure drawing apparatus when the light beam is scanned on the first surface of the substrate to be exposed, the stage is moved from the upstream side to the downstream side in the transport direction, and the substrate to be exposed is carried to the stage located on the upstream side, The substrate to be exposed is unloaded from the stage located on the downstream side.
  • an operator draws an image drawn on the exposed substrate and an exposure condition for drawing on the exposure drawing apparatus.
  • Enter job information indicating a request (job).
  • job information indicating a request (job).
  • job information indicating a request (job).
  • the exposure drawing process may fail and the exposed substrate that has become defective may be removed.
  • the exposure drawing process may fail and the exposed substrate that has become defective may be removed.
  • each surface of the substrate to be exposed does not correspond to each other.
  • the present invention has been made in view of the above problem, and an exposure drawing apparatus capable of preventing images that do not correspond to each other from being drawn on each side when drawing images on both sides of the substrate to be exposed,
  • An object of the present invention is to provide an exposure drawing system, a program, and an exposure drawing method.
  • an exposure drawing apparatus includes first job information in which image information indicating an image to be drawn on a first surface of a substrate to be exposed is associated with exposure condition information indicating an exposure condition.
  • the first drawing means for drawing the image indicated by the first job information on the first surface by exposing the first surface based on the second surface, and a second opposite to the first surface of the substrate to be exposed
  • Storage means for storing a plurality of second job information in which image information indicating an image to be drawn on a surface and exposure condition information indicating an exposure condition are associated with each other; and the plurality of second information stored in the storage means Among the job information, the second job information having the same exposure condition information as the exposure condition information indicated by the first job information used for drawing the image on the first surface of the substrate to be exposed by the first drawing means.
  • a second rendering means for rendering the second surface of the image represented by the second job information.
  • the storage means associates a plurality of image information indicating an image to be drawn on the second surface opposite to the first surface of the substrate to be exposed and exposure condition information indicating the exposure condition.
  • the second job information is stored.
  • the second drawing unit uses the first drawing unit among the plurality of second job information stored in the storage unit to draw an image on the first surface of the substrate to be exposed. By exposing the second surface of the substrate to be exposed on which the image is drawn on the first surface based on the second job information having the same exposure condition information as the exposure condition information indicated by the first job information, An image indicated by the second job information is drawn on the second surface.
  • the second job information having the same exposure condition information as the exposure condition information of the first job information used when drawing the image on the first surface is used. Since images are drawn on two surfaces, it is possible to prevent images that do not correspond to each other from being drawn on each surface when images are drawn on both surfaces of the substrate to be exposed.
  • the exposure condition includes a size of the substrate to be exposed, a number of exposure targets of the substrate to be exposed, and a mark for determining an image drawing area on the substrate to be exposed. It may include at least one of the arrangement pattern of the marks when provided and the photosensitive material type of the substrate to be exposed. Thereby, an image can be drawn on each surface of the substrate to be exposed under the applied exposure conditions.
  • an exposure drawing system is a first in which image information indicating an image drawn on a first surface of a substrate to be exposed is associated with exposure condition information indicating an exposure condition.
  • a first exposure drawing apparatus comprising a transmission means for sending exposure condition information of the first job information used for drawing an image on one surface; and drawing on a second surface opposite to the first surface of the substrate to be exposed
  • Storage means for storing a plurality of second job information in which image information indicating an image to be performed and exposure condition information indicating an exposure condition are associated with each other, receiving means for receiving the dew condition information transmitted by the transmitting means, And the storage means An image on the first surface by the first drawing unit based on the second job information having the same exposure condition information as the exposure condition information received by the receiving unit from the plurality of stored second job information.
  • a second exposure drawing apparatus having a second drawing means for drawing an image indicated by the second job information on the second surface by exposing the second surface of the substrate to be exposed. is doing.
  • the first drawing unit of the first exposure drawing apparatus associates the image information indicating the image drawn on the first surface of the substrate to be exposed with the exposure condition information indicating the exposure condition.
  • the exposure condition information of the first job information used for drawing an image on the first surface of the substrate to be exposed by the first drawing means is sent by the sending means of the first exposure drawing apparatus.
  • the second storage means of the second exposure / drawing apparatus stores the image information indicating the image to be drawn on the second surface opposite to the first surface of the substrate to be exposed and the exposure conditions.
  • a plurality of pieces of second job information associated with the exposure condition information shown are stored.
  • the dew condition information transmitted by the transmitting unit is received by the receiving unit of the second exposure drawing apparatus.
  • the second drawing means of the second exposure drawing apparatus has the exposure condition information identical to the exposure condition information received by the receiving means from the plurality of second job information stored in the storage means.
  • An image indicated by the second job information is drawn on the second surface by exposing the second surface of the exposed substrate on which the image is drawn on the first surface by the first drawing unit based on job information. Is done.
  • the second exposure drawing apparatus has the same exposure condition information as the exposure condition information of the first job information used when drawing the image on the first surface. Since the image is drawn on the second surface using the two-job information, it is possible to prevent the images that do not correspond to each other from being drawn on each surface when the images are drawn on both surfaces of the exposed substrate.
  • the transmission unit of the first exposure drawing apparatus may transmit exposure condition information when drawing by the first drawing unit is normally completed. As a result, it is possible to more reliably prevent images that do not correspond to each other from being drawn on each side when drawing images on both sides of the exposed substrate, as compared with the case where the present invention is not applied. .
  • the transmission unit of the first exposure drawing apparatus transmits error information indicating that an error has occurred when the drawing by the first drawing unit ends abnormally.
  • the second exposure drawing apparatus has the same exposure condition information as the exposure condition information received by the receiving means in the plurality of second job information stored by the storage means.
  • a receiving unit that receives selection of any one of the plurality of second job information is provided, and the second exposure drawing apparatus includes:
  • the second drawing unit may draw an image on the second surface based on the second job information whose selection is received by the receiving unit.
