TW200418703A

TW200418703A - Large substrate holder

Info

Publication number: TW200418703A
Application number: TW093106400A
Authority: TW
Inventors: Shuya Jogasaki
Original assignee: Olympus Optical Co
Priority date: 2003-03-18
Filing date: 2004-03-10
Publication date: 2004-10-01
Also published as: JP4276867B2; KR101011850B1; CN1532532A; TWI332931B; CN1532532B; JP2004281907A; KR20040082305A

Abstract

This invention is provided with plural pallets in an opening 3 of a support body 2, and a resilient rubber 9 embedded therein to absorb the vibration caused among the various pallets due to external and internal factors so as to serve as a vibration absorbing device.

Description

200418703 五、發明說明（l) [技術範圍：發明所屬之技術領域本發明為支撐液晶顯示螢幕（LCD )、電漿顯示 (Plasma display) (PDP )、有機EL 顯示螢幕等榮幕（FPD )之玻璃面板的大型面板支撐架。 ‘不背景技術先前技術使用液晶顯示螢幕的玻璃，螢幕技術的進步，尺寸右η :板$平“者液晶顯示 xlm以上。尺寸有日盈大型化的趨勢，甚至仏於面5 ί ί f面板’在液晶顯示螢幕的製造工程中，#晋於面板支撐架上進行瑕疵檢查。枉甲，载置撐架，刊载於特開平9 __18 ^ ,欢一中使用的面板支瑕疵檢查，包括照明；；：：=输機橋的構造。部分的目視檢查、以及利 ^ 私查貝以目視檢查瑕疵的瑕疵部分予以放大檢杳=:鏡將目視檢查所檢查出來入檢置的顯微檢查。不過，玻璃面板雖然是因為人為的移動等外在因在面板支撐架上，但卻會上，造成玻璃面板震動。另辰動力量傳至面板支撐架於人為的移動，其他如吹 L，璃面板的震動，不僅止貝駟室的強風風壓所引起的震第6頁 200418703200418703 V. Description of the invention (l) [Technical scope: The technical field to which the invention belongs The present invention is for supporting liquid crystal display (LCD), plasma display (PDP), organic EL display screens, etc. (FPD) Large panel support for glass panels. 'No background technology. The previous technology used glass for LCD screens, advances in screen technology, size right η: panel $ flat', LCD displays above xlm. The size has a tendency to become larger and larger, even on the surface 5 ί f panel 'In the manufacturing process of liquid crystal display screens, #Jin Yu on the panel support frame for defect inspection. ，甲, placing the support frame, published in kaiping 9 __18 ^, Huanyi panel defect inspection, including lighting; ; :: = The structure of the transport bridge. Partial visual inspection, as well as private inspection to enlarge the defective part of the visual inspection for flaw inspection. =: The microscopic inspection of the visual inspection will be carried out. Although the glass panel is externally caused by human movement on the panel support frame, it will cause the glass panel to vibrate. In addition, the power is transmitted to the panel support frame during the artificial movement. Vibration, not only stop the tremor caused by the strong wind and wind pressure in the Beibei room Page 6 200418703

動、搬運玻璃面板疊貨時所產等之震動的影響等，皆會造成板支標架本身的移動等内在因面板震動。生震動的影響、來自格柵板玻璃面板的震動。再者，面素’也會產生震動而使玻璃，為了成大型此，小面板的。再者支撐架璃面板檢查時，導致越局的顯微鏡影像的像。結測量等板震動者如專使用金附玻璃堵塞，。因此璃面板，故設計長度也較長。因就越會引起玻璃與高頻率的震動比較容易受面樣因此’當玻時’例如··顯微像也會因而震動別是顯微鏡倍率的風壓都會傳至動。所以，放大時形成不良的影璃面板上的線寬防止破璃面板支撐架上、或架的複數棧橋皆不過，在全面吸被面板支撐架所背面侧照射過來The impact of vibration such as when moving and handling glass panel stacking, etc., will cause the panel support frame itself to move due to the panel vibration. The effect of vibration, vibration from the glass panel of the grille panel. In addition, the surface element ’will also cause vibration to make the glass smaller, in order to make it larger. Furthermore, the inspection of the support glass panel results in an image of the microscope image that is overpassed. Measurements such as plate vibration, such as gold and glass clogging. Therefore, the glass panel has a longer design length. Because the more the glass and the high-frequency vibrations are more likely to be affected, the 'when glass', for example, the microscopic image will also be vibrated, especially the wind pressure of the microscope magnification will be transmitted. Therefore, a poor line width on the glass panel is prevented from being broken when zoomed in. The glass panel is prevented from being broken, or a plurality of trestle bridges. However, it is completely absorbed by the back side of the panel support frame.

支樓尺寸達lm Xlm以上的大型玻化、且没置於支樓架框内的各格棚小的震動就會引起共震，震動越大晨動。震動，包括低頻率的震動、 ’玻璃面板的厚度較薄，所以，也震動的影響。一震動，在進行玻璃面板的檢查透過顯微鏡觀察的瑕疵部分放大影放大影像也受影響也晝質變差。特時候’被小的震動、或是輕輕吹入而使觀察的放大影像產生微小震畫質便隨之變差，於檢查玻璃面板果’造成瑕疵部分的顯微檢查、玻的精密度不足。Large-scale vitrification of branches with a size of lm Xlm and above, and small grids that are not placed in the frame of the branch building, small vibrations will cause co-oscillation, and the greater the vibration, the more the morning movement. Vibration, including low-frequency vibration, and the thickness of the glass panel is thin, so it is also affected by vibration. The glass panel is inspected with a shake. The defective part viewed through a microscope is enlarged. The enlarged image is also affected and the quality of the day is deteriorated. In particular, when the small-scale vibration or slight blow-in caused a small vibration in the magnified image to be observed, the image quality deteriorated accordingly, and the micro-inspection of the defective part and the precision of the glass were insufficient when inspecting the glass panel. .

的方法有將玻璃面板全面吸附在面利文獻1所刊載的，構成面板支撐屬材料等。面板的方法中，玻璃面板背面側會使得透過照明光無法從玻璃面板的，無法利用透過照明進行玻璃面板The methods include comprehensively adsorbing the glass panel to the surface as described in the reference 1, and constituting a panel supporting metal material. In the panel method, the back side of the glass panel will make it impossible for the transmitted light to pass through the glass panel.

