TWI332931B

TWI332931B - Large size substrate holder

Info

Publication number: TWI332931B
Application number: TW093106400A
Authority: TW
Inventors: Jogasaki Shuya
Original assignee: Olympus Corp
Priority date: 2003-03-18
Filing date: 2004-03-10
Publication date: 2010-11-11
Also published as: JP4276867B2; KR101011850B1; CN1532532A; CN1532532B; JP2004281907A; KR20040082305A; TW200418703A

Description

1332931 五、發明說明α) [技術範圍：] 【發明所屬之技術領域本發明為支撐液晶顯示螢幕（LCD )、電聚顯厂、 (PUsma display) (PDP)、有機 EL 顯示螢幕等平鸯幕（FPD)之玻璃面板的大型面板支撐架。 ‘顯条【先前技術】 [背景技術：] 近年來隨著液晶顯示的趨勢，甚至達lm1332931 V. OBJECT OF THE INVENTION α) [Technical Field:] [Technical Field] The present invention is a flat screen for supporting a liquid crystal display (LCD), an electro-concentration factory, a PUSma display (PDP), an organic EL display screen, and the like. (FPD) large panel support for glass panels. ‘Explicit Articles [Prior Art] [Background Art:] In recent years, with the trend of liquid crystal display, even up to lm

使用液晶顯示螢幕的玻璃面板，鸯幕技術的進步’尺寸有日益大型化 X 1 m以上。這類玻璃面板，在液晶顯示螢幕的製造工程中， =面板支#架上進行瑕疲檢查。瑕錄查中使用的面板撐架，刊載於特開平9 — 1 8964 1號公報中。特開平9—. 1 8964 1號公報，為面板支撐架框内設為複數棧橋的構造。瑕疵檢查，包括照明玻璃面板並由檢查員以目視檢查瑕疵With the glass panel of the liquid crystal display screen, the advancement of the curtain technology has become larger and larger than X 1 m. In this type of glass panel, in the manufacturing process of the liquid crystal display screen, the panel inspection is performed on the panel. The panel bracket used in the survey is published in the Gazette of Jikaiping 9-1 8964. Japanese Laid-Open Patent Publication No. Hei 9-. No. 1 8964 No. 1 is a structure in which a plurality of trestles are arranged in a panel support frame.瑕疵 inspection, including illuminated glass panels and visual inspection by inspectors瑕疵

部分的目視檢查、以及利用顯微鏡將目視檢查所檢查出來的瑕疵>部分予以放大檢查的顯微檢查。不過玻璃面板雖然是載置在面板支樓架上，但卻會因為人為的移動等外在因素而震動力量傳至面板支撐架上’造成玻璃面板震動。另外，玻璃面板的震動，不僅止於人為的移動，其他如吹入實驗室的強風風壓所引起的震Partial visual inspection and microscopic examination of the 瑕疵> part of the visual inspection by microscopic examination. However, although the glass panel is placed on the panel support frame, it will be transmitted to the panel support frame due to external factors such as artificial movement, causing the glass panel to vibrate. In addition, the vibration of the glass panel not only stops the artificial movement, but also the vibration caused by the strong wind pressure blown into the laboratory.

1332931 五、發明說明（2) 動、搬運玻璃面板疊貨時所產生震動的影響、來自格概等之震動的影響等，皆會造成玻璃面板的震動。再者，面板震動 _板支禮架本身的移動等内在因素’也會產生震動而使玻^ 面板支樓架’為了支撐尺寸達lm Xlm以上的大型玻璃面板，故設計成大型化、且設置於支撐架框内的各格柵長度也較長。因此’小小的震動就會引起共震，震動越大就越會引起玻璃面板的震動。震動’包括低頻率的震動、與高頻率的震動。再者’玻璃面板的厚度較薄，所以，也比較容易受面樣支撐架震動的影響。因此，當玻璃面板一震動，在進行玻璃面板的檢查時，例如：顯微檢查時透過顯微鏡觀察的瑕疵部分放^影 .像也會因而震動，導致放大影像也受影響也畫質變差。特 .別是顯微鏡倍率越高的時候，微小的震動、或是輕輕吹入 -的風壓都會傳至顯微鏡而使觀察的放大影像產生微^震動。所以，放大影像的晝質便隨之變差，於檢查玻璃面板時形成不良的影像◊結果，造成瑕疵部分的顯微檢查、玻璃面板上的線寬測量等的精密度不足。防止玻璃面板震動的方法有將玻璃面板全面吸附在面板支撐架上、或者如專利文獻丨所刊載的，構成面板支撐架的複數棧橋皆使用金屬材料等。不過’在全面吸附玻璃面板的方法中，玻璃面板背面側會被面板支撐架所堵塞，使得透過照明光無法從玻璃面板的背面側照射過來。因此，無法利用透過照明進行玻璃面板 1332931 五、發明說明（3)1332931 V. INSTRUCTIONS (2) The effects of vibrations generated when moving and transporting glass panels, and the effects of vibrations from the grid, etc., can cause vibration of the glass panel. In addition, the internal factors such as the movement of the panel vibration _ board support itself will also cause vibration, so that the glass panel support frame is designed to be large and set in order to support a large glass panel with a size of lm Xlm or more. The length of each grid in the frame of the support frame is also long. Therefore, a small vibration will cause a common shock. The greater the vibration, the more the glass panel will vibrate. Vibration 'includes low frequency vibrations, and high frequency vibrations. Furthermore, the thickness of the glass panel is relatively thin, so it is also more susceptible to the vibration of the surface support frame. Therefore, when the glass panel is vibrated, when the glass panel is inspected, for example, the sputum portion observed through the microscope during the microscopic examination is placed, and the image is also vibrated, so that the magnified image is also affected and the image quality is deteriorated. In particular, when the magnification of the microscope is higher, the slight vibration or the light pressure that is gently blown into the microscope will be transmitted to the microscope to cause the observed magnified image to vibrate. Therefore, the enamel of the enlarged image is deteriorated, and a poor image is formed when the glass panel is inspected, resulting in insufficient precision such as microscopic inspection of the enamel portion and measurement of the line width on the glass panel. The method for preventing the vibration of the glass panel is to completely adsorb the glass panel on the panel support frame, or as disclosed in the patent document, the plurality of trestles constituting the panel support frame are made of a metal material or the like. However, in the method of fully adsorbing the glass panel, the back side of the glass panel is blocked by the panel support, so that the transmitted illumination light cannot be irradiated from the back side of the glass panel. Therefore, it is impossible to use the glass panel through the illumination 1332931 V. Description of the invention (3)