  • a second storage unit that stores the first job information and the second job information, and the first job information stored by the second storage unit are stored in the first storage unit.
  • the apparatus further includes a control device including a second transmission unit that transmits to the exposure drawing apparatus and transmits the second job information to the second exposure drawing apparatus, and the first exposure drawing apparatus transmits the second job information by the second transmission unit.
  • Second receiving means for receiving the received first job information, wherein the first drawing means of the first exposure drawing apparatus uses the first job information received by the second receiving means, An image indicated by the first job information is drawn on the first surface, and the second exposure drawing apparatus further comprises third receiving means for receiving the second job information transmitted by the second transmitting means; Second exposure Said storage means image device, the second job information received by said third receiving means may be a plurality store. As a result, the entire system can be comprehensively managed by the control device.
  • control device further includes a second accepting unit that accepts input of the first job information and the second job information
  • second storage unit of the control device includes: The first job information and the second job information received by the second receiving unit may be stored. Thereby, the image corresponding to each other can be drawn on each surface of the substrate to be exposed using the job information input by the user.
  • an exposure drawing system is a first in which image information indicating an image drawn on a first surface of a substrate to be exposed is associated with exposure condition information indicating an exposure condition.
  • image information indicating an image drawn on a first surface of a substrate to be exposed is associated with exposure condition information indicating an exposure condition.
  • a first exposure drawing apparatus comprising a first transmission means for transmitting exposure condition information of the first job information used for drawing an image on one surface; and a second surface opposite to the first surface of the substrate to be exposed.
  • Storage means for storing a plurality of second job information in which image information indicating an image to be drawn and exposure condition information indicating an exposure condition are associated with each other, and receiving the exposure condition information transmitted by the first transmission means
  • First receiving means and front Control comprising second transmission means for transmitting the second job information having the same exposure condition information as the exposure condition information received by the first reception means among the plurality of second job information stored by the storage means.
  • a second exposure drawing apparatus comprising second drawing means for drawing an image indicated by the second job information on the second surface by exposing the second surface of the substrate to be exposed on which the image is drawn on one surface And have.
  • the first drawing unit of the first exposure drawing apparatus associates the image information indicating the image drawn on the first surface of the substrate to be exposed with the exposure condition information indicating the exposure condition. By exposing the first surface based on the received first job information, an image indicated by the first job information is drawn on the first surface. Further, the first transmission unit of the first exposure drawing apparatus transmits the exposure condition information of the first job information used for drawing the image on the first surface of the substrate to be exposed by the first drawing unit.
  • image information indicating an image to be drawn on the second surface opposite to the first surface of the substrate to be exposed and exposure condition information indicating the exposure conditions are stored by the storage unit of the control device.
  • a plurality of second job information each associated with is stored.
  • the exposure condition information transmitted by the first transmission means is received by the first reception means of the control device.
  • the second job having the same exposure condition information as the exposure condition information received by the first receiving means among the plurality of second job information stored by the storage means by the second transmitting means of the control device. Information is sent.
  • the second receiving information of the second exposure drawing apparatus is received by the second receiving means of the second exposure drawing apparatus, and the second job information transmitted by the second sending means is received.
  • the control device is the same as the exposure condition information of the first job information received from the first exposure drawing device and used when drawing the image on the first surface. Since the second job information having the exposure condition information is transmitted to the second exposure drawing apparatus, it is possible to mutually draw each surface when drawing an image on both sides of the exposed substrate without adding a new function to the exposure drawing apparatus. It is possible to prevent drawing of an incompatible image.
  • the exposure condition includes a size of the substrate to be exposed, a number of exposure targets of the substrate to be exposed, and a mark for determining an image drawing area on the substrate to be exposed. It may include at least one of the arrangement pattern of the marks when provided and the photosensitive material type of the substrate to be exposed. Thereby, an image can be drawn on each surface of the substrate to be exposed under the applied exposure conditions.
  • a program according to the present invention uses a computer to cause the first drawing means to display image information indicating an image to be drawn on the first surface of the substrate to be exposed and exposure condition information indicating an exposure condition.
  • the first control means that exposes the first surface based on the first job information associated with the first job information to draw the image indicated by the first job information on the first surface, and the second drawing means Of the plurality of second job information, image information indicating an image drawn on a second surface opposite to the first surface of the substrate to be exposed and exposure condition information indicating exposure conditions are associated with each other.
  • a second control means for rendering the image represented by the second job information on the second surface to function as a.
  • the computer can be operated in the same manner as the exposure drawing apparatus according to the present invention, when the image is drawn on both surfaces of the substrate to be exposed, similarly to the exposure drawing apparatus. It is possible to prevent drawing of images that do not correspond to each other on each surface.
  • the first drawing means includes image information indicating an image drawn on the first surface of the substrate to be exposed and exposure condition information indicating the exposure conditions.
  • the first job information Based on the second job information having the same exposure condition information as the exposure condition information of the first job information used for drawing the image on the first surface of the substrate to be exposed by the drawing means, an image is formed on the first surface.
  • the drawn second surface of the exposed substrate By exposing, and a, and a second control step of rendering the second surface of the image represented by the second job information.
  • the exposure drawing method according to the present invention it operates in the same manner as the exposure drawing apparatus according to the present invention. Therefore, as with the exposure drawing apparatus, when drawing an image on both sides of the substrate to be exposed, It is possible to prevent the drawing of images that do not correspond to each other.
  • the exposed substrate C is a flat substrate such as a printed wiring board or a glass substrate for a flat panel display.
  • the exposure drawing system 1 is opposite to the first exposure drawing apparatus 2 that performs exposure on the first surface of the substrate C to be exposed and the first surface of the substrate C to be exposed.
  • a second exposure drawing apparatus 3 for performing exposure on the second surface is provided.