ZUU418/UJZUU418 / UJ

五、發明說明（3)… 的瑕疯檢查。卜，如專利文獻1所述，满1甬金屬【發明内容】 [發明之公開：] 本發明主要特徵，係在擁有框狀平框内J水，载置大型面板之複數棧橋的大型面板支;^ 上，&置忐吸收各棧橋之間由外在因素與内在因素引震動的震動吸收裝置。 [圖式之簡單說明圖一係，本發明大型基板支撐架的第一實施例構成圖。圖一Α係本發明大型基板第一實施例中面板吸附部材與支撐栓相對於各棧橋的安裝構造圖。圖二B係本發明大型基板第一實施例中面板吸附部材與支撐栓相對於各棧橋的安裝構造圖。〃圖一係本叙明大型基板支撐架第一實施例中振動吸收部材的分解解構成圖。圖四係本發明大型基板支撐架第一實施例中各棧橋間的橡膠體的壓入狀態圖。圖五A係本發明大型基板支撐架第一實施例中橡膠體的V. Description of the invention (3) ... Bu, as described in Patent Document 1, full 1 甬 metal [summary content] [Disclosure of the invention:] The main feature of the present invention is a large panel support having a plurality of large-scale trestle bridges with J-shaped water in a frame-shaped flat frame. ; ^ Above, & set the shock absorption device that absorbs vibration between external factors and internal factors between the trestle bridges. [Brief Description of Drawings] FIG. 1 is a structural diagram of a first embodiment of a large-sized substrate supporting frame according to the present invention. FIG. 1A is a diagram showing the installation structure of the panel suction member and the support bolt relative to each trestle in the first embodiment of the large-scale substrate of the present invention. Fig. 2B is an installation structure diagram of the panel suction member and the support bolt relative to each trestle in the first embodiment of the large-scale substrate of the present invention. 〃 Figure 1 is a disassembled and exploded view of the vibration absorbing member in the first embodiment of the large-scale substrate supporting frame. Fig. 4 is a view showing the state of pressing the rubber body between the trestle bridges in the first embodiment of the large-scale substrate supporting frame of the present invention. FIG. 5A shows the rubber body in the first embodiment of the large-scale substrate supporting frame of the present invention.

第8頁 200418703 五、發明說明（4) 上盖表不圖。圖五B係本發明大型基板支撐架第一實施例中橡膠體的上蓋表示圖。圖六係本發明大型基板支撐架第一實施例中基板支撐架本體中央所裝置振動吸收部材變形例的構成圖。圖七係本發明大型基板支撐架第一實施例中振動吸收部材離散安裝變形例的構成圖。圖八係本發明大型基板支撐架第一實施例中各機棒壓入橡膠體的變形例構成圖。 σ & ”間圖九係本發明大型基板支撐架第一實施例中各機捧壓入橡膠體的變形例構成圖。 &㈤間圖十係本發明大型基板支撐架的第二實施例的正成圖。構圖十一係本發明大型基板支撐架的第二實施例的構成圖。、、現 [圖號之說明：] ..........玻璃面板 ..........支撐架本體 .........•週邊載置部 ...........開口部 ...........棧橋 ...........平面吸附部材 ...........•支撐栓Page 8 200418703 V. Description of the invention (4) The cover is not shown. Fig. 5B is a diagram showing the upper cover of the rubber body in the first embodiment of the large-sized substrate supporting frame of the present invention. Fig. 6 is a structural diagram of a modified example of the vibration absorbing member provided in the center of the substrate supporting frame body in the first embodiment of the large substrate supporting frame of the present invention. Fig. 7 is a structural diagram of a modified example of discrete mounting of a vibration absorbing member in the first embodiment of the large-sized substrate supporting frame of the present invention. Fig. 8 is a structural diagram of a modification example in which each of the machine bars is pressed into the rubber body in the first embodiment of the large-scale substrate supporting frame of the present invention. σ & “Figure 9 is a structural diagram of a modified example of each machine pressing a rubber body in the first embodiment of the large substrate support frame of the present invention. & Figure 10 is a second embodiment of the large substrate support frame of the present invention The front view of the drawing. The composition of the eleventh embodiment of the large-scale substrate support frame of the present invention is a structural diagram of the second embodiment of the present invention. ..... Support frame body ......... • Peripheral mounting section ........... Opening section ... ........ Plane suction parts .............. • Support bolt

第9頁 200418703 五、發明說明（5) 7 ......... 8 ......... 8-1…… 8-2…… 8-3…… 8-4…… 8-5…… 8-6…… 吸附軟管震動吸收部材震動吸收部材震動吸收部材震動吸收部材震動吸收部材震動吸收部材震動吸收部材 9........... ........橡膠體 10 ......... .........封盍 11 ......... .........封盍 12......... .........切口 13......... ..........螺絲釘 14......... ..........吸收部材 15......... .........•基準栓 16......... ……· ···.壓栓 20......... ..........栓梢 21 ......... .........•权梢 22......... .........••凹部 23a........ ..........孔穴 23b........ ..........孔穴 24......... .........••凹部 25......... ...........凹部 26......... ...........接缝部份Page 9 200418703 V. Description of the invention (5) 7 ......... 8 ......... 8-1 …… 8-2 …… 8-3 …… 8-4… … 8-5 …… 8-6 …… Suction hose vibration absorbing member vibration absorbing member vibration absorbing member vibration absorbing member vibration absorbing member vibration absorbing member vibration absorbing member 9 .............. ..... Rubber body 10 ..................... Seal 11 ............... Seal 12 ..................... cut 13 ..................... screw 14 ......... .......... Absorbing material 15 ............... • Standard bolt 16 ............... .Suppressor 20 ..................... Supper 21 ............... ............. •• Concave part 23a .................... Hole 23b .............. ........ 孔 24 ............... •• Concave 25 ............... .. Recess 26 ............... Seam

第10頁 200418703 五、發明說明（6) 30 ....... 31 ....... 32 ....... 33 ....... 裝置本體支撐架本體 .底座 ..環狀棧橋 34 35-1 35-2 35-3 35-4 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 直線狀棧引導用開口部引導用開口部引導用開口部引導用開口部開口部回轉裝置驅動部升降栓梢裝置支樓棒支撐棒，升降栓梢，升降栓梢，升降栓梢 ,升降栓導執導執，門栓顯微鏡照明裝置Page 10 200418703 V. Description of the invention (6) 30 ....... 31 ....... 32 ....... 33 ....... Device body support frame body. Base .. Ring trestle 34 35-1 35-2 35-3 35-4 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 Opening part, Opening part, Rotating device, Driving part, Lifting pin tip device, Support rod, Supporting rod, Lifting pin tip, Lifting pin tip, Lifting pin tip, Lifting pin guide, Lighting system

第11頁 200418703 五、發明說明（7)P.........Page 11 200418703 V. Description of the invention (7) P ...

吸附幫浦【實施方式】 [本發明實施的最佳形態：] 以下為本發明的第1實施形態明Adsorption pump [Embodiment] [Best mode for carrying out the present invention:] The following is the first embodiment of the present invention.

圖一係大型面板支撐架的結構圖；此大型面板支揮架適用於檢查平面顯示螢幕之大型玻璃面板1表面的表面檢查裝置。面板支撐架本體2，為框狀結構。該面板支撐架本體2開口部3内，依X方向架設著複數之棧橋4。這些棧橋 4，由2片保持板4a、4b彼此相對呈帶狀配置構成·，保持板门 4a、4b之間’形成透過照明光可通過的空間部4c。這些保持板4a、4b之間則挾著透明防止材。支撐架本體2開口部3内的固定位各棧橋4上，設置複數之面板吸附部材 :數為維持玻璃面板1呈水平狀態，分別設i 各二二的是：板… 二b則是側ί:面是=方觀察的構造圖、圖 u ’ 些面板吸附部材5鱼間隔挾置於2片保持板“ 面、支撐栓6，依一定以吸附支撐載置於 0 ，板吸附部材5，是藉樓栓6，則是藉以m支撐架本上的破璃面板1;支疋错以水千支撐住該玻璃面板1;這些面板吸附Figure 1 is a structural diagram of a large panel support frame; this large panel support frame is a surface inspection device suitable for inspecting the surface of a large glass panel 1 of a flat display screen. The panel support frame body 2 has a frame-like structure. A plurality of trestle bridges 4 are erected in the X direction of the panel support frame body 2 opening 3. These trestle bridges 4 are formed by two holding plates 4a, 4b facing each other in a band shape. Between the holding plate doors 4a, 4b 'is formed a space portion 4c through which the illumination light can pass. Between these holding plates 4a and 4b, a transparent preventive material is held. A plurality of panel adsorption members are provided on each of the trestle bridges 4 in the fixed position in the opening 3 of the support frame body 2. The number is to maintain the glass panel 1 in a horizontal state. : The surface is the structural drawing of the square observation, the figure u 'Some panel adsorption members 5 are placed on two retaining plates "surface, support bolt 6, and must be placed at 0 with adsorption support, plate adsorption member 5, is Borrowing bolt 6 is the broken glass panel 1 on the m support frame; the support supports the glass panel 1 with thousands of water; these panels adsorb

