WO2011099384A1 - 発光装置および発光装置の製造方法 - Google Patents
発光装置および発光装置の製造方法 Download PDFInfo
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- WO2011099384A1 WO2011099384A1 PCT/JP2011/051742 JP2011051742W WO2011099384A1 WO 2011099384 A1 WO2011099384 A1 WO 2011099384A1 JP 2011051742 W JP2011051742 W JP 2011051742W WO 2011099384 A1 WO2011099384 A1 WO 2011099384A1
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- emitting element
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Definitions
- the present invention relates to a light-emitting device that can be used for a display device, a lighting fixture, a display, a backlight light source of a liquid crystal display, and the like, and a method for manufacturing the same.
- the light emitting element semiconductor light emitting element
- a method for improving the light output efficiency of the light emitting element for example, there is a method using a small chip die (light emitting element) (see, for example, Patent Document 1).
- a gallium nitride LED is used as a light emitting element
- light emitted from the light emitting element propagates through the semiconductor layer and is therefore absorbed when reflected by an electrode or the like (for example, see Patent Document 2).
- the loss of light absorption can be reduced by making the dice small chips so that the emitted light can be extracted to the outside.
- the amount of current that can be input is limited, so that a desired light output can be efficiently obtained as a multi-die structure in which a plurality of small chips are mounted.
- FD element flip chip method
- an electrode surface electrically connected to an external electrode facing downward for example, patents.
- References 1 and 3 since there are no electrodes, wires, or the like on the main extraction surface of light emitted from the light emitting element, it is possible to further increase the light output efficiency (extraction efficiency).
- the conductive member used for the base is mainly subjected to silver plating with high reflectivity.
- a base material ceramic materials that are hardly deteriorated even at high temperatures and high light densities are mainly used in the general illumination field, the in-vehicle illumination field, and the backlight light source field (see, for example, Patent Document 1).
- Au is mainly used for conductive wires used for protective elements and face-up elements (hereinafter referred to as FU elements as appropriate) having electrode surfaces provided on the top of the light emitting elements. Since Au wire is very soft and can be used for ball bonding, ⁇ 100 ⁇ m or less, for example, ultrafine wires with ⁇ of several tens of ⁇ m can be used. Many can be used.
- a light emitting device includes a base (package (mounting substrate having a wiring pattern)) on which electronic components such as a light emitting element and a protective element are mounted, and a conductive member for supplying current (electric power) to these electronic components. have. Furthermore, it has the sealing member for protecting an electronic component from an external environment.
- loss due to light absorption occurs depending on materials such as the base, the conductive member, and the sealing member.
- the surface area of the conductive member is relatively large, there is a problem that light extraction efficiency is reduced due to light absorption loss by the conductive member.
- the light emitting element semiconductor light emitting element
- materials such as a base (including a package), a conductive member, and a sealing member. Suppressing light absorption loss is effective in improving light extraction efficiency.
- Patent Document 5 titanium dioxide (TiO 2 ) or the like is formed on the surface of the metal reflective film by sputtering or vapor deposition to improve the gas barrier property by using it as a protective film. It is disclosed. Moreover, in patent document 6, it can be set as the reflector which does not have a possibility of discoloration by coat
- the light-emitting element includes a light-transmitting substrate such as sapphire and a semiconductor layer stacked thereon.
- each electrode is bonded onto the lead pattern via a conductive bump.
- substrate side of a light emitting element can be utilized as a light extraction side.
- Patent Document 12 a light-emitting device in which the lower part and side surfaces of the light-emitting element are covered with a resin containing a filler (Patent Documents 8 to 11) and a technique for electrodepositing titanium dioxide on the light-emitting element are disclosed.
- the conventional techniques have the following problems regarding light extraction of the light emitting device. Even if the surface of the metal reflective film is coated with titanium dioxide (TiO 2 ) or the like, light absorption loss occurs due to the base or the conductor depending on the portion of the coating, and the light extraction efficiency is not sufficiently improved.
- TiO 2 titanium dioxide
- a conductive portion slit groove portion
- Patent Document 7 light emitted from a light emitting element is absorbed by a conductive bump or lead. Therefore, there is a demand for reducing light absorption by members such as conductive bumps and leads and improving light extraction efficiency. In the lighting field, there is an increasing demand for uniform light distribution colors.
- the translucent substrate or the semiconductor layer constituting the light emitting element when attention is paid to the coating of the reflective member on the light emitting element, in the translucent substrate or the semiconductor layer constituting the light emitting element, all or the upper surface of the translucent substrate is covered with a reflective member such as TiO 2. And light extraction efficiency falls by absorption of the light by a reflective member. Moreover, when it is going to coat
- the reflecting member when the reflecting member is provided so that the side surface of the semiconductor layer is not covered with the reflecting member, the phosphor is settled and the semiconductor layer is buried in the phosphor when the light-transmitting member contains the phosphor. For this reason, the excitation / emission ratio in the phosphor lower layer increases, and light is absorbed again by the phosphor while passing through the thick phosphor layer, so that the light extraction efficiency is lowered.
- This invention is made
- a light-emitting device exposes a light-emitting element having a semiconductor layer and a light-transmitting substrate, at least a part and a top surface of a side surface of the light-transmitting substrate, and A reflective member that covers the side surface of the semiconductor layer, and a translucent member that covers a portion of the translucent substrate that is exposed from the reflective member, are provided.
- the light emitting device further includes a base and a conductive member provided on the base, wherein the light emitting element is placed on the conductive member, and at least on the surface of the conductive member,
- the part in which the light emitting element is not mounted may be covered with an insulating filler that is the reflecting member, and the light transmitting member may cover the light emitting element.
- the portion where the light emitting element is not placed refers to a portion outside the outer shape of the light emitting element when viewed from the upper surface side of the light emitting device. That is, when viewed from the upper surface side, the portion that is directly under the light emitting element and hidden is not necessarily covered with the insulating filler.
- an insulating filler may be coated on a portion directly below the light emitting element.
- the insulating filler is coated on the surface of the conductive member formed on the base, the light reflection efficiency of the conductive member is improved.
- the surface of the conductive member is coated with an insulating filler, it is not always necessary to use a specific member with high reflectivity as the conductive member, and a stable member that is not easily deteriorated or corroded can be used. .
- the surface of the conductive member is covered with a filler, even if a part of the conductive member is deteriorated or corroded, the light extraction efficiency of the light emitting device is prevented from being reduced due to light reflection by the filler. Can do.
- the light emitting device may be configured such that the base has a recess, the conductive member is provided on a bottom surface and a side surface of the recess, and the light emitting element is mounted on the bottom surface of the recess.
- the side surface of the recess has a region where the conductive member is not formed in a portion in contact with the upper end surface of the recess, and the portion in contact with the bottom surface of the recess in the side surface of the recess has a conductive property. It is preferable to have a region where no member is formed.
- a step is formed on a side surface of the recess on the upper end surface side of the recess, and a side surface of the step has a region where a conductive member is not formed. Furthermore, it is preferable that the shortest distance between the uppermost surface of the bottom surface of the step and the surface of the translucent member is 1/5 or less of the height of the concave portion.
- the surface of the member is preferably concave.
- the filler is preferably coated with a thickness of 5 ⁇ m or more.
- the reflectance of the filler is 50% or more with respect to light having an emission wavelength. According to such a configuration, the light extraction efficiency of the light emitting device is improved.
- the filler covers the surface of the light emitting element, and the surface area covered by the filler in one light emitting element is less than 50% of the entire surface area of the one light emitting element. Is preferred.
- the conductive member includes a positive electrode and a negative electrode, and these electrodes are provided apart from each other on the base, and at least a part between the electrodes is provided.
- the filler is preferably coated.
- the conductive portion slit (groove portion) generated between the electrodes is also covered with the filler, so that light is prevented from leaking from the bottom portion of the substrate through the conductive portion slit (groove portion). The Thereby, the light extraction efficiency can be further improved.
- the distance between the electrodes that is, the width of the conductive part slit (groove part) is preferably 200 ⁇ m or less. By making the width of the conductive part slit (groove part) 200 ⁇ m or less, the filler can easily cover the groove part.
- the light-emitting element is preferably a light-emitting element that is flip-chip mounted.
- the light emitting element can be made wireless, light absorption by the conductive wire of the light emitting element can be prevented, and light emitted from the light extraction surface side can be efficiently extracted.
- the outer peripheral portion and the lower portion of the light-emitting element that is flip-mounted are covered with a filler, light from the light-emitting surface side of the light-emitting element can be reflected and efficiently extracted to the outside.
- a protective element is mounted on the light emitting device, and the filler covers 50% or more of the surface of the protective element. According to such a configuration, light absorption loss due to the protection element can be suppressed.
- the filler is covered with a light shielding member. According to such a structure, since the light from a light emitting element is reflected with a filler and a light-shielding member, light extraction efficiency can be improved.
- the light-shielding member covers the side wall of the base. According to such a configuration, the light extraction efficiency can be improved by reflecting the light from the light emitting element by the light blocking member.
- the translucent member preferably covers the filler in addition to the light emitting element. According to such a configuration, the surface of the filler can be protected.
- a light-emitting device includes a base, a conductive member provided on the base, a light-emitting element placed on the conductive member, a portion to be an electrode of the conductive member, and an electrode terminal of the light-emitting element A conductive portion where the light emitting element is not mounted, an insulating filler covering the lower surface of the wire, a light transmissive member covering the light emitting element and the filler, It is characterized by providing.
- the gap portion of the filler is impregnated with a translucent member.
- the light-transmitting member is a member that transmits light from the light-emitting element and takes it out, and is also a member that seals the light-emitting element, and thus may be referred to as a sealing member.
- the gap between the fillers is also impregnated with the light-shielding member, so that the adhesion between the filler and the light-shielding member can be improved.
- the filler is preferably contained in an amount of more than 50% by volume with respect to the impregnated translucent member.
- the present invention provides a light emitting element having a semiconductor layer, a positive electrode and a negative electrode disposed on the surface of the semiconductor layer, a conductive member joined to the positive electrode and the negative electrode, and the positive electrode and the negative electrode. And a translucent member that covers an upper surface and a side surface of the light emitting element facing the surface on which the electrode is formed.
- the reflecting member is formed around the electrode of the light emitting element, a structure in which light does not easily leak below the light emitting element can be obtained. Therefore, loss of light caused by light entering below the light emitting element can be reduced. In addition, the light extraction efficiency can be increased by reflecting the light incident below the light emitting element.
- the reflecting member is exposed on a side surface of the light emitting device. According to such a configuration, absorption of light below the light emitting device is suppressed.
- an interface between the translucent member and the reflecting member is provided on a side surface side of the light emitting element. According to this configuration, light can be extracted from the upper surface and side surfaces of the light emitting element.
- the thickness from the upper surface of the light emitting element to the upper surface of the light transmissive member is substantially the same as the thickness from the side surface of the light emitting element to the side surface of the light transmissive member. Is preferred. According to this configuration, it is possible to obtain good light distribution characteristics in the near field. On the other hand, in the far field, the thickness from the side surface of the light emitting element to the side surface of the translucent member is made thinner than the thickness from the upper surface of the light emitting element to the upper surface of the translucent member. Since good light distribution characteristics can be obtained, it may be formed in this way.
- the light transmissive member contains a wavelength conversion member. According to this configuration, a light emitting device that can emit light having a desired wavelength is obtained. In addition, since color selection can be performed before mounting on the mounting substrate, the yield after mounting the light emitting elements is improved.
- a method of manufacturing a light-emitting device includes a step of bonding electrodes of a plurality of light-emitting elements on a support substrate, and a reflective member on the support substrate at least around the electrodes of the light-emitting elements. And a process of forming by an electrodeposition coating method or an electrostatic coating method.
- the reflecting member is formed around the electrode of the light emitting element, it is possible to reduce light loss caused by the light traveling below the light emitting element.
- the reflecting member can be easily formed on the conductive portion exposed immediately before the step of forming the reflecting member.
- a method for manufacturing a light emitting device includes: a step of forming a conductive member on a base that is a support substrate; a die bonding step of placing a light emitting element on the conductive member; and a surface of the conductive member.
- the base has a recess, a conductive member is formed on the bottom and side surfaces of the recess, and the light emitting element is mounted on the bottom of the recess.
- the filler is preferably coated with a thickness of 5 ⁇ m or more.
- the die bonding step there is a wire bonding step of electrically connecting a portion to be an electrode of the conductive member and an electrode terminal of the light emitting element with a wire, and in the filler coating step, the lower surface of the wire It is preferable to form a filler so as to cover the surface. Moreover, it is preferable to have the process of coat
- the method for manufacturing a light emitting device includes a step of covering a side surface and an upper surface of the light emitting element by forming a translucent member on the reflecting member, removing the support substrate, and And a step of dividing the light emitting element by dividing the member and the translucent member.
- the light transmissive member is impregnated in the reflective member in the step of forming the light transmissive member. According to such a procedure, the reflecting member can be fixed efficiently.
- the light transmissive member contains a wavelength conversion member. According to such a procedure, the thickness of the translucent member containing the wavelength conversion member can be adjusted in the step of separating the light emitting elements, and a light emitting device with little color unevenness can be obtained.
- the light emitting device of the present invention since light absorption by the conductive member and other conductors can be suppressed, the light from the light emitting element can be efficiently extracted and the output can be increased. Can do. Furthermore, according to the light emitting device of the present invention, the light leaking from the bottom surface of the substrate can be suppressed by covering the conductive portion slit with the filler, so that the light from the light emitting element can be extracted more efficiently. , Further increase in output can be achieved.
- this light emitting device can improve the light extraction efficiency by covering the conductive member with an insulating filler that reflects light without being limited to a specific material having high reflectivity. Furthermore, discoloration and corrosion of the conductive member are suppressed by forming the insulating filler with a thick film. As a result, reliability can be improved.
- the light emitting device of the present invention by forming the reflecting member around the electrode of the light emitting element, a structure in which light does not easily leak below the light emitting element can be obtained. Therefore, loss of light caused by light entering below the light emitting element can be reduced. In addition, the light extraction efficiency can be increased by reflecting the light incident below the light emitting element.
- a light emitting device with high output and high reliability can be manufactured.
- the method for manufacturing a light emitting device of the present invention by forming the reflecting member around the electrode of the light emitting element, it is possible to reduce the loss of light caused by the light traveling below the light emitting element. .
- the light extraction efficiency can be increased by reflecting the light traveling downward from the light emitting element.
- (A) is the perspective view which permeate
- (b) is the light-emitting device shown to (a) from the light emission surface side. It is the top view seen through a part.
- (A) is an X2-X2 cross-sectional arrow view of the light emitting device shown in FIG. 1 (b), and (b) is a schematic schematic view of the light emitting element of the light emitting device shown in FIG. FIG.
- FIG. 3 is a cross-sectional view showing a manufacturing process of the light-emitting device according to the first embodiment of the present invention, and (a) and (b) correspond to the X2-X2 cross-sectional view of the light-emitting device shown in FIG. 1 (b).
- FIG. 3 is a cross-sectional view illustrating a manufacturing process of the light-emitting device according to the first embodiment of the present invention, where (a) corresponds to an X2-X2 cross-sectional view of the light-emitting device illustrated in FIG. ) Corresponds to an X1-X1 cross-sectional arrow view of the light emitting device shown in FIG. FIG.
- FIG. 3 is a cross-sectional view illustrating a manufacturing process of the light-emitting device according to the first embodiment of the present invention, where (a) corresponds to an X2-X2 cross-sectional view of the light-emitting device illustrated in FIG. ) Corresponds to an X3-X3 cross-sectional view of the light emitting device shown in FIG.
- FIG. 4 is a cross-sectional view illustrating a manufacturing process of the light-emitting device according to the first embodiment of the present invention, where (a) corresponds to the X1-X1 cross-sectional view of the light-emitting device illustrated in FIG. ) Corresponds to an X2-X2 cross-sectional view of the light emitting device shown in FIG.
- (A) is the perspective view which permeate
- (b) is the light-emitting device shown to (a) from the light emission surface side. It is the top view seen through a part.
- (A) is a YY cross-sectional view of the light emitting device shown in FIG. 7 (b), and (b) is a schematic diagram of the light emitting element of the light emitting device shown in FIG. FIG.
- FIG. 9 is a cross-sectional view showing a manufacturing process of a light-emitting device according to a second embodiment of the present invention, wherein (a) and (b) correspond to the YY cross-sectional view of the light-emitting device shown in FIG. 7 (b). To do.
- FIG. 9 is a cross-sectional view showing a manufacturing process of a light-emitting device according to a second embodiment of the present invention, wherein (a) and (b) correspond to the YY cross-sectional view of the light-emitting device shown in FIG. 7 (b). To do.
- FIG. 9 is a cross-sectional view showing a manufacturing process of a light-emitting device according to a second embodiment of the present invention, wherein (a) and (b) correspond to the YY cross-sectional view of the light-emitting device shown in FIG. 7 (b). To do.
- FIG. 9 is a cross-sectional view showing a manufacturing process of a light-emit
- FIG. 9 is a cross-sectional view showing a manufacturing process of a light-emitting device according to a second embodiment of the present invention, wherein (a) and (b) correspond to the YY cross-sectional view of the light-emitting device shown in FIG. 7 (b).
- FIG. 8C is a cross-sectional view showing a manufacturing process of the light-emitting device according to the second embodiment of the present invention, and corresponds to a cross-sectional view along the line YY of the light-emitting device shown in FIG. It is a perspective view of an example of the light-emitting device concerning the 2nd Embodiment of this invention.
- FIG. 14A is the perspective view which permeate
- FIG. 14B is a light emission surface of the light-emitting device shown to Fig.14 (a). It is the top view seen through a part from the side. 14A is an X2-X2 cross-sectional arrow view of the light-emitting device shown in FIG. 14B, and FIG. 14B is an X1-X1 cross-sectional view of the light-emitting device shown in FIG. It is sectional drawing of another example of the light-emitting device which concerns on the 3rd Embodiment of this invention.
- FIG. 19 is a cross-sectional view of the light emitting device shown in FIG. It is a schematic sectional drawing which shows the light-emitting device which concerns on the 5th Embodiment of this invention.
