WO2019131155A1 - Dispositif d'inspection d'apparence, procédé d'inspection d'apparence, programme et procédé de fabrication de pièce - Google Patents

Dispositif d'inspection d'apparence, procédé d'inspection d'apparence, programme et procédé de fabrication de pièce Download PDF

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Publication number
WO2019131155A1
WO2019131155A1 PCT/JP2018/045789 JP2018045789W WO2019131155A1 WO 2019131155 A1 WO2019131155 A1 WO 2019131155A1 JP 2018045789 W JP2018045789 W JP 2018045789W WO 2019131155 A1 WO2019131155 A1 WO 2019131155A1
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WO
WIPO (PCT)
Prior art keywords
unit
scanning
scanning unit
line camera
appearance inspection
Prior art date
Application number
PCT/JP2018/045789
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English (en)
Japanese (ja)
Inventor
雄司 小堀
誠 利根川
Original Assignee
ソニー株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ソニー株式会社 filed Critical ソニー株式会社
Priority to CN201880082194.0A priority Critical patent/CN111492231B/zh
Priority to JP2019562965A priority patent/JP7415560B2/ja
Publication of WO2019131155A1 publication Critical patent/WO2019131155A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • B25J19/04—Viewing devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60—Control of cameras or camera modules

Definitions

  • the present technology relates to a technology such as an appearance inspection apparatus that inspects the appearance of a workpiece.
  • an appearance inspection apparatus for inspecting the appearance of a work is widely known (see, for example, Patent Documents 1 and 2 below).
  • an area camera or a line camera is generally provided to obtain an image of a work.
  • an object of the present technology is to provide a technology such as an appearance inspection apparatus capable of efficiently and quickly completing an appearance inspection of a work.
  • An appearance inspection apparatus includes a first robot arm unit, a second robot arm unit, and a control unit.
  • the first robot arm unit includes a first arm unit, a first line camera, and a first scanning unit provided to the first arm unit.
  • the second robot arm unit includes a second arm unit, a second line camera, and a second scanning unit provided in the second arm unit.
  • the control unit causes the first arm unit to move the first scanning unit in the scanning direction on the first surface of the work having the first surface and the second surface.
  • the first line is imaged by the line camera, and the first scanning unit is caused to scan the first surface, and the first plane is scanned by the first scanning unit.
  • the second line camera captures an image of the second surface, and The second scanning unit scans the second surface.
  • the second scanning unit can simultaneously scan the second surface of the work while the first scanning unit scans the first surface of the work. This enables the visual inspection of the workpiece to be completed efficiently and quickly.
  • the first scanning unit is moved in the scanning direction together with the first line camera, and the first light emission emits light to a location where the first line camera performs imaging. It may further include a part.
  • control unit adjusts an imaging angle at which the first line camera captures the first surface, and the first light emitting unit irradiates the first surface with light.
  • the irradiation angle may be adjusted.
  • control unit may cause the first scanning unit to scan the first surface a plurality of times at different imaging angles and different irradiation angles.
  • the second scanning unit is moved in the scanning direction together with the second line camera, and the second light emission emits light to a location where the second line camera performs imaging. It may further include a part.
  • control unit adjusts an imaging angle at which the second line camera captures the second surface, and the second light emitting unit emits light to the second surface.
  • the irradiation angle may be adjusted.
  • control unit may cause the second scanning unit to scan the second surface a plurality of times at different imaging angles and different irradiation angles.
  • control unit may cause the first scanning unit to scan the first surface a plurality of times in different scanning directions.
  • control unit may cause the second scanning unit to scan the second surface a plurality of times in different scanning directions.
  • the work further includes a third surface, and the control unit causes the first scanning unit and the second scanning unit to cooperatively scan the third surface. Good.
  • control unit causes the first scanning unit to scan the third surface in a predetermined scanning direction, and the second scanning unit causes the third surface to be scanned as the predetermined surface.
  • the scanning may be performed in a scanning direction different from the scanning direction.
  • control unit causes light from the first light emitting unit to interfere with imaging of the second line camera and light from the second light emitting unit.
  • the movement of scanning by the first scanning unit and the second scanning unit may be controlled so that light interference that interferes with the imaging of the first line camera does not occur.
  • control unit may control the on / off timing of the first light emitting unit and the second light emitting unit so that the light interference does not occur.
  • control unit may control imaging start timing and imaging end timing by the first line camera and the second line camera so that the light interference does not occur.
  • the first surface and the second surface may be surfaces adjacent to each other.
  • the first surface, the second surface, and the third surface may be surfaces adjacent to each other.