第12頁 200418703 五、發明說明（8) 部材5與支撐栓6，如圖一所示’其架設 ’^^ 本體2周邊載置部2a是同一高度。又人面板支撐架各面板吸附部材5，接續著吸：軟管7，·吸附 2片保持板4a、4b之間；吸附軟管7，是 B ，配置於 :成的。而且，將配設於各細的各吸附軟料製造幫浦p接續。极叉保木本體2外部的吸附另外，圖—A與圖二β所示之面板吸的安裝機橋4，在未安裝於面板吸附部材$時，：、支揮栓6 栓6則依-定間隔分別挾置於各保持板4a、4设數之支樓面板支撐架本體2開口部3内，以 ^間。置方向U*向）#方向=硬，棧橋4配收部材8 ;這些震動吸收部材8 $上硬數之震動吸排列成複數列，如圖一所千山 1 °卩3内依—定間隔 t ^ ^ ^ ^ #8 ^ ^ ^ ^ ^ ；導致^板支身的低頻率震動與高頻、率震動在因素而圖二，為震動吸收部材8的展動各棧橋4之間，分別壓入可吸二^放^ y刀解結構圖；在 9’是由高分子橡膠構成的直立J的膠9’·橡膠吸收多餘震動的性質。例如· 豆同刀子k膠9，具有還具有撞擊時不使物體受到撞#扣擊力量，並且 9並不會產生任何塵埃。勺[貝。另外，高分橡膠橡膠體9長度，較各棧橋4之間隔長度稍長。此外，橡 mm 第13頁 200418703 五、發明說明（9) =9支的樓長加度本/Λ與寬度，可依外在因素與内在因素對 $禅按木本身產生的震動大小等任意調整。的橡膠體9，如圖四中強調的壓入狀態所示， =端分別藉由對各授橋4的壓入力量，挾置於= 乂橋保持板4b與另一邊棧橋4的保持板“之間。、 η舜=些各棧橋4之間的橡膠體9，由上下之各封蓋1〇、Page 12 200418703 V. Description of the invention (8) As shown in FIG. 1, the parts 5 and the support bolts 6 are erected ′ ^^ The mounting part 2a on the periphery of the main body 2 is at the same height. In addition, the panel support frame sucks each of the panel members 5 in succession: the hose 7, sucks between the two holding plates 4a, 4b; the suction hose 7, which is B, is arranged at:. Then, each of the adsorption soft materials arranged in each thin layer is connected to a production pump p. The external adsorption of the polar fork protection wood body 2 In addition, the panel-mounted mounting bridge 4 shown in Figures A and Figure 2 β, when not installed on the panel suction member $, and the supporting bolts 6 and 6 The intervals are respectively placed in the opening portion 3 of the support panel body 2 of the support panel 4a, 4 respectively. Set direction U * 向) # direction = hard, trestle 4 distributes parts 8; these vibration absorbing parts 8 $ hard vibration vibrations are arranged in a plurality of rows, as shown in the figure of Qianshan 1 ° 卩 3 within a fixed interval t ^ ^ ^ ^ # 8 ^ ^ ^ ^ ^; The low frequency vibration, high frequency, and rate vibration that cause the ^ plate support are factors. Figure 2 shows the expansion of the vibration absorbing member 8 between the trestle bridges 4, respectively. The structure diagram of the inhalable ^ put ^ y knife; at 9 'is the upright J's glue 9' made of high-molecular rubber. The rubber absorbs excessive vibration. For example, Doudou k-knife 9 has the force to prevent objects from being hit during a collision, and 9 does not generate any dust. Spoon [shellfish. In addition, the length of the high-scoring rubber body 9 is slightly longer than the interval length of each trestle 4. In addition, oak mm Page 13 200418703 V. Description of the invention (9) = 9 pieces of floor length increase book / Λ and width, can be arbitrarily adjusted according to the external factors and internal factors on the size of the vibration generated by the Zen Zen wood itself . As shown in the press-in state emphasized in Fig. 4, the rubber body 9 is placed at the end by the press-in force of each of the bridges 4, and is placed on the bridge-holding plate 4b and the holding plate on the other side of the bridge 4 " Between, η shun = some rubber bodies 9 between the trestle bridges 4 are covered by the upper and lower ones 10,

口 1;皿；封夂*:蓋10呈凹形，在各棧橋4嵌入處褒設著切曰仅& 封盍11王凹形，其長度較各棧橋4的間隔，也就 G :、:^4b與4a—的間隔長度稍短一可’這些上下封蓋㈢、釘1 3箄Γ t n所不’自上下方向覆蓋橡膠體9，並利用螺絲 Γ網 ^ °再者，橡膠體9，如圖五Α所示，可在未如固五A下所封-盖1 〇、1 1的情況下支擇著。$外，橡膠體9，因所示，亦可利用上幫蓋u挾住橡膠體9予以支撐 ’甚至橡膠體9亦可在接觸上下封蓋1〇、u 下加以覆蓋住。 f的『月况 ^ 1卜丄各ί橋4的各保持板4a、4b，相對於面板厚度，擁刀的寬度，並由高剛性金屬構成，這些保持板4a、，為了抑制震動，面板表面上皆塗有一層防震材料，另 Ρ^τ ^可利用粒界腐蝕不銹鋼等制震金屬等製造而成。所謂 μ材料，例如：高分子橡膠或樹脂、吸震塗料、凝膠狀貝等皆可使用，所謂吸震塗料，例如··尿烷、丙烯、硅 2 ;賓树月曰皇料等皆是，所謂凝膠狀物質，例如：有機溶 ^本聚合類凝膠、硅酮類凝膠、氟離子交換樹脂等皆是。冉者，為使各棧橋4不致產生共震，故使各保持板“、4bMouth 1; dish; seal *: The cover 10 is concave, and there is a cut & seal 11 king concave at the embedment of each trestle 4, which is longer than the distance between each trestle 4, so G: : The interval length of ^ 4b and 4a- is slightly shorter. 'These upper and lower covers ㈢, nails 1 3 箄 Γ tn do not cover the rubber body 9 from the up and down direction, and using screws Γ net ^ ° Furthermore, the rubber body 9 As shown in Fig. 5A, it can be selected in the case that it is not sealed and covered under the solid five A as shown in Fig. 5A. In addition, as shown, the rubber body 9 can also be supported by the upper cover u to hold the rubber body 9 ', and even the rubber body 9 can be covered under contact with the upper and lower covers 10, u. f's "Monthly situation ^ 1" Each holding plate 4a, 4b of each bridge 4 is made of a highly rigid metal with respect to the thickness of the panel, the width of the blade, and these holding plates 4a, All are coated with a layer of anti-vibration material, and the other P ^ τ ^ can be manufactured by using grain boundary corrosion stainless steel and other shock-absorbing metals. The so-called μ materials can be used, for example, polymer rubber or resin, shock-absorbing coatings, gelatinous shellfish, etc. The so-called shock-absorbing coatings, such as ... urethane, acrylic, silicon 2; Gel-like substances include, for example, organic solvent-based polymer gels, silicone gels, and fluorine ion exchange resins. Ran, in order to prevent each trestle bridge 4 from co-vibrating, the holding plates ", 4b