- (A), (b) is process drawing explaining the manufacturing method of the light-emitting device of this invention which concerns on the 5th Embodiment of this invention.
- (A), (b) is process drawing explaining the manufacturing method of the light-emitting device which concerns on the 5th Embodiment of this invention.
- (A), (b) is process drawing explaining the manufacturing method of the light-emitting device which concerns on the 5th Embodiment of this invention.
- (A), (b) is process drawing explaining the manufacturing method of the light-emitting device which concerns on the 5th Embodiment of this invention.
- (A), (b) is a schematic sectional drawing which shows the light-emitting device which concerns on the 6th Embodiment of this invention.
- FIG. 1 It is a schematic sectional drawing which shows the modification of the light-emitting device which concerns on the 5th, 6th embodiment of this invention.
- (A), (b) is a schematic sectional drawing which shows the other modification of the light-emitting device of this invention.
- (A), (b) is a schematic sectional drawing which shows the other modification of the light-emitting device of this invention.
- (A), (b) is a SEM (Scanning Electron Microscope) photograph showing an example of a state in which a filler is deposited, and is a partially enlarged photograph of a cross section near the bottom surface of the concave portion of the light emitting device. It is a SEM photograph concerning a 3rd embodiment.
- (A), (b) is the partial enlarged photograph of the side surface vicinity of the light-emitting device in FIG. (A), (b) is the SEM photograph which concerns on another modification.
- the first to fourth embodiments will be described as a configuration in which a base is provided.
- the light emitting device using the FD element is denoted by reference numeral 100 (first and third embodiments)
- the light emitting device using the FU element is denoted by reference numeral 200 (second and fourth).
- Embodiment the light emitting device using the FD element is denoted by reference numeral 100 (first and third embodiments)
- the light emitting device using the FU element is denoted by reference numeral 200 (second and fourth). Embodiment).
- the light-emitting device 100 includes a light-emitting element 104 having a semiconductor layer 11 and a light-transmitting substrate (hereinafter referred to as a substrate as appropriate) 10, and at least one of the side surfaces of the light-transmitting substrate 10. And a reflective member 114 that exposes the side surface of the semiconductor layer 11 and a translucent member 108 that covers a portion of the translucent substrate 10 that is exposed from the reflective member 114. It is a thing.
- the light emitting device 100 is a light emitting device 100 on which at least one light emitting element 104 (two in this case) is mounted, and is provided on the base 101 and the base 101.
- an insulating filler 114 is used
- a light-transmitting member 108 that covers the light-emitting element 104 is mainly provided.
- a metal member 103, a protection element 105, and a wire 106 provided on the conductive members 102a and 102b on the base 101 are provided.
- the base 101 houses and protects electronic components such as the light emitting element 104 and the protection element 105.
- the base 101 has a concave portion 109 having an upper surface as an opening, and a bottom surface 120 and a side surface 130 are formed by the concave portion 109.
- Conductive members 102 a and 102 b are provided on the bottom surface 120 of the recess 109.
- an insulating member is preferable, and a member that hardly transmits light emitted from the light emitting element 104, external light, or the like is preferable. Moreover, what has a certain amount of intensity
- an inorganic filler such as SiO 2, TiO 2, Al 2 O 3 were mixed in a resin, the improvement of mechanical strength, reduction in thermal expansion coefficient, light It is also possible to improve the reflectance.
- the conductive members 102a and 102b are members for electrically connecting the outside and electronic components such as the light emitting element 104 and the protective element 105 and supplying electric current (power) from the outside to these electronic components.
- the conductive members 102a and 102b are also provided on the back surface 140 of the base body 101.
- the conductive members 102a and 102b on the bottom surface 120 of the recess 109 are electrically connected to the inside of the base body 101, respectively. It is provided so as to be continuous (integrated).
- the conductive members 102a and 102b can be provided with a function as a heat dissipation member in addition to being used as an electrode material for energization.
- the conductive members 102 a and 102 b may also extend to the side surface (side wall) 130 in the recess 109 of the base 101.
- the conductive members 102a and 102b have a positive electrode and a negative electrode, and these electrodes are provided separately on the base 101, and at least partly between the electrodes.
- the filler 114 is coated. That is, the conductive members 102a and 102b are separated horizontally (laterally) on the base 101 into a conductive member 102a as a positive electrode (anode) and a conductive member 102b as a negative electrode (cathode). Is provided. Thereby, a conductive part slit (groove part) G is formed between the electrodes (between the conductive members 102a and 102b).
- the light emitting element 104 is placed so as to straddle the conductive members 102a and 102b.
- the conductive portion slit (groove portion) G is covered with a filler 114 as described later. (See FIG. 5 (b)).
- a filler 114 As described later.
- the groove part G is completely coat
- the groove portion G is completely covered and the filler covers 80% or more of the region irradiated with light in the light emitting device excluding the light emitting element 104.
- the width of the groove G is preferably 200 ⁇ m or less.
- the filler 114 can easily cover the groove part. Moreover, by making the width of the groove part G 100 ⁇ m or less, the filler can more easily cover the groove part, which is more preferable. It is more preferable that the groove part G is completely covered with the filler.
- the lower limit is not limited, but is preferably 30 ⁇ m or more from the viewpoint of preventing contact between the electrodes.
- the filler 114 may also be wrapped around and covered with the groove portion G located below (downward) the light emitting element 104.
- the space between the groove G and the bonding member 111 located below (downward) the light emitting element 104 is sealed with a translucent member 108 in addition to the filler 114.
- the groove part G may not be covered with the filler 114 and may not be filled with the translucent member 108.
- the groove part G may be covered by applying a light shielding resin.
- the material of the conductive members 102 a and 102 b can be appropriately selected depending on the material used as the base 101, the manufacturing method of the light emitting device 100, and the like.
- the material of the conductive members 102a and 102b is preferably a material having a high melting point that can withstand the firing temperature of the ceramic sheet.
- a high melting point material such as tungsten or molybdenum. It is preferable to use a metal.
- the material of the conductive members 102a and 102b is preferably a material that can be easily processed, and when an epoxy resin that is injection-molded is used as the material of the base 101,
- the material of the conductive members 102a and 102b is preferably a member that can be easily processed by punching, etching, bending, etc., and has a relatively large mechanical strength.
- Specific examples include metals such as copper, aluminum, gold, silver, tungsten, iron and nickel, or iron-nickel alloys, phosphor bronze, iron-containing copper, molybdenum and the like.
- a metal member that covers the surface of the conductive member may be further provided.
- the “filler covering the surface of the conductive member” includes those in which a filler is coated on the surface of the metal member via the metal member on the conductive member. However, this metal member can be omitted.
- the metal member 103 improves the light reflection efficiency of the conductive members 102a and 102b by covering the surfaces of the conductive members 102a and 102b. However, the metal member 103 can be omitted.
- the metal member 103 does not need to be a highly reflective member, and may be integrated with the conductive members 102a and 102b.
- a metal member 103 is provided on the base body 101, that is, on the conductive members 102a and 102b on the bottom surface 120 of the recess 109. As shown in FIG. Further, as shown in FIG. 2A, the metal member 103 may be covered also on the surfaces of the conductive members 102 a and 102 b exposed on the back surface 140 of the base 101. The metal member 103 does not need to be provided up to the conductive members 102a and 102b embedded in the base 101.
- the material of the metal member 103 is not particularly limited as long as it can be plated.
- only silver, or an alloy of silver and a highly reflective metal such as copper, gold, aluminum, rhodium, or the like, or A multilayer film using silver or each alloy can be used.
- gold having excellent thermal conductivity or the like is used alone.
- the film thickness of the metal member 103 is preferably a metal foil of about 0.05 ⁇ m to 50 ⁇ m. When a multilayer film is used, the thickness of the entire layer is preferably within this range.
- the metal member 103 can be formed by sputtering, vapor deposition, or the like. In addition, even if it does not use the silver which is excellent in reflectivity as the metal member 103, since the insulating filler 114 which has light reflectivity is coat
- the light emitting element 104 is an FD element having an electrode patterned on one main surface, and is bonded and mounted (flip chip mounting) on the bottom surface 120 of the recess 109 by the bonding member 111.
- the bonding member 111 and the metal member It is connected to the conductive members 102 a and 102 b through 103.
- the light emitting element 104 has a substrate 10 and a semiconductor layer 11 stacked on the substrate 10 as shown in FIG.
- this semiconductor layer 11 an n-type semiconductor layer, an active layer, and a p-type semiconductor layer are laminated in order, an n-type electrode 16 is formed on the n-type semiconductor layer, and a p-type electrode 14 is formed on the p-type semiconductor layer. Is formed.
- the electrodes formed on the semiconductor layer 11 are mounted on the conductive members 102a and 102b.
- As a method for mounting the light emitting element 104 mounting using a solder paste as the bonding member 111 or mounting using bumps using solder or the like is used as shown in FIG.
- the semiconductor layer 11 of the light emitting element 104 is preferably covered with an insulating protective film 13 as shown in FIG. Note that the light-emitting element 104 of the FD element illustrated in FIG. 2B is further simplified in other drawings.
- a light emitting diode is preferably used, and a light emitting element having an arbitrary wavelength can be selected.
- a light emitting element having an arbitrary wavelength can be selected.
- the light emitting element 104 of blue (light having a wavelength of 430 nm to 490 nm) and green (light having a wavelength of 490 nm to 570 nm) ZnSe, a nitride-based semiconductor (In X Al Y Ga 1-XY N, 0 ⁇ X , 0 ⁇ Y, X + Y ⁇ 1), GaP, or the like can be used.
- the red light emitting element 104 (light having a wavelength of 620 nm to 750 nm), GaAlAs, AlInGaP, or the like can be used. Furthermore, a semiconductor light emitting element made of a material other than this can also be used.
- a nitride semiconductor In X Al Y Ga 1-XY N, 0 ⁇ X that can emit light of a short wavelength capable of efficiently exciting the fluorescent material.
- the emission wavelength can be variously selected by adjusting the material of the semiconductor layer 11 and the mixed crystal thereof.
- the structure of the light-emitting element 104 is either a structure in which both electrodes are formed on the semiconductor layer 11 stacked on the substrate 10 or a structure in which electrodes are provided in the vertical direction on the upper surface of the semiconductor layer 11 and the surface of the substrate 10. May be.
- a light-emitting element 104 made of a material other than these can also be used. Note that the component composition, emission color, size, number, and the like of the light-emitting element 104 to be used can be appropriately selected depending on the purpose. Alternatively, the light-emitting element 104 can output not only visible light but also ultraviolet light and infrared light.
- the filler 114 is insulative and covers the conductor portion of the light emitting device 100, and plays a role of suppressing a decrease in light extraction efficiency.
- the reflecting member 114 is preferably a white filler, and mainly an inorganic compound is preferably used.
- a portion of the surface of the metal member 103 in the conductive members 102a and 102b formed on the bottom surface 120 of the recess 109 is not filled with the light emitting element 104 or the protective element 105. 114.
- the peripheral region of the light emitting element 104, the side surface of the bonding member 111, and the exposed portion of the conductive portion slit are covered with a filler 114.
- the region covered with the filler 114 is a region where the conductor portion (conductor) is mainly exposed on the light extraction surface side of the light emitting device 100. It is preferable to cover at least 50% of the exposed portion of the conductor. Furthermore, it is preferable to cover almost the entire surface of the exposed conductor. In addition, since the electrodeposition coating etc. which are mentioned later cannot be performed in the site
- the protective element 105 and the conductive wire 106 are covered with the filler 114. Further, the filler 114 is not coated on the conductive members 102 a and 102 b exposed on the back surface of the base 101.
- the semiconductor layer 11 is covered with a protective film (insulating film) 13.
- a protective film insulation film
- the filler 114 At least a part and the upper surface of the side surface of the translucent substrate 10 are exposed, and the side surface of the semiconductor layer 11 is covered with the filler 114. That is, here, all of the side surfaces of the semiconductor layer 11 are covered with the filler 114, and part of the side surfaces of the substrate 10 are covered with the filler 114, and other portions and upper surfaces of the side surfaces of the substrate 10 are filled with the filler 114. Is exposed from.
- the resin crawls up to the side surface of the substrate 10 and the entire side surface is covered.
- the viscosity is adjusted so that the resin does not crawl up, the content of the reflective material increases to increase the viscosity, making it difficult to coat the entire surface of the conductive member thinly.
- the filler 114 can be coated on the conductive members 102a, 102b and the like without covering all of the side surfaces of the substrate 10.
- the side surface of the semiconductor layer 11 is covered with the filler 114, the light extraction efficiency can be improved.
- the translucent member 108 contains a phosphor
- the semiconductor layer 11 is not buried in the phosphor even if the phosphor settles. Therefore, light absorption by the phosphor is suppressed, and a decrease in light extraction efficiency can be suppressed. Moreover, the fall of light extraction efficiency can also be suppressed from the point that the light conversion by a fluorescent substance can be performed on the light extraction side as much as possible.
- the substrate 10 is not covered with the filler 114 by electrodeposition coating or the like, but depending on the coating amount, thickness, etc. of the filler 114, the substrate 10
- the surface (a part of the side surface of the substrate 10 (the lower portion of the substrate 10)) is covered with the filler 114.
- the semiconductor layer 11 not covered with the protective film 13 is covered with the filler 114.
- FIG. 8B when a FU element is used as the light emitting element 204, a bonding layer 123 that is a conductor is provided on the lower portion (back surface) of the substrate 20 in order to place the light emitting element. In such a case, part of the filler 114 also adheres to the bonding layer 123 on the back surface of the substrate 20.
- the filler 114 is a white filler, light is more easily reflected, and the light extraction efficiency can be improved.
- an inorganic compound is preferably used as the filler 114.
- the term “white” as used herein includes a filler itself which may be white, and also includes a material which appears to be white due to scattering when there is a difference in refractive index from the material surrounding the filler.
- the reflectance of the filler 114 is preferably 50% or more, and more preferably 70% or more, with respect to light having an emission wavelength. In this way, the light extraction efficiency of the light emitting device 100 is improved.
- the surface area covered with the filler 114 in one light emitting element 104 is less than 50% of the entire surface area of the one light emitting element 104. In this manner, the rate at which light emission from the light emitting element 104 is hindered by the filler 114 is low, and a decrease in light output from the light emitting element 104 can be suppressed.
- the surface area covered with the filler 114 in each of all the light emitting elements is preferably less than 50% of the entire surface area of one light emitting element 104.
- the filler 114 preferably covers 50% or more of the surface (exposed portion) of the protective element 105. In this way, light absorption loss due to the protective element 105 can be suppressed.
- Such an inorganic compound filler 114 examples include SiO 2 , Al 2 O 3 , Al (OH) 3 , MgCO 3 , TiO 2 , ZrO 2 , ZnO 2 , and Nb 2 O. 5 , MgO, Mg (OH) 2 , SrO, In 2 O 3 , TaO 2 , HfO, SeO, Y 2 O 3 and other oxides, SiN, AlN, AlON and other nitrides, MgF 2 and other fluorides, etc. Is mentioned. These may be used alone or in combination. Alternatively, these may be laminated.
- the particle size of the filler 114 is preferably about ⁇ 1 nm to 10 ⁇ m. By setting the particle size of the filler 114 within this range, the particle size is appropriate for coating, so that the filler 114 can be easily coated.
- the particle size of the filler 114 is preferably ⁇ 100 nm to 5 ⁇ m, more preferably ⁇ 200 nm to 2 ⁇ m. Further, the shape of the filler may be spherical or scaly.
- FIGS. 29A and 29B as an example of a state in which the filler 114 is deposited, a partially enlarged photograph by SEM of a cross section near the bottom surface 120 in the concave portion 109 of the light emitting device 100 is shown. Note that FIG. 29A shows one scale of 2 ⁇ m, and FIG. 29B shows one scale of 0.2 ⁇ m.
- filler 114 (including a spherical shape and a scale shape) having a particle diameter of about 250 nm is deposited by electrophoresis on the conductive member 102a (here, on the metal member 103 because the metal member 103 is formed).
- the translucent member 108 is impregnated in the filler 114.
- the filler 114 is preferably contained in an amount of more than 50% by volume, more preferably 65% by volume or more, with respect to the translucent member 108 to be impregnated.
- the filler 114 is exposed in 50% or more of the cross-sectional area in the cross-sectional observation of the portion where the filler 114 is deposited after impregnating the translucent member 108, and 65% More is more preferable.
- the moldability is lowered if the filler 114 is contained in an amount of more than 65% by volume with respect to the resin material. Moreover, even if it is 65 volume% or less, it is difficult to control the amount of resin, and it is also difficult to properly arrange a predetermined amount of resin at a desired location.
- the filler 114 can be coated at a high density, and the thickness thereof can be reduced.
- the translucent member 108 is a member that protects the light emitting element 104, the protective element 105, the wire 106, the filler 114, and the like placed on the base 101 from dust, moisture, external force, and the like. As shown in FIG. 2A, the inside of the concave portion 109 of the base 101 is covered (sealed) with a translucent member 108. In order to improve the adhesion between the filler 114 and the translucent member 108, it is preferable that the translucent member 108 is impregnated between the filler 114 and the filler 114, that is, in the gap portion of the filler 114.
- the light-transmitting member 108 can be omitted.
- the material of the light transmissive member 108 is preferably a light transmissive material capable of transmitting light from the light emitting element 104.
- the material include a silicone resin, an epoxy resin, and a urea resin.
- a colorant, a light diffusing agent, a filler, a fluorescent member, and the like can be contained as desired.
- the translucent member 108 can be formed of a single member, or can be formed as a plurality of layers of two or more layers.
- the filling amount of the translucent member 108 may be an amount that covers the light emitting element 104, the protection element 105, the wire 106, and the like placed in the concave portion of the base 101.
- the surface of the translucent member 108 may be raised to have a bullet shape or a convex lens shape.
- the wires 106 and 206 (see FIG. 8) electrically connect the electrode terminals of the FU element and the protective element 105 to the portions that serve as the electrodes of the conductive members 102a and 102b disposed in the recess 109 of the base 101. is there.
- Examples of the material of the wires 106 and 206 include metals such as gold, copper, platinum, and aluminum, and alloys thereof, and it is particularly preferable to use gold having excellent thermal conductivity.