  • the exposure drawing system 1 is provided between the first exposure drawing device 2 and the second exposure drawing device 3, and includes a reversing device 4 for inverting the front and back of the substrate C to be exposed, a first surface of the substrate C to be exposed, A control device 5 for controlling exposure on the second surface is provided.
  • the first exposure drawing apparatus 2 and the control apparatus 5 are connected to each other by the wired cable 8a, and the second exposure drawing apparatus 3 and the control apparatus 5 are connected to each other by the wired cable 8a. Communication is performed between the apparatus 2 and the second exposure drawing apparatus 3 via the wired cable 8a. Similarly, the first exposure drawing apparatus 2 and the second exposure drawing apparatus 3 are connected by a wired cable 8b, and these exposure drawing apparatuses communicate via the wired cable 8b.
  • the configuration of the first exposure drawing apparatus 2 and the second exposure drawing apparatus 3 according to the present embodiment will be described.
  • the 1st exposure drawing apparatus 2 and the 2nd exposure drawing apparatus 3 have the same structure, the 1st exposure drawing apparatus 2 is demonstrated here and the description about the 2nd exposure drawing apparatus 3 is abbreviate
  • the first exposure drawing apparatus 2 includes a flat stage 10 for fixing the substrate C to be exposed.
  • a plurality of suction holes (not shown) for sucking air are provided on the upper surface of the stage 10.
  • the air between the substrate C to be exposed and the stage 10 is sucked through the suction hole, so that the substrate C to be exposed is vacuum-sucked to the stage 10. .
  • the stage 10 is supported by a flat base 12 movably provided on the upper surface of the table-like base 11. That is, one or a plurality of (in this embodiment, two) guide rails 14 are provided on the upper surface of the base 11.
  • the base 12 is supported so as to be freely movable along the guide rail 14, and is moved by being driven by a drive mechanism (stage drive unit 42 described later) constituted by a motor or the like.
  • the stage 10 moves along the guide rail 14 in conjunction with the movement of the base 12.
  • the direction in which the stage 10 moves is defined as the Y direction
  • the direction perpendicular to the Y direction in the horizontal plane is defined as the X direction
  • the direction orthogonal to the Y direction in the vertical plane is defined as the Z direction.
  • a gate-shaped gate 15 is provided on the upper surface of the base body 11 so as to straddle the two guide rails 14.
  • the exposed substrate C placed on the stage 10 moves so as to enter and exit along the guide rail 14 through the opening of the gate 15.
  • An exposure unit 16 that exposes a light beam toward the opening is attached to the upper part of the opening of the gate 15. When the stage 10 moves along the guide rail 14 and is positioned at the opening by the exposure unit 16, the light beam is exposed on the upper surface of the substrate C to be exposed placed on the stage 10.
  • the exposure unit 16 includes a plurality (16 in the present embodiment) of exposure heads 16a. Each of the exposure heads 16 a is arranged in a matrix in the exposure unit 16.
  • the exposure unit 16 is connected to an optical fiber 18 drawn from a light source unit 17 described later and a signal cable 20 drawn from an image processing unit 19 described later.
  • Each of the exposure heads 16a has a digital micromirror device (DMD) as a reflective spatial light modulation element.
  • the exposure head 16 a modulates the light beam from the light source unit 17 by controlling the DMD based on the image information input from the image processing unit 19.
  • the first exposure drawing apparatus 2 exposes the substrate C to be exposed by irradiating the substrate C with this modulated light beam.
  • the spatial light modulator is not limited to the reflective type, and may be a transmissive spatial light modulator such as liquid crystal.
  • the image area P1 that is an area exposed by the exposure head 16a has a rectangular shape in which one side is inclined at a predetermined inclination angle with respect to the moving direction (Y direction) of the stage 10. It is.
  • FIG. 3A shows only a part of the plurality of exposure heads 16a according to this embodiment.
  • the substrate C to be exposed is moved along with the movement of the stage 10 as shown in FIG. 3B.
  • a strip-shaped exposed region P2 is formed for each exposure head 16a.
  • Each of the exposure heads 16a arranged in a matrix is arranged in the X direction so as to be shifted by a distance obtained by multiplying the length of the long side of the image region P1 by a natural number (in this embodiment, 1).
  • Each of the exposed regions P2 is formed so as to partially overlap with the adjacent exposed region P2.
  • a gate-type gate 22 is further provided on the upper surface of the base 11 so as to straddle the two guide rails 14.
  • the exposed substrate C placed on the stage 10 moves so as to enter and exit the opening of the gate 22 along the guide rail 14.
  • the photographing unit 23 is a CCD camera or the like having a built-in strobe with a very short light emission time.
  • a rail 23a is provided on the upper part of the opening of the gate 22 along a direction (X direction) perpendicular to the moving direction (Y direction) of the stage 10 in the horizontal plane. It is provided so that it can move by being guided by 23a.
  • the imaging unit 23 images the upper surface of the substrate C to be exposed placed on the stage 10.
  • the first exposure drawing apparatus 2 includes a first transfer unit 6 that transfers a substrate C to be exposed carried from the outside to a predetermined position of the first exposure drawing apparatus 2, and a substrate C to be exposed. Is transported from the first exposure drawing device 2 to a predetermined position of the reversing device 4.
  • the second exposure drawing apparatus 3 includes a first transfer unit 6 that transfers the substrate C to be exposed from the reversing device 4 to a predetermined position of the second exposure drawing apparatus 3, and the substrate C to be exposed of the second exposure drawing apparatus 3.
  • a second transport unit 7 for transporting to the outside is provided.
  • the first transport unit 6 and the second transport unit 7 have a plurality of rotating rollers and a drive motor that rotates the rotating rollers.
  • Each of the plurality of rotating rollers is laid in parallel, and a sprocket or pulley that receives a rotational force transmitted by a belt or a wire is attached to one end of the rotating roller.