200418703 五、發明說明（10) 的厚度不同，藉由變更 4本身的共振頻率不同，⑼材料的厚度、數量等，各棧橋狀態。 ’營造各棧橋4之間不會共震的理想此外，面板支撐架本辦？ w i 玻璃面板1之複數吸收二；邊載置部2a上，設有吸附固定 1 4與吸附軟管7連接（吸附墊）1 4，这些吸收部材引作用。另外，面板//力吸附幫針的吸引動作而進行吸栓（Ρ1Γ015與複數之屢^广本體2上，則設有複數之基準 Ξ: ί广:! ΐ if結構之支撐架操作說明如下：面板支撐架本體2上，哉耍^ ^ X lm以上的大型玻璃而载4,者液日日顯不螢幕用、尺寸為1m 离面板1，該玻璃面板1，由複數之壓栓數之基準栓15上，藉以設定基準位置，之後再猎由吸附臂浦P的4品从 1夂丹 , 帛滞的“作，利用各面板吸附部材5與各吸收部材14加以吸附固定住破璃面板i。在此狀態下、，對破璃面板1表面進行照明，由檢查人員以目視進行目視檢查，接著，利用顯微鏡將目視檢查檢查到 $瑕疵部分加以放大，並且進行顯微檢查。另外，利用顯从，拍攝玻璃面板1表面的放大影像，再對此影像資料進订影像處理’接著進行玻璃面板1表面上的線寬測量。在對玻璃面板1進行這樣的檢查期間，若因外在因素與内在因素而造成震動並且傳至面板支撐本體2的話，壓入各棧橋4之間的複數橡膠體g將會吸收、減弱震動能量，此昉面板本體2隨著破璃面板丨尺寸的大型化，設於支撐架框内的各棧橋4的長度也會增長，因此，外在因素或内在因素五發明說明（11) — 弓I起^白勺面板支樓& 之增大。牙木本體2内中央部產生的震動大小也會隨本實施形態中，上，壓入、卜在面板支撐架本體2内中央部的相對位置板支i架橡膠體9充當震動吸收部材8，所以，面吸收、減弱Γ内中央部產生震動時，將會由各橡膠體9所體9構成όΤ震動耳明者由於各棧橋4之間是利用複數之橡膠向連結的，所以’無論震動是依縱生的，比At 仏向（Υ方向）與高度方向（Ζ方向）而產 2 %由各橡膠體9所吸收、減弱。200418703 V. Description of the invention (10) The thickness of the (10) is different. By changing the resonance frequency of the 4 itself, the thickness and quantity of the plutonium material, etc., the state of each trestle. ’Create an ideal that will not cause co-oscillation between the trestle bridges 4 In addition, what should the panel support frame do? w i The glass panel 1 has a plurality of absorptions; the side mounting portion 2a is provided with an adsorption fixing 14 connected to an adsorption hose 7 (adsorption pad) 14. These absorption members serve as a guide. In addition, the panel // suction suction pin for the suction action to perform the suction plug (P1Γ015 and the plural number of the main body 2 are provided with a plurality of benchmarks Ξ: ί 广:! Ϊ́ if the structure of the support frame operation instructions are as follows: The main body 2 of the panel support frame is loaded with a large glass of ^ ^ or more. The size of the glass panel 1 is 1m away from the panel. The glass panel 1 is based on the number of pressure pins. Then, set the reference position on the bolt 15, and then hunt the 4 products from the suction arm pump P from 1 dandan and stagnation, and use each panel adsorption member 5 and each absorption member 14 to adsorb and fix the broken glass panel i In this state, the surface of the broken glass panel 1 is illuminated, and a visual inspection is performed visually by an inspector, and then the visual inspection is magnified with a microscope, and a microscopic inspection is performed. In addition, a microscopic inspection is performed using a display. Then, take an enlarged image of the surface of the glass panel 1, and then perform image processing on this image data. Then, perform line width measurement on the surface of the glass panel 1. During such inspection of the glass panel 1, if external factors and If the vibration is caused by factors and transmitted to the panel supporting body 2, the plurality of rubber bodies g pressed between the trestle bridges 4 will absorb and weaken the vibration energy. The panel body 2 increases in size with the broken glass panel 丨The length of each trestle 4 provided in the supporting frame frame will also increase. Therefore, the external factors or the internal factors are described in the fifth invention (11)-the bow I rises ^ the panel support tower & The magnitude of the vibration generated in the inner central portion will also vary according to this embodiment. The upper and lower positions of the central portion of the panel support frame body 2 and the plate support i frame rubber body 9 serve as a vibration absorbing member 8. Therefore, the surface absorbs When the vibration in the central part of Γ is weakened, it will be composed of rubber bodies 9 and 9. Vibrating ears. Because the trestle bridges are connected by a plurality of rubbers, so 'no matter the vibration is vertical. It is absorbed and weakened by each rubber body 9 compared with At 仏 direction (Υ direction) and height direction (Z direction).

疲部分放大影像=顯：檢查時’玻璃面板1表面上瑕倍率越高日寺，ί:::二巧地被觀察。特別是顯微鏡 =玻璃面板1上的線寬時，也能夠獲得高精密度二Enlarged image of the fatigued part = Display: Defect on the surface of the glass panel 1 at the time of inspection. The higher the magnification, Ritsu ::: coincidentally observed. Especially when microscope = line width on glass panel 1, high precision can also be obtained.