- the protective element 105 plays a role of, for example, a Zener diode, and may be provided as necessary. As shown in FIG. 4B, the protection element 105 is mounted (mounted) on the bottom surface 120 of the recess 109 by being bonded (mounted) with a bonding member 110, for example, Ag paste, and provided on the bottom surface of the protection element 105. It is connected to the conductive member 102 a via a metal layer (not shown) and the metal member 103.
- a bonding member 110 for example, Ag paste
- a wire 106 is connected to the upper surface of the protection element 105, and the wire 106 is connected to the conductive member 102 b through the metal member 103, so that the protection element 105 and the conductive member 102 b are electrically connected to each other. It is connected.
- the bonding member (die bond member) 111 electrically connects the electrode of the light emitting element 104 and the conductive members 102a and 102b, and bonds the light emitting element 104 to the base 101. It is a member to be made. A conductive member is used for the bonding member 111.
- Specific materials include an Au-containing alloy, an Ag-containing alloy, a Pd-containing alloy, an In-containing alloy, a Pb—Pd-containing alloy, an Au—Ga-containing alloy, Au— Examples thereof include an Sn-containing alloy, an Sn-containing alloy, an Au—Ge-containing alloy, an Au—Si-containing alloy, an Al-containing alloy, a Cu—In-containing alloy, and a mixture of metal and flux.
- a conductive member is not necessarily used as the bonding member 111, and a resin (resin composition) such as an insulating epoxy resin or silicone resin can be used.
- the bonding member 111 a liquid, paste, or solid (sheet, block, or powder) member can be used, and can be appropriately selected depending on the composition, the shape of the base 101, and the like. Moreover, these joining members 111 may be formed by a single member, or may be used in combination of several kinds. Furthermore, in particular, when a translucent bonding member is used, a fluorescent member that absorbs light from the light emitting element and emits light of a different wavelength can be included therein.
- [Wavelength conversion member] Light having a different wavelength by absorbing at least a part of light from the light emitting element 104 as a wavelength conversion member in the light transmitting member 108 or the light blocking member 207 (see FIG. 8A) described later.
- a fluorescent member that emits light may also be included.
- the fluorescent member it is more efficient to convert the light from the light emitting element 104 into a longer wavelength.
- the fluorescent member may be formed of a single fluorescent material or the like as a single layer, or may be formed of a mixture of two or more fluorescent materials or the like as a single layer.
- two or more single layers containing one kind of fluorescent substance or the like may be laminated, or two or more single layers each containing two or more kinds of fluorescent substances may be laminated.
- any member that absorbs light from a semiconductor light emitting element having a nitride-based semiconductor as a semiconductor layer and converts the light to light having a different wavelength may be used.
- a nitride-based phosphor or an oxynitride-based phosphor that is mainly activated by a lanthanoid-based element such as Eu or Ce can be used. More specifically, it is preferably roughly at least one selected from the groups described in the following (1) to (3).
- Phosphors such as organic or organic complexes mainly activated by lanthanoid elements such as Eu
- the YAG (Yttrium Aluminum Garnet) phosphor which is a rare earth aluminate phosphor mainly activated by a lanthanoid element such as Ce in (2), is preferable.
- the YAG phosphor is represented by the following composition formulas (21) to (24). (21) Y 3 Al 5 O 12 : Ce (22) (Y 0.8 Gd 0.2 ) 3 Al 5 O 12: Ce (23) Y 3 (Al 0.8 Ga 0.2) 5 O 12: Ce (24) (Y, Gd) 3 (Al, Ga) 5 O 12 : Ce
- part or all of Y may be substituted with Tb, Lu, or the like.
- Tb 3 Al 5 O 12: Ce, Lu 3 Al 5 O 12: may be Ce or the like.
- phosphors other than the above-described phosphors having the same performance, function, and effect can be used.
- FIGS. 3A and 3B are cross-sectional views showing the manufacturing process of the light-emitting device 100, and FIGS. 3A and 3B correspond to the X2-X2 cross-sectional view of the light-emitting device shown in FIG. 1B.
- FIG. 4A corresponds to an X2-X2 cross-sectional arrow view of the light-emitting device shown in FIG. 1B
- FIG. 4B shows an X1-X1 cross-sectional arrow of the light-emitting device shown in FIG. It corresponds to a visual map.
- 5A corresponds to an X2-X2 cross-sectional arrow view of the light emitting device shown in FIG. 1B, and FIG.
- FIG. 5B shows an X3-X3 cross sectional arrow of the light emitting device shown in FIG. 1B. It corresponds to a visual map.
- FIG. 6A corresponds to an X1-X1 cross-sectional view of the light emitting device shown in FIG.
- FIG. 6B corresponds to an X2-X2 cross-sectional view of the light emitting device illustrated in FIG. 3 to 6 show the manufacturing steps of the light emitting device 100 in time series, and are basically manufactured in the order of FIGS. 3 (a) to 6 (b). However, since FIG. 5A, FIG. 5B, and FIG. 6A are steps of covering the filler, they are performed almost simultaneously.
- the method for manufacturing the light emitting device 100 according to the present invention includes a conductive member forming step, a die bonding step, a filler covering step, and a translucent member forming step.
- a metal member formation process, a protection element bonding process, and a wire bonding process are included.
- each step will be described.
- the conductive member forming step is a step of forming conductive members 102 a and 102 b on the base 101. Further, when the conductive members 102a and 102b are also formed on the back surface 140 of the base 101, this step is performed. That is, this step is a step of providing the conductive members 102 a and 102 b on the base 101.
- a conductive paste containing fine particles of a refractory metal such as tungsten or molybdenum is applied in a predetermined pattern at the stage of an unfired ceramic green sheet. It can be obtained by firing.
- the conductive members 102a and 102b can be formed on a pre-fired ceramic plate, for example, by vacuum deposition, sputtering, plating, or the like.
- the concave portion 109 of the base can be formed, for example, by forming and stacking through holes of various sizes on a ceramic green sheet.
- the conductive members 102 a and 102 b can be formed on the side surface 130 in the same manner as the bottom surface 120.
- a copper plate is attached to a prepreg obtained by semi-curing a glass cloth-containing epoxy resin or epoxy resin and then thermally cured, and then a metal such as copper is used by a photolithography method.
- a metal such as copper is used by a photolithography method.
- the metal member forming step is a step of forming a bondable metal member 103 on the conductive members 102 a and 102 b on the substrate 101. Further, when the metal member 103 is formed also on the conductive members 102a and 102b such as the back surface 140 of the base 101, this step is performed. That is, this step is a step of providing the metal member 103 on the surfaces of the conductive members 102a and 102b.
- a plating method, a sputtering method, a vapor deposition method, a method for bonding a thin film, or the like can be used.
- the plating method any method of electrolytic plating and electroless plating can be used.
- the conductive members 102a and 102b and the metal member 103 may be patterned into a predetermined shape.
- the metal member needs to be a metal material that can be wire-bonded or flip-chip mounted. , 102b do not need to specifically limit the type of metal.
- the light emitting element 104 is placed on the base 101 after the metal member 103 is formed (on the conductive members 102a and 102b when the metal member 103 is not formed). And joining.
- the die bonding process includes a light emitting element placing process for placing the light emitting element 104 on the base 101 and a heating process for joining the light emitting element 104 by heating after placing the light emitting element 104.
- the light emitting element mounting step is a step of mounting the light emitting element 104 on the base 101 via the bonding member 111.
- the joining member 111 includes, for example, rosin (pine resin) or a thermosetting resin, and may further contain an activator such as a solvent for adjusting viscosity, various additives, or an organic acid, if necessary. Further, a metal (for example, powder) may be included.
- the light emitting element 104 is bonded to the conductive members 102 a and 102 b (metal member 103) on the base 101 by the bonding member 111. Note that a flux may be applied to the back surface of the light emitting element 104 in advance.
- the joining member 111 may be provided so as to be interposed between the conductive members 102a and 102b and the light emitting element 104 via the metal member 103, the light emitting element 104 among the conductive members 102a and 102b is provided. You may provide in the area
- FIG. 4A shows a state in which a liquid or paste-like resin composition (joining member) 111 is provided on the conductive members 102a and 102b.
- a method such as a potting method, a printing method, or a transfer method can be appropriately selected depending on the viscosity or the like.
- the light emitting element 104 is mounted in the location in which the joining member 111 was provided.
- An electrode is formed on the bonding surface of the light emitting element 104, and the electrode and the conductive members 102a and 102b are electrically connected.
- the light emitting element is placed on the conductive members 102a and 102b in the same manner as when the liquid or paste bonding member 111 is used after the solid bonding member 111 is placed.
- 104 can be mounted.
- the solid or paste-like bonding member 111 may be once melted by heating or the like to fix the light emitting element 104 at a desired position on the conductive members 102a and 102b.
- the amount of the resin composition is preferably adjusted to be equal to or larger than the bonding area of the light emitting element 104 after the light emitting element 104 is bonded.
- the light-emitting element is prevented from moving and deviating from a predetermined position due to the surface tension of the liquid or paste-like resin composition. Therefore, it is preferable to join each light emitting element 104 with the independent joining member 111. Note that the thickness of the bonding member varies depending on the type of the bonding member, and when the light emitting element is placed, the bonding member is crushed and spread in the lateral direction, or when following the unevenness of the substrate. Adjust in consideration. *
- the heating process is a process in which, after the light emitting element 104 is mounted, the bonding member 111 is heated to bond the light emitting element 104 onto the base 101.
- the bonding member 111 may be an insulating member, and at the heating step, at least a part of the bonding member 111 is volatilized. Perform at a temperature higher than the temperature.
- the joining member 111 contains a thermosetting resin, it is preferable to heat it more than the temperature at which hardening of a thermosetting resin occurs. In this way, the light emitting element 104 can be bonded and fixed with a thermosetting resin.
- the bonding member 111 when a resin composition containing, for example, rosin and a low melting point metal are used as the bonding member 111, the low melting point metal is placed on the conductive members 102a and 102b (on the metal member 103). In the case where the low melting point metal is melted, it is preferably heated to a temperature higher than the melting point.
- the bonding member 111 contains rosin and a metal is provided on the light emitting element side
- a metal film is formed on a sapphire surface of a gallium nitride based semiconductor element using a sapphire substrate
- insulation is caused by the action of the rosin component in the bonding member and the phenomenon that the metals try to diffuse each other by heating.
- a metal bond between the conductive member and the metal film can be formed while the member is removed. Thereby, a light emitting element can be fixed more firmly and electrical conduction is also possible.
- a cleaning step can be further performed following the heating.
- the remaining resin composition may be further removed by washing or the like after a part of the resin composition is eliminated by volatilization by heating (residual bonding member). Washing step).
- the resin composition contains rosin, it is preferably washed after heating.
- the cleaning liquid it is preferable to use a glycol ether organic solvent or the like.
- the protective element is formed on the base 101 after forming the metal member 103 (after forming the conductive members 102a and 102b when the metal member 103 is not formed).
- the wire bonding step is a step of connecting the electrode terminal on the protection element 105 and the portion to be the electrode of the conductive member 102b with the wire 106.
- the connection method of the wire 106 is not particularly limited, and may be performed by a commonly used method.
- ⁇ Filler coating process> As shown in FIG. 5 (a), in the filler coating step, a portion of the surface of the metal member 103 in the conductive members 102a and 102b where the light emitting element 104 is not formed is subjected to an electrolytic plating method, an electrodeposition coating method or a static coating method. This is a step of coating with a filler 114 by an electropainting method. In this step, after the light emitting element 104 is mounted by the bonding member 111, the exposed surface of the metal member 103 on the base 101 is covered with the filler 114 (on the conductive members 102a and 102b when the metal member 103 is not formed). . At this time, at least a part and the upper surface of the side surface of the translucent substrate 10 are exposed, and the side surface of the semiconductor layer 11 is covered with the filler 114.
- this filler coating step it is preferable to cover the groove G between the electrodes (between the conductive members 102a and 102b), and further, as shown in FIG. 6 (a).
- the protective element 105 and the wire 106 are also preferably covered.
- a film forming method such as an electrolytic plating method, electrostatic coating, or an electrodeposition method can be used.
- the filler coating step is formed, for example, by including a step of placing the light emitting device 100 in a solution containing the filler and a step of depositing the filler on the light emitting device 100 by electrophoresis in the solution. .
- a method of depositing the filler an electrode disposed opposite to the light emitting device 100 is disposed in the solution, and a voltage is applied to the electrode to cause electrophoresis of the charged filler in the solution.
- the filler 114 is deposited on the conductive members 102a and 102b where the metal member 103 is exposed.
- the thickness of the deposited filler 114 can be appropriately adjusted depending on the deposition conditions and time, but is preferably at least 5 ⁇ m.
- the thickness is 10 ⁇ m or more.
- a light reflecting layer is formed by the deposited filler 114 by using a material having a high filler reflectivity. After the formation process by electrodeposition of the filler 114 described above, members other than the filler 114 may be formed by electrodeposition.
- the electrolytic solution for electrodeposition a mixed solution in which a filler is dispersed is used.
- the electrolyte is not particularly limited as long as the charged filler can move by receiving electrostatic force.
- an acid or an alkali for dissolving the filler in the electrolytic solution for example, nitric acid containing ions of alkaline earth metal (such as Mg 2+ ) can be contained.
- the electrolytic solution may contain a metal alkoxide. Specifically, it is an organometallic material containing an element selected from Al, Sn, Si, Ti, Y, Pb or an alkaline earth metal as a constituent element.
- the electrolytic solution As a material contained in the electrolytic solution, a mixed solution in which a filler is dispersed in a sol obtained by mixing a metal alcoholate or a metal alkoxide and an organic solvent in a predetermined ratio may be used as the electrolytic solution. it can.
- the electrolytic solution can be a mixed solution in which acetone is used as an organic solvent and alumina sol and a filler are used as an organic metal material in a solution containing isopropyl alcohol as a mother liquor.
- the filler 114 can be coated on a plurality of light emitting devices at a time, which is excellent in mass productivity.
- the translucent member forming step is a step of forming the translucent member 108 on the base 101 and covering the light emitting element 104 with the translucent member 108.
- the translucent member 108 that covers the light emitting element 104, the protective element 105, the wire 106, and the like is a process in which a molten resin is injected into the concave portion 109 of the base 101 and then cured by heating, light irradiation, or the like.
- the light emitting device and the manufacturing method thereof described above exemplify the light emitting device and the manufacturing method thereof for embodying the technical idea of the present invention
- the present invention describes the light emitting device and the manufacturing method thereof as described above. It is not limited to.
- the member shown by the claim is not specified as the member of the embodiment.
- the dimensions, materials, shapes, relative arrangements, and the like of the components described in the embodiments are not intended to limit the scope of the present invention only to the extent that there is no specific description. It is just an example.
- the light emitting device using mainly the FD element has been described, but the present invention may be a light emitting device using the FU element.
- the number of light-emitting elements mounted on the light-emitting device is adjusted as appropriate, and there is a light-emitting device on which a plurality of three or more light-emitting elements are mounted.
- a light-emitting device using a FU element and a manufacturing method thereof will be described as a second embodiment.
- FIG. 13 shows a perspective view of an example of the light emitting device according to this embodiment.
- the overall configuration of the light emitting device will be described while taking up each configuration, and then the materials and the like of each member will be described.
- matters that are mainly different from the embodiment of the light emitting device 100 described above will be described.
- the light emitting device 200 is a light emitting device 200 on which at least one light emitting element 204 (here, two) is mounted, and includes a base 201 and a conductive member provided on the base 201.
- the insulating member 114 that covers the lower surface of the metal member 103 and the wire 206 on which the light emitting element 204 is not mounted, and the translucent member 108 that covers the light emitting element 204 and the filler 114 are mainly provided. Further, a light shielding member 207 is provided here.
- the base 201 has a recess 209a having an upper surface as an opening, and further, recesses 209b and 209c inside the recess 209a.
- a bottom surface 220a and a side surface 230a are formed. Is formed.
- the bottom surfaces 220b and 220c and the side surfaces 230b and 230c are formed by the recesses 209b and 209c, and a step is formed between the bottom surface 220a and the bottom surfaces 220b and 220c.
- a conductive member 202a is provided on the bottom surface 220a of the recess 209a
- a conductive member 202b is provided on the bottom surface 220b of the recess 209b
- a conductive member 202c is provided on the bottom surface 220c of the recess 209c.
- the conductive members 202b and 202c are also provided on the back surface 240 of the base 201, and the conductive members 202b and 202c on the bottom surfaces 220b and 220c of the recesses 209b and 209c are respectively inside the base. It is provided so as to be electrically continuous (integrated).
- the metal member 103 is provided on the base 201, that is, on the conductive members 202a, 202b, and 202c of the bottom surfaces 220a, 220b, and 220c of the recesses 209a, 209b, and 209c. Further, as shown in FIG. 8A, the metal member 103 may be covered also on the surfaces of the conductive members 202 b and 202 c provided on the back surface 240 of the base body 201. The metal member 103 is not provided up to the conductive members 202b and 202c embedded in the base body 201. The metal member 103 may be integrated with the conductive members 202b and 202c, or the metal member 103 may be omitted.
- the light emitting element 204 is an FU element having electrodes on its upper surface, and a bonding layer 123 is formed on the lower surface of the light emitting element 204.
- the bonding layer 123 formed on the light emitting element 204 is connected to the bonding member 111 on the surface formed in the order of the conductive member 202a, the metal member 103, and the bonding member 111 on the bottom surface 220a of the recess 209a.
- the joining member 111 is not shown in the drawing showing the light emitting device 200 of the second embodiment.
- the light emitting element 204 includes a substrate 20 and a semiconductor layer 21 stacked on the substrate 20.
- a patterned Ag / Pt / AuSn film (laminated in order from the left) can be formed on the back surface of the substrate 20.
- an n electrode (n pad electrode) 25 b that is an electrode terminal is provided on one side of the semiconductor layer 21, and a p pad electrode 25 a that is an electrode terminal is provided on the other side via the electrode 24.
- the pad electrodes 25a and 25b are formed on the same surface side of the semiconductor layer 21, and are electrically connected to the portions to be the electrodes of the conductive members 202b and 202c by wires 206 (see FIG. 7B).