  • the first robot arm on a first surface of a work having a first surface and a second surface by a first arm portion of a first robot arm portion
  • the first line camera of the first scanning unit is made to capture an image of the first surface while moving the first scanning unit of the unit in the scanning direction, and the first scanning unit is caused to pick up the first scanning unit. Scan the face,
  • the second arm of the second robot arm causes the second robot arm to generate the second robot arm on the second surface. Causing the second line camera of the second scanning unit to image the second surface while moving the scanning unit in the scanning direction, and causing the second scanning unit to scan the second surface .
  • a program according to the present technology is a program for controlling a first robot arm unit according to a first arm unit of a first robot arm unit on a first surface of a work having a first surface and a second surface. While moving the first scanning unit in the scanning direction, the first line camera of the first scanning unit causes the first line to be imaged, and the first scanning unit is moved to the first scanning unit. Let it scan When the first surface is scanned by the first scanning unit, the second arm of the second robot arm causes the second robot arm to generate the second robot arm on the second surface. Causing the second line camera of the second scanning unit to image the second surface while moving the scanning unit in the scanning direction, and causing the second scanning unit to scan the second surface The computer functions as a control unit.
  • the first robot on a first surface of a work having a first surface and a second surface by a first arm portion of a first robot arm portion While moving the first scanning unit of the arm unit in the scanning direction, the first line camera of the first scanning unit causes the first line to be imaged, and the first scanning unit performs the first scanning. Scan the face of the When the first surface is scanned by the first scanning unit, the second arm of the second robot arm causes the second robot arm to generate the second robot arm on the second surface.
  • the quality of the workpiece is determined based on the image captured by the first line camera and the image captured by the second line camera.
  • FIG. 1 is a top view showing an inspection system 100 according to a first embodiment of the present technology.
  • the inspection system 100 according to the present technology includes the abnormal noise inspection device 10, the seal sticking device 40, the first appearance inspection device 50A, the first transport device 80, and the second appearance.
  • An inspection device 50B and a second transfer device 90 are provided.
  • the inspection system 100 is disposed, for example, in the vicinity of the most downstream in the production line of the workpiece 1 and performs final inspection of the workpiece 1.
  • the first visual inspection is used when the two visual inspection devices 50A and 50B are simply referred to as the visual inspection device 50 and the two visual inspection devices 50A and 50B are distinguished.
  • the apparatus 50A and the second appearance inspection apparatus 50B are called.
  • the transport route of the work 1 is indicated by a broken arrow.
  • a stationary game machine is assumed as the work 1 to be inspected.
  • the work 1 is provided with a housing 2 having a substantially rectangular parallelepiped shape which is thin in the thickness direction.
  • FIG. 6 is a development view of the case 2 in the work 1.
  • the housing 2 has a total of six faces: a front face 3, a back face 4, and four side faces 5. Inside the housing 2, various electronic components necessary for the game machine are built.
  • the side 5 when simply referred to as the side 5, one of the four side surfaces is referred to, and in the case where the four side surfaces 5 are particularly distinguished, the first side surface is respectively referred to. It is called 5a, the 2nd side 5b, the 3rd side 5c, and the 4th side 5d.
  • the work 1 is conveyed by the abnormal noise inspection device 10 from another device (not shown) disposed on the upstream side to the seal sticking device 40, and the seal sticking device 40 sticks the seal.
  • the work 1 is conveyed by the abnormal noise inspection device 10 from the first seal adhesion device 40 to the first appearance inspection device 50A.
  • the abnormal noise inspection device 10 has a function of inspecting the abnormal noise of the work 1 while the workpiece 1 is being conveyed, and the workpiece 1 has abnormal noise during conveyance in the abnormal noise inspection device 10. It is inspected.
  • the workpiece 1 is inspected by the first appearance inspection apparatus 50A for three out of six surfaces of the workpiece 1.
  • the work 1 is transported by the first transport device 80 from the first appearance inspection device 50A to the second appearance inspection device 50B.
  • the remaining three surfaces of the work 1 are inspected by the second appearance inspection apparatus 50 ⁇ / b> B.
  • the workpiece 1 is transported by the second transport device 90 from the second appearance inspection device 50B to another device (for example, a packing device, a storage device, etc.) disposed downstream. Ru.
  • the appearance inspection of the next workpiece 1 is performed by the first appearance inspection device 50A. Further, at this time, the abnormal noise inspection device 10 and the seal sticking device 40 further perform the abnormal noise inspection and the seal sticking processing of the work 1 next to it.
  • FIG. 2 is a perspective view showing the abnormal noise inspection device 10 and the seal sticking device 40.
