DE19816151B4 - Verfahren zur Steuerung eines automatischen Transportierers in einer Halbleiterwaferkassettentransportvorrichtung - Google Patents

Verfahren zur Steuerung eines automatischen Transportierers in einer Halbleiterwaferkassettentransportvorrichtung Download PDF

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Publication number
DE19816151B4
DE19816151B4 DE19816151A DE19816151A DE19816151B4 DE 19816151 B4 DE19816151 B4 DE 19816151B4 DE 19816151 A DE19816151 A DE 19816151A DE 19816151 A DE19816151 A DE 19816151A DE 19816151 B4 DE19816151 B4 DE 19816151B4
Authority
DE
Germany
Prior art keywords
conveyor
controlling
semiconductor wafer
wafer cassette
automatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE19816151A
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English (en)
Other versions
DE19816151A1 (de
Inventor
Junji Iwasaki
Junichi Katsube
Yasushi Itami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of DE19816151A1 publication Critical patent/DE19816151A1/de
Application granted granted Critical
Publication of DE19816151B4 publication Critical patent/DE19816151B4/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67294—Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/14—Wafer cassette transporting

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
DE19816151A 1997-08-08 1998-04-09 Verfahren zur Steuerung eines automatischen Transportierers in einer Halbleiterwaferkassettentransportvorrichtung Expired - Fee Related DE19816151B4 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9214916A JPH1159829A (ja) 1997-08-08 1997-08-08 半導体ウェハカセット搬送装置、半導体ウェハカセット搬送装置で用いられるストッカ、ならびに半導体ウェハカセット搬送装置で用いられるストッカ入庫作業制御方法、ストッカ出庫作業制御方法、自動搬送車制御方法、およびストッカ在庫照合方法

Publications (2)

Publication Number Publication Date
DE19816151A1 DE19816151A1 (de) 1999-02-18
DE19816151B4 true DE19816151B4 (de) 2005-04-28

Family

ID=16663713

Family Applications (4)

Application Number Title Priority Date Filing Date
DE19816151A Expired - Fee Related DE19816151B4 (de) 1997-08-08 1998-04-09 Verfahren zur Steuerung eines automatischen Transportierers in einer Halbleiterwaferkassettentransportvorrichtung
DE19816130A Ceased DE19816130A1 (de) 1997-08-08 1998-04-09 Steuerverfahren für eine Lagerungsvorrichtungseintrittsaufgabe und eine Lagerungsvorrichtungsaustrittsaufgabe, die in einer Halbleiterwaferkassettentransportvorrichtung verwendet werden
DE19816127A Expired - Fee Related DE19816127B4 (de) 1997-08-08 1998-04-09 Vergleichsverfahren für eine Lagerungsvorrichtungslagerung in einer Halbleiterwaferkassettentransportvorrichtung
DE19816199A Ceased DE19816199A1 (de) 1997-08-08 1998-04-09 Halbleiterwaferkassettentransportvorrichtung und darin verwendete Lagerungsvorrichtung

Family Applications After (3)

Application Number Title Priority Date Filing Date
DE19816130A Ceased DE19816130A1 (de) 1997-08-08 1998-04-09 Steuerverfahren für eine Lagerungsvorrichtungseintrittsaufgabe und eine Lagerungsvorrichtungsaustrittsaufgabe, die in einer Halbleiterwaferkassettentransportvorrichtung verwendet werden
DE19816127A Expired - Fee Related DE19816127B4 (de) 1997-08-08 1998-04-09 Vergleichsverfahren für eine Lagerungsvorrichtungslagerung in einer Halbleiterwaferkassettentransportvorrichtung
DE19816199A Ceased DE19816199A1 (de) 1997-08-08 1998-04-09 Halbleiterwaferkassettentransportvorrichtung und darin verwendete Lagerungsvorrichtung

Country Status (5)

Country Link
US (4) US6169935B1 (de)
JP (1) JPH1159829A (de)
KR (4) KR100323192B1 (de)
DE (4) DE19816151B4 (de)
TW (3) TW407131B (de)

Cited By (3)

* Cited by examiner, † Cited by third party
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DE102005061970A1 (de) * 2005-06-20 2006-12-28 Lg. Philips Lcd Co., Ltd. Vorrichtung zum Stapeln von Kassetten und Verfahren zur Herstellung einer Flüssigkristallanzeigevorrichtung unter Verwendung derselben
DE102008012409B4 (de) * 2007-03-07 2017-08-17 Daifuku Co., Ltd. Steuerverfahren zum Steuern einer Gegenstandbearbeitungsanlage
CN112088133A (zh) * 2019-04-16 2020-12-15 株式会社迅销 库存管理***以及库存管理方法

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KR100323192B1 (ko) 2004-04-06
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KR19990023106A (ko) 1999-03-25
KR19990023104A (ko) 1999-03-25
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KR19990023105A (ko) 1999-03-25
US6169935B1 (en) 2001-01-02
US6151533A (en) 2000-11-21
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US6129496A (en) 2000-10-10
US6050768A (en) 2000-04-18
TW407131B (en) 2000-10-01
KR100276621B1 (ko) 2001-02-01
TW499385B (en) 2002-08-21
DE19816130A1 (de) 1999-02-18
JPH1159829A (ja) 1999-03-02

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