JP5915222B2 - 内径測定装置 - Google Patents
内径測定装置 Download PDFInfo
- Publication number
- JP5915222B2 JP5915222B2 JP2012026042A JP2012026042A JP5915222B2 JP 5915222 B2 JP5915222 B2 JP 5915222B2 JP 2012026042 A JP2012026042 A JP 2012026042A JP 2012026042 A JP2012026042 A JP 2012026042A JP 5915222 B2 JP5915222 B2 JP 5915222B2
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
- G01B11/12—Measuring arrangements characterised by the use of optical techniques for measuring diameters internal diameters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
- G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
- G02B23/24—Instruments or systems for viewing the inside of hollow bodies, e.g. fibrescopes
- G02B23/2476—Non-optical details, e.g. housings, mountings, supports
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/954—Inspecting the inner surface of hollow bodies, e.g. bores
- G01N2021/9542—Inspecting the inner surface of hollow bodies, e.g. bores using a probe
- G01N2021/9544—Inspecting the inner surface of hollow bodies, e.g. bores using a probe with emitter and receiver on the probe
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Astronomy & Astrophysics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Length Measuring Devices By Optical Means (AREA)
Description
2 撮像部
3 レーザ光線発光部
4 芯合せ部
5 レーザ光線拡散部
6 フレーム部
11 カメラ
14 レーザ発光器
17 レーザ光線
17′ レーザ光線
18 ハウジング
21 調整機構部
22 X軸スライダ
23 Y軸スライダ
26 光路孔
29 X軸ガイド溝
31 X軸ガイド
32 Y軸ガイド溝
33 Y軸ガイド
34 Y軸ガイド
36 X軸調整螺子
44 Y軸調整螺子
51 コーンミラー
52 全周透光窓
55 透光窓部
56 コーンミラーホルダ
57 固定フランジ
61 光リング
Claims (5)
- フレーム部の基端に設けられ、先端側を撮像する撮像部と、前記フレーム部の先端に設けられた芯合せ部と、該芯合せ部に透光窓部を介して前記芯合せ部の先端側に設けられたレーザ光線拡散部と、前記芯合せ部の発光部取付け面に取付けられたレーザ光線発光部と、前記レーザ光線拡散部に設けられ、先端に円錐反射面を有するコーンミラーとを具備し、該コーンミラーの軸心と前記撮像部の光軸は合致し、前記芯合せ部はスライダベースと、該スライダベースの上面に摺動可能に設けられ、前記撮像部の光軸に対して直交する方向にスライド可能なX軸スライダと、該X軸スライダの上面に摺動可能に設けられ、前記撮像部の光軸に対して直交すると共に前記X軸スライダのスライド方向に直交する方向にスライド可能なY軸スライダと、該Y軸スライダの上面に形成された前記発光部取付け面と、前記スライダベースと前記X軸スライダと前記Y軸スライダの中心部を貫通して形成された光路孔とを有し、前記レーザ光線発光部から照射されるレーザ光線が前記光路孔を通過して前記コーンミラーの頂点に入射する様、前記レーザ光線発光部の姿勢を調整可能としたことを特徴とする内径測定装置。
- 前記レーザ光線発光部は、前記発光部取付け面に3箇所で3組の引きボルト、押しボルトにより取付けられ、引きボルト、押しボルトの調整で前記レーザ光線発光部の光軸の前記コーンミラーの軸心に対する傾斜を調整可能とした請求項1の内径測定装置。
- 前記芯合せ部は前記フレーム部に着脱可能であり、前記芯合せ部と前記フレーム部とは嵌合方式で取付けられ、前記芯合せ部は前記フレーム部に取付けることで、前記芯合せ部の軸心が前記撮像部の光軸に合致する様構成された請求項1又は請求項2の内径測定装置。
- 前記レーザ光線拡散部は前記芯合せ部に嵌合方式で取付けられ、前記レーザ光線拡散部が前記芯合せ部に取付けられることで、前記コーンミラーの軸心が前記芯合せ部の軸心と合致する様構成された請求項1又は請求項3の内径測定装置。
- 前記芯合せ部と前記レーザ光線拡散部と前記レーザ光線発光部とを一体化し、前記芯合せ部により前記レーザ光線発光部の光軸と前記コーンミラーの軸心とを合致させた状態で、前記芯合せ部を前記フレーム部に取付けた請求項1又は請求項3又は請求項4の内径測定装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012026042A JP5915222B2 (ja) | 2012-02-09 | 2012-02-09 | 内径測定装置 |
US14/377,238 US9410795B2 (en) | 2012-02-09 | 2013-02-07 | Inner diameter measuring device |
PCT/JP2013/053589 WO2013118911A1 (ja) | 2012-02-09 | 2013-02-07 | 内径測定装置 |