  • the abnormal noise inspection device 10 includes a base 11 and a robot arm unit 12 provided on the base 11.
  • the robot arm unit 12 includes an arm unit 21 having an articulated structure, and a hand unit 31 (holding unit) provided at the tip of the arm unit 21.
  • the arm portion 21 has a base portion 22 mounted pivotably around the Z axis on the base 11 and an upper arm portion 23 mounted bendably with respect to the base portion 22.
  • the arm portion 21 also has a forearm portion 24 attached to the upper arm portion 23 in a bendable manner, and a wrist portion 25 attached to the forearm portion 24 in a bendable manner.
  • the hand portion 31 is attached to be rotatable with respect to the wrist portion 25 (rotation around the axis with the longitudinal direction of the wrist portion 25 as an axial direction).
  • the arm unit 21 is held by the hand unit 31 (and the hand unit 31) by the pivoting operation of the base 22, the bending operation of the upper arm 23, the bending operation of the forearm 24, the bending operation of the wrist unit 25, and the rotation operation of the hand 31 It is possible to freely move the workpiece 1) on the three-dimensional space.
  • the arm unit 21 can also change the posture of the hand unit 31 (and the work 1 held by the hand unit 31) to an arbitrary posture by the above-described operations.
  • the arm unit 21 may have any structure as long as at least movement of the hand unit 31 (that is, conveyance of the work 1 held by the hand unit 31) can be freely controlled. It does not matter (for example, the upper arm 23 may be omitted).
  • FIG. 3 is an enlarged view showing the hand unit 31.
  • the hand unit 31 includes a hand unit main body 32 rotatably attached to the wrist unit 25, and a first chuck mechanism 33 and a second chuck mechanism 33 provided on the hand unit main body 32.
  • the chuck mechanism 34 of FIG. the hand unit 31 is provided with a sound detection unit 35 that detects the sound of the work 1.
  • the first chuck mechanism 33 and the second chuck mechanism 34 are provided in the hand portion main body 32 so as to be orthogonal to each other.
  • the first chuck mechanism 33 can pinch two opposing side surfaces 5 of the four side surfaces 5 of the work 1 from both sides.
  • the second chuck mechanism 34 is capable of holding the other two opposite side surfaces 5 of the four side surfaces 5 of the work 1 from both sides.
  • the hand 31 can be held and separated by the first chuck mechanism 33 and the second chuck mechanism 34.
  • the hand portion 31 is not limited to the chuck mechanisms 33 and 34 as long as the hand portion 31 can hold and release the work 1, and may have any structure (for example, hold the work 1 by suction) May be in the form).
  • the arm unit 21 and the hand unit 31 each have various drive systems such as a motor, etc., and the drive system is controlled by the control unit 13 (see FIG. 4), whereby the arm unit 21 and the hand unit 31 Movement is controlled.
  • the sound detection unit 35 detects the sound generated from the work 1 according to the movement (conveyance) of the work 1, the change in posture (including rotation), and the like.
  • the sound detection unit 35 converts (detects) the sound generated in the work 1 into an electrical signal, amplifies this signal, and outputs the amplified signal to the control unit 13 (see FIG. 4).
  • the foreign matter moves in the work 1 and noise is generated. It may occur.
  • the foreign matter is, for example, a screw detached from the internal electronic component in the work 1, a fragment generated due to a part of the electronic component being damaged, or a foreign matter mixed in the work 1 from the outside, etc. It is.
  • the noise detection unit 35 detects abnormal noise generated in various situations as described above.
  • the abnormal noise is a sound that does not occur even if the normal work 1 is moved (conveyed) by the robot arm unit 12 and its posture is changed, but abnormal work 1 (foreign matter mixing, connector removal, etc. ) Means the sound generated when the robot arm unit 12 moves (conveys) and changes its posture.
  • the sound detection unit 35 is configured by an AE (Acoustic Emission) sensor, and is disposed so as to contact the workpiece 1 in a state where the workpiece 1 is held by the hand unit 31.
  • the AE sensor has a piezoelectric element (e.g., PZT), and converts the AE elastic wave propagating through the housing 2 of the work 1 into an electrical signal.
  • the sound detection unit 35 is disposed at a position near the center of the workpiece 1 held by the hand unit 31 so that the abnormal noise can be properly detected regardless of the position of the workpiece 1 at which the abnormal noise occurs. Ru.
  • the sound detection unit 35 is disposed at a position corresponding to that area. It may be done.
  • FIG. 4 is a block diagram showing an electrical configuration of the abnormal noise inspection device 10.