的瑕森檢查。 ^外，如專利文獻丨所述了 9野甬方法中’由於金屬材料為剛體金^#料構成授橋的孕乂谷易震動。【發明内容 [發明之公開Lucerne check. In addition, as described in the patent document 9 9 9 ’ ’ ’ ’ 由于由于由于由于由于由于由于由于由于由于由于由于由于由于由于由于由于由于由于由于由于由于由于由于[Disclosure of the Invention]

維内要特徵’係在擁有框狀平檯、與設於該平檯王、載置大型面板之複數棧橋的大型面板支撐架上’ 〇又置倉b吸收各機橋之間由外在因素與内在因素引起之震動的震動吸收裝置。 [圖式之簡單說明：] 圖一係本發明大型基板支撐架的第一實施例構成圖。圖二A係本發明大型基板第一實施例中面板吸附部材與支撐栓相對於各棧橋的安裝構造圖。The characteristics of the Veneer are based on the large-scale panel support frame with a frame-like platform and a plurality of trestles placed on the platform king and the large-sized panel. A shock absorbing device that vibrates with internal factors. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a configuration diagram of a first embodiment of a large substrate support frame of the present invention. Fig. 2A is a view showing a mounting structure of a panel suction member and a support bolt with respect to each trestle in the first embodiment of the large substrate of the present invention.

圖二B係本發明大型基板第一實施例中面板吸附部材與支撐栓相對於各棧橋的安裝構造圖。圖三係本發明大型基板支撐架第一實施例中振動吸收部材的分解解構成圖。圖四係本發明大型基板支撐架第一實施例中各棧橋間的橡膠體的壓入狀態圖。圖五A係本發明大型基板支撐架第一實施例中橡膠體的Fig. 2B is a view showing the mounting structure of the panel suction member and the support bolt with respect to the trestles in the first embodiment of the large substrate of the present invention. Fig. 3 is a view showing the exploded solution of the vibration absorbing member in the first embodiment of the large substrate support frame of the present invention. Fig. 4 is a view showing the pressed state of the rubber bodies between the trestles in the first embodiment of the large-sized substrate support frame of the present invention. Figure 5A is a rubber body of the first embodiment of the large substrate support frame of the present invention

1332931 五、發明說明（4) 上蓋表示圖。圖五B係本發明大型基板支撐架第—實施例中橡膠體的上蓋表示圖。圖六係本發明大型基板支樓架第一實施例中基板支撐架本體中央所裝置振動吸收部材變形例的構成圖。圖七係本發明大型基板支撐架第一實施例中振動吸收部材離散安裝變形例的構成圖》各棧橋間圖八係本發明大型基板支撐架第一實施例中壓入橡膠體的變形例構成圖^ 圖九係本發明大型基板支撐架第一實施例中各壓入橡膠體的變形例構成圖。 ” 間1332931 V. Description of invention (4) Upper cover representation. Fig. 5B is a view showing the upper cover of the rubber body in the first embodiment of the large substrate support frame of the present invention. Fig. 6 is a view showing the configuration of a modification of the vibration absorbing member of the center of the substrate support body in the first embodiment of the large-sized substrate support frame of the present invention. Figure 7 is a structural view showing a variation of the vibration absorbing member in the first embodiment of the large-sized substrate support frame of the present invention. Between each of the trestles, Fig. 8 is a modification of the press-fit rubber body in the first embodiment of the large-sized substrate support frame of the present invention. Fig. 9 is a structural view showing a modification of each of the press-fit rubber bodies in the first embodiment of the large-sized substrate support frame of the present invention. Between

的正面構圖十係本發明大型基板支撐架的第二實施例成圖。的上视The front side configuration is a second embodiment of the large substrate support frame of the present invention. Top view

圖Η 係本發明大型基板支撐架的第二實施例構成圖。 [圖號之說明：] 1 .................玻璃面板 2 ................. 支撐架本體 2a................週邊載置部 3 ............... 開口部 4 ..................棧橋 5 ..................平面吸附部材 6 .................. 支撐栓BRIEF DESCRIPTION OF THE DRAWINGS Figure 2 is a block diagram showing a second embodiment of a large substrate support frame of the present invention. [Description of the figure number:] 1 .................glass panel 2 ................. Support frame body 2a. ............... Peripheral mounting section 3 ............... Opening section 4............ ...... trestle 5 .................. plane adsorption parts 6 .................. support bolt

第9頁 1332931 五、發明說明（5) 7 ......... 8 ......... 8 ~ 1 ...... 8-2…… 8-3…… 8-4…… 8-5…… 8 _ 6...... 吸附軟管震動吸收部材震動吸收部材震動吸收部材震動吸收部材震動吸收部材震動吸收部材震動吸收部材 9........... .......,橡膠體 10 ......... .........封蓋 11 ......... .........封蓋 12 ......... .........切口 13 ......... ..........螺絲釘 14......... ..........吸收部材 15 ......... ..........基準栓 16 ......... ……· ···.壓栓 20 ......... ..........栓梢 21 ......... ..........栓梢 22......... ...........凹部 23a........ ..........孔穴 23b........ ..........孔穴 24......... ...........凹部 25 ......... ...........凹部 26......... ...........接縫部份Page 9 1332931 V. Description of invention (5) 7 ......... 8 ......... 8 ~ 1 ...... 8-2... 8-3... 8-4... 8-5...... 8 _ 6...... Adsorption hose vibration absorbing member vibration absorbing member vibration absorbing member vibration absorbing member vibration absorbing member vibration absorbing member vibration absorbing member 9... ..... ......., rubber body 10 ..................... Cover 11 ......... .... .....Cover 12 .....................Incision 13 ..................... Screw 14. .......................... Absorbing parts 15 ........................... Reference pins 16 .... .. ......····.Pressing bolts 20........................Tapping tips 21.................. ...tap tip 22........................... recess 23a........ .......... hole 23b.. ..................hole 24........................... recess 25......... .......... recess 26...................... seam part