EP13746779.1A EP2813805B1 (en) | 2012-02-09 | 2013-02-07 | Inside-diameter measurement device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012026042A JP5915222B2 (ja) | 2012-02-09 | 2012-02-09 | 内径測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013164271A JP2013164271A (ja) | 2013-08-22 |
JP5915222B2 true JP5915222B2 (ja) | 2016-05-11 |
Family
ID=48947660
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012026042A Active JP5915222B2 (ja) | 2012-02-09 | 2012-02-09 | 内径測定装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US9410795B2 (ja) |
EP (1) | EP2813805B1 (ja) |
JP (1) | JP5915222B2 (ja) |
WO (1) | WO2013118911A1 (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5884838B2 (ja) | 2012-02-09 | 2016-03-15 | 株式会社Ihi | 内径測定装置 |
JP2013164274A (ja) | 2012-02-09 | 2013-08-22 | Ihi Corp | 内径測定装置 |
JP5880096B2 (ja) | 2012-02-09 | 2016-03-08 | 株式会社Ihi | 内径測定装置 |
EP2813800B1 (en) | 2012-02-09 | 2019-10-02 | IHI Corporation | Inside-diameter measurement device |
JP5821675B2 (ja) | 2012-02-09 | 2015-11-24 | 株式会社Ihi | 回転機器の回転制限装置 |
JP5880097B2 (ja) * | 2012-02-09 | 2016-03-08 | 株式会社Ihi | 内径測定装置 |
JP5915223B2 (ja) | 2012-02-09 | 2016-05-11 | 株式会社Ihi | 内径測定装置及び内径測定方法 |
US9372076B2 (en) * | 2014-04-10 | 2016-06-21 | Tri Tool Inc. | System and method for automated pipe measurement and alignment |
EP2942654B1 (en) * | 2014-05-08 | 2018-10-10 | Airbus Defence and Space GmbH | Detector plane alignment adjusting device |
BR102015024034B1 (pt) * | 2015-09-17 | 2022-01-11 | Vallourec Soluções Tubulares Do Brasil S.A. | Sistema e método automáticos de medição e usinagem de extremidade de elementos tubulares |
CA2930037A1 (en) * | 2016-05-16 | 2017-11-16 | Inuktun Services Ltd. | Apparatus for laser profiling inspection |
CN107300366B (zh) * | 2017-08-25 | 2023-06-27 | 中国工程物理研究院核物理与化学研究所 | 一种孔用对中检测装置 |
US11376926B2 (en) | 2018-08-27 | 2022-07-05 | U.S. Farathane Corporation | Finger tab interface for vehicle pressure relief valve incorporated into a ventilation module for providing slow closing/opening of valve under low pressures resulting from a door slam event |
CN114877829B (zh) * | 2022-07-08 | 2022-09-09 | 兰州城市学院 | 一种地质勘探钻杆的直线度检测装置 |
Family Cites Families (88)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1664851A (en) | 1926-08-18 | 1928-04-03 | Gisholt Machine Co | Tool post |
US1721524A (en) | 1927-10-03 | 1929-07-23 | Charles E Moore | Feed-screw limit gauge for lathes |
US2822620A (en) | 1954-12-27 | 1958-02-11 | John C Ulfeldt | Gauge for measuring inside diameters |
US3247732A (en) | 1963-10-16 | 1966-04-26 | A E Moore Company Inc | Reversible drive mechanism |
US3436967A (en) | 1965-08-18 | 1969-04-08 | Aircraft Radio Corp | Mechanical suppressor for jittery shaft |
US3771350A (en) * | 1971-12-30 | 1973-11-13 | Aviat Inc | Pipeline leak detector |
GB1388475A (en) | 1972-02-08 | 1975-03-26 | Dale Ltd John | Flaw detector |