  • a transmission method using a cylindrical magnet can be employed in addition to the belt or the wire.
  • the first exposure drawing apparatus 2 is an auto carrier hand (hereinafter referred to as “automatic carrier hand”) that transports the substrate C to be exposed, which has been transported to the predetermined position by the first transport unit 6 from the predetermined position to the stage 10.
  • AC hand AC hand
  • the AC hand 24 is formed in a flat plate shape and is movably provided in the X direction and the Z direction.
  • the lower surface of the AC hand 24 is provided with a plurality of suction holes 25 for sucking air. The AC hand 24 sucks air between the AC hand 24 and the exposed substrate C through the suction hole 25 when the lower surface of the AC hand 24 moves to a position where the lower surface of the AC hand 24 contacts the upper surface of the exposed substrate C.
  • the substrate C is sucked and held on the lower surface of the AC hand 24 by vacuum suction. Further, when the AC hand 24 moves to the upper surface of the stage 10 with the substrate to be exposed C sucked and held on the lower surface of the AC hand 24, the substrate C to be exposed is pushed downward and pressed against the stage 10 Z. A pressing portion 26 that is movable in the direction is provided.
  • the AC hand 24 of the first exposure drawing apparatus 2 sucks and holds the unexposed substrate C that has been transported to the first transport unit 6 and moves it upward and places it on the upper surface of the stage 10. Further, the AC hand 24 of the first exposure drawing apparatus 2 moves the exposed substrate C upward by attracting and holding the exposed substrate C exposed on the first surface placed on the upper surface of the stage 10. Move to the second transport unit 7. The exposed substrate C whose first surface has moved to the second transport unit 7 is exposed to the outside of the first exposure drawing apparatus 2 by the second transport unit 7.
  • the AC hand 24 of the second exposure drawing apparatus 3 sucks and holds the exposed substrate C exposed to the first surface conveyed to the first conveyance unit 6 and moves the exposed substrate C upward. It is placed on the upper surface of the stage 10.
  • the AC hand 24 of the second exposure drawing apparatus 3 moves the upper surface by sucking and holding the exposed substrate C on which the first surface and the second surface placed on the upper surface of the stage 10 are exposed.
  • the exposure substrate C is moved to the second transport unit 7.
  • the exposed substrate C having the exposed first and second surfaces moved to the second transport unit 7 is carried out of the exposure drawing system 1 by the second transport unit 7.
  • the reversing device 4 includes a flat plate-like subframe 30 that is pivotally supported by a rotation shaft L.
  • the subframe 30 reverses the front and back of the substrate C to be exposed by rotating 180 degrees while holding the substrate C to be exposed inside.
  • a carry-in entrance 31 through which the substrate C to be exposed is carried into the sub-frame 30 is provided on the side of the sub-frame 30 on the side where the first exposure drawing apparatus 2 is located. It has been. Furthermore, a plurality of roller pairs 34 driven by a motor 33 are provided inside the subframe 30. The roller pair 34 conveys the substrate C to be exposed housed in the subframe 30 in a sandwiched state. The exposed substrate C is transported into the subframe 30 through the carry-in port 31 by the roller pair 34, and the front and back are reversed by the rotation of the subframe 30, and the subframe through the carry-in port 31 by the roller pair 34. 30 to the outside. In addition, when the subframe 30 finishes carrying out the substrate C to be exposed, the subframe 30 is rotated 180 degrees again in order to carry the next substrate C to be exposed.
  • the first exposure drawing apparatus 2 is provided with a system control unit 40 that is electrically connected to each part of the apparatus.
  • the system control unit 40 controls each part of the first exposure drawing apparatus 2. Is centrally controlled.
  • the first exposure drawing apparatus 2 includes a job storage unit 41, a stage drive unit 42, a display device 43, an input device 44, a shooting drive unit 46, and an external input / output unit 48.
  • the system control unit 40 has a CPU (Central Processing Unit), RAM (Random Access Memory), ROM (Read Only Memory), and HDD (Hard Disk Drive). Further, the system control unit 40 causes the CPU to emit a light beam from the light source unit 17 and output corresponding image information from the image processing unit 19 at a timing according to the movement of the stage 10. In this way, the system control unit 40 controls the exposure of the light beam to the substrate C to be exposed by the exposure head 16a.
  • CPU Central Processing Unit
  • RAM Random Access Memory
  • ROM Read Only Memory
  • HDD Hard Disk Drive
  • the job storage unit 41 includes a RAM and a non-volatile memory, and stores job information indicating a job to be executed.
  • the job according to the present embodiment exposes and draws the same image on the first surface of one or more exposed substrates C of the same type under the same conditions, and exposes the same image on the second surface under the same conditions. This is a batch exposure processing request for drawing. Details of the job information will be described later.
  • the job storage unit 41 stores job information of a job to be executed in a list format, but is not limited thereto, and may be stored in a queue format.
  • the stage drive unit 42 has a drive mechanism constituted by a motor or a hydraulic pump, and drives the stage 10 under the control of the system control unit 40.
  • the display device 43 is a display unit such as a liquid crystal display that displays various information under the control of the system control unit 40.
  • the input device 44 is an input means such as a touch sensor or operation buttons for inputting various information by a user operation.
  • the imaging drive unit 46 has a drive mechanism constituted by a motor or a hydraulic pump, and drives the imaging unit 23 under the control of the system control unit 40.
  • the external input / output unit 48 inputs / outputs various information to / from various information processing apparatuses including the second exposure drawing apparatus 3 and the control apparatus 5 connected to the first exposure drawing apparatus 2.
  • the external input / output unit 48 of the second exposure drawing apparatus 3 inputs various information to and from various information processing apparatuses including the first exposure drawing apparatus 2 and the control apparatus 5 connected to the second exposure drawing apparatus 3. Output.