- the portions of the semiconductor layer 21 of the light emitting element 204 other than the portions connected by the wires 206 of the pad electrodes 25 a and 25 b are covered with an insulating protective film (insulating film) 23. Note that the light emitting element 204 of the FU element shown in FIG. 8B is further simplified in other drawings. *
- the width of the bonding layer (the reflective layer 22a, the barrier layer 22b, and the adhesive layer 22c) disposed on the lower surface side of the light emitting element 204 is configured to be narrower than the width of the light emitting element 204, that is, the width of the substrate 20. ing. As described above, when the width of the bonding layer is narrower than the width of the substrate 20, the bonding layer is not cut in the process of separating the light emitting elements from the wafer, and thus the bonding layer is peeled off in the separation process. Fear can be avoided.
- the bonding layer 123 may have a multilayer structure including the reflective layer 22a and the barrier layer 22b in addition to the adhesive layer 22c that bonds the light emitting element 204 to the base 201.
- the reflective layer 22 a is a layer that efficiently reflects the light emitted by the light emitting element 204 to the inside of the substrate 20 or the semiconductor layer 21. By doing in this way, light can be taken out from the end surface other than the reflective layer 22a of the light emitting element 204 formed.
- specific materials Ag, Al, Rh, Pt, Pd, or the like is preferably used. For example, when Ag or an Ag alloy is used, an element with high reflectivity and good light extraction can be obtained.
- the barrier layer 22b is a layer for preventing diffusion of materials of other members, particularly the adhesive layer 22c.
- a material having a high melting point such as W or Mo, Pt, Ni, Rh, Au or the like is preferable.
- the adhesive layer 22 c is a layer that adheres the light emitting element 204 to the base 201.
- Specific materials include In, Pb—Pd, Au—Ga, Au and Ge, Si, In, Zn, and Sn, Al and Zn, Ge, Mg, Si, and In, Cu And alloys of Ge and In, Ag-Ge alloys, and Cu-In alloys.
- Preferable examples include eutectic alloy films, such as an alloy mainly composed of Au and Sn, an alloy mainly composed of Au and Si, and an alloy mainly composed of Au and Ge. Of these, AuSn is particularly preferable.
- the light emitting element 204 is placed on the surface of the metal member 103 in the conductive members 202a, 202b, and 202c formed on the bottom surfaces 220a, 220b, and 220c of the recesses 209a, 209b, and 209c.
- the part which is not covered is covered with the filler 114.
- the filler 114 covers the entire surface including the lower surface of the wire 206, and also covers the peripheral region of the light emitting element 204 and the side surface of the bonding layer 123 below the light emitting element 204. That is, a portion other than the region where the light emitting element 204 is placed on the conductive members 202a, 202b, and 202c is covered with the (conductive portion) filler 114.
- Translucent member As shown in FIG. 8A, the inside of the recess 209 a of the base 201 is sealed with a light transmissive member 108. Note that the light-transmitting member 108 is not formed in the portion where the light-shielding member 207 is embedded, but if the light-shielding member 207 is not provided, the light-transmitting member 108 (inside the recesses 209b and 209c) is also transmitted. The sex member 108 is formed. Note that the light-transmitting member 108 may be provided as necessary.
- the light blocking member 207 is preferably a member having a light reflecting function, and is embedded in the recesses 209b and 209c of the base 201 and covers the exposed portions of the base 201 exposed on the side surfaces 230a, 230b and 230c of the recesses 209b and 209c. It is a member. Since the exposed portions (side surfaces 230a, 230b, and 230c) of the base body 201 become a light transmission loss source that causes light loss when light is transmitted, a light blocking member 207 having a light reflecting function is provided at this portion. , Loss due to light transmission and absorption can be suppressed.
- the light shielding member 207 can be used not only in this embodiment but also in the light emitting device according to the first embodiment.
- a light shielding member 207 is embedded in the recesses 209b and 209c of the base 201.
- the light-shielding member 207 is preferably formed so that all of the recesses 209b and 209c are embedded, and more preferably formed so that all the exposed portions of the side surface 230a are covered.
- the light blocking member 207 is a member that efficiently reflects the light emitted from the light emitting element 204, and is preferably an insulating material that has little light absorption and is resistant to light and heat. Specific examples of the material include a silicone resin, an epoxy resin, and a urea resin. In addition to such materials, a colorant, a light diffusing agent, a filler, a fluorescent member, and the like can be contained as desired. Note that the light blocking member 207 can be formed of a single member, or can be formed as a plurality of layers of two or more layers.
- the light traveling upward from the light-emitting element 204 is extracted to the outside above the light-emitting device 200.
- the light traveling downward or laterally is reflected by the bottom surfaces 220 a, 220 b, 220 c, the side surfaces 230 a, 230 b, 230 c of the recesses 209 a, 209 b, 209 c of the base body 201, or the light shielding member 207, and It will be taken out to the upper part.
- the filler 114 is coated on the metal member 103 in the conductive members 202a, 202b, and 202c and the conductor portion (conductor) such as the wire 206, the absorption of light by this portion is suppressed and the filler 114 is also suppressed. The light is reflected by. Thereby, the light from the light emitting element 204 is extracted efficiently.
- 9 to 12 are cross-sectional views showing the manufacturing process of the light-emitting device 200, and correspond to the YY cross-sectional view of the light-emitting device shown in FIG. 7B.
- 9 to 12 show the manufacturing steps of the light emitting device 200 in time series, and are basically manufactured in the order of FIGS. 9A to 12.
- the manufacturing method of the light emitting device 200 according to the present invention includes a conductive member forming step, a die bonding step, a filler covering step, and a translucent member forming step.
- the second embodiment includes a wire bonding process because the FU element is used, and the second embodiment includes a light shielding member forming process because the light shielding member 207 is provided.
- each step will be described.
- the conductive member forming step is a step of forming conductive members 202a, 202b, and 202c on the base 201.
- this step is performed. That is, this step is a step of providing the conductive members 202a, 202b, and 202c on the base body 201.
- this step is a step of providing the conductive members 202a, 202b, and 202c on the base body 201.
- it is the same as that of the above-mentioned 1st Embodiment.
- the metal member forming step is a step of forming the bondable metal member 103 on the conductive members 202a, 202b, and 202c on the base 201. Moreover, when forming also in electrically-conductive members 202b and 202c, such as the back surface 240 of the base
- the die bonding step is a step of mounting and joining the light emitting element 204 on the base 201 (on the conductive member 202a) after the metal member 103 is formed. That is, the light emitting element 204 is placed and bonded onto the metal member 103 on the bottom surface 220a of the recess 209a of the base body 201 via the bonding member 111. About others, it is the same as that of the above-mentioned 1st Embodiment.
- the wire bonding step is a step of electrically connecting a portion to be an electrode of the conductive member 202b and an electrode terminal (pad electrode) on the light emitting element 204 with a wire 206. is there. Similarly, this is a step of electrically connecting an electrode terminal (pad electrode) above the light emitting element 204 and a portion to be an electrode of the conductive member 202c with a wire 206 (not shown). About others, it is the same as that of the above-mentioned 1st Embodiment.
- ⁇ Filler coating process> As shown in FIG. 11 (a), in the filler coating step, a portion of the surface of the metal member 103 on the conductive members 202a, 202b, and 202c where the light emitting element 204 is not formed is subjected to an electrolytic plating method or electrodeposition coating.
- This is a step of coating with a filler 114 by a method or an electrostatic coating method.
- the surface of the metal member 103 formed on the conductive members 202a, 202b, and 202c and the conductive portions of other members are covered with the filler 114.
- the conductive portion of the light emitting element 204 and the surface including the lower surface of the wire 206 are also covered with the filler 114. Others are the same as those in the first embodiment.
- the light shielding member forming step is a step of forming the light shielding member 207 in the recesses 209 b and 209 c of the base body 201 and covering the filler 114.
- This step is a step of covering the exposed portions of the base 201 exposed to the side surfaces 230a, 230b, 230c of the recesses 209b, 209c with the light shielding member 207.
- the light shielding member 207 may be omitted depending on the configuration and combination of other members.
- a resin is preferably used for such a light-shielding member 207, and the formation method can be performed by a potting method, a printing method, or the like.
- the translucent member forming step is a step of forming the translucent member 108 on the base body 201 and covering the light emitting element 204 with the translucent member 108. That is, it is a step of forming the light-transmissive member 108 covering the light emitting element 204, the wire 206, and the like in the concave portion 209a of the base 201 and curing it.
- the light transmitting member forming step in the case of forming a light blocking member (for example, a resin that reflects light having a light emission wavelength) 207, the light transmitting member is formed in the recess 209a of the base 201 after the light blocking member 207 is formed. Except for forming 108, it is the same as the first embodiment described above.
- the light emitting device 100 exposes the light emitting element 104 having the semiconductor layer 11 and the light transmissive substrate 10, at least a part of the side surface and the upper surface of the light transmissive substrate 10, and
- the reflective member 114 that covers the side surface of the semiconductor layer 11 and the translucent member 108 that covers the portion of the translucent substrate 10 that is exposed from the reflective member 114 are provided.
- the light-emitting device 100 is a light-emitting device 100 on which at least one light-emitting element 104 (here, one) is mounted. At least on the surfaces of the conductive members 102a and 102b provided on the bottom surface, the conductive member 102b provided on the side surface of the recess 109, the light emitting element 104 placed on the bottom surface of the recess 109, and the conductive members 102a and 102b. It mainly includes a reflecting member (in this case, an insulating filler 114 is used) that covers a portion where the light emitting element 104 is not placed, and a translucent member 108 that covers the light emitting element 104. Further, here, a protection element 105 and a wire 106 are provided.
- the base body 101 has a recess 109 having an upper surface as an opening, and a bottom surface 120 and a side surface 130 are formed by the recess 109.
- Conductive members 102 a and 102 b are provided on the bottom surface 120 of the recess 109, and a conductive member 102 b is provided on the side surface of the recess 109.
- the concave portion 109 is not limited in shape as long as the light-emitting element is directly placed on a die-bonding device or the like and has a sufficient size to allow electrical connection with the light-emitting element by wire bonding or the like.
- the shape of the opening of the recessed portion may be a substantially square shape, a circular shape, or the like.
- the angle of the side surface 130 is not particularly limited. For example, it may be inclined so as to expand toward the opening direction, the side surface may be a paraboloid, for example, a parabolic shape, or may be substantially perpendicular to the bottom surface 120.
- the conductive member provided on the side surface (side wall) 130 in the recess 109 may extend one of the conductive members 102 a and 102 b to the side surface (side wall) 130 in the recess 109.
- another conductive member may be arranged. That is, the conductive members 102a and 102b provided on the bottom surface 120 normally function as electrodes, but the conductive member provided on the side surface 130 does not necessarily have a function as an electrode.
- the conductive member 102a is provided in an island shape on the bottom surface 120 of the base 101, and the conductive member 102b is provided so as to continuously cover the periphery of the conductive member 102a and the side surface 130. That is, in the light emitting device of this embodiment, the conductive member 102b provided on the side surface has a negative polarity.
- the filler 114 is uniformly and densely arranged on the side surface of the recess 109 by using a method such as electrodeposition coating. Can be made. Moreover, it can suppress that light leaks from the side surface of a recessed part because the electrically-conductive member is formed in the side surface.
- the filler 114 is also coated on the surface of the conductive member 102 b formed on the side surface 130 of the recess 109.
- the exposed portion of the semiconductor layer 11 of the light emitting element 104, the side surface of the bonding member 111, and the conductive portion slit groove portion G are covered with a filler 114.
- the filler 114 is exposed on the upper surface of the base material when electrodeposition coating or the like described later is performed. It is formed so as to cover the conductive member 102b. Further, when the translucent member 108 is further filled, the translucent member is impregnated into the filler 114 located on the upper surface of the base material. Thus, the filler 114 and the translucent member 108 that protrude from the upper surface may be left as they are, or the upper surface of the base material 101 is polished so that it is more transparent than the uppermost surface of the base material 101. It is also possible to prevent the filler 114 from protruding. Further, as illustrated in FIG. 15B, as described in the first embodiment, the protective element 105 is also covered with the filler 114.
- the manufacturing method of the light emitting device 100 according to the present invention includes a conductive member forming step, a die bonding step, a filler coating step, and a translucent member forming step.
- a metal member formation process, a protection element bonding process, and a wire bonding process are included.
- items that are mainly different from the manufacturing method of the first embodiment will be described.
- a conductive member is formed on the bottom and side surfaces of the recess, and the light emitting element 104 is placed on the bottom of the recess.
- a plating method, a sputtering method, a vapor deposition method, a method for bonding a thin film, or the like can be used regardless of the bottom surface and the side surface of the recess.
- a portion of the surface of the conductive members 102 a and 102 b including the side surface 130 of the recess 109 where the light emitting element 104 is not formed is covered with the filler 114. Others are the same as those in the manufacturing method of the first embodiment, and the description is omitted here.
- FIGS. 31A and 31B are enlarged views of portions “a 1 ” and “a 2 ” in FIG. 30, respectively.
- 30 is a secondary electron image
- FIG. 31 is a reflected electron image.
- FIGS. 30 and 31 at least a part of the side surface and the upper surface of the translucent substrate 10 are exposed, and the side surface of the semiconductor layer 11 is covered with a reflecting member (filler) 114.
- the symbol KT indicates a phosphor.
- FIG. 4 A perspective view of an example of the light emitting device according to the present embodiment is shown in FIG.
- the overall configuration of the light emitting device will be described while taking up each configuration, and then the materials and the like of each member will be described.
- matters different from the embodiment of the light emitting device 200 described above will be mainly described.
- drawing which shows the light-emitting device 200 of 4th Embodiment the metal member 103 and the joining member 111 are not illustrated.
- the light-emitting device 200 is a light-emitting device 200 on which at least one light-emitting element 204 (two in this case) is mounted.
- Conductive members 202a, 202b, 202c provided on the bottom surface of the recess 209, the light emitting element 204 mounted on the conductive member 202a, a conductive member 202d provided on the side surface of the recess 209, and conductive members 202b, 202c.
- a wire 206 that electrically connects a portion to be an electrode of the electrode and the electrode terminal of the light emitting element 204, a conductive member on which the light emitting element 204 is not mounted, and an insulating filler 114 that covers the lower surface of the wire 206, and light emission And a translucent member 108 that covers the element 204 and the filler 114.
- the base 201 has a recess 209 having an upper surface as an opening, and a bottom surface 220 and a side surface 230 are formed by the recess 209.
- a conductive member 202a, a conductive member 202b, and a conductive member 202c are provided on the bottom surface 220 of the recess 209. Further, a conductive member 202 d is provided on the side surface 230 of the recess 209.
- the conductive members 202a and 202b are also provided on the back surface of the base 201, and are electrically continuous with the conductive members 202a and 202b on the bottom surface 220 of the recess 209 inside the base ( To be integrated). Further, the conductive member 202d does not have a function as an electrode, and is spaced apart from the bottom surface 220 and covers the side surface of the recess 209.
- the filler 114 covers the entire surface of the wire 206 and also covers the peripheral region of the light emitting element 204 and the side surface of the bonding layer 123 below the light emitting element 204. That is, portions other than the region where the light emitting element 204 is placed in the conductive members 202a, 202b, 202c, and 202d are covered with the filler 114.
- the manufacturing method of the light emitting device 200 according to the present invention includes a conductive member forming step, a die bonding step, a filler coating step, and a translucent member forming step. Moreover, in 4th Embodiment, since a FU element is used, a wire bonding process is included. Here, items that are mainly different from the manufacturing method of the second embodiment will be described.
- the conductive member forming step is a step of forming conductive members 202a, 202b, 202c, and 202d on the base body 201.
- the metal member forming step is a step of forming a metal member on the conductive members 202a, 202b, and 202c on the base 201.
- the die bonding process is a process in which the light emitting element 204 is placed on and bonded to the metal member on the bottom surface 220 of the recess 209 of the base body 201 via the bonding member 111.
- the wire bonding step is a step of electrically connecting a portion to be an electrode of the conductive member 202 a and an electrode terminal (pad electrode) above the light emitting element 204 with a wire 206. Similarly, this is a step of electrically connecting the electrode terminal (pad electrode) above the light emitting element 204 and the portion to be the electrode of the conductive members 202b and 202c with the wire 206.
- the filler covering step is a step of covering a portion of the surface on the conductive members 202a, 202b, 202c, and 202d where the light emitting element 204 is not formed with the filler 114.
- the surfaces of the conductive members 202a, 202b, 202c, and 202d and the conductive portions of other members are covered with the filler 114.
- the conductive portion of the light emitting element 204 and the surface of the wire 206 are preferably covered with the filler 114.
- the surface of the conductive member may be covered with a metal member, and the top thereof may be covered with a filler 114. Others are the same as the manufacturing method of the first embodiment and the second embodiment, and thus the description thereof is omitted here.
- the filler is disposed on the upper surfaces of the bases 101 and 201, the light-transmitting member is impregnated in the filler when the light-transmitting member 108 is filled in the recess, and the resin protrudes from the upper surface of the base. There is a risk that.
- a step is formed on the side surfaces 130 and 230 of the recess on the upper end surface side of the recess, and a region where no conductive member is formed is formed on the side surface of the step.
- a step 150 is formed on the side surface 130 of the recess 109 on the upper end surface side of the recess 109, and the side surface 160 of the step 150 has a region where the conductive member 102 b is not formed.
- the conductive member is formed on the bottom surface 170 of the step while the region where the conductive member is not formed is formed on the upper end portion of the concave portion 109, so that the filler can also be coated in the vicinity of the upper end portion of the concave portion 109. . Since the filler covering the conductive member is disposed at the step 150, the filler 114 and the translucent member 108 do not protrude from the upper surface of the substrate 101.
- the shortest distance between the bottom surface 170 of the step and the surface of the translucent member 180 is 1/5 or less of the height of the recess 109. If the distance between the bottom surface 170 of the step and the upper end surface of the recess 109 is large, the region where the conductive member is not formed increases.
- the filler 114 is not formed in the region where the conductive member is not formed, the light hitting the side surface 160 of the step is absorbed inside the base material 101.