  • the abnormal noise inspection device 10 includes a control unit 13, a storage unit 14, and a communication unit 15 in addition to the robot arm unit 12 and the sound detection unit 35 described above.
  • the control unit 13 is configured by a CPU (Central Processing Unit) or the like.
  • the control unit 13 executes various calculations based on various programs stored in the storage unit 14 to control each part of the abnormal noise inspection device 10 in an integrated manner.
  • CPU Central Processing Unit
  • control unit 13 When the control unit 13 causes the arm unit 21 to move the hand unit 31 in a state of holding the workpiece 1 to transport the workpiece 1 and the sound detection unit 35 transports the workpiece 1 To detect the sound of work 1 Then, the control unit 13 inspects the abnormal noise generated from the work 1 based on the detected sound signal. The details of the processing of the control unit 13 will be described later.
  • the storage unit 14 includes various programs necessary for the processing of the control unit 13, a non-volatile memory in which various data are stored, and a volatile memory used as a work area of the control unit 13.
  • the program may be read from a portable recording medium such as a semiconductor memory or an optical disk, or may be downloaded from a server apparatus on a network.
  • the communication unit 15 communicates with other devices in the production line by wire or wirelessly.
  • the seal sticking apparatus 40 includes a base 41 and a robot arm unit 42 provided on the base 41.
  • the robot arm unit 42 includes an arm unit 43 having an articulated structure, and a working hand unit 44 provided at the tip of the arm unit 43.
  • the configurations of the arm units 43 and 21 are basically the same as that of the arm units 43 and 21.
  • the configuration of the hand portions 44, 31 provided at the tip is different. The same applies to the robot arm unit in the first appearance inspection apparatus 50A, the first transfer apparatus 80, the second appearance inspection apparatus 50B, and the second transfer apparatus 90.
  • the arm portion 43 has a base 45 mounted pivotably around the Z axis on the base 41 and an upper arm 46 mounted bendably with respect to the base 45.
  • the arm portion 43 has a forearm portion 47 attached to the upper arm portion 46 in a bendable manner, and a wrist portion 48 attached to the forearm portion 47 in a bendable manner.
  • the working hand unit 44 is attached to be rotatable with respect to the wrist unit 25 (rotation around the axis with the longitudinal direction of the wrist unit 25 as an axial direction).
  • the working hand portion 44 is capable of taking out the seal from the seal storage portion (not shown), and in the state where the work 1 is held by the hand portion 31 of the abnormal noise inspection device 10, the side surface 5 of the work 1 It is possible to apply a seal from the upper side to the seal storage portion (not shown), and in the state where the work 1 is held by the hand portion 31 of the abnormal noise inspection device 10, the side surface 5 of the work 1 It is possible to apply a seal from the upper side to the
  • the seal sticking apparatus 40 is a control part which controls each part of the seal sticking apparatus 40 generally, A memory
  • FIG. 5 is a perspective view showing an appearance inspection apparatus 50 (a first appearance inspection apparatus 50A or a second appearance inspection apparatus 50B).
  • the first appearance inspection apparatus 50A and the second appearance inspection apparatus 50B cooperatively inspect the appearance of the work 1 in a shared manner.
  • the first appearance inspection apparatus 50A and the second appearance inspection apparatus 50B basically have the same configuration.
  • the first appearance inspection apparatus 50A has three surfaces in total of the front surface 3, the first side surface 5a, and the second side surface 5b among the six surfaces of the housing 2 in the work 1 (these three The faces are responsible for visual inspection of one another).
  • the remaining three surfaces, that is, the back surface 4, the third side surface 5c, and the fourth side surface 5d in total include three surfaces (these surfaces are adjacent to each other) In charge of inspection of the appearance of
  • the inspection is performed with the front surface 3 upside, and in the second appearance inspection apparatus 50B, the inspection is performed with the back surface 4 up.
  • the first appearance inspection apparatus 50A and the second appearance inspection apparatus 50B inspect each surface of the work 1 for any abnormality in appearance such as scratches (abrasions, dents) and tape marks, for example. .
  • the appearance abnormality inspected by the appearance inspection device 50 is not limited to a scratch or a tape mark.
  • the appearance abnormality may be any abnormality that is not found on the normal work 1 and is on the appearance.
  • the appearance inspection apparatus 50 includes a base 51, a mounting table 52 for the work 1, and a first robot arm unit 60 and a second robot arm unit 70.
  • the first robot arm unit 60 in the first appearance inspection apparatus 50A takes charge of scanning of the front 3 and part of scanning on the second side 5b.
  • the second robot arm unit 70 in the first appearance inspection apparatus 50A takes charge of scanning of the first side surface 5a and part of scanning on the second side surface 5b.