ίΐί!1/施形態中’面板支撐架本體2内的複數棧橋4 ^ : Ji 了橡膠體9構成的震動吸收部材，所以，I ’、在口素所產生的橫向與縱向震動，都^ 大型玻璃面板!：震Γ載面支撐架本體2上的攸扪晨動，抑制到最小限度。另外’複數機橋4之p气早益山 ^ HE ^ ^ 又間疋精由震動吸收部材8而連結的，台t g弱傳達到各棧橋4的共震頻率、消除各棧橋4之間的共月匕ίΐί! 1 / Structure Plural trestle 4 in the panel support frame body 2 ^: Ji The vibration absorbing member composed of rubber body 9 is used. Therefore, I ′, the horizontal and vertical vibrations generated in the voxel are both large. Glass panel !: The morning motion on the support frame body 2 of the shock bearing surface is suppressed to a minimum. In addition, the p-qi of the complex machine bridge 4 is Yatsuyama ^ HE ^ ^ Yamama Seiko is connected by the vibration absorbing member 8 and the platform tg is weakly transmitted to the common frequency of the trestle bridges 4 to eliminate the common moon between the trestle bridges 4 dagger

第16頁 200418703 五、發明說明（12) 的面板支撐架本體2中央部的震動。如此一來，在進行璃面板1的顯微檢查時，即使是透過顯微鏡進行高倍率察，也能在無震動狀態下良好地觀察其放大影像，σ 測量玻璃面板1上的線寬時，也能獲得良好的觀察' 另外’各棧橋4之間僅是藉由壓入各橡膠體構丁成、/ 。以，能簡單地安装在既有的面板支標架上斤：：動的影響。叩毛不文到震另外，各橡膠體9是由上、下封蓋1〇、u所即使橡膠體9從各棧橋4之M脫茨 & τ a ’所以，體上掉落下來。橋之間脫洛，也不會從面板支樓架本再者乂述第1實施形態’亦可作如下所述 j =1貫施形態中’相對於複數棧橋4的配置方7向垂直=向安裝複數之震動吸收部材8，但如，依面板支撑架本體2開口部3内中央部上斤不’在收部材8，也就是說，而始±产力歧直線狀展動吸以中央部產生震動為Λ支：架本體2上的破璃面板1，璃面板板1中央部的震動，果此夠吸收、減弱破即使只利用震動吸收部材8加以，亦且杈橋4中央部玻璃面板1的效果。、、、°仆具有吸收、減弱另外，震動吸收部材8，如圖七，地安裝在各棧橋4之間。再去，啦不’、呈鑛齒形離散亦可任意決定，大膽地說，最理展相動吸收部，的安裝位置大的面板支撐架本體2開口部3 4的狀悲是安裝在震動變 ° 、中央部上。另外，震動吸Page 16 200418703 V. Vibration of the central part of the panel support frame body 2 of the description of the invention (12). In this way, during the microscopic inspection of the glass panel 1, even if it is a high magnification inspection through a microscope, the magnified image can be observed well without vibration, and the line width on the glass panel 1 is also measured when σ is measured. A good observation can be obtained. In addition, each of the trestle bridges 4 is formed only by pressing in the rubber bodies. Therefore, it can be simply installed on the existing panel support frame. In addition, the rubber body 9 is covered by the upper and lower covers 10 and u. Even if the rubber body 9 is removed from M of each trestle 4 & τ a ′, the body falls off. The bridge will not be lifted, and the first embodiment of the form will not be described from the panel support frame. The following can also be described. J = 1 In the form of implementation, 'the 7-direction perpendicular to the arrangement of the plurality of trestle bridges = A plurality of vibration absorbing members 8 are installed to the center, but if the center of the inner portion of the opening 3 of the panel support frame body 2 is not loaded on the member 8, that is, the output force is linearly drawn to the center. The vibration generated by the part is Λ support: the broken glass panel 1 on the frame body 2 and the vibration of the central part of the glass panel panel 1 can absorb and weaken the vibration even if only the vibration absorbing member 8 is used, and the glass of the central part of the branch bridge 4 Panel 1 effect. ,,, And ° have absorption and attenuation. In addition, the vibration absorbing member 8 is installed between the trestle bridges 4 as shown in FIG. 7. Go again, you can't, it can be determined arbitrarily, it can be arbitrarily determined. Boldly speaking, the installation position of the panel support frame 2 with the large installation position of the phase-moving absorption section is large. Change °, on the central part. In addition, the vibration sucks

第17貢 200418703 五、發明說明（13) ，部材8 ’能分析吸附固定在面板支撐架本體上之玻璃面板1的震動，可安裝於玻璃面板！震動的腹部的部分。壓入各棧橋4之間作為震動吸收部材8的橡膠體9，如圖八所不，在棧橋4的相對位置上分別設有栓梢2〇、21，在這，栓梢2G、21之間則可嵌入橡膠體9，設置於各機橋4上的口栓梢20、21，在其設置的各部分上形成了嵌入用凹部 2。2。該凹部22則可嵌入圓柱狀橡膠體9端部。橡膠體9，為圓柱狀且兩端分別留有***各栓梢2 〇、2丨的孔穴2 3 a、 23b 〇The 17th tribute 200418703 V. Description of the invention (13), the part 8 'can analyze the vibration of the glass panel 1 which is fixed and fixed on the panel support frame body, and can be installed on the glass panel! Shaking part of the abdomen. The rubber body 9 as a shock absorbing member 8 is pressed between the trestle bridges 4, as shown in FIG. 8, and the pedestal bridges 4 are respectively provided with bolt tips 20 and 21. Here, between the bolt tips 2G and 21 Then, the rubber body 9 can be inserted, and the spigot tips 20 and 21 provided on each bridge 4 can be formed with recessed portions 2.2 for each part. The concave portion 22 can be fitted into the end of the cylindrical rubber body 9. The rubber body 9 is cylindrical and has holes 2 3 a and 23 b at both ends for inserting the plug pins 2 0 and 2 丨, respectively.

因此，各栓梢20、21分別***橡膠體9上的各孔穴23&、 23b，且兩端部則嵌入各保持板4a、仙的各嵌入用凹部 ::此時’橡膠體9若被挾於各棧橋4之間而無掉落的可能 ”牯，則可取下各栓梢20、21而將橡膠體Θ直接嵌入凹部 L L ° 橋4之間的橡膠體9，如圖九所示，在棧橋4的相對位置上分別形成了錐形狀凹部24、25 ’這些凹部Μ、 2則可壓入板狀或柱狀、尖端呈錐形狀的橡膠體9。此時 ^膠體9若形成板狀，兩端則形成三角形角落部，各凹部 2穴2。5 ’則形成能分別與橡膠體9的角落部叙合的三角形橡膠體9的形狀，並非僅限於圓柱狀或板狀，四方形亦丁〇圖一、圖八與圖九所不之各橡膠體9，其表面上塗有聚乙Therefore, each pin tip 20, 21 is inserted into each of the holes 23 &, 23b in the rubber body 9, and both ends are inserted into each of the holding plates 4a and the recesses for embedment of the fairy: at this time 'if the rubber body 9 is pinched Between the trestle bridges 4 without the possibility of falling off "牯, you can remove each pin tip 20, 21 and directly insert the rubber body Θ into the rubber body 9 between the recesses LL ° bridge 4, as shown in Figure 9, in Conical recesses 24 and 25 are formed at the relative positions of the trestle bridge 4, respectively. These recesses M and 2 can be pressed into a plate-shaped or column-shaped rubber body 9 having a tapered tip. At this time, if the colloid 9 is formed into a plate shape, Triangular corners are formed at both ends, and each cavity 2 holes 2.5. The shape of the triangular rubber body 9 which can be respectively combined with the corners of the rubber body 9 is not limited to a cylindrical or plate shape, and the square shape is also small. 〇The rubber bodies 9 shown in Figures 1, 8, and 9 are coated with polyethylene on their surfaces.