- a conductive member with low reflectivity such as tungsten is often used at the interface between the conductive member and the base material from the viewpoint of adhesion, etc., and light leaking to the base material is diffusely reflected in the base material. It is absorbed by the conductive member having a low reflectance.
- the shortest distance K1 between the bottom surface 170 of the step and the surface of the translucent member 180 is 1/5 or less of the height K3 of the concave portion 109. Thereby, it is possible to make it difficult for light to escape to the outside.
- K2 there is a distance K2 above the bottom surface 170 of the step, which is the thickness of the conductive member 102b (or a metal member in some cases) plus the thickness at which the filler 114 is deposited.
- K1 K2 is more preferable.
- K2 is preferably set so as not to be higher than the upper surface of the substrate.
- the surface of the translucent member 108 is concave. By adopting the concave shape, the upper surface of the resin does not exceed the upper surface of the base 101 or 201, and problems such as sticking of the light emitting devices can be avoided.
- FIG. 17A shows a change in the shape of the conductive member of the light emitting device shown in FIG. 16, and the other parts are the same as those shown in FIG.
- a conductive member is provided on a part of the bottom surface of the step 150.
- the bottom surface of the step has a region where the upper surface of the conductive member is exposed and a region where the conductive member is not exposed.
- the light emitting element 104 is placed via the bonding member 111 so as to straddle the conductive members 102 a and 102 b formed on the bottom surface of the recess.
- a conductive member 102c is formed on the side surface of the recess so as to be separated from the conductive members 102a and 102b on the bottom surface.
- the conductive member formed on the side surface may be formed by any method, for example, by metallization.
- FIG. 17B is also a modification of the shape of the conductive member of the light emitting device of FIG. 16, and the other parts are the same as FIG.
- this light emitting device 100 no conductive member is formed at the lower part of 102d formed on the side surface, and insulation with the conductive member formed on the bottom surface of the recess is maintained.
- it is formed using a base material of cofire ceramics.
- the bases 101 and 201 have been described as having the recess 109 and the recesses 209, 209a, 209b, and 209c in the first to fourth embodiments, but the recess 109 and the recesses 209 and 209a are described. , 209b, and 209c may be used.
- the translucent member 108 may be deposited on the upper surface of the plate-like substrate. Further, the light-transmitting member 108 may not be provided.
- the protection element 105 is provided.
- the second and fourth embodiments may include a protection element, and the first to fourth embodiments may be further provided.
- a protective element such as a Zener diode may be provided.
- one or two light emitting elements 104 and 104 are provided.
- three or more light emitting elements may be provided. When there are two or more light emitting elements mounted on the light emitting device, the light emission wavelengths of the light emitting elements may be different.
- the light emitting device includes three light emitting elements that emit three primary colors of RGB.
- the width of the bonding layer 123 (the reflective layer 22a, the barrier layer 22b, and the adhesive layer 22c) disposed on the lower surface side of the light emitting element 204 is smaller than the width of the light emitting element 204.
- the present invention is not limited to this.
- the width of the bonding layer 123 arranged on the lower surface side of the light emitting element 204 can be modified so that the width of the light emitting element 204 is equal. In this way, the filler 114 can easily cover the side surface of the bonding layer 123.
- the light emitting device 100 (200) includes the light emitting element 104 (204) that outputs light in the visible light region, but includes a light emitting element that outputs ultraviolet light or infrared light. You can also.
- the translucent member 108 is filled here so as to cover (seal) the entire concave portion, but the light-emitting elements 104 (204) are covered one by one or collectively. Also good.
- steps other than the steps described above may be included between or before and after the respective steps within a range that does not adversely affect the respective steps.
- a substrate cleaning process for cleaning the substrates 101 and 201 an unnecessary object removing process for removing unnecessary substances such as dust, a mounting position adjusting process for adjusting the mounting positions of the light emitting elements 104 and 204 and the protection element 105, and the like.
- Other steps may be included.
- the light emitting devices according to these embodiments are denoted by reference numerals 100A to 300A. Further, here, items that are mainly different from the first to fourth embodiments will be described.
- FIG. 20 is a schematic cross-sectional view showing a light emitting device according to a fifth embodiment of the present invention.
- the light-emitting device 100A includes a light-emitting element 104A in which the electrode 104c is disposed on the surface of the semiconductor layer 104b, a conductive member 102 bonded to the electrode 104c in the light-emitting element 104A, the electrode 104c in the light-emitting element 104A, and A reflection member 114 that covers the periphery of the conductive member 102 and a translucent member 108 that covers an upper surface and a side surface of the light emitting element 104A opposite to the surface on which the electrode 104c is formed are configured.
- the light emitting element 104A has a semiconductor layer 104b formed on one main surface of a translucent substrate 104a having a pair of opposing main surfaces. Further, a positive electrode and a negative electrode (hereinafter also referred to as electrodes) are formed on the surface of the semiconductor layer 104b.
- the light-emitting element 104A has the light-transmitting substrate 104a side facing the electrode formation surface as a main light extraction surface. Specifically, in the light-emitting element 100A in FIG. 20, the upper surface of the light-transmitting substrate 104a forms the upper surface of the light-emitting element 104A.
- a semiconductor layer 104b including a first semiconductor layer, an active layer, and a second semiconductor layer in this order is stacked on the lower surface side of the light-transmitting substrate 104a.
- the first semiconductor layer and the second semiconductor layer are provided with a negative electrode and a positive electrode, respectively.
- the electrode 104c of the light emitting element 100A is preferably formed of a metal having high reflectivity, and for example, an electrode containing Ag or Al is suitable. Accordingly, light from the light emitting element 104A can be reflected by the electrode 104c and extracted from the light transmitting substrate 104a side.
- the conductive member 102 is formed by, for example, plating, and is bonded to the positive electrode and the negative electrode of the light emitting element 104A via a conductive die bond member 111.
- the conductive member 102 is connected to the light emitting element 104A and functions as an electrode terminal of the light emitting device 100A.
- the lower surface of the conductive member 102 is exposed to the outside and forms a part of the outer surface of the light emitting device 100A.
- the reflection member 114 has an insulating property and covers at least the side surfaces of the conductive portions such as the conductive member 102 and the die bond member 111. In the present embodiment, the reflecting member 114 further covers the side surface of the electrode 104c of the light emitting element 104A. Further, the reflecting member 114 extends downward so as to be exposed on the side surface of the light emitting device 100A.
- the translucent member 108 is provided on the light emitting element 104A and the reflecting member 114 provided therearound.
- the translucent member 108 may contain a phosphor or the like.
- the light-transmitting member 108 covers the upper surface and the side surface of the light-transmitting substrate 104a in the light-emitting element 104A and the side surface of the semiconductor layer 104b.
- the interface between the translucent member 108 and the reflecting member 114 is the same as or higher than the interface between the electrode 104c and the semiconductor layer 104b.
- the side surfaces of the conductive member 102 and the die bond member 111 are covered with the reflecting member 114.
- the reflecting member 114 it is preferable that the lower surface of the translucent member 108 is coat
- a light source using a light emitting element and a wavelength conversion member is provided with a light emitting element mounted on a package using ceramics or resin, and then provided with a wavelength conversion member.
- the manufacturing method of the light emitting device according to the present embodiment mainly includes a step of bonding the electrodes 104c of the plurality of light emitting elements 104A on the support substrate 101 (first step), and at least the light emitting element 104A on the support substrate 101.
- step of covering the upper surface and the side surface of the light emitting element 104A (third step) by forming the translucent member 108 on the reflecting member 114, the support substrate 101 is removed, and the reflecting member 114 is removed.
- the support substrate 101 is prepared.
- the support substrate 101 is a plate-like or sheet-like member, and has a role of holding the light-emitting device in the manufacturing process of the light-emitting device according to this embodiment.
- the support substrate 101 is a member that is not included in the light-emitting device because it is removed before the light-emitting device is separated.
- the support substrate 101 is preferably a conductive substrate.
- a substrate formed of a single layer or a stacked layer of metal or alloy can be used.
- the support substrate 101 may be a laminate of resin and metal. Examples of the metal used for the support substrate 101 include SUS and Cu.
- a photosensitive resist is pasted on the support substrate 101 as a protective film.
- a photomask having a predetermined pattern shape is directly or indirectly arranged and exposed by irradiating with ultraviolet rays.
- development processing is performed to form a resist having a plurality of openings spaced apart from each other.
- the protective film resist
- either a positive type or a negative type may be used.
- the conductive member 102 is selectively formed in the opening of the resist.
- the conductive member 102 is preferably formed with a thickness of 0.1 to 500 ⁇ m.
- the conductive member 102 is preferably formed by an electrolytic plating method. The plating material, laminated structure, conditions, and the like can be appropriately adjusted by a method known in the art.
- the resist that is a protective film is removed. Thus, the conductive members 102 that are separated from each other are formed.
- the light emitting element 104 ⁇ / b> A is bonded onto the conductive member 102 using the die bond member 111.
- the die bond member include a solder material such as Au—Sn and a metal bump such as Au.
- the die bond member 111 may be formed so as to be interposed between the conductive member 102 and the light emitting element 104A. Therefore, the die bond member 111 may be provided on the (A) conductive member 102 side, (B) on the electrode 104c side of the light emitting element 104A, or (C) the conductive member 102 and the light emitting element 104A. You may provide in both of 104c.
- the die bond member 111 can be in a paste form or a solid form (sheet form, block form, powder form), and can be appropriately selected according to the composition of the die bond member 111, the shape of the conductive member 102, or the like. .
- a bonding method using a paste-like solder material as the die bond member 111 will be described in the case where the part where the die bond member 111 is formed is on the conductive member 102 side as described above (A).
- a paste-like solder material 111 is formed on the conductive member 102.
- the method for forming the solder material 111 can be appropriately selected from dispensing, printing, plating, electrodeposition, electrostatic coating, and the like.
- the electrode 104c of the light emitting element 104A is bonded to the place where the solder material 111 is formed. Thereafter, the temperature is raised to a temperature at which the solder material 111 is melted, held for a certain time, and then lowered to room temperature. Then, the flux remaining around the solder material 111 is washed and removed.
- FIG. 22B shows a state where the second step is completed.
- the reflecting member 114 By covering the portions where the conductive portions such as the conductive member 102 and the die bond member 111 are exposed with the reflecting member 114, it is possible to reduce the loss of light caused by the incidence of light on this portion. Therefore, it is preferable to form the reflecting member 114 so as to cover a region having an area of at least 40% or more of the entire area of the conductive portion exposed in the stage of performing the second step. Furthermore, it is more preferable that the reflecting member 114 is formed so as to cover almost the entire exposed area of the conductive portion at this stage.
- the exposed region refers to a region that can be seen from the outside, and excludes a region provided with an insulating protective film on the surface of the light-emitting element 104A.
- the reflective member 114 is preferably formed on the support substrate 101 to a height that covers the periphery of the electrode 104c of the light emitting element 104A. In this embodiment, the reflective member 114 is formed to a height that covers the side surface of the semiconductor layer 104b of the light-emitting element 104A.
- an electrolytic plating method As a method for forming the reflecting member 114, an electrolytic plating method, an electrostatic coating method, an electrodeposition coating method, or the like can be used. By using these methods, for example, the reflecting member 114 can be efficiently deposited selectively on the conductive portions such as the conductive member 102 and the die bond member 111. Further, in order to hold the reflecting member 114, a resin or inorganic material binder may be added or impregnated in the formed layer of the reflecting member 114. Further, the reflective member 114 may be impregnated with a translucent member 108 used in a third step described later.
- FIG. 23A is a diagram showing that a light-transmissive member 108 is formed on the reflecting member 114 and the light-emitting element 104A is covered.
- the translucent member 108 is preferably formed to a height that covers the upper surface and side surfaces of the light emitting element 104 ⁇ / b> A exposed from the reflecting member 114.
- potting, printing, compression molding, transfer molding, injection molding, thermal spraying, electrodeposition, casting, spin coating, or the like can be used.
- the formed translucent member 108 can be cured by heating, light irradiation, or the like.
- the translucent member 108 can be formed of a single member, or can be formed as a plurality of layers of two or more layers.
- the translucent member 108 When the translucent member 108 is cured by heating, the temperature, temperature, time, atmosphere, and the like of temperature increase or decrease can be appropriately selected. Further, when the translucent member 108 is cured by light irradiation, the light irradiation time, the wavelength of the irradiation light, and the like can be appropriately selected according to the material to be used. Further, the translucent member 108 may be cured using both heating and light irradiation.
- a colorant, a light diffusing agent, a filler, a wavelength conversion member (fluorescent member), or the like may be included in the translucent member 108.
- the translucent member 108 may be controlled in thickness by polishing or the like, or may have an optical function of controlling the optical orientation such as a lens shape including a microlens array or roughening.
- FIG. 23B is a diagram illustrating a state where the support substrate 101 is removed.
- a method for removing the support substrate 101 a method of physically peeling, a method of selectively removing the support substrate 101 by etching, or the like can be used.
- the dicing sheet 112 is pasted on the obtained light emitting device assembly (FIG. 24A).
- the light emitting element 104A is separated into pieces by cutting at a position where the separating portion 118 shown in FIG. 24B, that is, the reflecting member 114 and the light transmitting member 108 between the light emitting elements 104A is divided.
- a light emitting device 100A as shown in FIG. As a method for dividing into pieces, various known methods such as dicing with a blade and dicing with a laser beam can be used.
- FIG. 24B shows a state in which the light emitting elements 104A are individually divided, but they may be divided into arrays or aggregates such as every two or every four according to the purpose.
- the light-emitting element used in this embodiment is preferably a chip formed by stacking a semiconductor material over a light-transmitting substrate.
- a semiconductor material such as sapphire or spinel, or a conductive substrate such as GaN, SiC, Si, or ZnO is preferably used as the material for the substrate on which the nitride semiconductor is stacked.
- the material suitable for the positive electrode and the negative electrode is not limited as long as it is a material having conductivity.
- Au, Pt, Pd, Rh, Ni, W, Mo, Cr, Ti, Ag, Al Any metal or alloys thereof or combinations thereof can be utilized.
- a metal having high reflectance because light that is blocked by the electrode is reflected and extracted from the substrate side, so that the light extraction efficiency of the light-emitting device is improved.
- an insulating protective film may be formed on almost the entire surface of the light-emitting element except for the surface of the electrode serving as a connection region with the conductive member or the die bond member.
- SiO 2 , TiO 2 , Al 2 O 3 , polyimide, or the like can be used.
- the light emitting element can select various emission wavelengths according to the material of the semiconductor layer and the degree of mixed crystal.
- a nitride semiconductor In X Al Y Ga 1-XY N, 0 ⁇ X, 0 ⁇ Y, X + Y ⁇ 1 can be cited as preferable examples for efficiently exciting the fluorescent substance.
- a light-emitting element that outputs not only visible light but also ultraviolet rays and infrared rays can be obtained.
- a protective element such as a Zener diode or a light receiving element can be mounted together with the light emitting element.
- the conductive member is bonded to the positive electrode and the negative electrode of the light emitting element, and functions as an electrode of the light emitting device for electrical connection with the external electrode. At least one of the conductive members is mounted with the positive electrode of the light emitting element directly or via a die bond member or the like. In addition, at least one of the conductive members has the negative electrode of the light emitting element placed directly or via a die bond member.
- the conductive member it is necessary to use a material that is easily peeled off from the support substrate, or a material having selectivity to the solution at the contact portion with the support substrate when the support substrate is removed by etching. Specifically, noble metal systems such as Au, Pt, Rh, Ir, and Pd and alloys containing them are preferable. Further, another metal may be formed thereon. Specifically, Ni, Cu, Ag, Cr, W, etc. are mentioned.
- the film thickness of the conductive member is preferably about 0.1 ⁇ m to 500 ⁇ m.
- the conductive member has, for example, an upper surface on which the electrode of the light emitting element is placed and a lower surface that forms the outer surface of the light emitting device.
- the upper surface of the conductive member may be larger than the area on which the electrode of the light emitting element can be placed.
- the lower surface of the conductive member is exposed to the outside without being covered with a reflecting member or the like.
- the side surface of the conductive member may be a flat surface, but may have fine irregularities or the like. Further, the side surface of the conductive member may have a shape in which the side surface is inclined or curved toward the lower surface side. Thereby, peeling with a reflection member and a conductive member can be prevented.
- die bond member In order to adhere the conductive member and the electrode of the light emitting element, it is preferable to use a die bond member.
- the conductive member and the light emitting element can be made conductive.
- the die bond member include a solder material such as Au—Sn and a metal bump such as Au.
- a high melting point material such as Au—Sn.
- the thickness of the die bond member is preferably about 0.5 ⁇ m to 500 ⁇ m.
- the reflecting member has an insulating property and is provided so as to mainly cover the side surface of the conductive member.
- a reflective member so as to cover the side surface of the die bond member.
- the reflecting member has an effect of reflecting light emitted from the light emitting element or light converted in wavelength by the wavelength converting member. As a result, it is possible to reduce the loss of light caused by light entering the conductive member or the like.
- the reflection member preferably has a reflectance of 50% or more with respect to light (blue light) in a wavelength region of 430 nm to 490 nm. It is preferable to use a filler having a particle size in the range of about 10 nm to 10 ⁇ m. More preferably, it is 100 nm to 5 ⁇ m. Thereby, light can be scattered favorably.
- the translucent member covers the upper surface and side surfaces of the light emitting element.
- the interface between the translucent member and the reflecting member is disposed on the side surface side of the light emitting element. It is preferable that the thickness from the upper surface of the light emitting element to the upper surface of the translucent member is substantially the same as the thickness from the side surface of the light emitting element to the side surface of the translucent member. Thereby, good light distribution characteristics can be obtained in the near field, and uniform light emission can be obtained in each direction of the light emitting surface of the light emitting element.
- the translucent member preferably has a thickness of at least 10 ⁇ m. Further, it is more preferably in the range of about 30 ⁇ m to 300 ⁇ m.
- FIG. 25A is a schematic sectional view showing a light emitting device according to the sixth embodiment of the present invention. An overlapping description with the fifth embodiment may be omitted.
- the light-emitting device 200A includes a light-emitting element 204A in which an electrode 204c is disposed on the surface of a semiconductor layer 204b, and a conductive member 102 that is bonded to the electrode 204c of the light-emitting element 204A directly or via a die bond member 111.