  • the control device 5 includes a control unit 50 that controls the exposure drawing process in the exposure drawing system 1.
  • the control device 5 includes a storage unit 51 having a ROM, an HDD, and the like that store programs and various data necessary for exposure drawing processing by the control unit 50.
  • the storage unit 51 also stores job information, a job setting processing program, a first job execution processing program, a second job execution processing program, and a job selection processing program of the second embodiment.
  • control device 5 includes a display unit 52 such as a liquid crystal display that displays various types of information based on the control of the control unit 50, and an input unit 53 such as a keyboard and a mouse that inputs various types of information through user operations. Furthermore, the control device 5 includes a communication interface 54 that transmits and receives various types of information to and from the first exposure drawing device 2 and the second exposure drawing device 3 based on the control of the control unit 50.
  • display unit 52 such as a liquid crystal display that displays various types of information based on the control of the control unit 50
  • input unit 53 such as a keyboard and a mouse that inputs various types of information through user operations.
  • control device 5 includes a communication interface 54 that transmits and receives various types of information to and from the first exposure drawing device 2 and the second exposure drawing device 3 based on the control of the control unit 50.
  • the control device 5 accepts input of information regarding a job by a user operation. Further, when the control device 5 receives input of information related to the job, the control device 5 generates job information corresponding to each of the first exposure drawing device 2 and the second exposure drawing device 3, and each of the generated job information corresponds to the corresponding exposure drawing. Send to device.
  • the first exposure drawing apparatus 2 and the second exposure drawing apparatus 3 receive job information
  • the first exposure drawing apparatus 2 and the second exposure drawing apparatus 3 store the received job information in the job storage unit 41, and the exposed substrate C according to the contents of the stored job.
  • the first exposure drawing apparatus 2 stores a plurality of pieces of job information
  • the first exposure drawing apparatus 2 executes the job indicated by the job information in the order in which the pieces of job information are received.
  • the second exposure drawing apparatus 3 according to the present embodiment sequentially executes jobs corresponding to the jobs executed by the first exposure drawing apparatus 2.
  • the control device 5 causes the first exposure drawing apparatus 2 to draw an image on the first surface of the substrate C to be exposed, and the second exposure drawing apparatus 3 sets the exposure information of the substrate C to be exposed.
  • Job information 60B for drawing an image on the second surface is generated. That is, even for jobs related to the same substrate C to be exposed, exposure drawing processing is performed on the first surface and the second surface by separate exposure drawing apparatuses. Two-side job information 60B is generated separately.
  • the job information 60A and 60B are information in which job identification information 61, image information 62, and exposure condition information 63 are associated with each job, as shown in FIGS. 7A and 7B.
  • the job identification information 61 is information for identifying each job.
  • the image information 62 is information indicating an image to be drawn.
  • the exposure condition information 63 is information indicating the exposure conditions when exposing the light beam to draw an image corresponding to the substrate C to be exposed.
  • the exposure condition information 63 includes substrate size information indicating the substrate size of the exposure target substrate C (hereinafter referred to as “target substrate”) to be drawn, and drawing number information indicating the number of drawing of the target substrate. Contains.
  • the exposure condition information 63 includes mark information in which a mark arrangement pattern in the case where a mark for determining a drawing area of an image corresponding to the target substrate is provided is indicated by coordinates, and Sensitive material type information indicating the sensitive material type of the target substrate is included.
  • the information included in the exposure condition information 63 is not limited to these, and any information may be used as long as it is information used when performing exposure drawing processing, such as information indicating the intensity of the light beam and information indicating the moving speed of the stage 10. It may be the information.
  • the operator When the operator wants the first exposure drawing apparatus 2 and the second exposure drawing apparatus 3 to execute a job, the operator inputs each information included in the job information 60A and 60B to the control apparatus 5 via the input unit 53. .
  • the control device 5 performs job setting processing for generating job information 60A for the first surface and job information 60B for the second surface based on each input information and storing the job information 60B for the second surface in the storage unit 51. Do.
  • FIG. 8 is a flowchart showing a processing flow of a job setting processing program executed by the control unit 50 of the control device 5 when an execution instruction is input via the input unit 53.
  • the program is stored in advance in a predetermined area of the ROM of the storage unit 51.
  • the display unit 52 is controlled to display a job input screen for assisting the user in inputting information related to the job.
  • the job input screen 70 includes a drawing target surface selection column 71 for selecting whether the input is related to the first surface job or the second surface job.
  • the job input screen 70 has an image input field 72 for inputting image identification information indicating an image to be drawn.
  • the image identification information is a file name of a file including image information, a URL (Uniform Resource Locator) indicating a storage location of the image file, or the like.
  • the job input screen 70 also has a substrate type input field 73 for inputting substrate type information indicating the substrate type of the substrate C to be exposed that is applied to the job to be input.
  • the job input screen 70 has a drawing number input field 74 for inputting drawing number information indicating the number of drawing of the substrate C to be exposed in the target job. Furthermore, the job input screen 70 has an input end button 75 for designating information indicating that the input has ended.
  • selection candidates are displayed in a list display or the like for each input field, and any one of the displayed selection candidates is selected via the input unit 53. good.
  • the user uses the input unit 53 to select a drawing target surface in the drawing target surface selection column 71, inputs information corresponding to each input column, and then designates an input end button 75.
  • the process waits until the input end button 75 is designated, thereby waiting until the input of information related to the job is completed.
  • job information 60A, 60B is generated based on the drawing target surface selected in the drawing target surface selection column 71 and each information input in each input column, and the generated job information 60A, 60B is generated. Is stored in the storage unit 51.
  • the control unit 50 sets the image information of the image indicated by the information input in the image input column 72 as the image information 62, and the drawing number input column 74. The information input to is used as the drawing number information, and job information 60A for the first surface is generated.
  • substrate size information, mark information, and sensitive material type information are determined from the information input in the substrate type input field 73.