第10頁 1332931Page 10 1332931

第11頁 1332931 五發明說明（7) P......... •吸附幫浦【實施方式】 [本發明實施的最佳形態明以下為本發明的第1實施形態’並參考圖示加以說圖一係大型面板支撐架的結構圖；此大型面板支撐架 2於檢查平面顯示螢幕之大型玻璃面板丨表面的表面檢面板支撐架本體2，為樞狀結構。該面板支撐架本體2開口部3内，依χ方向架設著複數之棧橋4。這些擾橋 ^片保持板4a、4b彼此相對呈帶狀配置構成；保持板 =、之間，形成透過照明光可通過的空間部4c。這些持板4a、4b之間則挾著透明防止材。 —’、於中：ϊί Hi:2? 口部3内的固定位置上，例如相對 ^ , 棧橋4上，设置複數之面板吸附部材5 ;另複數支揮栓6t ’為維持玻璃面板1呈水平狀態，分別設有各機L二的Αί=ΒΛ別是：板？附部材5與支撑栓6相對於二Β則β相丨構化态，圖二Α疋自上方觀察的構造圖、圖 ;隔挾7V於面2 J伴2些面板吸附部材5與支撐栓6 ’依-定以吸附支撐巷番、枕之間；面板吸附部材5，是藉撐栓6，則β益置於各面板支撐架本體2上的玻璃面板1 ;支 '疋藉以水平支撐住該玻璃面板1 ;這些面板吸附第12頁 1332931Page 11 133293 First invention (7) P......... sorption pump [Embodiment] [Best embodiment of the present invention will be described below as a first embodiment of the present invention" and reference is made to the drawings. FIG. 1 is a structural view of a large panel support frame; the large panel support frame 2 is a pivotal structure of the surface inspection panel support frame body 2 on the surface of the large glass panel of the inspection plane. In the opening portion 3 of the panel support body 2, a plurality of trestles 4 are arranged in the direction of the yoke. These spoiler holding plates 4a and 4b are arranged in a strip shape with respect to each other; and between the holding plates =, a space portion 4c through which illumination light can pass is formed. A transparent preventive material is placed between the holding plates 4a and 4b. —', zhongzhong: ϊί Hi:2? At a fixed position in the mouth 3, for example, relative to the bridge 4, a plurality of panel adsorption members 5 are provided; and the other plurality of slings 6t' are horizontal for maintaining the glass panel 1 State, respectively, with each machine L two Α ΒΛ = ΒΛ is: board? The attachment member 5 and the support pin 6 are in a β-phase structure with respect to the two turns, and the structure diagram and the view from the top in Fig. 2; the partition 7V on the face 2 J with the two panel adsorption members 5 and the support pin 6 'According to the adsorption support between the lanes and the pillows; the panel adsorption part 5 is the glass panel 1 which is placed on the panel support body 2 by the support bolts 6; the support is supported by the horizontal support Glass panel 1; these panels absorb page 12 1333231

=材5與支撐栓6，如圖一所示，其架設高度與面板支撐架本體2周邊載置部2a是同一高度。八各面板吸附部材5，接續著吸附軟管7 ;吸附軟管7，配置於 2片保持板4a、4b之間；吸附軟管7，是由透光性材料製造而成的。而且，將配設於各棧橋4的各吸附軟管7整理成一 Ϊ浦P如接圖續—所示，並與設於面板支撐架本體2外部的吸附另外，圖二Α與圖二Β所示之面板吸附部材5盥二裝/橋二；Ξ㈣Γ板吸附部材5時，複數：支撐栓則依一疋間隔为別挾置於各保持板“、仙之置方：tx支方撑白架)本:二二部3内，以垂直於複數棧橋4配罝万向U方向）的方向（Y方客），安供收部材8 ;這些S動吸收部材8，在；' 之震動吸 .排列成複數列，如圖一所示，中内依—定間隔震動吸收部材8能吸收、減弱由於外°因、兩側共計3列；導致面板支樓架本身的低頻率震動素率、内在因素而圖三，為震動吸收部材8的部貝八羊震動。各棧橋4之間’分別壓入可吸 =構圖；在 9，是由高分子橡膠構成的直立方的體橡膠9 ;橡膠吸收多餘震動的性質。例如：卷 ’同为子橡膠9，具有時，高分子橡膠9將會吸收來自：體撞擊高分子橡膠9 還具有撞擊時不使物體受到撞擊、物體所的撞擊力量，並且 9並不會產生任何塵埃。生貝。另外，高分橡膠橡移體9長度，較各機橋4之我度稍長。此外，橡五、發明說明（9) 膠體9的長度、高度與寬度，可依外本身產生的震動大小等任意調整對延樣的橡膠體9,如圖四 ’正向=兩端分別藉由對各九、=，長邊方 U覆蓋；：ί;;0呈= 口 12,下封蓋^二凹^^棧㈣嵌入處裝設著切 )保持板4b與43的間隔長度稱：二棧:4:間？也就仙等加以固所二再自者上體9 ’並利用螺絲接觸上下封蓋1〇、！固广，可在未如圖五A所干，介7 :滑況下支撐著。另外’橡膠體9，著，甚至橡：體!；=上幫蓋U挾住橡膠體9予以支撐下加以覆L! 在接觸上下封蓋lo、n兩者的情況 ΐ ί分ί ί Γ的Λ保，板4a、4b，相對於面板厚度，擁 4b ,為带由愚剛性金屬構成，這些保持板4a、外又；刹田動，面板表面上皆塗有一層防震材料，另防震腐蝕不錄鋼等制震金屬等製造而成。所謂物質等比π* 2 尚分子橡膠或樹脂、吸震塗料、凝膠狀鲖類樹二：所謂吸震塗料，例:尿烷、丙烯、硅勝二塗料等皆是，所謂凝膠狀物冑，例如：有機溶再者\ S類凝膠、硅酮類凝膠、氟離子交換樹脂等皆是。，為使各棧橋4不致產生共震，故使各保持板牦、4b 1332931 發明說明（ίο) 的厚度不同’藉由變更防震材料的厚度、數量等，各棧橋 4本身的共振頻率不同，營造各棧橋4之間不會共震的理想狀態。 •此外，面板支撐架本體2周邊载置部2a上，設有吸附固定玻璃面板1之複數吸收部材（吸附墊）14，這些吸收部材 14與吸附軟管7連接，接受吸附幫浦p的吸引動作而進行吸引作用。另外，面板支撐架本體2上，則設有複數之基準栓（p i η ) 1 5與複數之壓栓1 6。接下來’將就上述結構之支撐架操作說明如下：面板支撐架本體2上，載置著液晶顯示螢幕用、尺寸為化 X lm以上的大型玻璃面板丨，該玻璃面板1，由複數之壓栓 16固疋於複數之基準栓15上，藉以設定基準位置，之後再 .藉由吸附幫浦P的操作’利用各面板吸附部材5與各吸收部 -材1 4加以吸附固定住玻璃面板1。The material 5 and the support pin 6, as shown in Fig. 1, have the same height as the peripheral mounting portion 2a of the panel support body 2. Eight each of the panel adsorption members 5 is connected to the adsorption hose 7; the adsorption hose 7 is disposed between the two holding plates 4a and 4b; and the adsorption hose 7 is made of a light transmissive material. Moreover, each of the adsorption hoses 7 disposed on each of the trestles 4 is arranged into a sputum P as shown in the following figure, and is adsorbed outside the body of the panel support frame 2, and FIG. 2 and FIG. The panel is exposed to the material of 5 盥 2 / bridge 2; Ξ (4) Γ 吸附吸附吸附吸附吸附 , , , , , : : : : : 吸附吸附吸附吸附吸附吸附吸附吸附吸附吸附吸附吸附吸附吸附吸附吸附吸附吸附吸附吸附吸附吸附吸附吸附吸附吸附吸附吸附吸附吸附吸附吸附This: in the second and second parts 3, in the direction perpendicular to the complex trestle 4 (for the direction of the universal U) (Y Fangke), the supply of the material 8; these S-moving parts 8, in the vibration absorption. In the plural series, as shown in Fig. 1, the medium-negative interval vibration absorbing member 8 can absorb and weaken due to the external factor, and the total of three columns on both sides; the low frequency vibration rate and internal factors of the panel support frame itself In the third figure, the vibration of the vibration absorbing member 8 is shocked. Each of the trestles 4 is pressed into the absorbing = composition; at 9, it is a straight cubic body rubber composed of polymer rubber 9; The nature of the vibration. For example: the volume 'is the same as the rubber 9, when it is, the polymer rubber 9 will absorb Self-body impact polymer rubber 9 also has the impact force when the impact is not caused by the impact of the object, and 9 does not produce any dust. Raw shell. In addition, the high score rubber rubber body 9 length, compared to each bridge 4, I am a little longer. In addition, the rubber five, the invention description (9) the length, height and width of the colloid 9, can be adjusted according to the size of the vibration generated by the external itself, such as the rubber body 9 of the sample, as shown in Figure 4 The ======================================================================================================= The length of the interval of 43 is called: two stacks: 4: between? It is also fixed by the celestial and then the upper body 9' and the upper and lower covers are closed by screws, and the solid cover can be as shown in Figure 5A. Dry, 介7: Supported under slippery conditions. In addition, 'rubber body 9, with, even oak: body!; = upper cover U slammed rubber body 9 under support to cover L! In contact with upper and lower cover lo, n In the case of both, the plates 4a, 4b, with respect to the thickness of the panel, 4b, are made of rigid metal, these holding plates 4a In addition, the brake field moves, the surface of the panel is coated with a layer of anti-vibration material, and the anti-vibration corrosion is not made of shock-absorbing metal such as steel. The so-called material ratio π* 2 is still molecular rubber or resin, shock absorbing coating, gel鲖鲖 tree 2: so-called shock-absorbing coatings, for example: urethane, propylene, silicon Sheng two coatings, etc., so-called gelatinous 胄, for example: organic soluble \\ S-type gel, silicone gel, fluorine The ion exchange resin or the like is used. In order to prevent the bridges 4 from being caused to resonate, the thickness of each of the holding plates 牦 and 4b 1332931 is different. ' By changing the thickness and the number of the vibration-proof materials, each of the trestles 4 The resonance frequency of the bridge itself is different, creating an ideal state in which the bridges 4 do not co-seism. In addition, a plurality of absorbing members (adsorption pads) 14 for absorbing and fixing the glass panel 1 are provided on the peripheral mounting portion 2a of the panel holder main body 2, and these absorbing members 14 are connected to the suction hose 7 to receive the suction of the suction pump p. Acting to attract. Further, on the panel support body 2, a plurality of reference plugs (p i η ) 15 and a plurality of pressure plugs 16 are provided. Next, the operation of the support frame of the above structure will be described as follows: On the panel support frame body 2, a large glass panel 尺寸 having a size of X lm or more is mounted on the liquid crystal display screen, and the glass panel 1 is pressed by a plurality of The plug 16 is fixed to the plurality of reference pins 15 to set the reference position, and then, by the operation of the adsorption pump P, the glass panel 1 is adsorbed and fixed by the respective panel adsorption members 5 and the respective absorption portions-materials 1 .

