TWI332931B - Large size substrate holder - Google Patents

Large size substrate holder Download PDF

Info

Publication number
TWI332931B
TWI332931B TW093106400A TW93106400A TWI332931B TW I332931 B TWI332931 B TW I332931B TW 093106400 A TW093106400 A TW 093106400A TW 93106400 A TW93106400 A TW 93106400A TW I332931 B TWI332931 B TW I332931B
Authority
TW
Taiwan
Prior art keywords
support frame
panel
vibration
substrate support
frame
Prior art date
Application number
TW093106400A
Other languages
English (en)
Chinese (zh)
Other versions
TW200418703A (en
Inventor
Jogasaki Shuya
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Publication of TW200418703A publication Critical patent/TW200418703A/zh
Application granted granted Critical
Publication of TWI332931B publication Critical patent/TWI332931B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mathematical Physics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Vibration Prevention Devices (AREA)
TW093106400A 2003-03-18 2004-03-10 Large size substrate holder TWI332931B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003074040A JP4276867B2 (ja) 2003-03-18 2003-03-18 基板ホルダ及びこれを備えた表面検査装置

Publications (2)

Publication Number Publication Date
TW200418703A TW200418703A (en) 2004-10-01
TWI332931B true TWI332931B (en) 2010-11-11

Family

ID=33289785

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093106400A TWI332931B (en) 2003-03-18 2004-03-10 Large size substrate holder

Country Status (4)

Country Link
JP (1) JP4276867B2 (ko)
KR (1) KR101011850B1 (ko)
CN (1) CN1532532B (ko)
TW (1) TWI332931B (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD210557S (zh) 2020-01-21 2021-03-21 志聖工業股份有限公司 熱製程用承載盤

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI307929B (en) * 2005-05-12 2009-03-21 Olympus Corp Substrate inspection apparatus
JP2009231437A (ja) * 2008-03-21 2009-10-08 Olympus Corp マクロ検査装置、マクロ検査システム、及び、マクロ検査方法
US9228256B2 (en) * 2009-12-11 2016-01-05 Kgt Graphit Technologie Gmbh Substrate support
KR101881408B1 (ko) * 2016-08-22 2018-07-23 주성엔지니어링(주) 기판지지홀더 및 이를 사용한 기판처리장치
TWI658532B (zh) * 2017-08-09 2019-05-01 明安國際企業股份有限公司 基板承置匣
KR102607248B1 (ko) * 2018-06-25 2023-11-30 어플라이드 머티어리얼스, 인코포레이티드 기판을 위한 캐리어 및 기판을 운반하기 위한 방법

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3636235B2 (ja) * 1996-01-08 2005-04-06 オリンパス株式会社 基板ホルダ
JP4175697B2 (ja) 1998-06-18 2008-11-05 オリンパス株式会社 ガラス基板保持具
CN2370524Y (zh) * 1999-01-07 2000-03-22 神基科技股份有限公司 具防震结构的数据存储装置
WO2003006971A1 (fr) * 2001-07-02 2003-01-23 Olympus Optical Co., Ltd. Dispositif de support de substrat
JP2003049558A (ja) * 2001-08-07 2003-02-21 Kazuhiko Kasai 制振間柱

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD210557S (zh) 2020-01-21 2021-03-21 志聖工業股份有限公司 熱製程用承載盤

Also Published As

Publication number Publication date
JP4276867B2 (ja) 2009-06-10
KR101011850B1 (ko) 2011-01-31
CN1532532A (zh) 2004-09-29
CN1532532B (zh) 2010-12-08
JP2004281907A (ja) 2004-10-07
KR20040082305A (ko) 2004-09-24
TW200418703A (en) 2004-10-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees