CN108154898B - 存储单元 - Google Patents

存储单元 Download PDF

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Publication number
CN108154898B
CN108154898B CN201710151469.9A CN201710151469A CN108154898B CN 108154898 B CN108154898 B CN 108154898B CN 201710151469 A CN201710151469 A CN 201710151469A CN 108154898 B CN108154898 B CN 108154898B
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voltage
write
read
line signal
transistor
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CN108154898A (zh
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罗俊元
张纬宸
王世辰
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eMemory Technology Inc
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eMemory Technology Inc
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    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/04Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
    • G11C16/0466Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells with charge storage in an insulating layer, e.g. metal-nitride-oxide-silicon [MNOS], silicon-oxide-nitride-oxide-silicon [SONOS]
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C5/00Details of stores covered by group G11C11/00
    • G11C5/14Power supply arrangements, e.g. power down, chip selection or deselection, layout of wirings or power grids, or multiple supply levels
    • G11C5/147Voltage reference generators, voltage or current regulators; Internally lowered supply levels; Compensation for voltage drops
    • GPHYSICS
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    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/06Auxiliary circuits, e.g. for writing into memory
    • G11C16/30Power supply circuits
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    • GPHYSICS
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    • G11C16/00Erasable programmable read-only memories
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    • G11C16/04Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
    • G11C16/0408Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors
    • GPHYSICS
    • G11INFORMATION STORAGE
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    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/04Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
    • G11C16/0408Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors
    • G11C16/0433Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors comprising cells containing a single floating gate transistor and one or more separate select transistors
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/04Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
    • G11C16/0408Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors
    • G11C16/0441Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors comprising cells containing multiple floating gate devices, e.g. separate read-and-write FAMOS transistors with connected floating gates
    • G11C16/0458Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors comprising cells containing multiple floating gate devices, e.g. separate read-and-write FAMOS transistors with connected floating gates comprising two or more independent floating gates which store independent data
    • GPHYSICS
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    • G11C16/10Programming or data input circuits
    • G11C16/14Circuits for erasing electrically, e.g. erase voltage switching circuits
    • G11C16/16Circuits for erasing electrically, e.g. erase voltage switching circuits for erasing blocks, e.g. arrays, words, groups
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    • G11C16/02Erasable programmable read-only memories electrically programmable
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    • GPHYSICS
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    • G11C7/1051Data output circuits, e.g. read-out amplifiers, data output buffers, data output registers, data output level conversion circuits
    • GPHYSICS
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    • GPHYSICS
    • G11INFORMATION STORAGE
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    • G11C7/00Arrangements for writing information into, or reading information out from, a digital store
    • G11C7/12Bit line control circuits, e.g. drivers, boosters, pull-up circuits, pull-down circuits, precharging circuits, equalising circuits, for bit lines
    • GPHYSICS
    • G11INFORMATION STORAGE
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    • G11C7/00Arrangements for writing information into, or reading information out from, a digital store
    • G11C7/22Read-write [R-W] timing or clocking circuits; Read-write [R-W] control signal generators or management 
    • GPHYSICS
    • G11INFORMATION STORAGE
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    • G11C8/10Decoders
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    • H01L23/522Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/528Geometry or layout of the interconnection structure
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    • H01L27/0203Particular design considerations for integrated circuits
    • H01L27/0207Geometrical layout of the components, e.g. computer aided design; custom LSI, semi-custom LSI, standard cell technique
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    • H01L27/12Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1203Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body the substrate comprising an insulating body on a semiconductor body, e.g. SOI
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Abstract

本发明公开了一种存储单元,包括耦合装置、读取晶体管、第一读取选择晶体管、第二读取选择晶体管、抹除装置、写入晶体管、及写入选择晶体管。耦合装置形成于第一掺杂区。抹除装置形成于第二掺杂区。读取晶体管、第一读取选择晶体管、第二读取选择晶体管、写入晶体管、及写入选择晶体管形成于第三掺杂区。耦合装置的栅极端耦接于共浮动栅极。抹除装置的栅极端耦接于共浮动栅极。在写入操作期间内,电子会由写入晶体管注入至共浮动栅极。在抹除操作期间内,电子会由共浮动栅极注入至抹除装置。

Description

存储单元
技术领域
本发明涉及一种存储单元,特别是涉及一种将写入的操作路径与读取的操作路径分离,且具有高耐久度的存储单元。
背景技术
非易失存储器(Non-Volatile Memory,NVM)是一种在没有电力供应至内存区块的情况下,仍然能够维持原本储存的数据的内存。非易失存储器可应用于许多设备,例如磁性装置、光盘片、闪存或是其它半导体制程的存储装置。非易失存储器可分为电子式寻址***(Electrically Addressed Systems)的内存,例如只读存储器(Read-Only Memory),以及机械式寻址***(Mechanically Addressed Systems)的内存,例如硬盘、光盘、磁带等装置。并且,非易失存储器不需要将本身储存的数据做周期性地更新。因此,非易失存储器常被用来当成备份数据的装置或是能长时间储存数据的装置。
因为科技的进步,为了存取巨量数据,高密度以及高容量的非易失存储器是不可或缺的电路组件。因为非易失存储器可以执行数据的写入操作以及读取操作,故内存的使用次数会与写入操作次数和读取操作次数有关。在传统的非易失存储器中,当使用次数增加时,跨导劣化(Transconductance Degradation)的现象(一般也可称为Gm Degradation)将很严重,这将导致抹除状态的电流值劣化(一般也可称为ERS Ion Degradation)。换句话说,在传统的非易失存储器中,当使用次数增加时,将产生抹除状态的电流值劣化现象,导致侦测边界的电压降低。因此,当非易失存储器的使用次数上升时,数据存取的效能会降低。
发明内容
本发明实施例提出一种种存储单元,包括耦合装置、读取晶体管、第一读取选择晶体管、第二读取选择晶体管、抹除装置、写入晶体管、及写入选择晶体管。耦合装置包括用以接收控制线信号的第一端、及第二端。读取晶体管包括第一端、耦接于耦合装置的第二端的控制端、及第二端。第一读取选择晶体管包括耦接于读取晶体管的第二端的第一端、用以接收字符线信号的控制端、及用以接收位线信号的第二端。第二读取选择晶体管包括用以接收读取来源线信号的第一端、用以接收读取选择栅极信号的控制端、及耦接于读取晶体管的第一端的第二端。抹除装置包括用以接收抹除线信号的第一端、及耦接于耦合装置的第二端的第二端。写入晶体管包括第一端、及耦接于耦合装置的第二端的控制端。写入选择晶体管包括用以接收写入来源线信号的第一端、用以接收写入选择栅极信号的控制端、及耦接于写入晶体管的第一端的第二端。
附图说明
图1是本发明的存储单元的实施例的电路架构图。
图2是图1的存储单元在写入操作期间内,各信号状态的示意图。
图3是图1的存储单元在写入禁止操作期间内,各信号状态的示意图。
图4是在读取操作期间且图1的存储单元被选择时,各信号状态的示意图。
图5是在读取操作期间且图1的存储单元未被选择时,各信号状态的示意图。
图6是图1的存储单元在抹除操作期间内,各信号状态的示意图。
图7是图1的存储单元的布局架构的示意图。
图8是本发明的内存数组的架构图。
图9是扩充图8的内存数组的示意图。
其中,附图标记说明如下:
100 存储单元
Reg1 第一掺杂区
Reg2 第二掺杂区
Reg3 第三掺杂区
CD 耦合装置
RT 读取晶体管
RST1 第一读取选择晶体管
RST2 第二读取选择晶体管
ED 抹除装置
PT 写入晶体管
PST 写入选择晶体管
CL 控制线信号
EL 抹除线信号
WL 字符线信号
BL 位线信号
SL 读取来源线信号
SG 读取选择栅极信号
VB 写入来源线信号
VA 写入选择栅极信号
Ic1及Ic2 电子流
Iread 电流
L1、L2、L3 布局层
PC及PE 接点
M1及M2 金属层
Cell1,1、Cell2,1、Cell3,1、Celln,1、Cell1,2
Cell2,2、Cell3,2、Celln,2、Cell1,m、Cell2,m、 存储单元
Cell3,3、Celln,m
200 内存数组
PAGE1、PAGE2、PAGEm、PACER、 分页单元
PAGEC
WL1、WL2、WLm 字符线
SG1、SG2、SGm 读取选择栅极线
CL1、CL2、CLm 控制线
EL1、EL2、ELm 抹除线
VA1、VA2、VAm 写入选择栅极线
SL1、SL2、SLm 读取来源线
BL1、BL2、BLn 位线
VB1、VB2、VBn 写入来源线
具体实施方式
图1是本发明的存储单元100的实施例的电路架构图。存储单元100包括耦合装置CD、读取晶体管RT、第一读取选择晶体管RST1、第二读取选择晶体管RST2、抹除装置ED、写入晶体管PT、及写入选择晶体管PST。耦合装置CD包括用以接收控制线信号CL的第一端、及第二端。耦合装置CD的第二端可为耦合装置CD的栅极端。读取晶体管RT包括第一端、耦接于耦合装置CD的第二端的控制端、及第二端。第一读取选择晶体管RST1包括耦接于读取晶体管RT的第二端的第一端、用以接收字符线信号WL的控制端、及用以接收位线信号BL的第二端。第二读取选择晶体管RST2包括用以接收读取来源线信号SL的第一端、用以接收读取选择栅极信号SG的控制端、及耦接于读取晶体管RT的第一端的第二端。抹除装置ED包括用以接收抹除线信号EL的第一端、及耦接于耦合装置CD的第二端的第二端。写入晶体管PT包括第一端、及耦接于耦合装置CD的第二端的控制端。写入晶体管PT还可包括第二端,且第二端保持在浮接状态。写入选择晶体管PST包括用以接收写入来源线信号VB的第一端、用以接收写入选择栅极信号VA的控制端、及耦接于写入晶体管PT的第一端的第二端。并且,耦合装置CD可形成于第一掺杂区(Doped Region)Reg1。抹除装置ED可形成于第二掺杂区Reg2。读取晶体管RT、第一读取选择晶体管RST1、第二读取选择晶体管RST2、写入晶体管PT、及写入选择晶体管PST可形成于第三掺杂区Reg3。在存储单元100中,第一掺杂区Reg1可为N型井。第二掺杂区Reg2可为N型井。第三掺杂区Reg3可为P型井。并且,第一掺杂区Reg1与第二掺杂区Reg2可为两各自的掺杂区。读取晶体管RT及写入晶体管PT可为两浮动栅极晶体管(FloatingGate Transistors)。耦合装置CD及抹除装置ED可为两金属氧化半导体电容(Metal-Oxide-Semiconductor Capacitors)。耦合装置CD的第二端、抹除装置ED的第二端、读取晶体管RT及写入晶体管PT的栅极端可耦接于共浮动栅极(Common Floating Gate)。不同于传统的存储单元使用相同路径来执行写入操作以及读取操作,存储单元100可利用不同路径来执行写入操作、抺除操作以及读取操作,因此可以达到提升耐久度的功效。以下将描述存储单元100在各种操作模式下的状态。
图2是存储单元100在写入操作期间内,各信号状态的示意图。在图2中,存储单元100的控制线信号CL可为在18伏特的第一电压(后文称为,第一电压VPGM)。读取来源线信号SL可为在5伏特的第二电压(后文称为,第二电压VDD)。读取选择栅极信号SG可为在第二电压VDD。字符线信号WL可为在5伏特的第二电压VDD。位线信号BL可为在第二电压VDD。抹除线信号EL可为在18伏特的第一电压VPGM。写入选择栅极信号VA可为在第二电压VDD。写入来源线信号VB可为接地电压(0伏特)。第三掺杂区Reg3(例如P型井)的电压为0伏特。由于抹除装置ED的第一端与第二端的跨压趋近于0伏特,因此电子不会由抹除装置ED的第二端(耦接于共浮动栅极)注入至第一端。并且,由于写入选择晶体管PST的第一端与控制端(源极端与栅极端)的跨压趋近于5伏特,因此写入选择晶体管PST会在导通状态。由于写入选择晶体管PST为导通,因此,写入选择晶体管PST的第一端与第二端的电压会在0伏特。因此,由于耦接于写入晶体管PT的控制端的共浮动栅极会接收到趋近于18伏特的偏压,且写入晶体管PT的源极/漏极区域会被汇入趋近于0伏特的电压,因此电子流Ic1将会根据FN穿隧(Fowler-Nordheim)效应,由写入晶体管PT注入至共浮动栅极。
图3是存储单元100在写入禁止操作期间内,各信号状态的示意图。在图3中,存储单元100的控制线信号CL、读取来源线信号SL、读取选择栅极信号SG、字符线信号WL、位线信号BL、抹除线信号EL、及写入选择栅极信号VA的电压状态相似于存储单元100在写入操作期间内的电压状态。因此,第一读取选择晶体管RST1、第二读取选择晶体管RST2、读取晶体管RT、及抹除装置ED的操作模式也类似于存储单元100在写入操作期间内的操作模式。然而,不同的是,写入来源线信号VB可为在5伏特的第二电压VDD。因此,由于写入选择晶体管PST的第一端与控制端(源极端与栅极端)的跨压趋近于0伏特,因此写入选择晶体管PST会是截止状态。这将导致写入晶体管PT的源极/漏极的信道电压会被升压至60%至80%的控制线信号CL的电压(18伏特)。换句话说,写入晶体管PT的氧化层的电场将不足以触发FN穿隧效应。因此,存储单元100于写入禁止操作期间内,可视为未被选择的存储单元。
图4是在读取操作期间且存储单元100被选择时,各信号状态的示意图。在图4中,控制线信号CL可为在0伏特的接地电压。读取来源线信号SL可为在0伏特的接地电压。读取选择栅极信号SG可为在1.8伏特的第三电压(后文称为,第三电压VG)。字符线信号WL可为第三电压VG。位线信号BL可为在1.2伏特的第四电压VBL。抹除线信号可为在0伏特的接地电压。写入选择栅极信号VA可为第三电压VG。写入来源线信号VB可为在0伏特的接地电压。第三掺杂区Reg3的电压为0伏特。在上述的电压设定条件下,第一读取选择晶体管RST1以及第二读取选择晶体管会是导通状态。读取电压Iread会被产生。换句话说,在读取操作期间内,读取电压Iread的强度会取决于储存于读取晶体管RT的控制端所耦接的共浮动栅极内的电子数量(因为这些电子数量会控制读取晶体管RT的电导率)。并且,写入选择栅极信号VA、读取选择栅极信号SG、及字符线信号WL可耦接在一起形成共端点,原因为写入选择栅极信号VA、读取选择栅极信号SG、及字符线信号WL在每一种操作模式的电压是相同的(在在图4中可为在1.8伏特的第三电压VG)。
图5是在读取操作期间且存储单元100未被选择时,各信号状态的示意图。在图5中,存储单元100的控制线信号CL、读取来源线信号SL、读取选择栅极信号SG、字符线信号WL、抹除线信号EL、写入选择栅极信号VA、及写入来源线信号VB的电压状态相似于存储单元100在读取操作期间且存储单元100被选择时的电压状态(如图4所示)。因此,抹除装置ED、写入晶体管PT、及写入选择晶体管PST的操作模式也类似于存储单元100在图4的操作模式。然而,不同的是,位线信号BL可为浮接状态下的信号。因此,不同于图4,在图5中,第二读取选择晶体管RST2与第一读取选择晶体管RST1不会产生读取电流。
图6是存储单元100在抹除操作期间内,各信号状态的示意图。在图6中,控制线信号CL可为在0伏特的接地电压。读取来源线信号SL可为在0伏特的接地电压。读取选择栅极信号SG可为在5伏特的第二电压VDD。字符线信号WL可为在5伏特的第二电压VDD。位线信号BL可为在0伏特的接地电压。抹除线信号EL可为在18伏特的第五电压(后文称为,第五电压VERS)。写入选择栅极信号VA可为在5伏特的第二电压VDD。写入来源线信号VB可为在0伏特的接地电压。并且,由于第一读取选择晶体管RST1的源极端与栅极端的跨压、第二读取选择晶体管RST2的源极端与栅极端的跨压、以及写入选择晶体管PST的源极端与栅极端的跨压够大,因此,第一读取选择晶体管RST1、第二读取选择晶体管RST2、以及写入选择晶体管PST会是导通状态。因此,写入晶体管PT以及读取晶体管RT的源极/漏极区域将会接收到0伏特的电压。然而,因为抹除操作的时间点是在写入操作完成后,因此,当存储单元100执行抹除操作的期间,共浮动栅极的初始化条件可视为已经注入了电子的状态。因此,耦合装置CD的第二端的电压会取决于耦合装置CD的第一端的电压以及共浮动栅极被注入电子数量的多寡。举例而言,耦合装置CD的第二端的电压可为-2伏特。如前述提及,当第一读取选择晶体管RST1、第二读取选择晶体管RST2、以及写入选择晶体管PST是导通状态时,写入晶体管PT以及读取晶体管RT的源极/漏极区域将会接收到0伏特的电压。换句话说,写入晶体管PT以及读取晶体管RT在源极与漏极间形成的信道电压会趋近于0伏特。由于耦接于写入晶体管PT的控制端的共浮动栅极与信道电压的跨压不足,因此FN的穿隧效应将不会被触发,亦即,电子不会由写入晶体管PT移动至共浮动栅极。类似地,由于耦接于读取晶体管RT的控制端的共浮动栅极与信道电压的跨压不足,因此FN的穿隧效应将不会被触发,亦即,电子不会由读取晶体管RT移动至共浮动栅极。然而,由于抹除装置ED的第一端接收了18伏特的电压,因此耦接于抹除装置ED的第二端的共浮动栅极与第一端的跨压将达到20伏特。因此,抹除装置ED将会产生穿隧效应。换句话说,电子流Ic2会由耦接于抹除装置ED的第二端的共浮动栅极流向抹除装置ED的第一端。
简单来说,存储单元100可执行许多的操作模式,例如写入操作、写入禁止操作、读取操作(包括了存储单元100被选择以及未被选择),以及抹除操作。在写入操作期间内,耦合装置CD的第一端会接收到高电压,写入选择晶体管PST会被导通,电子会由写入晶体管PT注入至共浮动栅极。在抹除操作期间内,抹除装置ED的第一端会接收到高电压,电子会由共浮动栅极注入至抹除装置ED。在读取操作且存储单元100被选择时,第一读取选择晶体管RST1以及第二读取选择晶体管RST2会被导通,以产生读取电流Iread,并藉由侦测读取电流Iread的大小可以辨识出共浮动栅极内电子的多寡(对应存储单元100的状态)。换句话说,在存储单元100中,读取操作、抹除操作以及写入操作所使用的操作路径是不同的(也可以说,是利用不同的晶体管运作)。在写入操作的期间内,存储单元100主要运作的晶体管为写入晶体管PT。在抹除操作的期间内,存储单元100主要运作的晶体管为抹除装置ED。在读取操作的期间内,存储单元100主要运作的晶体管为读取晶体管RT。举例而言,由于读取晶体管RT不会被连续地操作在不同模式(写入模式以及抹除模式),因此,读取晶体管RT较不会受到电压准位发生劣化的效应。因此,存储单元100可提供很高的操作耐久度。为了描述简洁,上述存储单元100所有模式下的电压状态可用表A来呈现。在表A中,”PGM”表示写入操作。”PGMI”表示写入禁止操作。”ERS”表示抹除操作。”READ”表示存储单元100被选择的写入操作。”READI”表示存储单元100未被选择的写入操作。”F”表示浮接状态。
表A可表示为下。
CL SL SG WL BL EL VA VB
PGM VPGM VDD VDD VDD VDD VPGM VDD 0
PGMI VPGM VDD VDD VDD VDD VPGM VDD VDD
ERS 0 0 VDD VDD 0 VERS VDD 0
READ 0 0 VG VG VBL 0 VG 0
READI 0 0 VG VG F 0 VG 0
表A
表A中列出了存储单元100在上述每一种操作模式下的各信号电压。然而,上述实施例中,任何合理修改存储单元100所用的电压范围都属于本发明所揭露的范畴。举例而言,第一电压VPGM可为范围在7伏特至24伏特中所选择的电压。第二电压VDD可为范围在1.2伏特至6.6伏特中所选择的电压。第三电压VG可为范围在1.2伏特至6.6伏特中所选择的电压。第四电压VBL可为范围在0.8伏特至2.5伏特中所选择的电压。第五电压VERS可为范围在7伏特至24伏特中所选择的电压。并且,在读取操作期间内且存储单元100被选择时,控制线信号CL以及抹除线信号EL可在第六电压,其中第六电压可为大于或等于接地电压。并且,在读取操作期间内且存储单元100未被选择时,控制线信号CL以及抹除线信号EL可在第六电压,并且位线信号BL可在第七电压,其中第七电压可等于接地电压或在第三电压VG与接地电压间。任何合理的电压组合都属于本发明的范畴。
图7是存储单元100的布局架构的示意图。如图7所示,耦合装置CD可形成于第一掺杂区Reg1。抹除装置ED可形成于第二掺杂区Reg2。读取晶体管RT、第一读取选择晶体管RST1、第二读取选择晶体管RST2、写入晶体管PT、及写入选择晶体管PST形成于第三掺杂区Reg3。读取晶体管RT及写入晶体管PT可为两浮动栅极晶体管。布局层L1、布局层L2、及布局层L3可为三个多晶硅层。在存储单元100中,布局层L1可为耦接于耦合装置CD的栅极端(第二端)、抹除装置ED的栅极端(控制端)、写入晶体管PT的栅极端(控制端)、以及读取晶体管的栅极端(控制端)的共浮动栅极层。并且,在耦合装置CD中,布局层L1没有直接接收到偏压(因为布局层L1即为共浮动栅极层,为了简化描述,后文的”布局层L1”以”浮动栅极层L1”称呼)。于此,掺杂态样为P型的区域与掺杂态样为N型的区域透过金属层M1连接,且被植入于第一掺杂区Reg1。控制线信号CL可透过接点PC输入至耦合装置CD中。在第二读取选择晶体管RST2及写入选择晶体管PST中,控制端利用共多晶硅层实现,例如利用布局层L2实现。原因为第二读取选择晶体管RST2及写入选择晶体管PST的控制端,无论存储单元100操作在哪一种模式,都会接收到相同的电压。这种特性可以参阅表A,在表A中,读取选择栅极信号SG以及写入选择栅极信号VA在所有的模式下都相同。写入晶体管PT的源极/漏极接面耦接于写入选择晶体管PST的源极/漏极接面。在抹除装置ED中,掺杂态样为P型的区域与掺杂态样为N型的区域透过金属层M2连接,且被植入于第二掺杂区Reg2。抹除线信号EL可透过接点PE输入至抹除装置ED中。然而,本发明的存储单元100的布局架构并非被地7图所局限。举例而言,字符线信号WL、读取选择栅极信号SG、写入选择栅极信号VA可由多晶硅层上的共节点产生。此外,如同前述提及,第一掺杂区Reg1可为N型井。第二掺杂区Reg2可为N型井。第三掺杂区Reg3可为P型井。然而,当存储单元100使用了深度N型井(Deep N Well、DNW)的制程时,第一掺杂区Reg1以及第二掺杂区Reg2的掺杂态样组合也可以变动。举例而言,第一掺杂区Reg1以及第二掺杂区Reg2可为两N型井或是两P型井。
图8是内存数组200的架构图,内存数组200可包括前述的存储单元100。如前述提及,存储单元100会接收字符线信号WL、读取选择栅极信号SG、写入选择栅极信号VA、控制线信号CL、抹除线信号EL、位线信号BL、读取来源线信号SL、及写入来源线信号VB以执行各种操作模式。并且,字符线信号WL、读取选择栅极信号SG、及写入选择栅极信号VA可包括选择信息。控制线信号CL及抹除线信号EL可包括状态控制信息。位线信号BL、读取来源线信号SL、及写入来源线信号VB可包括地址信息。在此,内存数组200包括(n×m)个存储单元,其中n与m为两个正整数。也可以说,在内存数组200中的(n×m)个存储单元,每一个存储单元都可与存储单元100相同的电路架构。在此,存储单元Cell1,1至存储单元Cell1,m组成了内存数组200中第一行的存储单元。存储单元Cell2,1至存储单元Cell2,m组成了内存数组200中第二行的存储单元。存储单元Celln,1至存储单元Celln,m组成了内存数组200中第n行的存储单元。并且,存储单元Cell1,1至存储单元Celln,1组成了内存数组200中第一列的存储单元。内存数组200中,第一分页单元(Page Unit)PAGE1定义为包括第一列的存储单元。存储单元Cell1,2至存储单元Celln,2组成了内存数组200中第二列的存储单元。第二分页单元PAGE2定义为包括第二列的存储单元。存储单元Cell1,m至存储单元Celln,m组成了内存数组200中第m列的存储单元。第m分页单元PAGEm定义为包括第m列的存储单元。当内存数组200的每一个存储单元都与存储单元100相同的电路架构时,每一个存储单元所接收的信号可用有线的方式传输。举例来说,对于内存数组200中的存储单元Cell1,1而言,字符线信号可用字符线WL1传递、读取选择栅极信号可用读取选择栅极线SG1传递、写入选择栅极信号可用写入选择栅极线VA1传递、控制线信号可用控制线CL1传递、抹除线信号可用抹除线EL1传递、读取来源线信号可用读取来源线SL1传递。并且,字符线WL1、读取选择栅极线SG1、写入选择栅极线VA1、控制线CL1、抹除线EL1、及读取来源线SL1可用于输入信号至第一分页单元PAGE1。并且,位线信号可用位线BL1传递、写入来源线信号可用写入来源线VB1传递。位线BL1以及写入来源线VB1可耦接于内存数组200中同一行的多个存储单元(例如存储单元Cell1,1至存储单元Cell1,m)。内存数组200中所有的存储单元的耦接规则皆类似。换句话说,内存数组200中,每一行以及每一列的存储单元的连接架构可遵循如图8所示的架构。
在内存数组200中,也可执行以分页单元为单位的操作模式。举例而言,第一分页单元PAGE1可先被选择以准备写入操作。此时,第二分页单元PAGE2至第m分页单元PAGEm将不会被选择。类似地,第一分页单元PAGE1可先被选择以准备读取操作。此时,第二分页单元PAGE2至第m分页单元PAGEm将不会被选择。为了清楚呈现各分页单元的状态,表B将列出分页单元被选择以及未被选择时的所有信号的电压状态。
Figure BDA0001245695370000111
表B
在表B中,”READ”表示读取状态,而"PGM"表示写入状态。第一电压VPGM、第二电压VDD、第三电压VG、第四电压VBL、以及浮接状态F的定义和电压范围已于前文详述,于此将不再赘述。在写入状态时,对于被选择的分页单元,写入来源线信号VB的电压值会有两种可能。可一并参阅表A,针对单一的存储单元而言,在写入操作期间内,写入来源线信号VB可在0伏特的接地电压。而在写入禁止操作期间,写入来源线信号VB可在第二电压VDD。其他的信号在写入操作期间以及写入禁止操作期间均相同。因此,针对包括同一列的分页单元而言,表B中的写入来源线信号VB可呈现"0/VDD"的电压状态以表示内部的存储单元处于写入操作期间或是写入禁止操作期间的可能。如图8所示,内存数组200中同一行的存储单元会接收到相同的来源线信号。换句话说,内存数组200中使用写入来源线(例如VB1)所耦接的所有同一行的存储单元(例如存储单元Cell1,1至存储单元Cell1,m)将会接收到电压状态为"0/VDD"的写入来源线信号。然而,同一行的存储单元(例如存储单元Cell1,1至存储单元Cell1,m)会对应不同的分页单元。因此,由于写入来源线信号VB会被不同的分页单元共享,因此对于未被选择的分页单元而言,写入来源线信号VB的电压状态也会为"0/VDD"。
并且,在读取状态时,对于被选择的分页单元,位线信号BL的电压值会有两种可能。可一并参阅表A,针对单一的存储单元而言,在读取操作期间且存储单元被选择时,位线信号BL可在第四电压VBL。在读取操作期间且存储单元未被选择时,位线信号BL可为浮接状态F的电压。其他的信号在读取操作期间内,无论存储单元是否被选择均相同。因此,针对包括同一列的分页单元而言,表B中的位线信号BL可呈现"VBL/F"的电压状态以表示内部的存储单元处于读取操作期间内,存储单元被选择以及未被选择的可能。如图8所示,内存数组200中同一行的存储单元会接收到相同的位线信号。换句话说,内存数组200中使用位线(例如BL1)所耦接的所有同一行的存储单元(例如存储单元Cell1,1至存储单元Cell1,m)将会接收到电压状态为"VBL/F"的位线信号。然而,同一行的存储单元(例如存储单元Cell1,1至存储单元Cell1,m)会对应不同的分页单元。因此,由于位线信号BL会被不同的分页单元共享,因此对于未被选择的分页单元而言,位线信号BL的电压状态也会为"VBL/F"。并且,当分页单元未被选择时,控制线信号CL、读取来源线信号SL、读取选择栅极信号SG、字符线信号WL、抹除线信号EL、及写入选择栅极信号VA可在接地电压。