- a reflecting member 114 that covers the periphery of the electrode 204c and the conductive member 102 of the light emitting element 204A, and a translucent member 108 that covers an upper surface and a side surface of the light emitting element 204A facing the surface on which the electrode 204c is formed. Composed.
- this structure also exposes at least part of the side surface and the top surface of the light-emitting element 204A including the semiconductor layer 204b and the light-transmitting substrate 204a, and covers the side surface of the semiconductor layer 204b.
- substrates 204a are provided.
- the reflection member 114 covers at least the side surfaces of the conductive portions such as the conductive member 102 and the die bond member 111.
- the reflecting member 114 further covers the side surface of the electrode 204c of the light emitting element 204A and the side surface of the semiconductor layer 204b.
- the translucent member 108 covers the upper surface and side surfaces of the translucent substrate 204a in the light emitting element 204A.
- the interface between the translucent member 108 and the reflective member 114 is the same as or higher than the interface between the semiconductor layer 204b and the translucent substrate 204a.
- the light traveling in the semiconductor layer 204b is emitted through the translucent substrate 204a exposed from the reflecting member 114.
- the side surfaces of the conductive member 102 and the die bond member 111 are covered with the reflection member 114, so that light from the light emitting element 204A enters the conductive member 102 and the die bond member 111.
- the loss of light caused by doing so can be reduced.
- light that travels below the light emitting element 204A is reflected by the reflective member 114 or the electrode 204c having high reflectivity, whereby light can be extracted efficiently.
- the reflecting member 114 is formed to a height that covers the side surface of the semiconductor layer 204b, light emitted downward from the light-emitting element 204A can be reduced, and light extraction efficiency is increased. be able to.
- the reflective member may directly cover the side surface of the light emitting element, but when an insulating protective film is applied to the side surface of the electrode of the light emitting element or the semiconductor layer, the reflective member covers this protective film.
- the side surface of the light emitting element may be indirectly covered.
- the upper surface of the reflecting member 114 provided around the light emitting element 304A may be formed to be inclined or curved so as to become lower toward the outside.
- the reflecting member 114 covers at least the side surfaces of the conductive member 102 and the die bond member 111.
- the reflective member 114 may further cover the side surfaces of the electrode 304c of the light emitting element and the semiconductor layer 304b.
- the translucent member 108 covers the upper surface and side surfaces of the translucent substrate 304a in the light emitting element 304A.
- the interface between the translucent member 108 and the reflecting member 114 is formed to be inclined or curved so as to become lower as the distance from the light emitting element 304A increases.
- the reflective member 114 is reflected by the surface of the translucent member 108 or the wavelength conversion member because the upper surface of the reflective member 114 is inclined or curved toward the outside of the light emitting device. The light traveling toward the 114 side can be easily extracted to the outside.
- the surface of the semiconductor layer exposed from the electrode is preferably covered with a reflecting member on the surface side where the electrode is formed.
- the light emitting element is exposed from the electrode 404c.
- At least a part of the surface of the semiconductor layer 404 b may be exposed from the reflecting member 114.
- the reflecting member 114 is formed as a thin film that covers the side surfaces of the conductive portions such as the conductive member 102, the die bond member 111, and the electrode 404c.
- a thin film reflecting member 114 is preferably provided in a portion where the conductive member 102 is not disposed. Accordingly, light from the light emitting element 404A can be prevented from leaking to the outside from the lower surface side of the light emitting device 400A, and the light extraction efficiency in the upper surface direction can be improved.
- the members shown in the claims are by no means specified as the members of the embodiment.
- the dimensions, materials, shapes, relative arrangements, and the like of the component parts described in the embodiments are described with the intention of limiting the scope of the present invention only to that unless otherwise specified. It's just an illustrative example. Note that the size, film thickness, positional relationship, and the like of the members shown in each drawing may be exaggerated for clarity of explanation.
- the substrate may be divided without peeling.
- the structure of the light emitting device 300A includes a substrate 101a as a base and a Si substrate 101b having a protection element function. , 300C.
- Specific materials that can be used as the substrate include paper phenol, liquid crystal polymer, polyimide resin, BT resin, Teflon (registered trademark), silicone, alumina, aluminum nitride in addition to glass epoxy substrates.
- the substrate itself may have an active / passive element function like Si.
- the substrate may be a Si substrate 101b, and a tapered substrate may be formed by anisotropic etching of Si.
- a trapezoidal substrate as shown in FIG. 28A, the light distribution angle of light emitted from the light emitting device 300D can be widened.
- a reflector shape as shown in FIG. 28B, the light distribution angle of the light emitted from the light emitting device 300E is narrowed, the front luminance can be increased, and the amount of light taken into the secondary optical system. Can be increased.
- FIG. 32B is an enlarged view of a portion “a 3 ” in FIG.
- FIGS. 32A and 32B At least a part of the side surface and the upper surface of the translucent substrate 304a are exposed, and the side surface of the semiconductor layer 304b is covered with a reflecting member (filler) 114. ing. Note that, in this photograph, the reflective member 114 is not in contact with the electrode 304c, and the reflective member 114 is formed around the electrode 304c, but the reflective member 114 is in contact with the electrode 304c. It may be a form. Note that the symbol KT indicates a phosphor.
- the light-emitting device according to the present invention can efficiently reflect light from the light-emitting element without using a reflective material that may corrode such as silver, and thus has excellent light extraction efficiency. is there. Further, even when a reflective material that may corrode, such as silver, is used, deterioration of the reflective material can be suppressed, so that the light extraction efficiency is excellent.
- the light-emitting device according to each of the present invention can be used for various display devices, lighting fixtures, displays, backlight light sources for liquid crystal displays, and image reading devices and projector devices in facsimiles, copiers, scanners, and the like. Can do.
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Abstract
Description
また、特許文献6では、リフレクターの反射面に高反射性粉体材料を樹脂に混合して成る高反射性樹脂層で被覆することで、変色のおそれがないリフレクターとすることができ、また、リフレクターとして放熱性に優れた材料を採用することで、熱による不具合を低減させることが開示されている。
二酸化チタン(TiO2)等を金属反射膜の表面に被覆しても、その被覆の箇所によっては、基体や導体部等により光の吸収損失がおこり、光取り出し効率が十分に向上しない。
さらに、上記特許文献4~6においては、これらの問題については解決策が示されていない。また、特許文献6に提案される高反射性樹脂層は、樹脂と粉体との混合物であるため、成形性の問題があり、特に高反射性粉体材料を多く含有させた場合には成形性が低下する傾向があることが開示されている(段落0022等)。
また、照明分野では、均一な配光色の要望も高くなってきている。
また、基体上の導電部材等を反射部材、例えば絶縁性のフィラーで被覆することで、発光装置を構成する部材の劣化やこの部材による光の吸収を抑制し、また発光素子の透光性基板の側面の一部や上面を露出することで、発光素子からの光を効率良く外部に取り出すことができると共に、信頼性の高い発光装置および発光装置の製造方法を提供することを課題とする。
ここで、「発光素子が載置されていない部位」とは、発光装置の上面側から見て、発光素子の外形よりも外側にある部位のことをいうものとする。つまり、上面側から見たときに、発光素子の直下となり隠れる部位については、必ずしも絶縁性のフィラーが被覆されていなくてもよい。ただし、発光素子の直下となる部位についても絶縁性のフィラーが被覆されていてもよい。
そして、前記凹部の側面において、前記凹部の上端面と接する部分には、導電部材が形成されていない領域を有することが好ましく、前記凹部の側面において、前記凹部の底面と接する部分には、導電部材が形成されていない領域を有することが好ましい。
また、前記フィラーは5μm以上の厚みで被覆されていることが好ましい。
このような構成によれば、発光装置の光の取り出し効率が向上する。
導電部スリット(溝部)の幅を200μm以下とすることで、フィラーが溝部を被覆し易くなる。
このような構成によれば、発光素子をワイヤレスにすることができ、発光素子の導電性ワイヤによる光吸収が防止され、光取り出し面側から発光した光を効率良く取り出すことができる。また、フリップ実装された発光素子の外周部や下部はフィラーで被覆されているため、発光素子の発光面側からの光を反射して外部に効率良く取り出すことができる。
このような構成によれば、保護素子による光の吸収損失を抑制することができる。
このような構成によれば、フィラーと遮光性部材によって発光素子からの光を反射するため、光取り出し効率を向上させることができる。
このような構成によれば、発光素子からの光を遮光性部材により反射して光の取り出し効率を向上させることができる。
このような構成によれば、フィラーの表面を保護することができる。
このような構成によれば、フィラーと透光性部材との密着力を向上させることができる。透光性部材は、発光素子からの光を透過させて外部に取り出す部材であり、また発光素子を封止する部材であるため、封止部材と呼ぶこともある。
また、発光装置に遮光性部材を有する場合には、フィラーの隙間部には遮光性部材も含浸しているため、フィラーと遮光性部材との密着力を向上させることができる。
一方、前記発光素子の側面から前記透光性部材の側面までの厚みが、前記発光素子の上面から前記透光性部材の上面までの厚みよりも薄くなるように形成することで、ファーフィールドにおいて良好な配光特性を得ることができるため、このように形成してもよい。
かかる手順によれば、反射部材を効率よく固着させることができる。
さらに、本発明に係る発光装置によれば、導電部スリットをフィラーで被覆することで、基体の底面から漏れる光を抑制することができるため、発光素子からの光をさらに効率良く取り出すことができ、さらなる高出力化を図ることができる。
また、本発明の発光装置の製造方法によれば、発光素子の電極の周囲に反射部材を形成することで、発光素子の下方に光が進行することにより生じる光の損失を低減することができる。また、反射部材が、発光素子の下方に進行する光を反射することで光取り出し効率を高めることができる。
第1実施形態では、FD素子を用いた発光装置について説明する。
まず、発光装置の全体構成について、各構成について取り上げながら説明し、その後、各部材等の材料等について説明する。
図1、図2に示すように、発光装置100は、半導体層11と透光性基板(以下、適宜、基板という)10とを有する発光素子104と、透光性基板10の側面の少なくとも一部及び上面を露出し、かつ、半導体層11の側面を被覆する反射部材114と、透光性基板10のうち、反射部材114から露出された部分を被覆する透光性部材108と、を備えたものである。
基体101は、発光素子104や保護素子105等の電子部品を収容して保護するものである。
導電部材102a,102bは、外部と、発光素子104や保護素子105等の電子部品とを電気的に接続し、これら電子部品に、外部からの電流(電力)を供給するための部材であるとともに、その表面に絶縁性のフィラーを被覆させるための部材である。すなわち、外部から通電させるための電極またはその一部としての役割を担うものである。
また、導電部材の表面を被覆する金属部材をさらに設けてもよい。本明細書中において、「導電部材の表面を被覆するフィラー」とは、導電部材の上に金属部材を介し、金属部材の表面にフィラーが被覆されているものも含むものとする。ただし、この金属部材は省略することが可能である。
なお、金属部材103として反射性に優れる銀を用いなくても、光反射性を有する絶縁性のフィラー114を被覆するため、光取り出し効率の低下が抑制される。
発光素子104は、一方の主面にパターニングされた電極を有するFD素子であり、凹部109の底面120に、接合部材111により接合されて載置(フリップチップ実装)され、接合部材111および金属部材103を介して、導電部材102a,102bと接続されている。
また、可視光領域の光だけでなく、紫外線や赤外線を出力する発光素子104とすることもできる。
フィラー114は、絶縁性であり、発光装置100の導体部を被覆するものであり、光の取り出し効率の低下を抑制する役割を担う。なお、反射部材114は、白色のフィラーであることが好ましく、また、主として無機化合物を用いることが好ましい。