  • the first robot arm unit 60 in the second appearance inspection apparatus 50B takes charge of scanning of the back surface 4 and part of scanning on the fourth side 5d.
  • the second robot arm unit 70 in the second appearance inspection apparatus 50B is in charge of scanning of the third side surface 5c and part of scanning on the fourth side surface 5d.
  • the first robot arm unit 60 and the second robot arm unit 70 have basically the same configuration.
  • the first robot arm unit 60 includes a first arm unit 61 having an articulated structure, and a first scanning unit 62 provided at the tip of the first arm unit 61.
  • the second robot arm unit 70 includes a second arm unit 71 having an articulated structure, and a second scanning unit 72 provided at the tip of the second arm unit 71.
  • the first arm portion 61 (second arm portion 71) is bendable with respect to the base 63 (base 73) pivotally mounted around the Z axis on the base 51 and the base 63 (base 73) And an upper arm 64 (upper arm 74) attached thereto.
  • the first arm 61 (second arm 71) is a forearm 65 (forearm 75) attached to the upper arm 64 (upper arm 74) so as to be bendable, and a forearm 65 (forearm) And a wrist portion 66 (list portion 76) attached to be bendable with respect to the portion 75).
  • the first scanning unit (second scanning unit 72) is attached to be rotatable with respect to the list unit 66 (list unit 76) (rotation around the axis with the longitudinal direction of the list unit as the axial direction).
  • the first arm 61 (second arm 71) performs a pivoting operation of the base 63 (base 73), a bending operation of the upper arm 64 (upper arm 74), a bending operation of the forearm 65 (forearm 75),
  • the bending operation of the wrist unit 66 (list unit 76) and the rotation operation of the first scanning unit 62 (second scanning unit 72) make the first scanning unit 62 (second scanning unit 72) in a three-dimensional space. It is possible to move it freely.
  • the first arm 61 (second arm 71) can change the attitude of the first scanning section 62 (second scanning section 72) to an arbitrary attitude by each operation described above. It is assumed.
  • the first arm 61 (second arm 71) may have any structure that can freely control the movement of at least the first scanning unit 62 (second scanning unit 72). Such a structure may be used (for example, the upper arm may be omitted).
  • the first scanning unit 62 includes a support member 69 rotatably attached to the wrist unit 66, a first line camera 67 fixed to the support member 69, and a first line camera fixed to the support member 69. And a light emitting unit 68.
  • the second scanning unit 72 is fixed to the support member 79 rotatably attached to the wrist unit 76, the second line camera 77 fixed to the support member 79, and the support member 79.
  • a second light emitting unit 78 is fixed to the support member 79 rotatably attached to the wrist unit 76, the second line camera 77 fixed to the support member 79, and the support member 79.
  • the first line camera 67 (second line camera 77) includes a plurality of imaging elements arranged along one direction, and various optical lenses such as an imaging lens.
  • the first line camera 67 (second line camera 77) is moved by the first arm 61 (second arm 71) in the direction orthogonal to the one direction (the direction in which the imaging devices are arranged) While capturing the image, a specific surface of the case 2 of the work 1 is captured to obtain an image, and the image is output to the control unit 53 (see FIG. 9).
  • the first light emitting unit 68 (second light emitting unit 78) has a long shape in the one direction (the direction in which the imaging devices are arranged in the line camera).
  • the first light emitting unit 68 (second light emitting unit 78) is made of, for example, various light emitters such as a light emitting diode (LED) and a white light bulb.
  • the first light emitting unit 68 (second light emitting unit 78) is integrated with the first line camera 67 (second line camera 77) by the first arm unit 61 (second arm unit 71).
  • the first line camera 67 (the second line camera 77) emits light to a location where imaging is performed while being moved to
  • the first scanning unit 62 (second scanning unit 72) When the first scanning unit 62 (second scanning unit 72) is moved in the scanning direction on a specific surface of the workpiece 1, the first scanning unit 62 (second scanning unit 72) specifies the specific surface while maintaining a constant distance from the specific surface. Is moved parallel to the plane of
  • the scanning direction of the first scanning unit 62 (second scanning unit 72) is adjusted by the first arm unit 61 (second arm unit 71).
  • the first scanning unit 62 (second scanning unit 72) is a first line camera for a specific surface of the case 2 of the work 1 by the first arm unit 61 (second arm unit 71).
  • the imaging angle of 67 (second line camera 77) and the irradiation angle of light by the first light emitting unit 68 (second light emitting unit 78) are adjusted.
  • FIG. 7 and 8 are diagrams showing an imaging angle of the line camera and an irradiation angle of light of the light emitting unit.