在此狀態下，對玻璃面板1表面進行照明，由檢查人員以目視進行目視檢查，接著，利用顯微鏡將目視檢查檢查到的瑕疵部分加以放大’並且進行顯微檢查。另外，利用顯微鏡拍攝玻螭面板1表面的放大影像，再對此影像資料進行影像處理，接著進行玻璃面板1表面上的線寬測量。在對玻璃面板1進行這樣的檢查期間，若因外在因素與内在因素而造成震動並且傳至面板支撐本體2的話，壓入各棧橋4之間的複數橡膠體9將會吸收、減弱震動能量，此時面板本體2隨著玻璃面板1尺寸的大型化，設於支樓架框内的各棧橋4的長度也會增長，因此，外在因素或内在因素In this state, the surface of the glass panel 1 was illuminated, and visual inspection was performed visually by an inspector, and then the portion of the flaw examined by visual inspection was magnified by a microscope and microscopically examined. Further, an enlarged image of the surface of the glass sheet 1 is taken by a microscope, and image processing is performed on the image data, followed by measurement of the line width on the surface of the glass panel 1. During such inspection of the glass panel 1, if the vibration is caused by external factors and internal factors and transmitted to the panel support body 2, the plurality of rubber bodies 9 pressed between the bridges 4 will absorb and attenuate the vibration energy. At this time, as the size of the glass panel 1 is increased, the length of each of the trestles 4 disposed in the frame of the branch frame is also increased, and therefore, external factors or internal factors