また、半導体層11の側面がフィラー114で被覆されていることで、光の取り出し効率を向上させることができる。また、透光性部材108が蛍光体を含有する場合に、蛍光体が沈降しても半導体層11が蛍光体に埋もれてしまうことがない。そのため、蛍光体による光の吸収が抑制され、光取り出し効率の低下を抑制することができる。また、蛍光体による光変換をなるべく光取り出し側で行うことができるという点でも、光取り出し効率の低下を抑制することができる。
透光性部材108は、基体101に載置された発光素子104、保護素子105、ワイヤ106、フィラー114等を、塵芥、水分、外力等から保護する部材である。図2(a)に示すように、基体101の凹部109内部は、透光性部材108により、被覆(封止)されている。また、フィラー114と透光性部材108との密着力を向上させるため、フィラー114とフィラー114の間、すなわちフィラー114の隙間部に透光性部材108が含浸していることが好ましい。なお、発光素子104をFD素子とし、発光素子104の外周を遮光性部材で被覆する構造においては、透光性部材108は、省略することもできる。
ワイヤ106、206(図8参照)は、FU素子や保護素子105における電極端子と、基体101の凹部109に配される導電部材102a,102bの電極となる部位とを電気的に接続するものである。ワイヤ106、206の材料は、金、銅、白金、アルミニウム等の金属、および、それらの合金を用いたものが挙げられるが、特に、熱伝導率等に優れた金を用いるのが好ましい。
保護素子105は、例えば、ツェナーダイオード等の役割を担うものであり、必要に応じて設ければよい。
図4(b)に示すように、保護素子105は、凹部109の底面120に、接合部材110、例えば、Agペーストにより接合されて載置(実装)され、保護素子105の底面に設けられた金属層(図示省略)および金属部材103を介して、導電部材102aと接続されている。また、保護素子105の上面には、ワイヤ106が接続されており、このワイヤ106が、金属部材103を介して導電部材102bに接続されて、保護素子105と導電部材102bとが、電気的に接続されている。
接合部材(ダイボンド部材)111は、発光素子104をFD素子とする場合、発光素子104の電極と導電部材102a,102bとを電気的に接続するものであり、また発光素子104を基体101に接着させる部材である。この接合部材111には導電性の部材を用い、具体的な材料としては、Au含有合金、Ag含有合金、Pd含有合金、In含有合金、Pb-Pd含有合金、Au-Ga含有合金、Au-Sn含有合金、Sn含有合金、Au-Ge含有合金、Au-Si含有合金、Al含有合金、Cu-In含有合金、金属とフラックスの混合物等を挙げることができる。
前記した透光性部材108や、後記する遮光性部材207(図8(a)参照)中に、波長変換部材として発光素子104からの光の少なくとも一部を吸収して異なる波長を有する光を発する蛍光部材を含有させることもできる。
蛍光部材は、例えば、Eu、Ce等のランタノイド系元素で主に賦活される、窒化物系蛍光体、酸窒化物系蛍光体を用いることができる。より具体的には、大別して下記(1)~(3)にそれぞれ記載された中から選ばれる少なくともいずれか1以上であることが好ましい。
(2)Ce等のランタノイド系元素で主に賦活される、希土類アルミン酸塩、希土類ケイ酸塩、アルカリ土類金属希土類ケイ酸塩等の蛍光体
(3)Eu等のランタノイド系元素で主に賦活される、有機または有機錯体等の蛍光体
(21)Y3Al5O12:Ce
(22)(Y0.8Gd0.2)3Al5O12:Ce
(23)Y3(Al0.8Ga0.2)5O12:Ce
(24)(Y,Gd)3(Al,Ga)5O12:Ce
次に、本発明の第1の実施形態に係る発光装置の製造方法について、図面を参照しながら説明する。なお、ここでは発光装置1つを用いて説明しているが、最終工程で分割するまでは基体は集合体となっており、分割することで基体の外側面が表出する。
また、図3~図6は、発光装置100の製造工程を時系列で示しており、基本的に、図3(a)~図6(b)の順で製造される。ただし、図5(a)、(b)、図6(a)は、フィラーを被覆する工程であるため、ほぼ同時に行われる。
図3(a)に示すように、導電部材形成工程は、基体101上に導電部材102a,102bを形成する工程である。また、導電部材102a,102bを基体101の裏面140等にも形成させる場合は、この工程により行う。すなわち、この工程は、基体101に導電部材102a,102bを設ける工程である。
図3(b)に示すように、金属部材形成工程は、基体101上の導電部材102a,102b上に、ボンディング可能な金属部材103を形成する工程である。また、基体101の裏面140等の導電部材102a,102bにも金属部材103を形成させる場合は、この工程により行う。すなわち、この工程は、導電部材102a,102bの表面に、金属部材103を設ける工程である。
金属部材103上にワイヤボンディングをしたり、発光素子104との電極を直接接続させる場合には、ワイヤボンディングやフリップチップ実装が可能な金属材料である必要があるが、これらを行わない導電部材102a,102bは、金属の種類を特に限定する必要はない。
図4(a)に示すように、ダイボンディング工程は、金属部材103を形成した後の基体101上(金属部材103を形成しない場合は導電部材102a,102b上)に、発光素子104を載置して接合する工程である。
発光素子載置工程は、基体101上に、接合部材111を介して、発光素子104を載置する工程である。接合部材111は、例えば、ロジン(松脂)若しくは熱硬化性樹脂を含み、さらに必要に応じて、粘度調整のための溶剤や各種添加剤、有機酸などの活性剤を含有させてもよい。さらには金属(例えば粉末状)を含有させても良い。
加熱工程は、発光素子104を載置した後に、接合部材111を加熱し、発光素子104を基体101上に接合する工程である。
例えば、接合部材111に樹脂組成物を用いた場合、加熱により樹脂組成物の一部を揮発によって消失させた後に、残留した樹脂組成物を、さらに洗浄等によって除去してもよい(残留接合部材洗浄工程)。特に、樹脂組成物がロジン含有の場合には、加熱後に洗浄するのが好ましい。洗浄液としては、グリコールエーテル系有機溶剤等を用いるのが好ましい。
図4(b)に示すように、保護素子接合工程は、金属部材103を形成した後(金属部材103を形成しない場合は導電部材102a,102bを形成した後)の基体101上に、保護素子105を載置して接合する工程である。すなわち、保護素子105を、金属部材103を介して導電部材102a上に載置して接合する工程である。
図4(b)に示すように、ワイヤボンディング工程は、保護素子105上部にある電極端子と導電部材102bの電極となる部位とをワイヤ106で接続する工程である。ワイヤ106の接続方法は、特に限定されるものではなく、通常用いられる方法で行えばよい。
図5(a)に示すように、フィラー被覆工程は、導電部材102a,102bにおける金属部材103の表面のうち、発光素子104が形成されていない部位を、電解鍍金法、電着塗装法又は静電塗装法によりフィラー114で被覆する工程である。この工程により、発光素子104を接合部材111により載置した後に、基体101上の金属部材103の露出面を(金属部材103を形成しない場合は導電部材102a,102b上に)フィラー114で被覆する。この際、透光性基板10の側面の少なくとも一部及び上面は露出し、かつ、半導体層11の側面はフィラー114で被覆される。
フィラー114を被覆する方法としては、電解鍍金法、静電塗装、電着法等の成膜方法を用いることができる。
このようなフィラーを堆積させる方法は、溶液中において、発光装置100と対向配置される電極を配置し、この電極に電圧を印加することにより、溶液中で帯電されたフィラーを電気泳動させることで導電部材102a,102bにおける金属部材103が露出した部位にフィラー114を堆積させるものである。
ここで、堆積したフィラー114の厚みは、堆積条件や時間により適宜調整することができるが、少なくとも5μm以上の厚みであることが好ましい。更に好ましくは10μm以上の厚みであることが好ましい。フィラーの反射率の高い材料を用いて形成することで、堆積したフィラー114により、光反射層が形成される。
上述したフィラー114の電着による形成工程の後、フィラー114以外の部材を電着により形成してもよい。
例えば、電解液にフィラーを溶解させる酸やアルカリ、例えば、アルカリ土類金属のイオン(Mg2+など)を含んだ硝酸を含有させたりすることができる。
また、電解液には金属アルコキシドを含有されてもよい。具体的には、Al、Sn、Si、Ti、Y、Pbあるいはアルカリ土類金属から選択される元素を構成元素として含む有機金属材料である。電解液に含まれる材料としては、その他にも、金属アルコレート、あるいは金属アルコキサイドと有機溶剤とを所定の割合で混合してなるゾル中にフィラーを分散させた混合液を電解液とすることもできる。
その他にも、電解液はイソプロピルアルコールを母液とする溶液に、有機溶剤としてアセトン、有機金属材料としてアルミナゾルおよびフィラーを含有させた混合溶液とすることができる。
なお、本実施形態では、最終工程で分割するまでは基体は集合体であるため、複数の発光装置に対して一度にフィラー114を被覆することができるため、量産性に優れたものである。
図6(b)に示すように、透光性部材形成工程は、基体101上に透光性部材108を形成し、発光素子104を透光性部材108で被覆する工程である。すなわち、発光素子104、保護素子105、ワイヤ106等を被覆する透光性部材108を、基体101の凹部109内に溶融樹脂を注入し、その後加熱や光照射等によって硬化する工程である。
すなわち、前記に示す発光装置およびその製造方法は、本発明の技術思想を具体化するための発光装置およびその製造方法を例示するものであって、本発明は、発光装置およびその製造方法を前記に限定するものではない。また、請求の範囲に示される部材等を、実施の形態の部材に特定するものではない。特に、実施の形態に記載されている構成部品の寸法、材質、形状、その相対的配置等は、特定的な記載がない限りは、本発明の範囲をそれのみに限定する趣旨ではなく、単なる説明例にすぎない。
第2実施形態では、FU素子を用いた発光装置について説明する。本実施形態に係る発光装置の一例の斜視図を図13に示す。
まず、発光装置の全体構成について、各構成について取り上げながら説明し、その後、各部材等の材料等について説明する。なお、ここでは、前記した発光装置100の実施形態と主に異なる事項について説明する。
図7、図8に示すように、発光装置200は、少なくとも1つの発光素子204(ここでは、2つ)を搭載した発光装置200であり、基体201と、基体201上に設けられた導電部材202a,202b,202cと、導電部材202a,202b,202c上に載置された発光素子204と、導電部材202bの電極となる部位と発光素子204の電極端子とを電気的に接続するワイヤ206と、発光素子204が載置されていない金属部材103およびワイヤ206の下面を被覆する絶縁性のフィラー114と、発光素子204およびフィラー114を被覆する透光性部材108と、を主に備える。さらに、ここでは、遮光性部材207を備えている。
図8(a)に示すように、基体201は、上面を開口部とする凹部209aと、さらに凹部209a内部に凹部209b,209cを有しており、この凹部209aにより、底面220aと側面230aが形成されている。さらに、この凹部209b,209cにより、底面220b,220cと、側面230b,230cが形成されており、底面220aと、底面220b,220cとの間で、段差が形成されている。そして、この凹部209aの底面220aには、導電部材202aが、凹部209bの底面220bには、導電部材202bが、凹部209cの底面220cには、導電部材202cが、それぞれ設けられている。
図8(a)に示すように、導電部材202b、202cは、基体201の裏面240にも設けられ、凹部209b,209cの底面220b,220cの導電部材202b,202cとは、基体内部で、それぞれ電気的に連続するように(一体となるように)設けられている。
図8(a)に示すように、基体201上、すなわち、凹部209a,209b,209cの底面220a,220b,220cの導電部材202a,202b,202c上には、金属部材103が設けられている。また、図8(a)に示すように、基体201の裏面240に設けられた導電部材202b,202cの表面にも、金属部材103を被覆してもよい。なお、金属部材103は基体201内に埋設されている導電部材202b,202cにまで設けるものではない。この金属部材103は導電部材202b,202cと一体化したものとしてもよく、または金属部材103は省略してもよい。
発光素子204は、図8(a)、(b)に示すように、その上面に電極を有するFU素子であり、発光素子204の下面には、接合層123が形成されている。この発光素子204に形成された接合層123は、凹部209aの底面220aに、導電部材202a、金属部材103、接合部材111の順に形成されている中の表面にある接合部材111と接続されている。ただし、第2実施形態の発光装置200を示す図面においては接合部材111は図示していない。
接合層123は、発光素子にFU素子を用いる場合、発光素子204を基体201に接合させる接着層22cの他にも、反射層22aやバリア層22bを備えた多層構造としてもよい。
図8(a)に示すように、凹部209a,209b,209cの底面220a,220b,220cに形成された導電部材202a,202b,202cにおける金属部材103の表面のうち、発光素子204が載置されていない部位が、フィラー114で被覆されている。さらに、フィラー114は、ワイヤ206の下面をはじめ、表面全体を被覆しており、発光素子204の周辺領域、また発光素子204の下部の接合層123の側面も被覆している。
すなわち、導電部材202a,202b,202cにおける発光素子204が載置された領域以外の部位が(導電部位)フィラー114によって被覆されている。
図8(a)に示すように、基体201の凹部209a内部は、透光性部材108により、封止されている。なお、遮光性部材207が埋設されている部位には、透光性部材108は形成されないが、遮光性部材207を設けない場合には、この部位(凹部209b,209c内部)にも、透光性部材108を形成する。なお、透光性部材108は、必要に応じて設ければよい。
遮光性部材207は、光反射機能をもつ部材であることが好ましく、基体201の凹部209b,209cに埋設し、凹部209b,209cの側面230a,230b,230cに露出する基体201の露出部を覆う部材である。基体201の露出部(側面230a,230b,230c)は、光が透過することで光の損失を起こす光透過損失源となるため、この部位に光反射機能をもつ遮光性部材207を設けることで、光の透過や吸収による損失を抑制することができる。このように基体201の側壁や、また、フィラー114の少なくとも一部は、遮光性部材207により被覆されていることが好ましい。これにより、発光素子204からの光を遮光性部材207により反射して光の取り出し効率を向上させることができる。この遮光性部材207は、本実施形態に限らず、第1の実施形態に係る発光装置においても用いることができる。
次に、本発明の第2の実施形態に係る発光装置の製造方法について、図面を参照しながら説明する。なお、ここでは発光装置1つを用いて説明しているが、最終工程で分割するまでは基体は集合体となっており、分割することで基体の外側面が表出する。
また、図9~図12は、発光装置200の製造工程を時系列で示しており、基本的に、図9(a)~図12の順で製造される。
図9(a)に示すように、導電部材形成工程は、基体201上に導電部材202a,202b,202cを形成する工程である。また、導電部材202b,202cを基体201の裏面240等にも形成させる場合は、この工程により行う。すなわち、この工程は、基体201に導電部材202a,202b,202cを設ける工程である。
その他については、前記した第1実施形態と同様である。
図9(b)に示すように、金属部材形成工程は、基体201上の導電部材202a,202b,202c上に、ボンディング可能な金属部材103を形成する工程である。また、基体201の裏面240等の導電部材202b,202cにも形成させる場合は、この工程により行う。すなわち、この工程は、導電部材202a,202b,202cの表面に、金属部材103を設ける工程である。
その他については、前記した第1実施形態と同様である。
図10(a)に示すように、ダイボンディング工程は、金属部材103を形成した後の基体201上(導電部材202a上)に、発光素子204を載置して接合する工程である。すなわち基体201の凹部209aの底面220aの金属部材103上に接合部材111を介して、発光素子204を載置して接合する工程である。
その他については、前記した第1実施形態と同様である。
図10(b)に示すように、ワイヤボンディング工程は、導電部材202bの電極となる部位と、発光素子204上部にある電極端子(パッド電極)とを、ワイヤ206で電気的に接続する工程である。同じく、発光素子204上部にある電極端子(パッド電極)と導電部材202cの電極となる部位とを、ワイヤ206で電気的に接続する工程である(図示省略)。
その他については、前記した第1実施形態と同様である。
図11(a)に示すように、フィラー被覆工程は、導電部材202a,202b,202c上の金属部材103の表面のうち、発光素子204が形成されていない部位を、電解鍍金法、電着塗装法又は静電塗装法によりフィラー114で被覆する工程である。この工程により、発光素子204を接合した後に、導電部材202a,202b,202cの上に形成されている金属部材103の表面、その他の部材の導電部を、フィラー114で被覆する。また、発光素子204の導電部やワイヤ206の下面をはじめとする表面もフィラー114で被覆するのが好ましい。
その他については、前記第1実施形態と同様である。
図11(b)に示すように、遮光性部材形成工程は、基体201の凹部209b,209cに遮光性部材207を形成し、フィラー114を被覆する工程である。この工程は、凹部209b,209cの側面230a,230b,230cに露出する基体201の露出部を遮光性部材207で被覆する工程である。さらには、凹部209aの側面230aの露出部の全てを被覆するように形成してもよい。これらの領域を遮光性部材207で被覆することで、前記したように、基体201の露出部からの光の透過による、光の損失を抑制することができ、光の取り出し効率を向上させることができる。なお、この遮光性部材207は、他の部材の構成や組み合わせによっては省略してもよい。
このような遮光性部材207には樹脂を用いるのが好ましく、その形成方法は、ポッティング法、印刷法等により行うことができる。
図12に示すように、透光性部材形成工程は、基体201上に透光性部材108を形成、発光素子204を透光性部材108で被覆する工程である。すなわち、発光素子204、ワイヤ206等を被覆する透光性部材108を、基体201の凹部209aに形成し硬化する工程である。
透光性部材形成工程は、遮光性部材(例えば、発光波長の光を反射する樹脂)207を形成する場合は、遮光性部材207が形成された後に、基体201の凹部209aに透光性部材108を形成すること以外については、前記した第1実施形態と同様である。
第3実施形態では、FD素子を用いた発光装置について説明する。
まず、発光装置の全体構成について、各構成について取り上げながら説明し、その後、各部材等の材料等について説明する。なお、ここでは、前記した発光装置100の実施形態と主に異なる事項について説明する。
図14、図15に示すように、発光装置100は、半導体層11と透光性基板10とを有する発光素子104と、透光性基板10の側面の少なくとも一部及び上面を露出し、かつ、半導体層11の側面を被覆する反射部材114と、透光性基板10のうち、反射部材114から露出された部分を被覆する透光性部材108と、を備えたものである。
図15(a)に示すように、基体101は、上面を開口部とする凹部109を有しており、この凹部109により、底面120と側面130が形成されている。そして、この凹部109の底面120には、導電部材102a,102bが設けられており、凹部109の側面には、導電部材102bが設けられている。
なお、側面130の角度も、特に限定されない。例えば、開口方向に向かって広がるように傾斜されていても良いし、例えばパラボラ状のように側面が放物面であってもよいし、底面120と略垂直とされていてもよい。
図15(a)に示すように、凹部109内の側面(側壁)130に設ける導電部材は、導電部材102a,102bのいずれか一方を凹部109内の側面(側壁)130に延在させてもよいし、別の導電部材を配置してもよい。つまり、底面120に設けられる導電部材102a及び102bは、通常、電極として機能させるが、側面130に設けられる導電部材は、必ずしも電極としての機能を有しなくてもよい。
また、凹部109の側面130に形成された導電部材102bの表面にも、フィラー114が被覆されている。発光素子104の半導体層11の露出部や接合部材111の側面、導電部スリット溝部Gは、フィラー114により被覆されている。
次に、本発明の第3の実施形態に係る発光装置の製造方法について説明する。
本発明に係る発光装置100の製造方法は、導電部材形成工程と、ダイボンディング工程と、フィラー被覆工程と、透光性部材形成工程と、を具備する。また、第1実施形態では、金属部材103および保護素子105を設けているため、金属部材形成工程、保護素子接合工程およびワイヤボンディング工程を含む。なお、ここでは前記第1実施形態の製造方法と主に異なる事項について説明する。
第4実施形態では、FU素子を用いた発光装置について説明する。本実施形態に係る発光装置の一例の斜視図を図18(a)に示す。
まず、発光装置の全体構成について、各構成について取り上げながら説明し、その後、各部材等の材料等について説明する。なお、ここでは、前記した発光装置200の実施形態と主に異なる事項について説明する。なお、第4実施形態の発光装置200を示す図面においては、金属部材103及び接合部材111は図示していない。
図18(a)、(b)、図19に示すように、発光装置200は、少なくとも1つの発光素子204(ここでは、2つ)を搭載した発光装置200であり、基体201と、基体201の凹部209の底面に設けられた導電部材202a,202b,202cと、導電部材202a上に載置された発光素子204と、凹部209の側面に設けられた導電部材202dと、導電部材202b、202cの電極となる部位と発光素子204の電極端子とを電気的に接続するワイヤ206と、発光素子204が載置されていない導電部材およびワイヤ206の下面を被覆する絶縁性のフィラー114と、発光素子204およびフィラー114を被覆する透光性部材108と、を主に備える。
図19に示すように、基体201は、上面を開口部とする凹部209を有しており、この凹部209により、底面220と側面230が形成されている。そして、この凹部209の底面220には、導電部材202a、導電部材202b、導電部材202cが設けられている。また、凹部209の側面230には、導電部材202dが設けられている。
図19に示すように、導電部材202a、202bは、基体201の裏面にも設けられ、凹部209の底面220の導電部材202a,202bとは、基体内部で、それぞれ電気的に連続するように(一体となるように)設けられている。
また、導電部材202dは、電極としての機能を有しておらず、底面220から離間して、凹部209の側面を被覆している。