  • the substrate size information, the mark information, and the photosensitive material type information are stored in the storage unit 51 in association with each substrate type of the substrate C to be exposed.
  • the substrate size information, mark information, and sensitive material type information corresponding to the substrate type indicated by the information input in the substrate type input field 73 are converted into the substrate size of the job information 60A. Information, mark information, and sensitive material type information.
  • the control unit 50 sets the image information of the image indicated by the information input in the image input field 72 as the image information 62, and enters the drawing number input field 74.
  • the input information is used as the drawing number information, and job information 60B for the second surface is generated.
  • the control unit 50 also determines and applies the substrate size information, the mark information, and the sensitive material type information in the job information 60B as in the job information 60A.
  • step S107 it is determined whether or not the job information generated in the process of step S105 is the job information 60A on the first surface.
  • the process proceeds to step S109, and the generated job information 60A is transmitted to the first exposure drawing apparatus 2 via the wired cable 8a.
  • the first exposure drawing apparatus 2 stores the received job information 60 ⁇ / b> A in its own job storage unit 41.
  • step S107 the job information generated by the process in step S105 is regarded as the second-side job information 60B, and the process proceeds to step S111.
  • step S111 the generated job information 60B is transmitted to the second exposure drawing apparatus 3 via the wired cable 8a, and then the job setting processing program is terminated.
  • the second exposure drawing apparatus 3 stores the received job information 60B in its own job storage unit 41.
  • the control device 5 performs the job information 60 ⁇ / b> A on the first surface and the job on the second surface based on information input by the user.
  • Information 60B is generated.
  • the job information 60A for the first surface generated by the control device 5 is stored in the order received in the job storage unit 41 of the first exposure drawing device 2, and the job information 60B for the second surface is stored in the second exposure drawing device 3.
  • the first exposure drawing apparatus 2 When the first exposure drawing apparatus 2 receives and stores the job information 60A from the control apparatus 5, the first exposure drawing apparatus 2 draws an image on the first surface of the substrate C to be exposed using the stored job information 60A in accordance with a predetermined user operation. The first job execution process is performed.
  • FIG. 11 is a flowchart showing the flow of processing of the first job execution processing program executed by the system control unit 40 of the first exposure drawing apparatus 2 at this time.
  • the program is stored in advance in a predetermined area of the ROM provided in the system control unit 40.
  • the timing at which the program is executed is not limited to the timing according to a predetermined user operation, but may be the timing at which the job information 60A is received.
  • step S200 control is performed to display the job information 60A stored in the job storage unit 41 on the display device 43.
  • the system control unit 40 performs control to display each job information 60A in a list format.
  • the user places the number of exposed substrates C indicated by the drawing number information in the job information 60 ⁇ / b> A to be executed on the upstream side of the first transport unit 6 of the first exposure drawing apparatus 2.
  • the user selects and designates the displayed job information 60A via the input device 44, thereby inputting a job execution instruction indicated by the designated job information 60A.
  • next step S201 the process waits until the job execution instruction is input.
  • job information 60A corresponding to the job instructed to execute hereinafter referred to as “execution first page job”.
  • the image information 62 is obtained from In the present embodiment, when acquiring the image information 62 of the image to be drawn, the image information (image information 62 of the job information 60A) stored in the own job storage unit 41 is acquired, but the present invention is not limited to this. . That is, the image identification information may be added to the job information 60A, and the image information of the image to be drawn may be acquired from the control device 5 or an external storage device based on the image identification information.
  • an exposure condition for drawing an image on the substrate C to be exposed is determined by executing the execution first surface job.
  • the system control unit 40 determines the exposure condition based on the substrate size information, the number of drawn images information, the mark information, and the photosensitive material type information in the job information 60A of the execution first surface job.
  • the system control unit 40 photographs the mark provided on the substrate C to be exposed by the photographing unit 23, and measures the position of the mark from the image obtained by the photographing. Further, the system control unit 40 determines a drawing area in which an image is drawn based on the measured mark position. Further, the system control unit 40 deforms the image to be drawn based on the determined size and shape of the drawing area.
  • the system control unit 40 determines the intensity of the light beam to be exposed, the moving speed of the stage 10 (or the exposure time of the light beam), and the like according to the photosensitive material type indicated by the photosensitive material type information.
  • an exposure drawing process for drawing an image by exposing a light beam to the substrate C to be exposed is started according to the determined exposure condition.
  • the system control unit 40 draws the deformed image on the exposed substrate C by exposing the light beam modulated based on the deformed image with the exposure head 16a. .
  • step S209 it is determined whether or not a predetermined error has occurred.
  • the system control unit 40 performs the exposure drawing process due to deformation or positioning failure of the substrate C to be exposed, failure of a part used when performing exposure drawing of the light source unit 17, the image processing unit 19, the exposure unit 16, and the like. It is determined that an error has occurred, for example, when stopped halfway. If the determination in step S209 is affirmative, the process proceeds to step S211, error information indicating that an error has occurred is transmitted to the control device 5, and the first job execution processing program is terminated. On the other hand, the control device 5 that has received the error information performs control to display the error information on the display unit 52.
  • the system control unit 40 may transmit error information to the second exposure drawing apparatus 3.
  • the second exposure drawing apparatus 3 that has received the error information performs control to display the error information on the display device 43, or the job information 60B of the job corresponding to the execution first page job in which the error has occurred. Or delete it.
  • step S209 if a positive determination is made in step S209, the process proceeds to step S213.
  • step S213 it is determined whether or not the exposure drawing process for one substrate to be exposed C has been completed. If a negative determination is made in step S213, the process returns to step S209. On the other hand, if a positive determination is made in step S213, the process proceeds to step S215.
  • step S215 the exposure condition information 63 of the execution first surface job is transmitted to the second exposure drawing apparatus 3.