1332931 五、發明說明（11) 弓I起的面板支撑架本體2内中央部產生的震動大小也之增大。本實施形態中，在面板支撐架本體2内中央部的相對位置上’壓入了複數之橡膠體9充當震動吸收部材8，所以 ”撐！ΐ體2内中央部產生震動時，將會由各橡膠體9所雪:再者’由於各棧橋4之間是利用複數之橡踢部材8連結的’所以，無論震動是依縱向（X方向）、橫向（Y方向）與高度方向（z方向）而產生的’皆能由各橡膠體9所吸收、減弱。結果，在進行玻璃面板顯微檢查時，玻璃面板丨表面上瑕影ΐ才得以毫無震動地被觀察。特別是顯微鏡倍率越局時，在觀察放大影像時越不會產生震動另外， =玻璃面板!上的線寬時，也能夠獲得高精密度的測董結果。於上述第1實施形態中’面板支撐架本體2内之間由於壓入了橡膠體9構成的震動吸棧，論是外在因素、内在因素所產生的橫向與縱材所以’無合被橡膠體9所吸收、減弱，可將震動都三大型玻璃面板i的震動，抑制到支樓架本體2上的另外，複數棧橋4之間是藉由震動吸收部此減弱傳達到各授橋4的共震頻率而連結的/ 震。伐橋4之間的共另外，在面板支樓架本體2中央部的對動吸收部材8與面板吸附部材5，罝上，权有震故此及收、減弱震動最大五、發明說明（12) 的面板支撐架本體2 φ 嘀面板1的顯微檢查時、。卩的震動。如此一來，在進行破察，也能在無震動狀，態’即使1透過顯微鏡進行高倍率觀挪量玻璃面板】上的緩宫'c 硯察其放大影像，同時在另外，各棧橋4之間僅B耝士，能獲得良好的觀察影像。以，能簡單地安裝在^曰堅入各橡膠體9所構成，所動的影響。的面板支撐架上，而毫不受到震另外，各橡膠體9是由上即使橡膠體9從各棧橋4之'封蓋10、U所覆蓋，所以，體上掉落下來。洛’也不會從面板支撐架本再者，上述第1實施形熊，上述第1實施形態中，^目^ ^如下所述之變形。垂直方向安裝複數之震;二數棧橋4的配置方向上’依面板支撐架本體2開口部3内中=，但如圖六所示，在吹部材8，也就是說，面板支樓、上可^直線狀震動吸以中央部產生震動為‘最大，因.、本體2上的坡璃面板1，璃面板板1中央部的震動，’如果能夠吸收、減弱玻到極小的程度’所α，面板支樓璃板二的震動就可以減弱即使只利用震動吸收部材8加;本體2的各校橋4中央部玻璃面板1的效果。、。亦具有吸收、減弱另外，震動吸收部材8，如圖七地安裝在各棧橋4之間。再者，二，亦可呈鋸齒形離散亦可任意決定，大膽地說，最理震吸:部材8的安裝位置大的面板支樓架本體2開口部3的=是：裝在= τ犬0Is上。另外，震動吸五、發明說明—^7 _ 收部松a At I板1的震附固⑦在面板支樓架本體上之玻璃面 t的部分動可文裝於玻璃面板1震動的腹部、或震動增大所示各ϊί2間作為震動吸收部材8的橡膠體9，如圖八些栓梢20叉相對位置上分別設有栓梢20、21，在這各栓梢2〇 :之= : = 體9，設置於各棧橋4上的 ”。該凹仰則ίί 部分上形成了嵌入用凹部圓柱狀且：端ΠΪΪΞ柱膠體9端部。橡膠體9，為 2扑。鳊刀另J留有***各栓梢20、21的孔穴23a、 2:此，且各：，2〇、21分別***橡膠體9上的各孔穴…、 b且兩端部則嵌入各保持板4a、4b的各嵌入用凹膠體9若被挾於各棧橋4之間而無掉落的可能 22。’ '取下各栓梢20、21而將橡膠體9直接嵌入凹部之間的橡膠體9 ’如圖九所示，在棧橋*的相内則可錐形狀凹部24、25 ’這些凹部24、25 橡膠體9若形/板狀兩、端=呈/形狀的橡膠體9。此時心成板狀兩鈿則形成三角形角落部，各凹部孔穴則形成能分別與橡膠體9的角落部嵌合的三角形 J膠體9的形狀，並非僅限於圓柱狀或板狀，四方形亦圖二、圖八與圖九所示之各橡谬體9 ’其表面上塗有聚乙第18頁 1332931 五、發明說明（14) 埽等物質’藉由塗上塗料， ^ ^ , η -Λ- -r n 除了可提鬲橡膠體9的持久性間產4麼梭二士庙屋生甚至還可防止各棧橋4之也可胃、】、粒子等掉落。另外，橡膠體9 止靜電的產生。鼠乙席纖維）製成的圓筒内’可防1332931 V. INSTRUCTION OF THE INVENTION (11) The magnitude of the vibration generated in the central portion of the panel support body 2 from the bow I is also increased. In the present embodiment, a plurality of rubber bodies 9 are pressed into the shock absorbing members 8 at the relative positions of the central portions of the panel support body 2, so that when the center portion of the body 2 is vibrated, it will be Each of the rubber bodies 9 is snow: In addition, since the bridges 4 are connected by a plurality of rubber kick members 8, the vibration is in the longitudinal direction (X direction), the lateral direction (Y direction), and the height direction (z direction). The resulting 'can be absorbed and weakened by each rubber body 9. As a result, when the glass panel is microscopically inspected, the shadow on the surface of the glass panel is observed without vibration. In particular, the magnification of the microscope is higher. In the case of the boarding, the vibration is not generated when the magnified image is observed. In addition, when the line width is larger than the glass panel!, the result of the high-precision measurement can be obtained. In the first embodiment, the panel supporting frame body 2 is inside. Between the vibration and the suction formed by the rubber body 9, the lateral and longitudinal materials generated by the external factors and internal factors are absorbed and weakened by the rubber body 9, and the vibration can be three large glasses. Panel i The vibration is suppressed to the support frame body 2, and the plurality of trestles 4 are connected by the shock absorbing portion to weaken the resonance frequency transmitted to the respective bridges 4. The additional between the bridges 4 In the central portion of the panel support frame body 2, the movable absorbing member 8 and the panel absorbing member 5, on the cymbal, the weight is shocked, and the shock and vibration are reduced to the maximum. 5. The panel support frame body 2 φ 嘀 of the invention (12) In the microscopic examination of the panel 1, the vibration of the cymbal. In this way, in the case of no-vibration, the state of the slab can be observed without any vibration, even if it is a high-magnification glass panel through a microscope. In view of the magnified image, at the same time, only the B gentleman between the trestles 4 can obtain a good observation image. Therefore, it can be easily installed in the rubber body 9 which is composed of the rubber bodies. On the panel support frame, without any shock, the rubber bodies 9 are covered by the 'covers 10, U of the respective bridges 4 from the upper rubber body 9, so that the body falls. Will be from the panel support frame, the first implementation of the above-mentioned bear, the above In the first embodiment, the deformation is as follows. The plurality of earthquakes are mounted in the vertical direction; the arrangement direction of the two-numbered bridge 4 is "in the opening 3 of the panel support body 2", but as shown in Fig. 6. It is shown that in the blowing member 8, that is, the panel branch, the upper portion can be linearly vibrated to absorb the vibration at the center portion, which is the maximum, because the glass panel 1 on the body 2, the central portion of the glass panel panel 1 Vibration, 'If you can absorb and reduce the glass to a very small degree', the vibration of the panel glass panel 2 can be weakened even if only the vibration absorbing member 8 is used; the main bridge 4 of the main body 4 is the central glass panel 1 The effect also has absorption and attenuation. In addition, the vibration absorbing member 8 is installed between the trestles 4 as shown in Fig. 7. Furthermore, the zigzag dispersion can also be arbitrarily determined, boldly speaking, the most reasonable Sucking: The mounting position of the panel 8 of the member 8 is large. The opening 3 is mounted on = τ dog 0Is. In addition, the vibration suction five, the invention description - ^7 _ the part of the loose a At I board 1 shock attachment solid 7 on the panel support frame body on the glass surface t part of the movement can be installed on the vibrating abdomen of the glass panel 1 Or the vibration increases the rubber body 9 between the respective ϊί2 as the shock absorbing member 8, and as shown in Fig. 8, the spigot tips 20, 21 are respectively arranged at the opposite positions of the spigots, respectively. = body 9, set on each of the trestles 4". The concave gradual ίί part is formed with a recessed cylindrical shape and the end of the colloidal colloid 9 rubber body 9, which is 2 flutter. There are holes 23a, 2 into which the respective tips 20, 21 are inserted: and each of: 2, 21 is inserted into each of the holes of the rubber body 9, b, and both ends are fitted into the respective holding plates 4a, 4b. If the concave colloid 9 for embedding is sandwiched between the trestles 4, there is no possibility of falling. 22 'Removing the respective bolt tips 20, 21 and inserting the rubber body 9 directly into the rubber body 9' between the recesses is as shown in FIG. As shown, in the phase of the trestle*, the conical recesses 24, 25' can be formed as the rubber bodies 9 of the rubber body 9 in the form of a shape/plate shape and end = shape/shape. The two-shaped plate-like shape forms a triangular corner portion, and each of the concave-shaped holes forms a shape of a triangular J-colloid 9 which can be fitted to the corner portion of the rubber body 9, respectively, and is not limited to a cylindrical shape or a plate shape, and the square is also shown in FIG. Figure 8 and Figure 9 show the rubber bodies 9' on the surface of which are coated with polyethylene. Page 18, 1332931 V. Inventions (14) Materials such as ' by coating, ^ ^ , η -Λ- -rn In addition to the durable inter-products of the rubber body 9, it can even prevent the stomach, the particles, etc. from falling on the trestles 4. In addition, the rubber body 9 stops static electricity generation. In the cylinder made of B-fiber)