图9是扩展内存数组200的示意图。为了描述简化,在图9中,内存数组200内引入了原有的第一分页单元PAGE1。并且,列扩充分页单元PAGER以及行扩充分页单元PAGEC也一并引入了图9中以用来描述内存数组200如何扩充两个轴向的维度。如图9所示,对于列方向的维度扩充而言,当列扩充分页单元PAGER准备与第一分页单元PAGE1合并以扩充列方向的维度时,第一分页单元PAGE1与列扩充分页单元PAGER内的存储单元可用字符线WL1、读取来源线SL1、写入选择栅极线VA1、及读取栅极线SG1耦接。而控制线CL1以及抹除线EL1可选择性地耦接于第一分页单元PAGE1与列扩充分页单元PAGER内的存储单元。对于行方向的维度扩充而言,当行扩充分页单元PAGEC准备与第一分页单元PAGE1合并以扩充行方向的维度时,第一分页单元PAGE1与行扩充分页单元PAGEC内的存储单元可用位线BL1以及写入来源线VB1耦接(例如第一行)、可用位线BL2以及写入来源线VB2耦接(例如第二行),依此类推。简单来说,对于列方向的维度扩充而言,同一列(例如第一列)的内存必须要用字符线WL1、读取来源线SL1、写入选择栅极线VA1、及读取栅极线SG1耦接。对于行方向的维度扩充而言,同一行(例如第一行)的内存必须要用位线BL1以及写入来源线VB1耦接。其他行的存储单元的耦接情况也是类似的结构。因此,内存数组200可以根据上述的两个轴向的维度扩充而增加存储单元的数量。此外,针对行方向的维度扩充而言,字符线WL1、读取选择栅极线SG1、写入选择栅极线VA1、及读取来源线SL1也可以连接于同一行的存储单元(同一行但是隶属于不同分页单元PAGE及PAGEC的存储单元)。
综上所述,本发明描述了一种存储单元。存储单元可操作并执行写入功能、读取功能、及抹除功能。不同于传统存储单元使用单一的操作路径,本发明的存储单元使用不同的写入操作路径以及读取操作路径,因此可达到高耐久度的功效。举例而言,存储单元内的读取晶体管在写入操作期间以及抹除操作期间内几乎不会受到电压驱动,因此耐久度将提高。此外,本发明也揭露了包括许多存储单元的内存数组的扩充方法。对于列方向的维度扩充而言,同一列的存储单元可以共享一些带有选择信息及地址信息的信号。对于行方向的维度扩充而言,同一行的存储单元可以共享一些带有地址信息的信号。因此,本发明的存储单元能增加其耐久度以及防止侦测边界的电压劣化。设计人员也可轻易地将多个存储单元以简单且具有设计弹性的方式组合成任何维度的内存数组。
以上所述仅为本发明的优选实施例而已,并不用于限制本发明,对于本领域的技术人员来说,本发明可以有各种更改和变化。凡在本发明的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。

Claims (21)

1.一种存储单元,其特征在于,包括:
耦合装置,包括:
第一端,用以接收控制线信号;及
第二端;
读取晶体管,包括:
第一端;
控制端,耦接于所述耦合装置的所述第二端;及
第二端;
第一读取选择晶体管,包括:
第一端,耦接于所述读取晶体管的所述第二端;
控制端,用以接收字符线信号;及
第二端,用以接收位线信号;
第二读取选择晶体管,包括:
第一端,用以接收读取来源线信号;
控制端,用以接收读取选择栅极信号;及
第二端,耦接于所述读取晶体管的所述第一端;抹除装置,包括:
第一端,用以接收抹除线信号;及
第二端,耦接于所述耦合装置的所述第二端;
写入晶体管,包括:
第一端;及
控制端,耦接于所述耦合装置的所述第二端;及
写入选择晶体管,包括:
第一端,用以接收写入来源线信号;
控制端,用以接收写入选择栅极信号;及
第二端,耦接于所述写入晶体管的所述第一端;
其中在写入禁止操作期间内,所述写入来源线信号的电压等于所述写入选择栅极信号的电压,所述写入选择晶体管是截止,以使所述写入晶体管的源极/漏极电压无法触发穿隧效应,在抹除操作期间内,所述第二读取选择晶体管是导通状态,在读取操作期间内,在所述读取晶体管的读取电压是由共浮动栅极(Common Floating Gate)内的电子数量决定;及
其中所述存储单元属于非易失存储器,所述读取晶体管及所述写入晶体管是两浮动栅极晶体管(Floating Gate Transistors),所述耦合装置及所述抹除装置是两金属氧化半导体电容(Metal-Oxide-Semiconductor Capacitors),所述耦合装置的所述第二端耦接于所述共浮动栅极,且所述抹除装置的所述第二端耦接于所述共浮动栅极。
2.如权利要求1所述的存储单元,其特征在于,所述写入晶体管还包括第二端,且所述第二端保持在浮接状态。
3.如权利要求1所述的存储单元,其特征在于,所述耦合装置形成于第一掺杂区(DopedRegion),且所述抹除装置形成于第二掺杂区。
4.如权利要求1所述的存储单元,其特征在于,所述读取晶体管、所述第一读取选择晶体管、所述第二读取选择晶体管、所述写入晶体管、及所述写入选择晶体管形成于第三掺杂区。
5.如权利要求1所述的存储单元,其特征在于,所述字符线信号、所述读取选择栅极信号、及所述写入选择栅极信号是在多晶硅层(Polycrystalline Layer)上的共节点产生。
6.如权利要求1所述的存储单元,其特征在于,在写入操作期间内,所述第一读取选择晶体管及所述第二读取选择晶体管是截止。
7.如权利要求6所述的存储单元,其特征在于,所述控制线信号是在第一电压,所述读取来源线信号是在第二电压,所述读取选择栅极信号是在所述第二电压,所述字符线信号是在所述第二电压,所述位线信号是在所述第二电压,所述抹除线信号是在所述第一电压,所述写入选择栅极信号是在所述第二电压,所述写入来源线信号是在接地电压,所述第一电压大于所述第二电压,且所述第二电压大于所述接地电压。
8.如权利要求1所述的存储单元,其特征在于,所述控制线信号是在第一电压,所述读取来源线信号是在第二电压,所述读取选择栅极信号是在所述第二电压,所述字符线信号是在所述第二电压,所述位线信号是在所述第二电压,所述抹除线信号是在所述第一电压,所述写入选择栅极信号是在所述第二电压,所述写入来源线信号是在第二电压,且所述第一电压大于所述第二电压。
9.如权利要求1所述的存储单元,其特征在于,在读取操作期间内且所述存储单元被选择时,所述控制线信号是在第六电压,所述读取来源线信号是在接地电压,所述读取选择栅极信号是在第三电压,所述字符线信号是在所述第三电压,所述位线信号是在第四电压,所述抹除线信号是在所述第六电压,所述写入选择栅极信号是在所述第三电压,所述写入来源线信号是在所述接地电压,所述第三电压及所述第四电压大于所述接地电压,且所述第六电压大于或等于所述接地电压。
10.如权利要求1所述的存储单元,其特征在于,在读取操作期间内且所述存储单元未被选择时,所述控制线信号是在第六电压,所述读取来源线信号是在接地电压,所述读取选择栅极信号是在第三电压,所述字符线信号是在所述第三电压,所述位线信号是在第七电压或在浮接状态,所述抹除线信号是在所述第六电压,所述写入选择栅极信号是在所述第三电压,所述写入来源线信号是在所述接地电压,所述第三电压大于所述接地电压,所述第六电压大于或等于所述接地电压,且所述第七电压等于所述接地电压或在所述第三电压与所述接地电压间。
11.如权利要求1所述的存储单元,其特征在于,在抹除操作期间内,所述控制线信号是在接地电压,所述读取来源线信号是在所述接地电压,所述读取选择栅极信号是在第二电压,所述字符线信号是在所述第二电压,所述位线信号是在所述接地电压,所述抹除线信号是在第五电压,所述写入选择栅极信号是在所述第二电压,所述写入来源线信号是在所述接地电压,所述第五电压大于所述第二电压,且所述第二电压大于所述接地电压。
12.如权利要求11所述的存储单元,其特征在于,所述第一读取选择晶体管、所述第二读取选择晶体管、及所述写入选择晶体管是导通。
13.如权利要求1所述的存储单元,其特征在于,在写入操作期间内,所述耦合装置的所述第一端接收高电压,所述写入选择晶体管是导通,且电子会由所述写入晶体管注入至所述共浮动栅极。
14.如权利要求1所述的存储单元,其特征在于,所述读取晶体管的源极/漏极接面耦接于所述第一读取选择晶体管的源极/漏极接面或所述第二读取选择晶体管的源极/漏极接面。
15.如权利要求1所述的存储单元,其特征在于,在抹除操作期间内,所述抹除装置的所述第一端接收高电压,且电子会由所述共浮动栅极注入至所述抹除装置。
16.如权利要求1所述的存储单元,其特征在于,所述写入晶体管的源极/漏极接面耦接于所述写入选择晶体管的源极/漏极接面。
17.如权利要求1所述的存储单元,其特征在于,所述字符线信号、所述读取选择栅极信号、及所述写入选择栅极信号包括选择信息,所述控制线信号及所述抹除线信号包括状态控制信息,且所述位线信号、所述读取来源线信号、及所述写入来源线信号包括地址信息。
18.如权利要求1所述的存储单元,其特征在于,所述字符线信号是用字符线传递、所述读取选择栅极信号是用读取选择栅极线传递、所述写入选择栅极信号是用写入选择栅极线传递、所述控制线信号是用控制线传递、所述抹除线信号是用抹除线传递、所述读取来源线信号是用读取来源线传递,且所述字符线、所述读取选择栅极线、所述写入选择栅极线、所述控制线、所述抹除线、及所述读取来源线耦接于内存数组中同一列的多个存储单元,以形成分页单元。
19.如权利要求18所述的存储单元,其特征在于,当所述分页单元未被选择时,所述控制线信号、所述读取来源线信号、所述读取选择栅极信号、所述字符线信号、所述抹除线信号、及所述写入选择栅极信号是在接地电压。
20.如权利要求18所述的存储单元,其特征在于,还包括多个位线,用以传送多个位线信号,以及多个写入来源线,用以传送多个写入来源线信号,且所述多个位线及所述多个写入来源线耦接于所述内存数组中同一行的多个存储单元。
21.如权利要求1所述的存储单元,其特征在于,所述位线信号是用位线传递、所述写入来源线信号是用写入来源线传递,且所述位线及所述写入来源线耦接于内存数组中同一行的多个存储单元。
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Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9965267B2 (en) 2015-11-19 2018-05-08 Raytheon Company Dynamic interface for firmware updates
US9847133B2 (en) 2016-01-19 2017-12-19 Ememory Technology Inc. Memory array capable of performing byte erase operation
US9633734B1 (en) * 2016-07-14 2017-04-25 Ememory Technology Inc. Driving circuit for non-volatile memory
CN107768373B (zh) * 2016-08-15 2022-05-10 华邦电子股份有限公司 存储元件及其制造方法
US9882566B1 (en) * 2017-01-10 2018-01-30 Ememory Technology Inc. Driving circuit for non-volatile memory
TWI652683B (zh) * 2017-10-13 2019-03-01 力旺電子股份有限公司 用於記憶體的電壓驅動器
US10332597B2 (en) * 2017-11-08 2019-06-25 Globalfoundries Singapore Pte. Ltd. Floating gate OTP/MTP structure and method for producing the same
JP7143326B2 (ja) 2017-12-20 2022-09-28 タワー パートナーズ セミコンダクター株式会社 半導体装置
KR102385951B1 (ko) * 2018-02-23 2022-04-14 에스케이하이닉스 시스템아이씨 주식회사 프로그램 효율이 증대되는 원 타임 프로그래머블 메모리 및 그 제조방법
KR102422839B1 (ko) * 2018-02-23 2022-07-19 에스케이하이닉스 시스템아이씨 주식회사 수평 커플링 구조 및 단일층 게이트를 갖는 불휘발성 메모리 소자
US10522202B2 (en) * 2018-04-23 2019-12-31 Taiwan Semiconductor Manufacturing Co., Ltd. Memory device and compensation method therein