  • the imaging angle of the first line camera 67 (second line camera 77) is set to 90 °, and the irradiation angle of the light of the first light emitting unit 68 (second light emitting unit 78) An example is shown when is set to 30 degrees.
  • the imaging angle of the first line camera 67 (second line camera 77) is set to 60 °, and the light of the first light emitting unit 68 (second light emitting unit 78) An example is shown when the irradiation angle is set to 60 °.
  • the imaging angle of the first line camera 67 (second line camera 77) is set to 90 °, and the first light emitting unit 68 (second light emission The irradiation angle of the portion 78) is set to 30 °, and the specific surface is scanned by the first scanning portion 62 (second scanning portion 72). Thereafter, the imaging angle of the first line camera 67 (second line camera 77) is set to 60 °, and the irradiation angle of the first light emitting portion 68 (second light emitting portion 78) is set to 60 ° A specific surface is scanned by the first scanning unit 62 (second scanning unit 72). That is, in the present embodiment, the imaging angle of the first line camera 67 (second line camera 77) and the irradiation angle of the first light emitting unit 68 (second light emitting unit 78) are changed. The same area is scanned.
  • the first line camera 67 (second line camera 77) and the first light emitting unit 68 (second light emitting unit 78) As a whole, the angle with respect to a specific surface is changed. On the other hand, even if the first line camera 67 (second line camera 77) and the first light emitting unit 68 (second light emitting unit 78) can individually adjust the angle with respect to a specific plane Good.
  • the imaging angle of the first line camera 67 (second line camera 77) when the first scan is performed is referred to as a first imaging angle (90 ° in the present embodiment), and the second imaging The imaging angle of the first line camera 67 (second line camera 77) at the time of scanning is referred to as a second imaging angle (60.degree. In the present embodiment).
  • the irradiation angle of the first light emitting unit 68 (second light emitting unit 78) when the first scan is performed is referred to as a first irradiation angle (30.degree. In this embodiment), and the second scanning is performed.
  • the irradiation angle of the first light emitting unit 68 (second light emitting unit 78) when the second light emitting unit 78 is performed is referred to as a second irradiation angle (60.degree. In the present embodiment).
  • each value in a 1st imaging angle, a 2nd imaging angle, a 1st irradiation angle, and a 2nd irradiation angle it can change suitably.
  • these values are appropriately set in accordance with the material of the housing 2 of the work 1, the type of abnormality to be detected in the appearance inspection (for example, a scratch, a tape mark, and the like), and the like.
  • FIG. 9 is a block diagram showing the electrical configuration of the appearance inspection apparatus 50 (first appearance inspection apparatus 50A or second appearance inspection apparatus 50B).
  • the appearance inspection apparatus 50 includes a control unit 53, a storage unit 54, and a communication unit 55, in addition to the first robot arm unit 60 and the second robot arm unit 70 described above. ing.
  • the control unit 53 is constituted by a CPU (Central Processing Unit) or the like, executes various calculations based on various programs stored in the storage unit 54, and controls the respective units of the visual inspection apparatus 50 in an integrated manner.
  • CPU Central Processing Unit
  • the control unit 13 causes the first line camera 67 to move the first scanning unit 62 in the scanning direction on the specific surface of the workpiece 1 by the first arm unit 61 in the appearance inspection apparatus 50.
  • the specific surface of the workpiece 1 is imaged, and the first scanning unit 62 scans the specific surface of the workpiece 1.
  • control unit 13 causes the second arm unit 71 to perform a second scan on another specific surface of the workpiece 1 while the specific surface of the workpiece 1 is being scanned by the first scanning unit 62. While moving the unit 72 in the scanning direction, the second line camera 77 causes the other specific surface of the workpiece 1 to be imaged and causes the second scanning unit 72 to scan the other specific surface. The details of the processing of the control unit 53 will be described later.
  • first robot arm unit 60 and the second robot arm unit 70 are controlled by one control unit 53 is shown, but the first robot arm unit 60 and the second robot arm unit 70 are illustrated. Robot arms 70 may be controlled by separate control units.
  • the storage unit 54 includes various programs necessary for the processing of the control unit 53, a non-volatile memory in which various data are stored, and a volatile memory used as a work area of the control unit 53.
  • the program may be read from a portable recording medium such as a semiconductor memory or an optical disk, or may be downloaded from a server apparatus on a network.
  • the communication unit 55 communicates with other devices in the production line by wire or wirelessly.
  • the first transfer device 80 includes a base 81 and a robot arm unit 82 provided on the base 81.