200418703 五、發明說明（14) 烯等物質，藉由塗上塗之外，同時亦可防止靜電彦=可美高橡膠體9的持久性間產生摩擦而有塵埃、微小粒子1 =可防止各機橋4之止靜電的產生。你義、准）製成的圓筒内，可防震動吸收部材8，不僅限於 # 在震動可傳達到的部分，如所機橋4之間’亦可設置與面板支撐牟太+圖所不之面板支撐架本體2 另外， =，部4。内。再者.，震構= “ 分26及各保持板4amb之間的内空間部乂二震動吸收部材8 ’則可使用樹脂、震動吸收塗枓、或凝膠狀物質’藉由***這些防震材料，可吸收外因素與内在因素引發的震動，能提升防震效果。接著，就有關本發明第2實施形態，參考圖示說明如下·· 圖十與圖十一為適用於面板檢查裝置之支撐架的結構圖，圖十是正面圖，圖十一則是表面圖。檢查裝置本體30内，底座（base) 32上設有面板支撐架本體 31 ’面板支撲架本體31上，如圖十一所示，呈同心圓狀裝置著複數之環狀棧橋33，這些環狀棧橋33，在半徑方向上且每隔一定的角度，例如：每隔6 0度即藉由直線狀棧3 4加以連結起來。這些環狀棧橋3 3與直線狀棧橋3 4之間，分別形成了照明透光用開口部3 6。但是，從外側算來第一層與第二層的各環狀棧橋33之間，每隔120度配置著直線狀支200418703 V. Description of the invention (14) In addition to the coating, it can also prevent static electricity. In addition, it can prevent friction and dust and minute particles from forming. The bridge 4 stops the generation of static electricity. In the cylinder made by you, you can prevent the vibration absorbing member 8, not only # In the part where the vibration can be transmitted, such as between the bridge 4 ', it can also be set up with the panel support Mu Tai + Tuo You The panel support frame body 2 In addition, =, section 4. Inside. Furthermore, the seismic structure = "The inner space portion between the sub-26 and each holding plate 4amb. The second vibration-absorbing member 8 'can use resin, vibration-absorbing coating, or gel-like substance' by inserting these shock-proof materials It can absorb the vibration caused by external factors and internal factors, and can improve the anti-shock effect. Next, the second embodiment of the present invention will be described with reference to the illustrations as follows: Figure 10 and Figure 11 are support frames suitable for panel inspection devices Fig. 10 is a front view, and Fig. 11 is a surface view. In the inspection device body 30, a panel support frame body 31 is provided on the base 32, as shown in Fig. 11 As shown, a plurality of ring-shaped trestle bridges 33 are arranged in a concentric circle shape. These ring-shaped trestle bridges 33 are connected in a radial direction and at certain angles, for example, every 60 degrees are connected by linear stacks 3 4 Up. Between these ring-shaped trestles 33 and linear trestles 34, openings 36 for lighting and light transmission are respectively formed. However, from the outside, between the ring-shaped trestles 33 of the first and second layers , With linear branches arranged every 120 degrees

IH 第19頁 200418703 五、發明說明（15) 持棧橋3 4，使後述之升降栓梢4 4、4 5可在1 2 0度的範圍内移動，如此一來，面板支撐架本體3 1外圍部即形成了引導用開口部35-3〜35-4。另外，在面板支撐架本體31的外側，後述之升降栓梢4 4、4 5移動引導用開口部3 5 - 1、 35-2。複數之環狀機橋3 3之間，在其半徑方向上安裝著與圖三所示之相同再造的震動吸收部材8 - 1〜8 - 6。各環狀棧3 3之間即可藉此壓入震動吸收部材的橡膠體9，各環狀棧橋3 3，則是藉由橡膠體9加以連結。IH Page 19 200418703 V. Description of the invention (15) Hold the trestle bridge 3 4 so that the lifting bolt tips 4 4 and 4 5 described below can be moved within a range of 120 degrees. In this way, the periphery of the panel support body 3 1 That is, the guide openings 35-3 to 35-4 are formed. In addition, on the outside of the panel support frame main body 31, the lifter pins 4 4 and 4 5 to be described later move the guide openings 3 5-1 and 35-2. Between the plurality of ring bridges 33, the same vibration-absorbing members 8-1 to 8-6 as those shown in Fig. 3 are rebuilt in the radial direction. The rubber body 9 of the vibration absorbing member can be pressed between the ring stacks 3 and 3, and the ring stacks 3 3 are connected by the rubber body 9.

另外，這些震動吸收部材8 -1〜8 - 6，不僅限於在半徑方向上安裝成一列，也可只安裝在震動增大的部分環狀棧橋3 3 之間。另外，震動吸收部材8，也可離散地安裝在各環狀棧3 3之間每隔一個的任意位置上。另外，環狀棧橋3 3的形狀’不僅限定於上述第1實施形態之2片保持板4a、4b，剖面為細長形的長方形板材、剖面是矩形的角材、剖面擁有矩形中空狀的角材、或剖面為二字形的角材等皆可。In addition, these vibration absorbing members 8-1 to 8-6 are not limited to being installed in a row in the radial direction, and may be installed only between the ring-shaped trestles 3 3 where the vibration increases. In addition, the vibration absorbing member 8 may be discretely installed at every other position between each of the ring stacks 33. In addition, the shape of the ring-shaped trestle bridge 33 is not limited to the two holding plates 4a and 4b of the first embodiment described above, a rectangular plate having an elongated cross section, a rectangular angle member in a cross section, and a rectangular hollow angle member in a cross section, or Angle-shaped materials with a double-shaped cross section are acceptable.

面板支撐架本體31下方，如圖十所示，裝設著回轉裝置 37 ’此之回轉裝置37，可透過各開口部35_丨〜35_4將玻璃面板抬高至面板支撐架本體3丨的上方，並在抬高狀態下略往回轉9 0度’所以’是由驅動部3 8與升降栓梢裝置3 9構成’驅動部3 8，能使升降栓梢裝置3 9上下移動與回轉。升降栓梢裝置39，如圖十一所示，乃是由各升降栓梢支撐棒40、41、以及立設於這些升降栓梢支撐棒4〇、41兩端部的各升降栓梢42〜45所構成。Below the panel support frame body 31, as shown in FIG. 10, a rotation device 37 is installed. The rotation device 37 can raise the glass panel to the top of the panel support frame body 3 through the openings 35_ 丨 ~ 35_4. In the raised state, it is rotated 90 degrees slightly. 'So' is composed of the driving part 38 and the lifting pin tip device 39. The driving part 38 can move the lifting pin tip device 39 up and down. As shown in FIG. 11, the lifting pin tip device 39 is composed of lifting pin tip support rods 40 and 41 and lifting pin tips 42 erected at both ends of the lifting pin tip support rods 40 and 41. 45.