US10964708B2 (en) * 2018-06-26 2021-03-30 Micron Technology, Inc. Fuse-array element
CN108986866B (zh) * 2018-07-20 2020-12-11 上海华虹宏力半导体制造有限公司 一种读高压传输电路
TWI659502B (zh) * 2018-08-02 2019-05-11 旺宏電子股份有限公司 非揮發性記憶體結構
CN110828464A (zh) * 2018-08-08 2020-02-21 旺宏电子股份有限公司 非易失性存储器结构
DE102019120605B4 (de) 2018-08-20 2022-06-23 Taiwan Semiconductor Manufacturing Company, Ltd. Speicherschaltung und verfahren zu deren herstellung
US11176969B2 (en) 2018-08-20 2021-11-16 Taiwan Semiconductor Manufacturing Company, Ltd. Memory circuit including a first program device
CN109147851B (zh) * 2018-08-31 2020-12-25 上海华力微电子有限公司 一种锁存电路
KR20200031894A (ko) * 2018-09-17 2020-03-25 에스케이하이닉스 주식회사 메모리 모듈 및 이를 포함하는 메모리 시스템
US10797064B2 (en) * 2018-09-19 2020-10-06 Ememory Technology Inc. Single-poly non-volatile memory cell and operating method thereof
CN109524042B (zh) * 2018-09-21 2020-03-17 浙江大学 一种基于反型模式阻变场效应晶体管的与非型存储阵列
TWI708253B (zh) 2018-11-16 2020-10-21 力旺電子股份有限公司 非揮發性記憶體良率提升的設計暨測試方法
CN111342541B (zh) * 2018-12-19 2021-04-16 智原微电子(苏州)有限公司 电源切换电路
KR20200104669A (ko) * 2019-02-27 2020-09-04 삼성전자주식회사 집적회로 소자
US10924112B2 (en) * 2019-04-11 2021-02-16 Ememory Technology Inc. Bandgap reference circuit
US11508719B2 (en) * 2019-05-13 2022-11-22 Ememory Technology Inc. Electrostatic discharge circuit
CN112086115B (zh) * 2019-06-14 2023-03-28 力旺电子股份有限公司 存储器***
CN112131037B (zh) * 2019-06-24 2023-11-14 华邦电子股份有限公司 存储器装置
JP2021048230A (ja) * 2019-09-18 2021-03-25 キオクシア株式会社 半導体記憶装置
US11521980B2 (en) * 2019-11-14 2022-12-06 Ememory Technology Inc. Read-only memory cell and associated memory cell array
US11217281B2 (en) * 2020-03-12 2022-01-04 Ememory Technology Inc. Differential sensing device with wide sensing margin
US11139006B1 (en) * 2020-03-12 2021-10-05 Ememory Technology Inc. Self-biased sense amplification circuit
JP6887044B1 (ja) * 2020-05-22 2021-06-16 ウィンボンド エレクトロニクス コーポレーション 半導体記憶装置および読出し方法
TWI739695B (zh) * 2020-06-14 2021-09-11 力旺電子股份有限公司 轉壓器
US11373715B1 (en) * 2021-01-14 2022-06-28 Elite Semiconductor Microelectronics Technology Inc. Post over-erase correction method with auto-adjusting verification and leakage degree detection
TWI819457B (zh) * 2021-02-18 2023-10-21 力旺電子股份有限公司 多次編程非揮發性記憶體的記憶胞陣列
US11854647B2 (en) * 2021-07-29 2023-12-26 Micron Technology, Inc. Voltage level shifter transition time reduction
US11972800B2 (en) * 2021-12-16 2024-04-30 Ememory Technology Inc. Non-volatile memory cell and non-volatile memory cell array
US12014783B2 (en) 2022-01-10 2024-06-18 Ememory Technology Inc. Driving circuit for non-volatile memory

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104517647A (zh) * 2013-09-27 2015-04-15 力旺电子股份有限公司 一种非易失性存储器单元、非易失性存储器及其操作方法
CN104718613A (zh) * 2012-10-19 2015-06-17 株式会社佛罗迪亚 非易失性半导体存储装置

Family Cites Families (168)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4617652A (en) 1979-01-24 1986-10-14 Xicor, Inc. Integrated high voltage distribution and control systems
JP2685966B2 (ja) 1990-06-22 1997-12-08 株式会社東芝 不揮発性半導体記憶装置
US5331590A (en) 1991-10-15 1994-07-19 Lattice Semiconductor Corporation Single poly EE cell with separate read/write paths and reduced product term coupling
JP3180608B2 (ja) 1994-03-28 2001-06-25 松下電器産業株式会社 電源選択回路
JP3068752B2 (ja) 1994-08-29 2000-07-24 松下電器産業株式会社 半導体装置
US5648669A (en) * 1995-05-26 1997-07-15 Cypress Semiconductor High speed flash memory cell structure and method
US5742542A (en) * 1995-07-03 1998-04-21 Advanced Micro Devices, Inc. Non-volatile memory cells using only positive charge to store data
US5640344A (en) * 1995-07-25 1997-06-17 Btr, Inc. Programmable non-volatile bidirectional switch for programmable logic
US6005806A (en) * 1996-03-14 1999-12-21 Altera Corporation Nonvolatile configuration cells and cell arrays
JP4659662B2 (ja) 1997-04-28 2011-03-30 ペグレ・セミコンダクターズ・リミテッド・ライアビリティ・カンパニー 半導体装置及びその製造方法
FR2767219B1 (fr) * 1997-08-08 1999-09-17 Commissariat Energie Atomique Dispositif memoire non volatile programmable et effacable electriquement compatible avec un procede de fabrication cmos/soi
JP3037236B2 (ja) * 1997-11-13 2000-04-24 日本電気アイシーマイコンシステム株式会社 レベルシフタ回路
US5959889A (en) * 1997-12-29 1999-09-28 Cypress Semiconductor Corp. Counter-bias scheme to reduce charge gain in an electrically erasable cell
DE19808525A1 (de) 1998-02-27 1999-09-02 Siemens Ag Integrierte Schaltung
JP2000021183A (ja) 1998-06-30 2000-01-21 Matsushita Electric Ind Co Ltd 半導体不揮発性メモリ
US5999451A (en) 1998-07-13 1999-12-07 Macronix International Co., Ltd. Byte-wide write scheme for a page flash device
JP3344331B2 (ja) 1998-09-30 2002-11-11 日本電気株式会社 不揮発性半導体記憶装置
JP2000276889A (ja) 1999-03-23 2000-10-06 Toshiba Corp 不揮発性半導体メモリ
WO2001017030A1 (en) * 1999-08-27 2001-03-08 Macronix America, Inc. Non-volatile memory structure for twin-bit storage and methods of making same
JP2001068650A (ja) * 1999-08-30 2001-03-16 Hitachi Ltd 半導体集積回路装置
KR100338772B1 (ko) * 2000-03-10 2002-05-31 윤종용 바이어스 라인이 분리된 비휘발성 메모리 장치의 워드라인 드라이버 및 워드 라인 드라이빙 방법
US6370071B1 (en) * 2000-09-13 2002-04-09 Lattice Semiconductor Corporation High voltage CMOS switch
EP1451969A2 (en) * 2001-11-27 2004-09-01 Koninklijke Philips Electronics N.V. Semiconductor device having a byte-erasable eeprom memory
TW536818B (en) 2002-05-03 2003-06-11 Ememory Technology Inc Single-poly EEPROM