震動吸收部材8，不僅限於貼# 士 A Λ m ^ 阼於裝δ又在各棧橋4之間，亦可設置盘品杧士〜知丄如圖一所不之面板支撐架本體2 "、 f，、本體2框内震動吸收部材8的各接縫部分26， 2 ’震動吸收部材8，亦可***構成棧橋4的各保持板^ ”4b之間的空間部切内。再者，震動吸收部材8，亦可分別設置於各接縫部分26及各保持板“與仙之間的内空間部 4 c中’這些震動吸收部材8，則可使用樹脂、震動吸收塗料、或凝膠狀物質，藉由***這些防震材料，可吸收外在因素與内在因素引發的震動，能提升防震效果。接著，就有關本發明第2實施形態，參考圖示說明如下：圖十與圖十一為遶用於面板檢查裝置之支撐架的結構圖，圖十疋正面圖，圖十一則是表面圖。檢查裝置本體30内’底座（base)32上設有面板支撐架本體 31 ’面板支樓架本體31上’如圖Η--所示，呈同心圓狀裝置著複數之環狀棧橋33，這些環狀棧橋33，在半徑方向上且每隔一定的角度，例如：每隔60度即藉由直線狀機34加以連結起來。這些環狀棧橋33與直線狀棧橋34之間，分別形成了照明透光用開口部3 6。但是’從外側算來第一層與第二層的各環狀棧橋33之間，每隔120度配置著直線狀支The vibration absorbing member 8 is not limited to the sticker # Λ ^ m ^ 阼 in the installation δ and between the various trestles 4, and may also be provided with a disc gentleman~ knowing that the panel support frame body 2 " f, the joint portions 26, 2' of the shock absorbing members 8 in the frame 2 of the main body 2, or the 'shock absorbing members 8, may be inserted into the space portion between the holding plates ”4b constituting the trestle 4. Further, the vibration The absorbing member 8 may be provided in each of the seam portions 26 and the respective vibration plates 8 in the inner space portion 4 c between the holding plates and the holding plates, and the resin, the shock absorbing paint, or the gel may be used. By inserting these anti-vibration materials, the substance can absorb the vibration caused by external factors and internal factors, and can improve the anti-shock effect. Next, a second embodiment of the present invention will be described with reference to the drawings. Fig. 10 and Fig. 11 are structural views of a support frame for a panel inspection device, Fig. 10 is a front view, and Fig. 11 is a surface view. . The base of the inspection unit body 30 is provided with a panel support frame body 31 on the panel support frame body 31. As shown in the figure, a plurality of annular trestles 33 are arranged in a concentric manner. The annular trestles 33 are connected by a linear machine 34 at a constant angle in the radial direction, for example, every 60 degrees. An illumination light-transmissive opening portion 36 is formed between each of the annular trestles 33 and the linear trestles 34. However, a linear branch is arranged every 120 degrees between the first and second ring-shaped trestles 33 from the outside.

第19頁 1332931 五'發明說明（15) 持棧橋34 ’使後述之升降栓梢44、45可在丨20度的範圍内移動，如此一來’面板支撐架本體31外圍部即形成了引導用開口部35-3〜35-4。另外，在面板支撐架本體31的外側’後述之升降栓梢44、45移動引導用開口部、 35-2。複數之狀授橋3 3之間’在其半彳空方向上安裝著與圖三所示之相同再造的震動吸收部材8-1〜8-6。各環狀機33之間即可藉此壓入震動吸收部材的橡膠體9，各環狀機橋33，則是藉由橡膠體9加以連結。Page 19 1332293 V'Invention Description (15) The trestle 34' allows the elevating pin tips 44, 45, which will be described later, to move within a range of 20 degrees, so that the peripheral portion of the panel support frame body 31 is guided. Openings 35-3 to 35-4. Further, the elevating pin tips 44 and 45, which will be described later on the outer side of the panel holder main body 31, move the guiding opening portions 35-2. The vibration absorbing members 8-1 to 8-6 which are the same as those shown in Fig. 3 are mounted in the half hollow direction between the plurality of bridges 3'. The rubber body 9 of the shock absorbing member can be press-fitted between the ring machines 33, and the ring bridges 33 are connected by the rubber body 9.

另外’這些震動吸收部材8-1〜8-6，不僅限於在半徑方向上安裝成一列’也可只安裝在震動增大的部分環狀棧橋33 之間。另外，震動吸收部材8，也可離散地安裝在各環狀棧33之間每隔一個的任意位置上。另外，環狀棧橋33的形 •狀’不僅限定於上述第1實施形態之2片保持板4a、4b，剖 •面為細長形的長方形板材、剖面是矩形的角材、剖面擁有姮形中空狀的角材、或剖面為二·字形的角材等皆可。Further, these shock absorbing members 8-1 to 8-6 are not limited to being mounted in a row in the radial direction, and may be attached only between the partial ring-shaped bridges 33 where the vibration is increased. Further, the shock absorbing members 8 may be discretely attached to every other position between the annular stacks 33. Further, the shape of the ring-shaped trestle 33 is not limited to the two-piece holding plates 4a and 4b of the above-described first embodiment, and the cross-section is a rectangular rectangular plate, a rectangular cross-section, and a cross-section having a hollow shape. The angle material or the angle of the shape of the two-shaped shape can be used.