第20頁 200418703 五、發明說明（16) ' 〜因此，當升降栓梢裝置39在上升的狀態下回轉日士，降栓梢42、43則沿著各引導用開口部35 —j、35〜2才口。升狀移動，各升降栓梢44、45亦沿著各引導用開：，弧 3 5-3呈圓弧狀移動。邛35-4、另外’在面板支撐架本體31兩端侧的底座32上，平行設置著導軌4 6、4 7，這些導執4 6、4 7之間則壯\&方—向柱48並且跨過面板支撐架本體31的上方，門柱48U二導軌46、47 ’可依γ方向裝設並可移動，而且才對於門柱48 ,可依X方向裝設顯微鏡且為可移動式。；之架Π1的上方’ $有圖示中未標示出來的目視日支㈣本體31的下方’則設有光線透過照來，則針對使用上述構造之支撐架的檢查操作，說明狀態的面板支樓架本體31上，載置著大型尺寸的破面板支撐架本體31，可依—定角度升起、搖。f廷樣的狀態下，來自目視照明裝置的照明光可照射上的浐Π的表面i ’如此-來，則可檢查出玻璃面板1 上的、缺陷、髒污、附著的塵埃等瑕疵。 σ另方面，在進行顯微檢查時，面板支撐架本體31是 ^水平狀態設置Μ ’門柱49則可依相對於各導軌4?、48的 γ方向移動，顯微鏡49則可依相對於門柱49糾方向移動，如此：：藉由顯微鏡49對瑕疮部分進行顯微檢查。 ^樣的檢查當中’外在因素或内在因素引發的震動 200418703Page 20, 200418703 V. Description of the invention (16) '~ Therefore, when the lifting pin tip device 39 is turned around in a rising state, the falling pin tips 42, 43 are along the respective guide openings 35-j, 35 ~ 2 talents. Ascending movement, each lifting bolt tip 44, 45 is also opened along each guide: arc 3 5-3 moves in an arc shape.邛 35-4. In addition, on the base 32 on both sides of the panel support frame body 31, guide rails 4 6 and 4 7 are arranged in parallel, and the guides 4 6 and 4 7 are strong. 48 and across the panel support frame body 31, the door post 48U two guide rails 46, 47 'can be installed and moved in the γ direction, and for the door post 48, a microscope can be installed in the X direction and is movable. ; Above the frame Π1 '$ there is a visual sun support not shown in the figure below the main body 31' is provided with light through, the panel support for the inspection operation of the support structure using the above structure, the state of the panel support A large-size broken panel support frame body 31 is mounted on the floor frame body 31 and can be raised and shaken at a fixed angle. In the f-like state, the illumination light from the visual illuminating device can illuminate the surface i 'of the 浐 Π. Thus, defects such as defects, dirt, and adhered dust on the glass panel 1 can be detected. σ On the other hand, during the microscopic inspection, the panel support frame body 31 is set horizontally. The gate post 49 can be moved in the γ direction relative to each of the guide rails 4 and 48, and the microscope 49 can be moved relative to the gate post 49. The correction direction is moved like this: Microscopic examination of the blemishes part by the microscope 49. ^ In the examination, the external factors or internal factors caused the shock 200418703

若傳到面板支撑架本體31的話’則呈同心圓形狀配、數之壞狀授橋33中央部的震動是最大的。 _ 的效本實施形態中’由於呈同心圓形狀配置的各環 33之間因有壓入橡膠體9，所以傳至各璟妝姥捧狀棧橋可被橡膠體9所吸收、減弱。再者，震動方向）、橫向（Y方向）、高度方向（2方向）而產生同(X 各方向的震動皆可被各橡膠體9所吸收、減弱。、’ 結果，進行玻璃面板顯微檢查時，透過顯微鏡49 的玻璃面板1表面上的瑕疵部分放大影像，即可良好地在^ 無震動的情況下進行觀察’特別是顯微鏡倍率越"高察放大影像時越不會受到震動。 [產業上的利用可能性] 本發明適用於電漿顯示螢幕（plasma display) (PDP)、 ^EL顯*榮幕等平面顯示榮幕（FpD)等之玻璃面板檢一 ^ ’可作為支撐該玻璃面板之用。When transmitted to the panel support frame body 31, the vibration of the central portion of the convergent bridge 33 having the most concentric shape is the largest. Effect of _ In this embodiment, ′, since the rubber bodies 9 are pressed between the rings 33 arranged in a concentric circle shape, they are transmitted to each of the makeup pegs and can be absorbed and weakened by the rubber bodies 9. Moreover, the vibration direction), lateral direction (Y direction), and height direction (2 directions) produce the same (the vibrations in each direction of X can be absorbed and weakened by each rubber body 9.) As a result, a microscopic inspection of the glass panel is performed. When the image is enlarged through the defective part on the surface of the glass panel 1 of the microscope 49, it can be observed well without vibrations. In particular, the higher the magnification of the microscope, the less vibration will be experienced when magnifying the image. Industrial Applicability] The present invention is suitable for inspection of glass panels such as plasma display (PDP), ^ EL display, and flat screens (FpD), etc. ^ 'can be used to support the glass Panel use.

第22頁 200418703 圖式簡單說明 [圖式之簡單說明：]Page 22 200418703 Brief description of the drawings [Simplified description of the drawings:]

IaI本太’V:大士型基板支撐架的第-實施例構成圖。回一、"大型基板第-實施例中面板吸附部材與支 I柽相對於各棧橋的安裝構造圖。〃圖一B係本發明大型基板第一實施例中面板吸附部撐栓相對於各棧橋的安裝構造圖。才〃支圖三係本發明大型基板支撐架第一實施例中振動吸的分解解構成圖。口圖四係本發明大型基板支撐架第一實施例中各棧橋間的橡膠體的壓入狀態圖。圖五A係本發明大型基板支樓架第一實施例中橡膠體的上蓋表示圖。圖五B係本發明大型基板支撐架第一實施例中橡膠體的上蓋表示圖。圖六係本發明大型基板支撑架苐一貫施例中基板支_力。本體中央所裝置振動吸收部材變形例的構成圖。牙木圖七係本發明大型基板支撐架第一實施例中把& 離散安裝變形例的構成圖。 ^ ^ 圖八係本發明大型基板支撐架第一實施例中、橡膠體的變形例構成圖。幾橋間壓入棧橋間壓入IaI 本太 'V: Structural diagram of a first embodiment of a tuas-type substrate support frame. Back to the diagram of the installation structure of the panel adsorption member and the support I in the first embodiment of the large-scale substrate with respect to each trestle.一 Fig. 1B is an installation structure diagram of the supporting bolts of the panel adsorption part with respect to each trestle in the first embodiment of the large-sized substrate of the present invention. Fig. 3 is a disassembled and exploded view of the vibration absorption in the first embodiment of the large-sized substrate supporting frame of the present invention. Fig. 4 is a diagram showing the pressed state of the rubber between the trestle bridges in the first embodiment of the large-scale substrate supporting frame of the present invention. Fig. 5A is a diagram showing the upper cover of the rubber body in the first embodiment of the large-sized base plate support frame of the present invention. Fig. 5B is a diagram showing the upper cover of the rubber body in the first embodiment of the large-sized substrate supporting frame of the present invention. FIG. 6 shows the supporting force of the substrate in the conventional embodiment of the large substrate supporting frame of the present invention. A structural diagram of a modified example of the vibration absorbing member installed in the center of the body.牙木 Figure 7 is a structural diagram of a modified example of discrete mounting & in the first embodiment of the large-scale substrate supporting frame of the present invention. ^ ^ Fig. 8 is a structural diagram of a modified example of the rubber body in the first embodiment of the large-sized substrate support frame of the present invention. Press between bridges Press between bridges

圖九係本發明大型基板支撐架第一實施例中& 橡膠體的變形例構成圖圖十係本發明大型基板支撐架的第二實施圖。的正面構成Fig. 9 is a structural diagram of a modified example of the & rubber body in the first embodiment of the large-scale substrate support frame of the present invention. Fig. 10 is a second embodiment of the large-scale substrate support frame of the present invention. Positive composition

第23頁 200418703 圖式簡單說明圖十一係本發明大型基板支撐架的第二實施例的上視構成圖。Page 23 200418703 Brief Description of Drawings Figure 11 is a top view of the second embodiment of the large substrate support frame of the present invention.