US6621745B1 (en) * 2002-06-18 2003-09-16 Atmel Corporation Row decoder circuit for use in programming a memory device
US6774704B2 (en) 2002-10-28 2004-08-10 Tower Semiconductor Ltd. Control circuit for selecting the greater of two voltage signals
US7038947B2 (en) * 2002-12-19 2006-05-02 Taiwan Semiconductor Manufacturing Co., Ltd. Two-transistor flash cell for large endurance application
CN1224106C (zh) * 2003-03-05 2005-10-19 力旺电子股份有限公司 只读存储器及其制作方法
JP2004326864A (ja) 2003-04-22 2004-11-18 Toshiba Corp 不揮発性半導体メモリ
FR2856185A1 (fr) 2003-06-12 2004-12-17 St Microelectronics Sa Memoire flash programmable par mot
US6963503B1 (en) 2003-07-11 2005-11-08 Altera Corporation. EEPROM with improved circuit performance and reduced cell size
JP2005051227A (ja) * 2003-07-17 2005-02-24 Nec Electronics Corp 半導体記憶装置
US7169667B2 (en) * 2003-07-30 2007-01-30 Promos Technologies Inc. Nonvolatile memory cell with multiple floating gates formed after the select gate
US7081774B2 (en) * 2003-07-30 2006-07-25 Semiconductor Energy Laboratory Co., Ltd. Circuit having source follower and semiconductor device having the circuit
US7145370B2 (en) 2003-09-05 2006-12-05 Impinj, Inc. High-voltage switches in single-well CMOS processes
US20050134355A1 (en) 2003-12-18 2005-06-23 Masato Maede Level shift circuit
US20050205969A1 (en) * 2004-03-19 2005-09-22 Sharp Laboratories Of America, Inc. Charge trap non-volatile memory structure for 2 bits per transistor
US7580311B2 (en) * 2004-03-30 2009-08-25 Virage Logic Corporation Reduced area high voltage switch for NVM
US7629640B2 (en) * 2004-05-03 2009-12-08 The Regents Of The University Of California Two bit/four bit SONOS flash memory cell
DE602004010795T2 (de) * 2004-06-24 2008-12-11 Stmicroelectronics S.R.L., Agrate Brianza Verbesserter Seitenspeicher für eine programmierbare Speichervorrichtung
US6992927B1 (en) 2004-07-08 2006-01-31 National Semiconductor Corporation Nonvolatile memory cell
US7209392B2 (en) * 2004-07-20 2007-04-24 Ememory Technology Inc. Single poly non-volatile memory
KR100633332B1 (ko) * 2004-11-09 2006-10-11 주식회사 하이닉스반도체 음의 전압 공급회로
KR100642631B1 (ko) * 2004-12-06 2006-11-10 삼성전자주식회사 전압 발생회로 및 이를 구비한 반도체 메모리 장치
US7369438B2 (en) 2004-12-28 2008-05-06 Aplus Flash Technology, Inc. Combo memory design and technology for multiple-function java card, sim-card, bio-passport and bio-id card applications
US7193265B2 (en) 2005-03-16 2007-03-20 United Microelectronics Corp. Single-poly EEPROM
US7263001B2 (en) 2005-03-17 2007-08-28 Impinj, Inc. Compact non-volatile memory cell and array system
US7288964B2 (en) 2005-08-12 2007-10-30 Ememory Technology Inc. Voltage selective circuit of power source
JP4800109B2 (ja) 2005-09-13 2011-10-26 ルネサスエレクトロニクス株式会社 半導体装置
JP2007149997A (ja) 2005-11-29 2007-06-14 Nec Electronics Corp 不揮発性メモリセル及びeeprom
US7382658B2 (en) 2006-01-26 2008-06-03 Mosys, Inc. Non-volatile memory embedded in a conventional logic process and methods for operating same
US7391647B2 (en) * 2006-04-11 2008-06-24 Mosys, Inc. Non-volatile memory in CMOS logic process and method of operation thereof
US20070247915A1 (en) * 2006-04-21 2007-10-25 Intersil Americas Inc. Multiple time programmable (MTP) PMOS floating gate-based non-volatile memory device for a general-purpose CMOS technology with thick gate oxide
US7773416B2 (en) * 2006-05-26 2010-08-10 Macronix International Co., Ltd. Single poly, multi-bit non-volatile memory device and methods for operating the same
JP4901325B2 (ja) 2006-06-22 2012-03-21 ルネサスエレクトロニクス株式会社 半導体装置
US7768059B2 (en) 2006-06-26 2010-08-03 Ememory Technology Inc. Nonvolatile single-poly memory device
TWI373127B (en) * 2006-06-26 2012-09-21 Ememory Technology Inc Nonvolatile single-poly memory device
US20070296034A1 (en) 2006-06-26 2007-12-27 Hsin-Ming Chen Silicon-on-insulator (soi) memory device
JP5005970B2 (ja) 2006-06-27 2012-08-22 株式会社リコー 電圧制御回路及び電圧制御回路を有する半導体集積回路
CN100508169C (zh) * 2006-08-02 2009-07-01 联华电子股份有限公司 单层多晶硅可电除可程序只读存储单元的制造方法
US7586792B1 (en) * 2006-08-24 2009-09-08 National Semiconductor Corporation System and method for providing drain avalanche hot carrier programming for non-volatile memory applications
KR100805839B1 (ko) * 2006-08-29 2008-02-21 삼성전자주식회사 고전압 발생기를 공유하는 플래시 메모리 장치
US7483310B1 (en) * 2006-11-02 2009-01-27 National Semiconductor Corporation System and method for providing high endurance low cost CMOS compatible EEPROM devices
KR100781041B1 (ko) * 2006-11-06 2007-11-30 주식회사 하이닉스반도체 플래시 메모리 장치 및 그 소거 동작 제어 방법
JP4863844B2 (ja) * 2006-11-08 2012-01-25 セイコーインスツル株式会社 電圧切替回路
US8378407B2 (en) 2006-12-07 2013-02-19 Tower Semiconductor, Ltd. Floating gate inverter type memory cell and array
US7755941B2 (en) * 2007-02-23 2010-07-13 Panasonic Corporation Nonvolatile semiconductor memory device
US7436710B2 (en) 2007-03-12 2008-10-14 Maxim Integrated Products, Inc. EEPROM memory device with cell having NMOS in a P pocket as a control gate, PMOS program/erase transistor, and PMOS access transistor in a common well
WO2008114342A1 (ja) * 2007-03-16 2008-09-25 Fujitsu Microelectronics Limited 電源スイッチ回路及び半導体集積回路装置
US7663916B2 (en) 2007-04-16 2010-02-16 Taiwan Semicondcutor Manufacturing Company, Ltd. Logic compatible arrays and operations
US7903465B2 (en) * 2007-04-24 2011-03-08 Intersil Americas Inc. Memory array of floating gate-based non-volatile memory cells
JP4455621B2 (ja) * 2007-07-17 2010-04-21 株式会社東芝 エージングデバイス