面板支樓架本體31下方’如圖十所示，裝設著回轉裝置 37，此之回轉裝置37，可透過各開口部35-1〜35-4將玻璃面板抬高至面板支撐架本體31的上方，並在抬高狀態下略往回轉9 0度，所以，是由驅動部3 8與升降栓梢裝置3 9構成’驅動部38 ’能使升降栓梢裝置39上下移動與回轉。升降栓梢裝置39 ’如圖十一所示，乃是由各升降栓梢支撐棒40、41、以及立設於這些升降栓梢支撐棒4〇、41兩端部的各升降栓梢4 2〜4 5所構成。 1332931 五、發明說明（16) 回轉時，各升 35~2内呈圓弧開口部35-4、因此’當升降栓梢裝置39在上升的狀態丁降栓梢42、43則沿著各引導用開口部354、狀移動’各升降栓梢44、45亦沿著各引導用 35-3呈圓弧狀移動。另外，在面板支撐架本體31兩端側的底座32上，平行設置著導軌46、47，這些導執46、47之間則荖柱48並且跨過面板支撐架本體31的上方，門柱48 ^ 導轨46、47，可依γ方向裝設並可移動，而且相對於此之、門柱48，可依X方向裝設顯微鏡且為可移動式。、Below the panel support frame body 31, as shown in FIG. 10, a swing device 37 is provided. The swing device 37 can lift the glass panel to the panel support frame body 31 through the openings 35-1 to 35-4. The upper portion is slightly rotated by 90 degrees in the raised state. Therefore, the driving portion 38 and the lifting bolt tip device 39 constitute the 'driving portion 38' to enable the lifting and lowering device 39 to move up and down. The lifting bolt tip device 39' is shown in Fig. 11 by the lifting bolts supporting rods 40, 41 and the lifting bolt tips 4 2 standing at the opposite ends of the lifting bolt tip supporting rods 4, 41. ~ 4 5 constitutes. 1332931 V. INSTRUCTION OF THE INVENTION (16) During the rotation, each of the liters 35 to 2 has an arc opening 35-4, so that 'when the lifting bolt tip device 39 is in the ascending state, the slinger tips 42, 43 follow the respective guides. The opening portions 354 are moved in a movable manner, and the respective lifting bolt tips 44 and 45 are also moved in an arc shape along the respective guiding members 35-3. In addition, on the base 32 on both end sides of the panel support body 31, guide rails 46, 47 are disposed in parallel, and between the guides 46, 47, the mast 48 and across the panel support frame body 31, the door post 48 ^ The guide rails 46, 47 can be mounted and moved in the gamma direction, and the door post 48 can be mounted in a microscope in the X direction and movable. ,

面板支撐架本體31的上方，設有圖示中未標示出來的目照明裝置’面板支撐架本體31的下方，則明裝置50。 ^ ^ 接下來，則針對使用上述構造之支撐架的檢查操作，說明如下：呈水平狀態的面板支撐架本體31上，載置著大型尺寸的玻璃面板1，面板支撐架本體31，可依一定角度升起、搖動。在這樣的狀態下’來自目視照明裝置的照明光可照射在玻璃面板1的表面上，如此一來，則可檢查出玻璃面板】上的損傷、缺陷、髒污、附著的塵埃等瑕疵。另方面，在進行顯微檢查時，面板支撐架本體31是呈水平狀態設置的，門柱49則可依相對於各導軌47、48的 Υ方向移動，顯微鏡49則可依相對於門柱49的乂方向移動，如此即可藉由顯微鏡49對瑕疵部分進行顯微檢查。在这樣的檢查當中，外在因素或内在因素引發的震動Above the panel support frame body 31, there is provided a device illuminating device 50, which is not shown in the figure, below the panel support frame body 31. ^ ^ Next, the inspection operation using the support frame of the above configuration is as follows: On the panel support frame body 31 in a horizontal state, a large-sized glass panel 1 is mounted, and the panel support frame body 31 can be fixed. The angle rises and shakes. In such a state, illumination light from the visual illumination device can be irradiated onto the surface of the glass panel 1, and as a result, defects such as damage, defects, dirt, and adhered dust on the glass panel can be inspected. On the other hand, when the microscopic inspection is performed, the panel support body 31 is disposed in a horizontal state, the door post 49 is movable in the 相对 direction with respect to the respective guide rails 47, 48, and the microscope 49 is responsive to the 门 of the door post 49. The direction is moved so that the pupil portion can be microscopically examined by the microscope 49. In such an inspection, external or internal factors cause vibration

第21頁 1332931 五、發明說明（17) 若傳到面板支樓架本體31的話’則呈同心圓形狀配置的複數之環狀棧橋33中央部的震動是最大的。本實施形態中，由於呈同心圓形狀配置的各環狀棧橋 33之間因有壓入橡膠體9 ’所以傳至各環狀棧橋33的震動可被橡膠體9所吸收、減弱。再者，震動無論是依縱向（χ 方向）、橫向（Y方向）、高度方向（Z方向）而產生的，各方向的震動皆可被各橡膠體9所吸收、減弱。Page 21 1332931 V. INSTRUCTIONS (17) If transmitted to the panel pedestal body 31, the vibration of the central portion of the plurality of annular trestles 33 arranged in a concentric shape is the largest. In the present embodiment, since the rubber bodies 9 are pressed between the annular land bridges 33 arranged in a concentric shape, the vibration transmitted to the respective ring bridges 33 can be absorbed and weakened by the rubber body 9. Further, the vibration is generated in the longitudinal direction (χ direction), the lateral direction (Y direction), and the height direction (Z direction), and the vibration in each direction can be absorbed and weakened by the respective rubber bodies 9.

結果’進行玻璃面板顯微檢查時，透過顯微鏡49觀察的玻璃面板1表面上的瑕疵部分放大影像，即可良好地在無震動的情況下進行觀察，特別是顯微鏡倍率越高時，觀察玫大影像時越不會受到震動。 [產業上的利用可能性] 本發明適用於電漿顯示螢幕（plasma display) (PDP)、有機EL顯示螢幕等平面顯示螢幕（FPD)等之玻璃面板檢查時’可作為支撐該玻璃面板之用。[Results] When performing microscopic examination of the glass panel, the image of the enamel portion on the surface of the glass panel 1 observed through the microscope 49 is magnified, and the observation can be performed without vibration, especially when the magnification of the microscope is higher. The more the image is, the less it will be shaken. [Industrial Applicability] The present invention is applicable to a glass panel inspection such as a plasma display (PDP) or an organic EL display screen, such as a flat display screen (FPD), which can be used as a support for the glass panel. .

