JP4276867B2 - 基板ホルダ及びこれを備えた表面検査装置 - Google Patents

基板ホルダ及びこれを備えた表面検査装置 Download PDF

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Publication number
JP4276867B2
JP4276867B2 JP2003074040A JP2003074040A JP4276867B2 JP 4276867 B2 JP4276867 B2 JP 4276867B2 JP 2003074040 A JP2003074040 A JP 2003074040A JP 2003074040 A JP2003074040 A JP 2003074040A JP 4276867 B2 JP4276867 B2 JP 4276867B2
Authority
JP
Japan
Prior art keywords
substrate holder
auxiliary holding
substrate
vibration
vibration absorbing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003074040A
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English (en)
Japanese (ja)
Other versions
JP2004281907A5 (ko
JP2004281907A (ja
Inventor
修哉 城ヶ崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP2003074040A priority Critical patent/JP4276867B2/ja
Priority to TW093106400A priority patent/TWI332931B/zh
Priority to KR1020040017622A priority patent/KR101011850B1/ko
Priority to CN2004100300483A priority patent/CN1532532B/zh
Publication of JP2004281907A publication Critical patent/JP2004281907A/ja
Publication of JP2004281907A5 publication Critical patent/JP2004281907A5/ja
Application granted granted Critical
Publication of JP4276867B2 publication Critical patent/JP4276867B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mathematical Physics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Vibration Prevention Devices (AREA)
JP2003074040A 2003-03-18 2003-03-18 基板ホルダ及びこれを備えた表面検査装置 Expired - Fee Related JP4276867B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2003074040A JP4276867B2 (ja) 2003-03-18 2003-03-18 基板ホルダ及びこれを備えた表面検査装置
TW093106400A TWI332931B (en) 2003-03-18 2004-03-10 Large size substrate holder
KR1020040017622A KR101011850B1 (ko) 2003-03-18 2004-03-16 대형 기판 홀더
CN2004100300483A CN1532532B (zh) 2003-03-18 2004-03-18 基板保持架

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003074040A JP4276867B2 (ja) 2003-03-18 2003-03-18 基板ホルダ及びこれを備えた表面検査装置

Publications (3)

Publication Number Publication Date
JP2004281907A JP2004281907A (ja) 2004-10-07
JP2004281907A5 JP2004281907A5 (ko) 2006-03-09
JP4276867B2 true JP4276867B2 (ja) 2009-06-10

Family

ID=33289785

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003074040A Expired - Fee Related JP4276867B2 (ja) 2003-03-18 2003-03-18 基板ホルダ及びこれを備えた表面検査装置

Country Status (4)

Country Link
JP (1) JP4276867B2 (ko)
KR (1) KR101011850B1 (ko)
CN (1) CN1532532B (ko)
TW (1) TWI332931B (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI307929B (en) * 2005-05-12 2009-03-21 Olympus Corp Substrate inspection apparatus
JP2009231437A (ja) * 2008-03-21 2009-10-08 Olympus Corp マクロ検査装置、マクロ検査システム、及び、マクロ検査方法
US9228256B2 (en) * 2009-12-11 2016-01-05 Kgt Graphit Technologie Gmbh Substrate support
KR101881408B1 (ko) * 2016-08-22 2018-07-23 주성엔지니어링(주) 기판지지홀더 및 이를 사용한 기판처리장치
TWI658532B (zh) * 2017-08-09 2019-05-01 明安國際企業股份有限公司 基板承置匣
KR102607248B1 (ko) * 2018-06-25 2023-11-30 어플라이드 머티어리얼스, 인코포레이티드 기판을 위한 캐리어 및 기판을 운반하기 위한 방법
TWD210557S (zh) 2020-01-21 2021-03-21 志聖工業股份有限公司 熱製程用承載盤

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3636235B2 (ja) * 1996-01-08 2005-04-06 オリンパス株式会社 基板ホルダ
JP4175697B2 (ja) 1998-06-18 2008-11-05 オリンパス株式会社 ガラス基板保持具
CN2370524Y (zh) * 1999-01-07 2000-03-22 神基科技股份有限公司 具防震结构的数据存储装置
WO2003006971A1 (fr) * 2001-07-02 2003-01-23 Olympus Optical Co., Ltd. Dispositif de support de substrat
JP2003049558A (ja) * 2001-08-07 2003-02-21 Kazuhiko Kasai 制振間柱

Also Published As

Publication number Publication date
KR101011850B1 (ko) 2011-01-31
CN1532532A (zh) 2004-09-29
TWI332931B (en) 2010-11-11
CN1532532B (zh) 2010-12-08
JP2004281907A (ja) 2004-10-07
KR20040082305A (ko) 2004-09-24
TW200418703A (en) 2004-10-01

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