1·· 第24頁1 ·· page 24

Claims

200418703 六、申請專利範圍 1 · 一種大型基板支撐架，在里於前述平檯框内、水平· w + 雍有框狀平檯、與設置板支撐架上，設有型面板之複數棧橋的大型面因素引起的震動橋之間因外在因素與内在 *，2“::::;:;置?/1 所:以基板支撑之前述機橋的接縫部上於…接框内與複數架Λ中ί: f專利範圍w項所述之大型基板支撐保持板之置’裝設於構成前述棧橋之2片 J ]二間部為其特徵者。架，其中ΐ如申睛專利範圍第1項所述之大型基板支撐之俞述棧：ϊί動吸收裝置’裝設於前述平檯框内與複數 ^ ^ ^ , 縫部上，並同時裝設於構成前述棧橋之2 持板之間的空間部為其特徵者。架，其中ΐ如申請專利範圍第1項所述之大型基板支撐徵者。則述棧橋，複數並列裝設於前述平檯框内為其特| 架，其中Ϊ如申請專利範圍第1項所述之大型基板支撐幻述棧橋，呈同心圓形狀複數裝設於前述平檯框200418703 VI. Scope of patent application 1 · A large-scale substrate support frame, horizontally inside the aforementioned platform frame, w + Yong frame-shaped platform, and a plurality of large-scale trestle bridges with plate-shaped panels Vibration bridges caused by surface factors due to external factors and internal factors *, 2 "::::;: ;; set? / 1 place: the joints of the aforementioned bridge supported by the substrate are placed in the joint frame and plural In the frame Λ: The large substrate supporting and holding plate described in the item f of the patent scope is installed on the two pieces constituting the aforesaid trestle, and the second part is the feature of the frame. The Yushu stack supported by the large-scale substrate described in item 1: The dynamic absorption device is installed in the aforementioned platform frame and a plurality of ^ ^ ^, slits, and is simultaneously installed between the two holding plates constituting the aforementioned trestle. The space department is its characteristic. The frame, among which is the large-scale substrate support levy described in item 1 of the scope of application for patents, then the trestle bridge, a plurality of which are installed side by side in the aforementioned platform frame, is its special frame. The large-scale substrate supporting the narrative trestle described in the first patent application scope is concentric Complex shape is mounted on the platform frame

第25頁 200418703 六、申請專利範圍内為其特徵者架間者架間者種如申請專利範圍第1項所述之大型基板支撐 =中，述震動吸收裝置，分別裝設於前述各棧橋之並且壬複數列彼此平行配置於前述平檯框内為其特徵種如申請專利範圍第1項所述之大型基板支撐 ^中j述震動吸收裝置，分別裝設於前述各棧橋之亚且穿過前述平檯框内中央部呈一直線配置為其特徵架，其一 ^如申請專利範圍第1項所述之大型基板支撐 I找I中則述震動吸收裝置之特徵是分別散佈配置在前述各杈橋之間為其特徵者。 10 架，其 1種如申請專利範圍第1項所述之大型基板支撐承、旦二中前述震動吸收裝置，擁有依前述各棧橋之間隔還述久、哎而形成之前述彈性體，姐將前述彈性體壓入前夫橋之間為其特徵者。 11 12. 所述彈性體，是為橡膠為其特徵者。〜種如申請專利範圍第1 0項所述之大型基板支撐Page 25 200418703 VI. The characteristics of those who are within the scope of the patent application are those of the large-scale substrate support described in item 1 of the patent application scope. The vibration absorption device is installed in each of the aforementioned trestle bridges. And the plural numbers are arranged parallel to each other in the aforementioned platform frame, which is a characteristic type of the large-scale substrate support described in item 1 of the scope of the patent application. The vibration absorption device described in the above-mentioned j is respectively installed in the sub-bridges and passes through The central part of the aforementioned platform frame is arranged in a straight line as its feature frame. One of the features of the large-scale substrate support I as described in item 1 of the patent application scope is that the characteristics of the vibration absorbing device are separately distributed and arranged on the aforementioned branches. Between the bridges are its characteristics. 10 aircrafts, one of which is the large-scale substrate support bearing described in item 1 of the scope of the patent application, and the aforementioned shock absorption device of No. 2 Middle School, which has the aforementioned elastic body formed according to the interval between the aforementioned trestle bridges, and hey, sister It is characteristic that the aforementioned elastic body is pressed between the former husband's bridges. 11 12. The elastomer is characterized by rubber. ~ Large substrate support as described in item 10 of the scope of patent application

第26頁 200418703 六、申請專利範圍 ^。八中别述彈性體，是由高分子橡膠所形成的為其特忾加1甘3·^種如申請專利範圍第1 〇項所述之大型基板支p 二質徵:由樹脂、震動吸收塗料、“膠加，直击^種如申請專利範圍第10項所述之大型基板支撐 ί田:a w述彈性體的長度、高度與寬度，分別是依照$外而内在因素引起之前述面板支撐架本身的震動大小而形成的為其特徵者。八j 15 —括 ^，览· 1、如申請專利範圍第1 0項所述之大型基板支撐向產述彈性體，可吸收、減弱縱向、橫向與高度方 ° 之晨動為其特徵者。架，^ ·中1種如申請專利範圍第1 0項所述之大型基板支撐 ί徵者。W述震動吸收裝置，將前述彈性體加以覆蓋為其 1 7 架，1·中一 1種如申請專利範圍第1 〇項所述之大型基板支撐為其特徵^述震動吸收裝置，將前述彈性體予以塗上塗料Page 26 200418703 6. Scope of Patent Application ^. The eighth-mentioned elastomer is made of high-molecular rubber, and its special features are plus 1 g, 3 g, and 2 g of large-scale substrate support as described in item 10 of the patent application scope. Paint, "glue, directly click on the large-scale substrate support as described in item 10 of the scope of patent application: the length, height, and width of the elastomer are described in the aforementioned panel support frame according to the external and internal factors, respectively It is formed by its own magnitude of vibration. 8 j 15 — Including ^, 1 · The large substrate support as described in item 10 of the patent application can be used to produce the elastomer, which can absorb and weaken the longitudinal and lateral directions. It is characterized by the morning movement with a high degree °. Frame, ^ · 1 of the large substrate support as described in item 10 of the patent application scope. The shock absorption device covers the aforementioned elastic body as Its 17 racks, 1 · 1 and 1 kinds of large substrate support as described in item 10 of the patent application scope are characterized by the above-mentioned vibration absorbing device, and the aforementioned elastomer is coated with paint

第27頁 200418703 六、申請專利範圍 1 8. —種如申請專利範圍第1 0項所述之大型基板支撐架，其中前述彈性體表面上，塗有聚乙烯塗料為其特徵者。 fPage 27 200418703 VI. Scope of patent application 1 8. A large-scale substrate support frame as described in item 10 of the scope of patent application, wherein the surface of the aforementioned elastomer is coated with polyethylene paint as its feature. f

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