  • the robot arm unit 82 includes an arm unit 83 having an articulated structure, and a hand unit 84 provided at the tip of the arm unit 83.
  • the configuration of the arm unit 83 is the same as that of the abnormal noise inspection device 10 and the arm portions 21, 61 and 71 in the robot arm in the appearance inspection device 50.
  • the hand portion 84 is provided with a chuck mechanism capable of holding two opposing side surfaces 5 of the four side surfaces 5 of the work 1 from both sides.
  • the robot arm unit 82 of the first transfer device 80 holds the work 1 placed on the mounting table 52 of the first appearance inspection device 50A, and transfers the work 1 while reversing the vertical direction of the work 1 And place it on the mounting table 52 of the second appearance inspection apparatus 50B.
  • the first transfer device 80 stores a control unit that generally controls the first transfer device 80 and various programs, data, and the like necessary for processing of the control unit. And a communication unit that communicates with other devices in the production line.
  • the second transfer device 90 includes a base 91 and a robot arm unit 92 provided on the base 91.
  • the robot arm unit 92 includes an arm unit 93 having an articulated structure, and a hand unit 94 provided at the tip of the arm unit 93.
  • the mechanical configuration and the electrical configuration of the second transfer device 90 are the same as the abnormal noise inspection device 10 except that the sound detection unit 35 is not provided.
  • the robot arm unit 92 of the second transfer device 90 holds the work 1 placed on the mounting table 52 of the second appearance inspection device 50B, and another device (packaging device, storage is provided downstream) Transport the workpiece 1 to the next step.
  • the second conveyance device 90 is notified of the goodness and the defect of the work 1 to be conveyed from the abnormal noise inspection device 10, the first appearance inspection device 50A, and the second appearance device.
  • the robot arm unit 92 of the second transfer device 90 advances the work 1 determined to be non-defective in all three devices 10, 50A, 50B to the next step.
  • the storage rack for storing the defective product 1 without advancing the workpiece 1 to the next step Transport to (not shown).
  • work 1 determined to be inferior goods may be arrange
  • FIG. 10 is a flowchart showing processing in the control unit 13 of the abnormal noise inspection device 10.
  • control unit 13 of the abnormal noise inspection device 10 controls the arm unit 21 of the robot arm unit 12 to move the hand unit 31 to the holding position of the work 1 (step 101). Then, the control unit 13 causes the hand unit 31 to hold the work 1 (step 102). When the work 1 is held by the hand unit 31, the sound detection unit 35 contacts the vicinity of the center of the work 1 as shown in FIG. 3.
  • control unit 13 starts processing for acquiring a sound signal from the sound detection unit 35 (step 103). Then, the control unit 13 starts an abnormal noise inspection of the work 1 based on the detected sound signal (step 104). The details of the abnormal noise test will be described later.
  • control unit 13 turns the arm unit 21 clockwise, turns the hand unit 31 holding the work 1 clockwise (moves in the first direction), and seals the work 1 40 to the processing position (step 105).
  • the control unit 13 causes the posture of the workpiece 1 by the bending operation of each part in the arm unit 21 and the rotation operation with respect to the arm unit 21 in the hand unit 31. Change to any posture for sticking the seal.
  • the posture of the work 1 at this time is a posture in which the work 1 is erected, with the specific side surface 5 of the work 1 facing upward (see FIG. 2).
  • control unit 13 When the control unit 13 transports the work 1 to the processing position in the seal sticking apparatus 40, the control unit 13 stops the movement of the robot arm unit 12 and causes the hand unit 31 to stand by while holding the work 1 (step 106). In this state, the seal attaching device 40 applies a seal to the upper side surface 5 of the work 1.
  • control unit 13 determines whether the process in the seal sticking apparatus 40 is completed (step 107). In addition, when the process in the seal
  • step 107 the control unit 13 proceeds to step 108.
  • step 108 the control unit 13 turns the arm unit 21 counterclockwise, turns the hand unit 31 holding the work 1 counterclockwise (moves in the second direction), and the work 1 is moved.
  • the sheet is conveyed from the seal sticking apparatus 40 to the first appearance inspection apparatus 50A.
  • the control unit 13 separates the work 1 from the hand unit 31 and places the work 1 on the mounting table 52 of the first appearance inspection apparatus 50A.
  • the control unit 13 When the workpiece 21 is being conveyed by turning the arm unit 21 counterclockwise, the control unit 13 performs the workpiece 1 by the bending operation of each part in the arm unit 21 and the rotation operation with respect to the arm unit 21 in the hand unit 31. Is changed to an arbitrary posture for mounting the work 1 on the mounting table 52.