  • the exposure condition information 63 of the execution first surface job is transmitted from the first exposure drawing apparatus 2 to the second exposure drawing apparatus 3, but the present invention is not limited to this.
  • the information to be transmitted may be information including the exposure condition information 63 of the execution first surface job by the second exposure drawing apparatus 3, and may be, for example, the job information 60A itself.
  • the transmitted information may be predetermined information (for example, only substrate size information, substrate size and mark information, etc.) included in the exposure condition information 63 of the execution first page job.
  • next step S217 it is determined whether or not the execution first page job has been completed.
  • the system control unit 40 determines that the execution first surface job has been completed when the exposure drawing process for the exposure target substrate C having the drawing number indicated in the drawing number information of the exposure condition information 63 is completed.
  • step S217 If the determination in step S217 is negative, the process returns to step S209. If the determination is affirmative, the first job execution processing program is terminated.
  • the second exposure drawing apparatus 3 When the second exposure drawing apparatus 3 according to the present embodiment receives the exposure condition information 63 of the execution first surface job from the first exposure drawing apparatus 2, the second exposure drawing apparatus 3 converts the exposure condition information 63 and the job information 60 ⁇ / b> B received from the control device 5. Based on this, a second job execution process for drawing an image on the second surface of the substrate C to be exposed is performed.
  • FIG. 12 is a flowchart showing the flow of processing of the second job execution processing program executed by the system control unit 40 of the second exposure drawing apparatus 3 at this time.
  • the program is stored in advance in a predetermined area of the ROM provided in the system control unit 40.
  • the timing at which the program is executed is not limited to the timing at which the job identification information of the job to be executed is received, but is the timing at which a predetermined execution instruction is input by the user via the input device 44. Also good.
  • step S301 whether or not a plurality of job information 60B having the same exposure condition information 63 as the exposure condition information 63 of the received execution first page job exists in the job information 60B stored in the job storage unit 41. Determine whether or not.
  • step S301 determines whether the job information 60B stored in the job storage unit 41 or a non-selection button for selecting no job.
  • the job selection screen 76 has a selection button 77 for selecting any one of the job information 60B stored in the job storage unit 41, and a non-selection button for selecting no job.
  • a selection button 78 is provided. The user designates one of the selection buttons 77 or the non-selection button 78 using the input device 44.
  • step S304 the process waits until any selection button 77 or non-selection button 78 is selected.
  • step S305 it is determined whether any job is selected. At this time, when any selection button 77 is selected, the system control unit 40 determines that any job is selected (positive determination), and when any non-selection button 78 is selected, any job. Is determined not to have been selected (negative determination).
  • step S305 If the determination in step S305 is affirmative, the selected job is designated as an execution target (hereinafter referred to as “execution second side job”), and the process proceeds to step S309 described later. On the other hand, if a negative determination is made in step S305, the process proceeds to step S317, error information indicating that the job is not selected is transmitted to the control device 5, and the second job execution processing program is terminated. On the other hand, the control device 5 performs control to display the received error information on the display unit 52.
  • step S301 if a negative determination is made in step S301, the process proceeds to step S307.
  • step S307 the job information 60B stored in the job storage unit 41 includes job information 60B indicating a job on the second surface having the same exposure condition information 63 as the exposure condition information 63 on the received execution first surface job. Determine if there is only one
  • step S307 If a negative determination is made in step S307, the process proceeds to step S317, error information indicating that there is no job to be executed is transmitted to the control device 5, and the second job execution processing program is terminated. On the other hand, the control device 5 performs control to display the received error information on the display unit 52.
  • step S307 determines whether the job information 60B determined to exist by the processing in step S307 is set as the execution second page job, and the process proceeds to step S309.
  • the job information 60B determined to exist by the process of step S307 may be displayed on the display device 43, and an input of a job execution instruction indicated by the job information 60B may be received. In this case, after receiving the execution instruction input, the process proceeds to step S309.
  • step S309 image information 62 of an image to be drawn on the second surface of the substrate C to be exposed is acquired from the job information 60B of the execution second surface job.
  • the image information (image information 62 of the job information 60B) stored in the own job storage unit 41 is acquired, but the present invention is not limited to this. That is, the image identification information may be added to the job information 60B, and the image information of the image to be drawn may be acquired from the control device 5 or an external storage device based on the image identification information.
  • an exposure condition for drawing an image on the substrate C to be exposed in the execution second surface job that is a job to be executed is determined.
  • the system control unit 40 sets the exposure condition based on the substrate size information, the number-of-drawing-number information, the mark information, and the photosensitive material type information in the job information 60B of the execution second-side job by the same method as in step S205. decide.
  • job A and job A ′ have the same exposure condition information 63
  • job B and job B ′ have the same exposure condition information 63
  • job information 60A for job A for drawing an image corresponding to the first surface job information 60A for job B, and the like are stored.
  • the second exposure drawing apparatus 3 stores job information 60B of job A 'and job information 60B of job B' for drawing an image corresponding to the second surface.
  • the second exposure drawing apparatus 3 sets the job A ′ having the same exposure condition information 63 as the job A as an execution target.
  • step S313 similarly to the process in step S207 of the first job execution processing program described above, an exposure drawing process is performed in which a light beam is exposed on the exposed substrate C to draw an image according to the determined exposure condition. Start.
  • step S315 it is determined whether or not a predetermined error has occurred.
  • the system control unit 40 performs the exposure drawing process due to deformation or positioning failure of the substrate C to be exposed, failure of a part used when performing exposure drawing of the light source unit 17, the image processing unit 19, the exposure unit 16, and the like. It is determined that an error has occurred, for example, when stopped halfway.
  • step S317 error information indicating that an error has occurred is transmitted to the control device 5, and the second job execution processing program is terminated.
  • the control device 5 performs control to display the received error information on the display unit 52.
  • step S315 when it becomes affirmation determination by step S315, it transfers to step S319.