第22頁 1332931 圖式簡單說明 [圖式之簡單說明：] 圖一係本發明大型基板支撐架的第一實施例構成圖。圖二A係本發明大型基板第一實施例中面板吸附部材與支 • 撐栓相對於各棧橋的安裝構造圖。圊二B係本發明大型基板第一實施例中面板吸附部材與支撐栓相對於各棧橋的安裝構造圖。圖三係本發明大型基板支撐架第一實施例中振動吸收部材的分解解構成圖。圖四係本發明大型基板支撐架第一實施例中各棧橋間的橡膠體的壓入狀態圖。圖五A係本發明大型基板支撐架第一實施例中橡膠體的上蓋表示圖。圖五B係本發明大型基板支撐架第一實施例中橡膠體的上蓋表示圖。 •圖六係本發明大型基板支撐架第一實施例中基板支樓架本體中央所裝置振動吸收部材麥形例的構成圖。圖七係本發明大型基板支撐架第一實施例中振動吸收部離散安裝變形例的構成圖。 °Page 22 1332931 Brief description of the drawings [Simple description of the drawings:] Fig. 1 is a configuration diagram of a first embodiment of a large substrate support frame of the present invention. Fig. 2A is a view showing the mounting structure of the panel suction member and the support bolt in the first embodiment of the large substrate of the present invention with respect to each of the trestles.圊BB is a mounting structure diagram of the panel adsorption member and the support bolt in the first embodiment of the large-sized substrate of the present invention with respect to each of the trestles. Fig. 3 is a view showing the decomposition of the vibration absorbing member in the first embodiment of the large substrate support frame of the present invention. Fig. 4 is a view showing the state of pressing of the rubber bodies between the trestles in the first embodiment of the large-sized substrate supporting frame of the present invention. Fig. 5A is a view showing the upper cover of the rubber body in the first embodiment of the large substrate support frame of the present invention. Fig. 5B is a view showing the upper cover of the rubber body in the first embodiment of the large substrate support frame of the present invention. Fig. 6 is a view showing a configuration of a wheat-shaped vibration absorbing member in the center of the substrate supporting frame in the first embodiment of the large-sized substrate supporting frame of the present invention. Fig. 7 is a view showing the configuration of a variation of the vibration absorbing portion in the first embodiment of the large-sized substrate supporting frame of the present invention. °

圖八係本發明大型基板支撐架第一實施例中各機橋間壓橡膠體的變形例構成圖。 @ K 圖九係本發明大型基板支撐架第一實施例中各棧橋間Fig. 8 is a structural view showing a modification of each of the inter-axle pressure rubber bodies in the first embodiment of the large-substrate support frame of the present invention. @ K图九 is the stacking bridge between the first embodiment of the large substrate support frame of the present invention

橡膠體的變形例構成圖。 @ S K 圖十係本發明大型基板支撐架的第二實施例的正面構成 1332931 圖式簡單說明圖十一係本發明大型基板支撐架的第二實施例的上視構成圖。A configuration example of a modification of the rubber body. @ S K Figure 10 is a front view of a second embodiment of a large substrate support frame of the present invention. 1332931 BRIEF DESCRIPTION OF THE DRAWINGS Fig. 11 is a top plan view of a second embodiment of a large substrate support frame of the present invention.

第24頁Page 24

II

Claims

1332931 第93106400號申請專利範圍修正年9呪7/雜(m^ 1. 一種大型基板支撐架，其具備下述元件----i 框狀平檯··具相H簡支撐基板；保持部··設於前述框狀平棱的開口部；震動吸收裝置：崎述鱗部及奴方向設置，設有吸收或衰減因外在及内在因素起的前述保持部的震動。 2.如申請專概圍第1項所叙大錄板支撐架，其帽述保持. 部係以複數並設於前述平檯框的開σ部内為其特徵者。 3.如申請專利範圍第1項所述之大型基板支撐架，其中前述保持部係以複數並設賴心隨，裝設於前述平檯㈣開口部内為其特微去。 5·如申請專利範圍第1項至第4項中的任何-項所述之大型基板支撐架’射前述之震驗《㈣於上祕持部及框狀平檯之間連結設置者為其特徵者。月專她圍第1至第4項中的任何—項所述之大型基板支接架’其中保持部為複數個，震動吸收裝置則連結各保持部使成一直線狀配置為其特徵者。 7·如申π專利_第！項至第4項中的任何—項所述之大型基板支撐架^保持部為複數個，震動吸收裝置係在前述各保持 1或月〗述框狀平檯與縣部間至少—個廣泛配置為其特徵者。、 8.如申_軸1卿4物昏佩之大型基板支撑架’其中前述震動吸收裝置係以柱狀形成，其長度長於各保持相咖或上述框狀平檯絲持侧關隔，顧定於各保寺P或上述框狀平檯及保持部中的至少一個為其特徵者。 9.如申請專利細第1項至第4項巾触何-項所述之大型基板支撐架，其中前述震動吸收裝置至少施以封蓋或塗佈之一種為其特徵者。1332931 No. 93106400 Patent application scope revision year 9呪7/miscellaneous (m^ 1. A large substrate support frame with the following components---i frame-shaped platform·with phase H simple support substrate; holding portion · The opening is provided in the frame-shaped flat edge; the shock absorbing device is provided in the direction of the scale and the slave, and absorbs or attenuates the vibration of the holding portion due to external and internal factors. In the case of the large-size board support frame described in item 1, the cap is maintained. The department is characterized by a plurality of sigma parts in the above-mentioned platform frame. 3. As described in item 1 of the patent application. The large-sized substrate support frame, wherein the holding portion is provided in plural and disposed in the opening portion of the platform (4). 5. If any of the first to fourth items of the patent application range - The large-scale substrate support frame described in the above section is the one that is characterized by the connection between the upper secret part and the framed platform. The large-sized substrate support frame described in the item has a plurality of holding portions, and the shock absorbing device is connected. The holding portion is configured to be in a straight line shape. 7. The large-sized substrate support frame according to any one of the items of the π patents to the fourth item has a plurality of holding portions, and the shock absorbing device is Each of the foregoing holds a month or a month and at least one of the frame-like platforms and the county is widely configured as a feature. 8. A large-scale substrate support frame such as Shen _ axis 1 qing 4 objects faintly It is formed in a column shape, and its length is longer than each of the holding phase coffee or the frame-shaped platform wire holding side separation, and is determined by at least one of each of the Baosi P or the frame-shaped platform and the holding portion. 9. The large substrate support frame according to any one of the preceding claims, wherein the shock absorbing device is characterized by at least one of a cover or a coating.