US8369155B2 (en) * 2007-08-08 2013-02-05 Hynix Semiconductor Inc. Operating method in a non-volatile memory device
JP2009049182A (ja) 2007-08-20 2009-03-05 Toyota Motor Corp 不揮発性半導体記憶素子
US7700993B2 (en) * 2007-11-05 2010-04-20 International Business Machines Corporation CMOS EPROM and EEPROM devices and programmable CMOS inverters
KR101286241B1 (ko) 2007-11-26 2013-07-15 삼성전자주식회사 최대 전압 선택회로
US7968926B2 (en) 2007-12-19 2011-06-28 Taiwan Semiconductor Manufacturing Company, Ltd. Logic non-volatile memory cell with improved data retention ability
CN101965638B (zh) * 2008-01-18 2012-12-05 夏普株式会社 非易失性随机存取存储器
US7639536B2 (en) 2008-03-07 2009-12-29 United Microelectronics Corp. Storage unit of single-conductor non-volatile memory cell and method of erasing the same
US7800426B2 (en) 2008-03-27 2010-09-21 Taiwan Semiconductor Manufacturing Co., Ltd. Two voltage input level shifter with switches for core power off application
JP5266443B2 (ja) * 2008-04-18 2013-08-21 インターチップ株式会社 不揮発性メモリセル及び不揮発性メモリセル内蔵データラッチ
US8344443B2 (en) 2008-04-25 2013-01-01 Freescale Semiconductor, Inc. Single poly NVM devices and arrays
US8218377B2 (en) * 2008-05-19 2012-07-10 Stmicroelectronics Pvt. Ltd. Fail-safe high speed level shifter for wide supply voltage range
US7894261B1 (en) 2008-05-22 2011-02-22 Synopsys, Inc. PFET nonvolatile memory
US8295087B2 (en) * 2008-06-16 2012-10-23 Aplus Flash Technology, Inc. Row-decoder and select gate decoder structures suitable for flashed-based EEPROM operating below +/− 10v BVDS
KR101462487B1 (ko) * 2008-07-07 2014-11-18 삼성전자주식회사 플래시 메모리 장치 및 그것의 프로그램 방법
US7983081B2 (en) 2008-12-14 2011-07-19 Chip.Memory Technology, Inc. Non-volatile memory apparatus and method with deep N-well
US8189390B2 (en) * 2009-03-05 2012-05-29 Mosaid Technologies Incorporated NAND flash architecture with multi-level row decoding
US8319528B2 (en) * 2009-03-26 2012-11-27 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device having interconnected transistors and electronic device including semiconductor device
KR101020298B1 (ko) 2009-05-28 2011-03-07 주식회사 하이닉스반도체 레벨 시프터 및 반도체 메모리 장치
CN101650972B (zh) * 2009-06-12 2013-05-29 东信和平科技股份有限公司 智能卡的非易失性存储器数据更新方法
JP2011009454A (ja) * 2009-06-25 2011-01-13 Renesas Electronics Corp 半導体装置
FR2952227B1 (fr) 2009-10-29 2013-09-06 St Microelectronics Rousset Dispositif de memoire du type electriquement programmable et effacable, a deux cellules par bit
EP2323135A1 (en) * 2009-11-12 2011-05-18 SiTel Semiconductor B.V. Method and apparatus for emulating byte wise programmable functionality into sector wise erasable memory
KR101071190B1 (ko) * 2009-11-27 2011-10-10 주식회사 하이닉스반도체 레벨 쉬프팅 회로 및 이를 이용한 비휘발성 반도체 메모리 장치
IT1397229B1 (it) * 2009-12-30 2013-01-04 St Microelectronics Srl Dispositivo di memoria ftp programmabile e cancellabile a livello di cella
CN107293322B (zh) * 2010-02-07 2021-09-21 芝诺半导体有限公司 含导通浮体晶体管、并具有永久性和非永久性功能的半导体存储元件及操作方法
US8284600B1 (en) 2010-02-08 2012-10-09 National Semiconductor Corporation 5-transistor non-volatile memory cell
KR101676816B1 (ko) * 2010-02-11 2016-11-18 삼성전자주식회사 플래시 메모리 장치 및 그것의 프로그램 방법
US9082652B2 (en) 2010-03-23 2015-07-14 Sharp Kabushiki Kaisha Semiconductor device, active matrix substrate, and display device
KR101653262B1 (ko) * 2010-04-12 2016-09-02 삼성전자주식회사 멀티-비트 메모리의 프로그램 방법 및 그것을 이용한 데이터 저장 시스템
US8217705B2 (en) 2010-05-06 2012-07-10 Micron Technology, Inc. Voltage switching in a memory device
US8258853B2 (en) * 2010-06-14 2012-09-04 Ememory Technology Inc. Power switch circuit for tracing a higher supply voltage without a voltage drop
US8355282B2 (en) 2010-06-17 2013-01-15 Ememory Technology Inc. Logic-based multiple time programming memory cell
US9042174B2 (en) 2010-06-17 2015-05-26 Ememory Technology Inc. Non-volatile memory cell
US8958245B2 (en) 2010-06-17 2015-02-17 Ememory Technology Inc. Logic-based multiple time programming memory cell compatible with generic CMOS processes
US8279681B2 (en) 2010-06-24 2012-10-02 Semiconductor Components Industries, Llc Method of using a nonvolatile memory cell
US20120014183A1 (en) * 2010-07-16 2012-01-19 Pavel Poplevine 3 transistor (n/p/n) non-volatile memory cell without program disturb
US8044699B1 (en) * 2010-07-19 2011-10-25 Polar Semiconductor, Inc. Differential high voltage level shifter
KR101868332B1 (ko) * 2010-11-25 2018-06-20 삼성전자주식회사 플래시 메모리 장치 및 그것을 포함한 데이터 저장 장치
US8461899B2 (en) * 2011-01-14 2013-06-11 Stmicroelectronics International N.V. Negative voltage level shifter circuit
JP5685115B2 (ja) * 2011-03-09 2015-03-18 セイコーインスツル株式会社 電源切換回路
DE112012002622B4 (de) * 2011-06-24 2017-01-26 International Business Machines Corporation Aufzeichnungseinheit für lineare Aufzeichnung zum Ausführen optimalen Schreibens beim Empfangen einer Reihe von Befehlen, darunter gemischte Lese- und Schreibbefehle, sowie Verfahren und Programm für dessen Ausführung
US9455021B2 (en) 2011-07-22 2016-09-27 Texas Instruments Incorporated Array power supply-based screening of static random access memory cells for bias temperature instability
KR20130022743A (ko) * 2011-08-26 2013-03-07 에스케이하이닉스 주식회사 고전압 생성회로 및 이를 구비한 반도체 장치
US8999785B2 (en) * 2011-09-27 2015-04-07 Tower Semiconductor Ltd. Flash-to-ROM conversion
CN103078618B (zh) * 2011-10-26 2015-08-12 力旺电子股份有限公司 电压开关电路
JP2013102119A (ja) * 2011-11-07 2013-05-23 Ememory Technology Inc 不揮発性メモリーセル
US8508971B2 (en) 2011-11-08 2013-08-13 Wafertech, Llc Semiconductor device with one-time programmable memory cell including anti-fuse with metal/polycide gate