  • step S319 it is determined whether or not the exposure drawing process for the substrate C to be exposed has been completed. If a negative determination is made in step S319, the process returns to step S315. If an affirmative determination is made, the process proceeds to step S321.
  • step S321 it is determined whether or not the execution second side job has been completed.
  • the system control unit 40 determines that the execution second-side job is completed when the exposure drawing process for the exposure target substrate C having the drawing number indicated in the drawing number information of the exposure condition information 63 is completed. If a negative determination is made in step S321, the process proceeds to step S323.
  • step S323 the process waits until it receives exposure condition information for drawing an image on the next exposed substrate C in the execution second-surface job.
  • step S325 it is determined whether or not the received exposure condition information is the same as the exposure condition information of the job information 60B of the execution second side job. If the determination in step S325 is affirmative, the execution of the second execution side job is continued, and the process proceeds to step S315. On the other hand, if a negative determination is made in step S325, the process proceeds to step S317, and error information indicating that exposure condition information different from the exposure condition information of the job information 60B of the execution second-surface job has been received is indicated by the control device 5. To end the first job execution processing program.
  • step S321 determines whether the first job execution processing program is terminated.
  • information indicating the first job executed is transmitted from the first exposure drawing apparatus 2 to the second exposure drawing apparatus 3, and the corresponding job is selected and executed by the second exposure drawing apparatus 3.
  • the first exposure drawing apparatus 2 transmits information indicating the first job to be executed to the control apparatus 5, the control apparatus 5 selects a corresponding job, and the selected job is subjected to the second exposure drawing. Transmit to device 3.
  • FIG. 14 is a flowchart showing the flow of processing of the job setting processing program executed by the control unit 50 of the control device 5 at this time.
  • the program is stored in advance in a predetermined area of the ROM of the storage unit 51.
  • steps S401 to S405 processing similar to that in steps S101 to S105 of the first embodiment is performed.
  • the generated job information 60A for the first surface is transmitted to the first exposure drawing apparatus 2 via the wired cable 8a, and the job setting processing program is terminated.
  • the first exposure drawing apparatus 2 stores the received job information 60 ⁇ / b> A in the job storage unit 41.
  • the first exposure drawing apparatus 2 After storing the job information 60A, the first exposure drawing apparatus 2 performs a first job execution process for drawing an image on the first surface of the substrate C to be exposed based on the job information 60A in accordance with a predetermined user operation.
  • FIG. 15 is a flowchart showing the flow of processing of the first job execution processing program executed by the system control unit 40 of the first exposure drawing apparatus 2 at this time.
  • the program is stored in advance in a predetermined area of the ROM provided in the system control unit 40.
  • the timing at which the program is executed is not limited to the timing in accordance with a predetermined user operation, and may be the timing at which the job information 60A is received.
  • steps S500 to S513 processing similar to that in steps S201 to S213 of the first embodiment is performed.
  • step S515 the exposure condition information 63 in the job information 60A of the execution first surface job is transmitted to the control device 5.
  • step S517 processing similar to that in step S217 in the first embodiment is performed, and the first job execution processing program is terminated.
  • control apparatus 5 When the control apparatus 5 according to the present embodiment receives the exposure condition information of the job information 60A from the first exposure drawing apparatus 2, the same exposure as the received exposure condition information is received from the job information 60B stored in the storage unit 51. Job selection processing for selecting job information 60B having condition information is performed.
  • FIG. 16 is a flowchart showing the flow of processing of the job selection processing program executed by the control unit 50 of the control device 5 at this time.
  • the program is stored in advance in a predetermined area of the ROM of the storage unit 51.
  • the timing at which the program is executed is not limited to the timing at which the exposure condition information is received, but may be the timing at which a predetermined execution instruction is input by the user via the input unit 53.
  • step S601 the second side job having the same exposure condition information 63 as the received execution first side job exposure condition information 63 among the second side job information 60B stored in the storage unit 51. It is determined whether or not the information 60B exists.
  • step S601 determines whether the determination in step S601 is affirmative. If the determination in step S601 is affirmative, the process proceeds to step S605, and the second surface job information 60B having the same exposure condition information 63 as the exposure condition information 63 of the execution first surface job is transferred to the second exposure drawing apparatus 3. Transmission is performed via the wired cable 8a. The second exposure drawing apparatus 3 stores the received second-side job information 60B in the job storage unit 41.
  • step S601 the process proceeds to step S605 to indicate that there is no second-side job information 60B having the same exposure condition information 63 as the exposure condition information 63 of the execution first-side job. Control to display error information on the display unit 52 is performed.
  • the second exposure drawing apparatus 3 When the second exposure drawing apparatus 3 according to the present embodiment receives the job information 60B on the second surface from the control device 5, the second exposure drawing apparatus 3 draws an image on the second surface of the substrate C to be exposed based on the received job information 60B. The second job execution process is performed.
  • FIG. 17 is a flowchart showing the flow of processing of the second job execution processing program executed by the system control unit 40 of the second exposure drawing apparatus 3 at this time.
  • the program is stored in advance in a predetermined area of the ROM provided in the system control unit 40.
  • the timing at which the program is executed is not limited to the timing at which the job information 60B is received, but may be the timing at which a predetermined execution instruction is input by the user via the input device 44.
  • steps S701 to S705 processing similar to that in steps S301 to S305 in the first embodiment is performed.
  • steps S707 to S723 processing similar to that in steps S309 to S325 of the first embodiment is performed, and the second job execution processing program is terminated.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
PCT/JP2013/072818 2012-09-27 2013-08-27 露光描画装置、露光描画システム、プログラム及び露光描画方法 WO2014050405A1 (ja)

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CN201380049240.4A CN104662479B (zh) 2012-09-27 2013-08-27 曝光描绘装置、曝光描绘***、程序及曝光描绘方法

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