CN1532532B - 基板保持架 - Google Patents

基板保持架 Download PDF

Info

Publication number
CN1532532B
CN1532532B CN2004100300483A CN200410030048A CN1532532B CN 1532532 B CN1532532 B CN 1532532B CN 2004100300483 A CN2004100300483 A CN 2004100300483A CN 200410030048 A CN200410030048 A CN 200410030048A CN 1532532 B CN1532532 B CN 1532532B
Authority
CN
China
Prior art keywords
lattice bar
substrate
frame shape
lattice
absorption
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2004100300483A
Other languages
English (en)
Chinese (zh)
Other versions
CN1532532A (zh
Inventor
城崎修哉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Publication of CN1532532A publication Critical patent/CN1532532A/zh
Application granted granted Critical
Publication of CN1532532B publication Critical patent/CN1532532B/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mathematical Physics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Vibration Prevention Devices (AREA)
CN2004100300483A 2003-03-18 2004-03-18 基板保持架 Expired - Fee Related CN1532532B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003074040A JP4276867B2 (ja) 2003-03-18 2003-03-18 基板ホルダ及びこれを備えた表面検査装置
JP074040/2003 2003-03-18

Publications (2)

Publication Number Publication Date
CN1532532A CN1532532A (zh) 2004-09-29
CN1532532B true CN1532532B (zh) 2010-12-08

Family

ID=33289785

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2004100300483A Expired - Fee Related CN1532532B (zh) 2003-03-18 2004-03-18 基板保持架

Country Status (4)

Country Link
JP (1) JP4276867B2 (ko)
KR (1) KR101011850B1 (ko)
CN (1) CN1532532B (ko)
TW (1) TWI332931B (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI734129B (zh) * 2018-06-25 2021-07-21 美商應用材料股份有限公司 用於一基板之載體及用以運載一基板之方法

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI307929B (en) * 2005-05-12 2009-03-21 Olympus Corp Substrate inspection apparatus
JP2009231437A (ja) * 2008-03-21 2009-10-08 Olympus Corp マクロ検査装置、マクロ検査システム、及び、マクロ検査方法
US9228256B2 (en) * 2009-12-11 2016-01-05 Kgt Graphit Technologie Gmbh Substrate support
KR101881408B1 (ko) * 2016-08-22 2018-07-23 주성엔지니어링(주) 기판지지홀더 및 이를 사용한 기판처리장치
TWI658532B (zh) * 2017-08-09 2019-05-01 明安國際企業股份有限公司 基板承置匣
TWD210557S (zh) 2020-01-21 2021-03-21 志聖工業股份有限公司 熱製程用承載盤

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2370524Y (zh) * 1999-01-07 2000-03-22 神基科技股份有限公司 具防震结构的数据存储装置
CN1401871A (zh) * 2001-08-07 2003-03-12 笠井和彦 阻尼中间柱和使用它的阻尼结构

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3636235B2 (ja) * 1996-01-08 2005-04-06 オリンパス株式会社 基板ホルダ
JP4175697B2 (ja) 1998-06-18 2008-11-05 オリンパス株式会社 ガラス基板保持具
WO2003006971A1 (fr) * 2001-07-02 2003-01-23 Olympus Optical Co., Ltd. Dispositif de support de substrat

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2370524Y (zh) * 1999-01-07 2000-03-22 神基科技股份有限公司 具防震结构的数据存储装置
CN1401871A (zh) * 2001-08-07 2003-03-12 笠井和彦 阻尼中间柱和使用它的阻尼结构

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI734129B (zh) * 2018-06-25 2021-07-21 美商應用材料股份有限公司 用於一基板之載體及用以運載一基板之方法

Also Published As

Publication number Publication date
JP4276867B2 (ja) 2009-06-10
KR101011850B1 (ko) 2011-01-31
CN1532532A (zh) 2004-09-29
TWI332931B (en) 2010-11-11
JP2004281907A (ja) 2004-10-07
KR20040082305A (ko) 2004-09-24
TW200418703A (en) 2004-10-01

Similar Documents

Publication Publication Date Title
CN1532532B (zh) 基板保持架
KR20070025099A (ko) 디스플레이 장치용 글라스패널의 마이크로 검사장비용스테이지
CN101672800B (zh) 用于承载盘内的芯片的检测***及其检测方法
KR101002429B1 (ko) 어레이 테스트 장치
CN202523695U (zh) 检查装置
KR100859933B1 (ko) 기판홀딩장치
KR20120080135A (ko) 기판 검사 시스템
JP2006317437A5 (ko)
CN101140245A (zh) 外观检查用基板保持装置
CN1288435C (zh) 基片检查装置
KR101018769B1 (ko) 스토커
JP4079651B2 (ja) 基板支持装置
JP2008076079A (ja) 基板検査装置
KR100665729B1 (ko) 엘시디 패널의 자동 검사장치
KR100509812B1 (ko) 수직형 엘시디 패널 검사장치
KR100669112B1 (ko) 슬라이딩 기능이 구비된 디스플레이 장치용 글라스 검사장치
KR101300098B1 (ko) 기판 검사 장치 및 방법
JP3139179U (ja) フラットパネルディスプレイ用検査装置
KR102626389B1 (ko) 디스플레이 패널 검사 장치 및 방법
KR20090078520A (ko) 기판 지지기구 및 이를 구비한 기판 검사장치
KR20060049624A (ko) 티에프티 엘시디 판넬 생산 라인용 자동 광학 검사 장비의광원 설치 방법
KR101134692B1 (ko) 평판 패널 검사장비
KR100988897B1 (ko) 어레이 테스터용 옵틱척
JP3122780U (ja) 基板のクリーニング装置
JP2011124317A (ja) 太陽電池モジュールの取付装置及び太陽電池モジュールの取付方法

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20101208

Termination date: 20140318