US9165661B2 (en) * 2012-02-16 2015-10-20 Cypress Semiconductor Corporation Systems and methods for switching between voltages
US9048137B2 (en) 2012-02-17 2015-06-02 Flashsilicon Incorporation Scalable gate logic non-volatile memory cells and arrays
US8941167B2 (en) 2012-03-08 2015-01-27 Ememory Technology Inc. Erasable programmable single-ploy nonvolatile memory
TWI467744B (zh) * 2012-03-12 2015-01-01 Vanguard Int Semiconduct Corp 單層多晶矽可電抹除可程式唯讀記憶裝置
US8787092B2 (en) 2012-03-13 2014-07-22 Ememory Technology Inc. Programming inhibit method of nonvolatile memory apparatus for reducing leakage current
US9390799B2 (en) * 2012-04-30 2016-07-12 Taiwan Semiconductor Manufacturing Company, Ltd. Non-volatile memory cell devices and methods, having a storage cell with two sidewall bit cells
TWI469328B (zh) 2012-05-25 2015-01-11 Ememory Technology Inc 具可程式可抹除的單一多晶矽層非揮發性記憶體
TWI498901B (zh) * 2012-06-04 2015-09-01 Ememory Technology Inc 利用程式化禁止方法減少漏電流的非揮發性記憶體裝置
US9729145B2 (en) * 2012-06-12 2017-08-08 Infineon Technologies Ag Circuit and a method for selecting a power supply
KR101334843B1 (ko) * 2012-08-07 2013-12-02 주식회사 동부하이텍 전압 출력 회로 및 이를 이용한 네거티브 전압 선택 출력 장치
KR102038041B1 (ko) 2012-08-31 2019-11-26 에스케이하이닉스 주식회사 전원 선택 회로
JP5988062B2 (ja) * 2012-09-06 2016-09-07 パナソニックIpマネジメント株式会社 半導体集積回路
US9130553B2 (en) 2012-10-04 2015-09-08 Nxp B.V. Low/high voltage selector
JP6053474B2 (ja) * 2012-11-27 2016-12-27 株式会社フローディア 不揮発性半導体記憶装置
JP2014116547A (ja) 2012-12-12 2014-06-26 Renesas Electronics Corp 半導体装置
JP6078327B2 (ja) * 2012-12-19 2017-02-08 ルネサスエレクトロニクス株式会社 半導体装置
US8963609B2 (en) * 2013-03-01 2015-02-24 Arm Limited Combinatorial circuit and method of operation of such a combinatorial circuit
US9275748B2 (en) * 2013-03-14 2016-03-01 Silicon Storage Technology, Inc. Low leakage, low threshold voltage, split-gate flash cell operation
KR102095856B1 (ko) * 2013-04-15 2020-04-01 삼성전자주식회사 반도체 메모리 장치 및 그것의 바디 바이어스 방법
US9197200B2 (en) 2013-05-16 2015-11-24 Dialog Semiconductor Gmbh Dynamic level shifter circuit
US9362374B2 (en) * 2013-06-27 2016-06-07 Globalfoundries Singapore Pte. Ltd. Simple and cost-free MTP structure
US9520404B2 (en) 2013-07-30 2016-12-13 Synopsys, Inc. Asymmetric dense floating gate nonvolatile memory with decoupled capacitor
CN103456359A (zh) * 2013-09-03 2013-12-18 苏州宽温电子科技有限公司 基于串联晶体管型的改进的差分架构Nor flash存储单元
US9019780B1 (en) * 2013-10-08 2015-04-28 Ememory Technology Inc. Non-volatile memory apparatus and data verification method thereof
KR20150042041A (ko) * 2013-10-10 2015-04-20 에스케이하이닉스 주식회사 전압발생기, 집적회로 및 전압 발생 방법
FR3012673B1 (fr) * 2013-10-31 2017-04-14 St Microelectronics Rousset Memoire programmable par injection de porteurs chauds et procede de programmation d'une telle memoire
KR102072767B1 (ko) * 2013-11-21 2020-02-03 삼성전자주식회사 고전압 스위치 및 그것을 포함하는 불휘발성 메모리 장치
US9159425B2 (en) * 2013-11-25 2015-10-13 Stmicroelectronics International N.V. Non-volatile memory with reduced sub-threshold leakage during program and erase operations
KR102157875B1 (ko) * 2013-12-19 2020-09-22 삼성전자주식회사 불휘발성 메모리 장치 및 그것을 포함한 메모리 시스템
JP6235901B2 (ja) * 2013-12-27 2017-11-22 ルネサスエレクトロニクス株式会社 半導体装置
US9331699B2 (en) 2014-01-08 2016-05-03 Micron Technology, Inc. Level shifters, memory systems, and level shifting methods
KR20160132405A (ko) * 2014-03-12 2016-11-18 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
CN103943570A (zh) * 2014-03-20 2014-07-23 上海华力微电子有限公司 一种一次性编程存储器中金属硅化物掩膜的制备方法
US9508396B2 (en) * 2014-04-02 2016-11-29 Ememory Technology Inc. Array structure of single-ploy nonvolatile memory
JP5745136B1 (ja) * 2014-05-09 2015-07-08 力晶科技股▲ふん▼有限公司 不揮発性半導体記憶装置とその書き込み方法
FR3021806B1 (fr) * 2014-05-28 2017-09-01 St Microelectronics Sa Procede de programmation d'une cellule memoire non volatile comprenant une grille de transistor de selection partagee
FR3021804B1 (fr) * 2014-05-28 2017-09-01 Stmicroelectronics Rousset Cellule memoire non volatile duale comprenant un transistor d'effacement
JP6286292B2 (ja) 2014-06-20 2018-02-28 株式会社フローディア 不揮発性半導体記憶装置
US20160006348A1 (en) 2014-07-07 2016-01-07 Ememory Technology Inc. Charge pump apparatus
US9431111B2 (en) * 2014-07-08 2016-08-30 Ememory Technology Inc. One time programming memory cell, array structure and operating method thereof
CN104112472B (zh) * 2014-07-22 2017-05-03 中国人民解放军国防科学技术大学 兼容标准cmos工艺的超低功耗差分结构非易失性存储器
CN104361906B (zh) * 2014-10-24 2017-09-19 中国人民解放军国防科学技术大学 基于标准cmos工艺的超低功耗非易失性存储器
US9514820B2 (en) * 2014-11-19 2016-12-06 Stmicroelectronics (Rousset) Sas EEPROM architecture wherein each bit is formed by two serially connected cells
JP6340310B2 (ja) 2014-12-17 2018-06-06 ルネサスエレクトロニクス株式会社 半導体集積回路装置およびウェラブル装置
TWI546903B (zh) * 2015-01-15 2016-08-21 聯笙電子股份有限公司 非揮發性記憶體單元
JP6457829B2 (ja) 2015-02-05 2019-01-23 ルネサスエレクトロニクス株式会社 半導体装置
CN104900266B (zh) * 2015-06-10 2018-10-26 上海华虹宏力半导体制造有限公司 Eeprom存储单元门极控制信号产生电路
US9799395B2 (en) 2015-11-30 2017-10-24 Texas Instruments Incorporated Sense amplifier in low power and high performance SRAM
US9847133B2 (en) 2016-01-19 2017-12-19 Ememory Technology Inc. Memory array capable of performing byte erase operation

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104718613A (zh) * 2012-10-19 2015-06-17 株式会社佛罗迪亚 非易失性半导体存储装置
CN104517647A (zh) * 2013-09-27 2015-04-15 力旺电子股份有限公司 一种非易失性存储器单元、非易失性存储器及其操作方法

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