JPS50159355A (ja) | 1974-06-12 | 1975-12-23 | ||
US4045877A (en) | 1976-03-11 | 1977-09-06 | Sunnen Products Company | Retractable dial bore gauge |
IT1133314B (it) | 1980-06-02 | 1986-07-09 | Finike Italiana Marposs | Comparatore manuale a tampone per il controllo del diametro di fori |
JPS5866809A (ja) | 1981-09-28 | 1983-04-21 | サミユエル・ロスステイン | 管の欠陥測定方法及び管の検査装置における複合走査装置 |
JPS59187155A (ja) | 1983-04-06 | 1984-10-24 | Hitachi Ltd | 回転運動変換装置 |
US4536963A (en) | 1983-08-29 | 1985-08-27 | Mitutoyo Mfg. Co., Ltd. | Digital indication type measuring machine |
US4631834A (en) * | 1984-04-20 | 1986-12-30 | Mitutuoyo Mfg. Co., Ltd. | Coordinate measuring instrument |
JPS61144551A (ja) | 1984-12-18 | 1986-07-02 | Toshiba Corp | 長孔周壁検査装置 |
JPS61282659A (ja) | 1985-06-10 | 1986-12-12 | Fuji Electric Co Ltd | 回動軸の回動範囲制限機構 |
JPH0733996B2 (ja) | 1986-08-26 | 1995-04-12 | 三菱電機株式会社 | 管内面形状検出装置 |
JPS63159708A (ja) | 1986-12-24 | 1988-07-02 | Seiko Instr & Electronics Ltd | 円筒形状物の軸中心検出装置 |
IT1213696B (it) | 1987-10-09 | 1989-12-29 | Marposs Spa | Apparecchio per il controllo di dimensioni lineari di pezzi |
JPH01195309A (ja) | 1988-01-29 | 1989-08-07 | Sumitomo Rubber Ind Ltd | 円筒体測定装置 |
US4872269A (en) * | 1988-04-08 | 1989-10-10 | Karl Sattmann | Automatic cylinder profiling gage |
FR2631697B1 (fr) * | 1988-05-17 | 1991-07-26 | Hispano Suiza Sa | Appareil pour le controle optique du profil interne d'un tube ou d'un alesage |
DE3841439A1 (de) | 1988-12-09 | 1990-06-13 | Pietzsch Automatisierungstech | Vorrichtung zum gleichzeitigen vermessen hintereinanderliegender zylinderbohrungen |
US4937524A (en) | 1989-04-24 | 1990-06-26 | The Babcock & Wilcox Company | Rotating eddy current roller head for inspecting tubing |
JPH0562573A (ja) | 1991-06-18 | 1993-03-12 | Fuji Electric Co Ltd | 光電スイツチ |
US5259119A (en) | 1991-09-17 | 1993-11-09 | Mitutoyo Corporation | Automatic inner diameter measuring apparatus and zero adjustment thereof |
US5224274A (en) | 1992-03-12 | 1993-07-06 | The Edmunds Manufacturing Company | Contact gage |
JP2531488B2 (ja) * | 1993-08-10 | 1996-09-04 | 株式会社機動技研 | 管内測定方法 |
JPH0729405U (ja) * | 1993-11-01 | 1995-06-02 | 三菱重工業株式会社 | 管内面検査装置 |
JPH07191269A (ja) | 1993-12-27 | 1995-07-28 | Y S Opt:Kk | 内面観察装置 |
JPH0814874A (ja) | 1994-06-27 | 1996-01-19 | Tosok Corp | 測定装置 |
JPH0893876A (ja) | 1994-09-28 | 1996-04-12 | Mitsubishi Heavy Ind Ltd | 回転軸の過回動防止構造 |
JP3338571B2 (ja) | 1994-11-22 | 2002-10-28 | アスモ株式会社 | 移動体の位置検出装置 |
FR2730304B3 (fr) | 1995-02-07 | 1997-04-18 | Arnould Denis | Appareil mecanique de metrologie pour mesures d'alesages et de cones de grande dimension |
WO1997002480A1 (en) * | 1995-06-30 | 1997-01-23 | The United States Of America, Represented By The Secretary Of The Air Force | Electro-optic, noncontact, interior cross-sectional profiler |