図19に示すように、凹部209の底面220に形成された導電部材202a,202b,202cにおける金属部材の表面のうち、発光素子204が載置されていない部位が、フィラー114で被覆されている。また、凹部209の側面230に形成された導電部材202dも、フィラー114で被覆されている。さらに、フィラー114は、ワイヤ206の表面全体を被覆しており、発光素子204の周辺領域、また発光素子204の下部の接合層123の側面も被覆している。
すなわち、導電部材202a,202b,202c、202dにおける発光素子204が載置された領域以外の部位がフィラー114によって被覆されている。
次に、本発明の第4の実施形態に係る発光装置の製造方法について説明する。
本発明に係る発光装置200の製造方法は、導電部材形成工程と、ダイボンディング工程と、フィラー被覆工程と、透光性部材形成工程と、を具備する。また、第4実施形態では、FU素子を用いるため、ワイヤボンディング工程を含む。なお、ここでは前記第2実施形態の製造方法と主に異なる事項について説明する。
第3、第4実施形態に関するその他の変形例として、基体の凹部の上端部に導電部材が形成されない領域を有する構成について説明する。
例えば、第3実施形態、第4実施形態では、凹部109、209の側面全面に導電部材が形成されている例を説明したが、凹部の側面130、230の側面の一部には導電部材が形成されていなくても良い。
ここで、図16に示すように、段差の底面170と、透光性部材180の表面との最短距離K1が、凹部109の高さK3の1/5以下とする。これにより、光を外側に抜けにくくさせることができる。なお、段差の底面170の上には導電部材102b(場合によってはさらに金属部材)の厚みにフィラー114が堆積される厚みを加えた距離K2がある。K1-K2が小さいほど、外側に抜ける光は少なくなるため好ましく、K1=K2とすることがさらに好ましい。なお、K2は基体の上面よりも高くならないように設定することが好ましい。
また、透光性部材108の表面が凹形状とされていることが好ましい。凹形状とすることで樹脂上面が基体101または201の上面を超えることが無く、発光装置同士がくっつく等の不具合を回避することができる。
その他の変形例として、例えば、基体101,201については、第1~第4実施形態では、凹部109や凹部209,209a,209b,209cを有するものについて説明したが、凹部109や凹部209,209a,209b,209cを有さない板状の基体を用いてもよい。なお、この場合、透光性部材108は、板状の基体の上面に堆積させればよい。さらには、透光性部材108を設けない構成としてもよい。
さらに、前記第1~第4実施形態では、1つまたは2つの発光素子104,104(204,204)を備える構成としたが、発光素子は、それぞれ、3つ以上設けられていてもよい。また、発光装置に搭載される発光素子が2以上の複数個である場合には、各発光素子の発光波長は異なるものであってもよい。例えば、RGBの3原色を発光する3つの発光素子を搭載する発光装置である。
なお、これらの変形例は、以下に説明する第5、第6実施形態およびその変形例等にも、これらの形態に合わせて適宜、適用することができる。
図20は、本発明の第5の実施の形態に係る発光装置を示す概略断面である。
本実施の形態において、発光装置100Aは、半導体層104bの表面に電極104cが配置される発光素子104Aと、発光素子104Aの電極104cに接合される導電部材102と、発光素子104Aの電極104c及び導電部材102の周囲を被覆する反射部材114と、発光素子104Aにおける電極104cが形成された面と対向する上面及び側面を覆う透光性部材108と、を備えて構成される。
本実施の形態においては、透光性部材108は、発光素子104Aにおける透光性基板104aの上面及び側面と、半導体層104bの側面と、を被覆している。透光性部材108と反射部材114との界面は、電極104cと半導体層104bとの界面と同一若しくは界面よりも上に配置されている。
また、一般的に、発光素子と波長変換部材を用いた光源は、セラミックスや樹脂を用いたパッケージに発光素子を実装し、その後、波長変換部材を設けているが、本発明の発光装置を各種パッケージ等に実装することにより、パッケージに実装する前の段階において色選別を行うことが可能であるため、パッケージ実装後の歩留まりが向上する。
次に、本実施形態に係る発光装置の製造方法について説明する。図21~24は、本実施の形態に係る発光装置の製造工程を示す概略断面図である。
本実施形態に係る発光装置の製造方法は、主として、支持基板101の上に複数の発光素子104Aの電極104cを接着する工程(第1の工程)と、支持基板101の上に少なくとも発光素子104Aの電極104cの周囲が被覆される高さまで反射部材114を電解鍍金法、電着塗装法又は静電塗装法によって形成する工程(第2の工程)と、を有する。さらにここでは、反射部材114の上に透光性部材108を形成することにより、発光素子104Aの上面及び側面を被覆する工程(第3の工程)と、支持基板101を除去し、反射部材114及び透光性部材108を分割することにより発光素子104Aを個片化する工程(第4の工程)と、を有する。
まず、支持基板101を準備する。支持基板101は、板状又はシート状の部材であり、本実施の形態に係る発光装置の製造工程において、発光装置を保持する役割を持つ。支持基板101は、発光装置を個片化する前に除去されるため、発光装置には具備されていない部材である。
次に、第1の工程において露出した導電部材102やダイボンド部材111等の導電部を被覆するように、絶縁性の反射部材114を設ける。図22(b)は、この第2の工程が完了した状態を示している。
また、反射部材114を保持するために、形成された反射部材114の層に樹脂や無機材料のバインダーを添加あるいは含浸させてもよい。また、後述する第3の工程において使用する透光性部材108を反射部材114に含浸させてもよい。
次に、発光素子104Aを被覆する透光性部材108を形成し硬化する。図23(a)は、反射部材114の上に透光性部材108を形成し、発光素子104Aを被覆したことを示す図である。透光性部材108は、反射部材114から露出した発光素子104Aの上面及び側面を被覆する高さまで形成することが好ましい。透光性部材108の形成方法としては、ポッティング、印刷、圧縮成型、トランスファーモールド、射出成形、溶射、電着、キャスト、スピンコート等を用いることができる。形成された透光性部材108は、加熱や光照射等によって硬化させることができる。なお、透光性部材108は単一の部材で形成することもできるし、または、2層以上の複数層として形成することもできる。
第3の工程の後、支持基板101を除去する。これにより、導電部材102の底面が露出する。図23(b)は、支持基板101を除去した状態を示す図である。支持基板101を除去する方法としては、物理的に剥がす方法、エッチングにより選択的に支持基板101を除去する方法等を用いることができる。
本実施の形態に用いられる発光素子は、透光性基板に半導体材料を積層させてチップ化したものが好ましい。窒化物半導体を積層させるための基板の材料として、例えば、サファイア、スピネルなどの絶縁性基板や、GaN、SiC、Si、ZnOなどの導電性基板が好適に用いられる。
また、導電部材又はダイボンド部材との接続領域となる電極の表面を除いて発光素子のほぼ全面に絶縁性の保護膜を形成してもよい。保護膜にはSiO2、TiO2、Al2O3、ポリイミド等が利用できる。
導電部材は、発光素子の正電極及び負電極に接着され、外部電極と電気的に接続するための発光装置の電極として機能するものである。導電部材の少なくとも一つは、発光素子の正電極が直接又はダイボンド部材等を介して載置される。また、導電部材の他の少なくとも一つは、発光素子の負電極が直接又はダイボンド部材を介して載置される。
導電部材の側面は、平坦な面でもよいが、微細な凹凸等が形成されていてもよい。また、導電部材の側面は、下面側に側面が傾斜又は湾曲する形状であってもよい。これにより、反射部材と導電部材との剥離を防止することができる。
導電部材と発光素子の電極とを接着するためにダイボンド部材を用いることが好ましい。導電性を有するダイボンド部材を用いることで導電部材と発光素子とを導通させることができる。ダイボンド部材としては、Au-Sn等のハンダ材料、Au等の金属バンプ等が挙げられる。特に、Au-Sn等の高融点材料を用いることが好ましい。ダイボンド部材の厚みは、0.5μm~500μm程度であることが好ましい。
反射部材は、絶縁性を有しており、主として導電部材の側面を被覆するように設けられるものである。導電部材が発光素子の電極にダイボンド部材を介して接着されている場合は、ダイボンド部材の側面も被覆するように反射部材を設けることが好ましい。反射部材は、発光素子から出射された光、または波長変換部材で波長変換された光を反射させる効果を持つ。これにより、導電部材等に光が入射することにより生じる光の損失を低減することができる。また、反射部材は、発光素子の電極の周囲を被覆するように設けることが好ましい。
また、発光装置の下面において、導電部材が配置されていない部分に、反射部材を設けることが好ましい。このような位置に反射部材を設けることにより、発光素子からの光が、発光装置の下面側から外部に漏れ出すのを防止することができ、上面方向への光の取り出し効率を向上させることができる。
反射部材は、その反射率が、430nm~490nmの波長域の光(青色光)に対して50%以上であることが好ましい。
フィラーとしては、粒径が10nm~10μm程度の範囲のものを用いることが好ましい。さらに好ましくは100nm~5μmである。これにより、光を良好に散乱させることができる。
透光性部材は、発光素子における上面及び側面を被覆している。また、透光性部材と反射部材との界面は、発光素子の側面側に配置されている。
発光素子の上面から透光性部材の上面までの厚みは、発光素子の側面から透光性部材の側面までの厚みと略同一であることが好ましい。これにより、ニアフィールドにおいて良好な配光特性を得ることができ、発光素子の発光面の各方位において均一な発光を得ることができる。
しかしながら、発光素子の側面から透光性部材の側面までの厚みが、発光素子の上面から透光性部材の上面までの厚みよりも薄くなるように形成してもよい。これにより、ファーフィールドにおいて良好な配光特性を得ることができ、発光素子の発光面の各方位において均一な発光を得ることができる。
透光性部材の厚みは、少なくとも10μm以上であることが好ましい。また、30μm~300μm程度の範囲であることがより好ましい。
図25(a)は、本発明の第6の実施の形態に係る発光装置を示す概略断面図である。第5実施形態と重複する説明は省略することもある。
すなわち、この構成も、半導体層204bと透光性基板204aとを有する発光素子204Aと、透光性基板204aの側面の少なくとも一部及び上面を露出し、かつ、半導体層204bの側面を被覆する反射部材114と、透光性基板204aのうち、反射部材114から露出された部分を被覆する透光性部材108と、を備えたものである。
透光性部材108は、発光素子204Aにおける透光性基板204aの上面及び側面を被覆している。透光性部材108と反射部材114との界面は、半導体層204bと透光性基板204aとの界面と同一若しくは界面よりも上に配置されている。半導体層204b内を進行する光は、反射部材114から露出された透光性基板204aを介して出射される。
この変形例の発光装置300Aのように、反射部材114の上面が発光装置の外側に向かって傾斜又は湾曲していることにより、透光性部材108の表面や波長変換部材で反射されて反射部材114側に向かう光を、外部に取り出しやすくすることができる。
また、さらに、図28(a)、(b)に示すように、基体をSi基板101bとし、Siの異方性エッチングにより、テーパー状の基板とすることもできる。図28(a)のように台形状の基板とすることで、発光装置300Dから放出される光の配光角を広げることができる。また、図28(b)のようにリフレクター形状とすることで、発光装置300Eから放出される光の配光角が狭まり、正面輝度を高めることができ、二次光学系への光の取り込み量を増やすことができる。
11,21,104b,204b,304b,404b 半導体層
13,23 保護膜
14 p型電極
16 n型電極
22a 反射層
22b バリア層
22c 接着層
24 電極
25a,25b パッド電極
100,200,100A,200A,300A,400A 発光装置
101,201 基体(支持基板)
101a 基板(基体)
101b Si基板(基体)
102,102a,102b,202a,202b,202c,202d,302,402 導電部材
103 金属部材
104,104A,204A,304A,404A 発光素子
104c,204c,304c,404c 電極
105 保護素子
106,206 ワイヤ(導電性ワイヤ)
108 透光性部材
118 分離部
109,209,209a,209b,209c 凹部
110 保護素子の接合部材
111,203,303,403 接合部材(ダイボンド部材(ハンダ材料))
112 ダイシングシート
114 反射部材(フィラー)
120,220,220a,220b,220c 凹部の底面
123 接合層
130,230,230a,230b,230c 凹部の側面
140,240 基体の裏面
207 遮光性部材
G 溝部
KT 蛍光体
Claims (36)
- 半導体層と透光性基板とを有する発光素子と、
前記透光性基板の側面の少なくとも一部及び上面を露出し、かつ、前記半導体層の側面を被覆する反射部材と、
前記透光性基板のうち、前記反射部材から露出された部分を被覆する透光性部材と、を備えたことを特徴とする発光装置。 - さらに、基体と、前記基体上に設けられた導電部材と、を有し、前記発光素子が前記導電部材上に載置され、
前記導電部材の表面において、少なくとも前記発光素子が載置されていない部位を前記反射部材である絶縁性のフィラーが被覆しており、前記透光性部材が前記発光素子を被覆していることを特徴とする請求の範囲第1項に記載の発光装置。 - 前記基体が凹部を有し、前記導電部材が前記凹部の底面及び側面に設けられ、前記発光素子が前記凹部の底面に載置されていることを特徴とする請求の範囲第2項に記載の発光装置。
- 前記凹部の側面において、前記凹部の上端面と接する部分には、導電部材が形成されていない領域を有することを特徴とする請求の範囲第3項に記載の発光装置。
- 前記凹部の側面において、前記凹部の底面と接する部分には、導電部材が形成されていない領域を有することを特徴とする請求の範囲第3項に記載の発光装置。
- 前記凹部の上端面側において、前記凹部の側面に段差を有しており、前記段差の側面には、導電部材が形成されていない領域を有することを特徴とする請求の範囲第3項に記載の発光装置。
- 前記段差の底面のうち、最も上方に位置する面と、前記透光性部材の表面との最短距離が、前記凹部の高さの1/5以下であることを特徴とする請求の範囲第6項に記載の発光装置。
- 前記透光性部材の表面が凹形状であることを特徴とする請求の範囲第1項に記載の発光装置。
- 前記フィラーは5μm以上の厚みで被覆されていることを特徴とする請求の範囲第2項又は請求の範囲第3項に記載の発光装置。
- 前記フィラーの反射率は、発光波長の光に対して50%以上であることを特徴とする請求の範囲第2項又は請求の範囲第3項に記載の発光装置。
- 前記フィラーが、前記発光素子の表面を被覆しており、1つの発光素子における前記フィラーに被覆された表面積が、前記1つの発光素子の全体の表面積の50%未満であることを特徴とする請求の範囲第2項又は請求の範囲第3項に記載の発光装置。
- 前記導電部材が、正の電極と、負の電極と、を有しており、これらの電極が前記基体上で離間して設けられ、前記電極間の少なくとも一部に、前記フィラーが被覆されていることを特徴とする請求の範囲第2項又は請求の範囲第3項に記載の発光装置。
- 前記電極間の距離が、200μm以下であることを特徴とする請求の範囲第12項に記載の発光装置。
- 前記発光素子が、フリップチップ実装された発光素子であることを特徴とする請求の範囲第2項又は請求の範囲第3項に記載の発光装置。
- 前記発光装置には、保護素子が実装されており、この保護素子における表面の50%以上を前記フィラーが被覆していることを特徴とする請求の範囲第2項又は請求の範囲第3項に記載の発光装置。
- 前記フィラーの少なくとも一部は、遮光性部材により被覆されていることを特徴とする請求の範囲第2項又は請求の範囲第3項に記載の発光装置。
- 前記遮光性部材は、前記基体の側壁を被覆していることを特徴とする請求の範囲第16項に記載の発光装置。
- 前記透光性部材は、前記発光素子の他に、前記フィラーを被覆していることを特徴とする請求の範囲第2項又は請求の範囲第3項に記載の発光装置。
- 基体と、
前記基体上に設けられた導電部材と、
前記導電部材上に載置された発光素子と、
前記導電部材の電極となる部位と前記発光素子の電極端子とを電気的に接続するワイヤと、
前記発光素子が載置されていない導電部位及び前記ワイヤの下面を被覆する絶縁性のフィラーと、
前記発光素子及び前記フィラーを被覆する透光性部材と、を備えることを特徴とする発光装置。 - 前記フィラーの隙間部には透光性部材が含浸していることを特徴とする請求の範囲第2項、請求の範囲第3項、又は請求の範囲第19項に記載の発光装置。
- 前記フィラーが被覆されている領域において、前記フィラーは前記含浸された透光性部材に対して、50体積%よりも多く含有されていることを特徴とする請求の範囲第20項に記載の発光装置。
- 半導体層と、前記半導体層の表面に配置される正電極及び負電極と、を有する発光素子と、前記正電極及び負電極に接合される導電部材と、前記正電極及び負電極の側面と前記導電部材の側面とを被覆する反射部材と、前記発光素子における前記電極が形成された面と対向する上面及び側面を覆う透光性部材と、を有することを特徴とする発光装置。
- 前記反射部材が発光装置の側面に露出していることを特徴とする請求の範囲第22項に記載の発光装置。
- 前記透光性部材と前記反射部材との界面が、前記発光素子の側面側に設けられていることを特徴とする請求の範囲第22項に記載の発光装置。
- 前記発光素子の上面から前記透光性部材の上面までの厚みが、前記発光素子の側面から前記透光性部材の側面までの厚みと略同一であることを特徴とする請求の範囲第22項に記載の発光装置。
- 前記発光素子の側面から前記透光性部材の側面までの厚みが、前記発光素子の上面から前記透光性部材の上面までの厚みよりも薄いことを特徴とする請求の範囲第22項に記載の発光装置。
- 前記透光性部材は、波長変換部材が含有されてなることを特徴とする請求の範囲第22項に記載の発光装置。
- 支持基板の上に複数の発光素子の電極を接着する工程と、
前記支持基板の上に、少なくとも前記発光素子の電極の周囲に反射部材を、電解鍍金法、電着塗装法又は静電塗装法によって形成する工程と、を含むことを特徴とする発光装置の製造方法。 - 支持基板である基体上に導電部材を形成する工程と、
前記導電部材上に、発光素子を載置するダイボンディング工程と、
前記導電部材の表面のうち、前記発光素子が形成されていない部位を、電解鍍金法、電着塗装法又は静電塗装法により反射部材である絶縁性のフィラーで被覆する工程と、
前記発光素子を透光性部材で被覆する工程と、を具備することを特徴とする発光装置の製造方法。 - 前記基体が凹部を有し、前記凹部の底面及び側面に導電部材を形成し、前記凹部の底面に発光素子を載置することを特徴とする請求の範囲第29項に記載の発光装置の製造方法。
-
前記フィラーは5μm以上の厚みで被覆されていることを特徴とする請求の範囲第29項又は請求の範囲第30項に記載の発光装置の製造方法。 - 前記ダイボンディング工程の後に、前記導電部材の電極となる部位と前記発光素子の電極端子とをワイヤにより電気的に接続するワイヤボンディング工程を有し、
前記フィラー被覆工程において、前記ワイヤの下面を被覆するようにフィラーを形成することを特徴とする請求の範囲第29項又は請求の範囲第30項に記載の発光装置の製造方法。 - 前記フィラーを遮光性部材で被覆する工程を有することを特徴とする請求の範囲第29項又は請求の範囲第30項に記載の発光装置の製造方法。
- 前記反射部材の上に、透光性部材を形成することにより、前記発光素子の側面及び上面を被覆する工程と、
前記支持基板を除去し、前記反射部材及び透光性部材を分割することにより前記発光素子を個片化する工程と、を含むことを特徴とする請求の範囲第28項に記載の発光装置の製造方法。 -
前記透光性部材を形成する工程において、前記反射部材に前記透光性部材を含浸させることを特徴とする請求の範囲第34項に記載の発光装置の製造方法。 - 前記透光性部材は、波長変換部材が含有されてなることを特徴とする請求の範囲第34項に記載の発光装置の製造方法。
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- 2011-01-28 BR BR112012020317-7A patent/BR112012020317B1/pt active IP Right Grant
- 2011-01-28 US US13/577,491 patent/US9196805B2/en active Active
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EP3547380A1 (en) | 2019-10-02 |
JP6056920B2 (ja) | 2017-01-11 |
US10230034B2 (en) | 2019-03-12 |
JPWO2011099384A1 (ja) | 2013-06-13 |
US20160035952A1 (en) | 2016-02-04 |
CN102754229A (zh) | 2012-10-24 |
KR101763972B1 (ko) | 2017-08-01 |
KR20170091167A (ko) | 2017-08-08 |
BR112012020317A2 (pt) | 2016-05-03 |
EP2535954A1 (en) | 2012-12-19 |
US9887329B2 (en) | 2018-02-06 |
RU2012138400A (ru) | 2014-03-20 |
JP2015228512A (ja) | 2015-12-17 |
TWI502775B (zh) | 2015-10-01 |
RU2525325C2 (ru) | 2014-08-10 |
KR20120125350A (ko) | 2012-11-14 |
EP2535954B1 (en) | 2019-06-12 |
BR112012020317B1 (pt) | 2020-10-13 |
TW201214789A (en) | 2012-04-01 |
CN102754229B (zh) | 2016-07-06 |
EP2535954A4 (en) | 2015-04-15 |
US9196805B2 (en) | 2015-11-24 |
EP3547380B1 (en) | 2023-12-20 |
US20130037842A1 (en) | 2013-02-14 |
US20180123006A1 (en) | 2018-05-03 |
JP5996871B2 (ja) | 2016-09-21 |
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