US6124037A (en) | 1996-04-08 | 2000-09-26 | Alcon Laboratories, Inc. | Articles coated with in vivo polymerizable ophthalmic compositions |
JPH09311034A (ja) | 1996-05-23 | 1997-12-02 | Sumitomo Metal Ind Ltd | 鋼管の内径・内周長測定方法及び装置 |
US5933231A (en) * | 1996-07-10 | 1999-08-03 | Industrial Technology Institute | Method and system for measuring cavities and probe for use therein |
JPH10137962A (ja) | 1996-11-07 | 1998-05-26 | Matsushita Electric Ind Co Ltd | レーザ光学系 |
JPH10197215A (ja) | 1996-12-19 | 1998-07-31 | Westinghouse Electric Corp <We> | 管状製品の内壁の光学検査装置 |
JP3700805B2 (ja) | 1997-01-30 | 2005-09-28 | 石川島播磨重工業株式会社 | ロングシャフトの内径振れ計測装置 |
GB9719514D0 (en) | 1997-09-12 | 1997-11-19 | Thames Water Utilities | Non-contact measuring apparatus |
US6427353B1 (en) | 1998-05-28 | 2002-08-06 | Rockwell Automation Technologies, Inc. | High speed acquisition and calculation of dimensional variables with vibration and skew error reduction |
JP2000136923A (ja) | 1998-11-04 | 2000-05-16 | Kubota Corp | 接触式管内径測定装置 |
JP2000146564A (ja) | 1998-11-04 | 2000-05-26 | Kubota Corp | 接触式管内径測定装置の精度確認装置 |
US6243962B1 (en) | 1999-02-10 | 2001-06-12 | Samsomatic, Ltd. | Boring apparatus with shaft mounted diameter gage |
JP2002022671A (ja) | 2000-07-12 | 2002-01-23 | Nissan Motor Co Ltd | 円筒内壁面検査装置および検査方法 |
JP2002148036A (ja) | 2000-11-10 | 2002-05-22 | Mitsubishi Heavy Ind Ltd | 管内径モニタリング装置 |
US7046356B2 (en) * | 2000-11-15 | 2006-05-16 | Quest Trutec, Lp | Method for processing in situ inspection reformer tube data |
JP4085616B2 (ja) | 2001-11-01 | 2008-05-14 | 株式会社日立プラントテクノロジー | 内面形状計測方法及びその装置 |
US6931149B2 (en) | 2002-04-19 | 2005-08-16 | Norsk Elektro Optikk A/S | Pipeline internal inspection device and method |
JP2003329606A (ja) | 2002-05-09 | 2003-11-19 | Tohoku Techno Arch Co Ltd | 内面検査装置 |
JP3869360B2 (ja) | 2002-12-27 | 2007-01-17 | 三鷹光器株式会社 | 手術用顕微鏡の回転支持構造 |
JP2004176852A (ja) | 2002-11-28 | 2004-06-24 | Moriyama Giken:Kk | 回転体ストッパーとそれを用いた風力発電装置 |
JP4230408B2 (ja) | 2004-04-30 | 2009-02-25 | 独立行政法人科学技術振興機構 | 深穴計測装置および深穴計測方法 |
JP2005331333A (ja) | 2004-05-19 | 2005-12-02 | Mitsubishi Heavy Ind Ltd | 軸管内径計測装置および軸管内径自動計測装置 |
JP3105724U (ja) | 2004-06-04 | 2004-11-25 | 株式会社環境システム | 管の内径測定装置 |
US7189023B2 (en) | 2004-09-01 | 2007-03-13 | Micro-Star Int'l Co., Ltd. | Rotational positioning apparatus |
JP2006153546A (ja) | 2004-11-26 | 2006-06-15 | Sanyo Special Steel Co Ltd | 接触式鋼管寸法測定装置 |
JP4508849B2 (ja) | 2004-11-30 | 2010-07-21 | 株式会社ケンウッド | 回転つまみのストッパー構造 |
US7111407B2 (en) | 2004-11-30 | 2006-09-26 | Tennessee Valley Authority | Vertical shaft alignment tool |
JP4192901B2 (ja) | 2005-02-17 | 2008-12-10 | 三菱電機株式会社 | アンテナ装置 |
JP4641824B2 (ja) | 2005-02-24 | 2011-03-02 | 株式会社クボタ | 管内調査装置 |
US7328520B2 (en) | 2005-06-17 | 2008-02-12 | The Technologies Alliance, Inc. | Gage for measuring diameters |
JP2007057305A (ja) * | 2005-08-23 | 2007-03-08 | Mitsubishi Electric Engineering Co Ltd | 筒内検査装置 |
JP2007071852A (ja) | 2005-09-02 | 2007-03-22 | Akio Katsuki | 深穴測定装置および深穴測定方法 |
CH705706B1 (de) | 2005-11-03 | 2013-05-15 | Belimo Holding Ag | Stellantrieb mit einem Reduktionsgetriebe für ein Stellglied zur Regelung eines Gas- oder Flüssigkeitsstroms. |
FR2898671B1 (fr) | 2006-03-14 | 2008-12-26 | Snecma Sa | Systeme de mesure de cotes a l'interieur d'un arbre creux notamment de turbomachine aeronautique |
JP2007292699A (ja) | 2006-04-27 | 2007-11-08 | Asmo Co Ltd | 部材の表面検査方法 |
DE202006017076U1 (de) * | 2006-11-08 | 2007-01-04 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung zur Inspektion einer Rohrleitung |
US20090144999A1 (en) | 2006-11-30 | 2009-06-11 | Lau Kam C | Interior contour measurement probe |
DK2300777T3 (da) | 2008-06-18 | 2013-11-04 | Chris Marine Ab | Cylinderdiametermåling |
US8164758B2 (en) | 2008-07-10 | 2012-04-24 | Quest Metrology, LLC | Internal inspection system and method |
JP2010019783A (ja) | 2008-07-14 | 2010-01-28 | Mitsutoyo Corp | 内径測定器 |
US8035823B2 (en) * | 2008-09-05 | 2011-10-11 | 3Dm Devices Inc. | Hand-held surface profiler |
NO333307B1 (no) * | 2008-11-24 | 2013-04-29 | Statoil Asa | Anordning og fremgangsmate for optisk maling av tykkelsen av enhver avsetning av materiale pa innerveggen til en konstruksjon |
JP2010164334A (ja) * | 2009-01-13 | 2010-07-29 | Ihi Corp | 内面形状測定装置および内面形状測定方法 |
JP2011002439A (ja) | 2009-06-22 | 2011-01-06 | Kentaro Iguchi | 検査装置 |
JP5378083B2 (ja) | 2009-07-01 | 2013-12-25 | 東亜グラウト工業株式会社 | 内径測定装置及びその内径測定装置を用いた管路内径測定システム |
US20110080588A1 (en) | 2009-10-02 | 2011-04-07 | Industrial Optical Measurement Systems | Non-contact laser inspection system |
JP5880097B2 (ja) | 2012-02-09 | 2016-03-08 | 株式会社Ihi | 内径測定装置 |
JP5880096B2 (ja) | 2012-02-09 | 2016-03-08 | 株式会社Ihi | 内径測定装置 |
JP2013164274A (ja) | 2012-02-09 | 2013-08-22 | Ihi Corp | 内径測定装置 |
JP5821675B2 (ja) | 2012-02-09 | 2015-11-24 | 株式会社Ihi | 回転機器の回転制限装置 |
JP5884838B2 (ja) | 2012-02-09 | 2016-03-15 | 株式会社Ihi | 内径測定装置 |
EP2813800B1 (en) | 2012-02-09 | 2019-10-02 | IHI Corporation | Inside-diameter measurement device |
JP5915223B2 (ja) | 2012-02-09 | 2016-05-11 | 株式会社Ihi | 内径測定装置及び内径測定方法 |
US9188775B2 (en) * | 2013-08-28 | 2015-11-17 | United Sciences, Llc | Optical scanning and measurement |
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2012
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2013
- 2013-02-07 WO PCT/JP2013/053589 patent/WO2013118911A1/ja active Application Filing
- 2013-02-07 US US14/377,238 patent/US9410795B2/en active Active
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US9410795B2 (en) | 2016-08-09 |
WO2013118911A1 (ja) | 2013-08-15 |
EP2813805B1 (en) | 2019-12-04 |
JP2013164271A (ja) | 2013-08-22 |
US20150015873A1 (en) | 2015-01-15 |
EP2813805A4 (en) | 2015-10-07 |
EP2813805A1 (en) | 2014-12-17 |
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