  • the posture of the work 1 at this time is a posture in which the front 3 of the work 1 faces upward.
  • the control unit 13 receives the sound signal from the sound detection unit 35.
  • the acquisition process is ended (step 109).
  • the control unit 13 ends the abnormal noise inspection of the work 1 based on the sound signal (step 110).
  • the control unit 13 determines whether abnormal noise is detected in the abnormal noise test (step 111). If no abnormal noise is detected (NO in step 111), the control unit 13 transmits, together with the identification information of the work 1, information indicating that the work 1 is good to the second transport device 90. (Step 112). On the other hand, when abnormal noise is detected (YES in step 111), the control unit 13 sends the second conveyance device 90 information indicating that the work 1 is a defective product together with the identification information of the work 1 And (step 113).
  • the work 1 determined to be defective in the abnormal noise inspection is subjected to appearance inspection in the first appearance inspection device 50A and the second appearance inspection device 50B, and then the second transport device 90 is used as a storage shelf for storing a defect. Is stored in the storage unit, whereby defective products are separated from non-defective products.
  • the work 1 for which the determination of good or bad in the abnormal noise inspection is performed is separated by the second transfer device 90. 12 may be performed by itself.
  • a storage shelf for storing a defective product is installed in the operation area of the robot arm unit 12 in the abnormal noise inspection device 10.
  • the noise signal is inspected by comparing the waveform of the sound signal of the workpiece 1 as the inspection target with the waveform of the sound signal of the normal workpiece 1.
  • the magnitude of the sound in a specific frequency band indicating abnormal noise is larger than that of the sound signal of the normal work 1.
  • experimental results were obtained such that the value indicated by the sound signal is increased at frequencies of 1.5 kHz, 3 kHz, 6 kHz, 12 kHz, and 24 kHz.
  • the screw collides with the inner wall of the work 1 and other members according to the movement (conveyance) and the posture change of the work 1, and at this time, 1.5 kHz, 3 kHz, 6 kHz, Abnormal noise with a frequency of 12 kHz and 24 kHz is generated.
  • the sound of the specific frequency band as abnormal noise mixes in the movement (conveyance) speed of the work 1, the speed of posture change of the work 1, the material of the case 2 of the work 1, the structure inside the work 1, the work 1 Depends on the type of foreign substance to be
  • a sound signal in a specific frequency band corresponding to abnormal noise is extracted from the entire sound signal detected by the sound detection unit 35 (for example, FFT (Fast Fourier transform) ) May be. Then, based on the sound signal in this specific frequency band, it may be determined whether abnormal noise has occurred. In this case, the sound signal in this specific frequency band may be integrated, and it may be determined based on the integral value whether abnormal noise has occurred.
  • FFT Fast Fourier transform
  • a sound signal in a frequency band of 1 kHz to 30 kHz is extracted from the sound signal detected by the sound detection unit 35. Then, based on the sound signal in the frequency band of 1 kHz to 30 kHz, it may be determined whether abnormal noise has occurred. Further, in this case, for example, a sound signal in a frequency band of 1 kHz to 30 kHz may be integrated, and it may be determined whether abnormal noise has occurred based on whether the integrated value exceeds a threshold.
  • abnormal noise does not occur even if the workpiece 1 is conveyed clockwise, abnormal noise may occur when the workpiece 1 is conveyed counterclockwise. On the contrary, even if the workpiece 1 is conveyed counterclockwise, no abnormal noise is generated, but when the workpiece 1 is conveyed clockwise, the abnormal noise may be generated.
  • the foreign matter may move in the work 1 only in one of the clockwise conveyance and the counterclockwise conveyance.
  • An abnormal noise may occur only on one side.
  • the abnormal noise may occur.
  • the foreign matter moves for the first time in the housing 1 for the first time by changing the posture of the work 1. May.
  • the processing of the first appearance inspection apparatus 50A will be representatively described unless otherwise specified.
  • the front surface 3 is read as the back surface 4
  • the first side 5a is read as the third side 5c
  • the second side 5b is read as the fourth side 5d. Just do it.
  • FIG. 11 is a flowchart showing processing in the control unit 53 of the appearance inspection apparatus 50.
  • the control unit 53 of the first appearance inspection apparatus 50A determines whether the work 1 has been mounted on the mounting table 52 (step 201).
  • the determination as to whether or not the work 1 has been placed is made based on a signal transmitted from the abnormal noise inspection device 10. For example, when the abnormal noise inspection device 10 places the work 1 on the mounting table 52, a signal indicating that the work 1 is placed is transmitted from the abnormal noise inspection device 10 to the first appearance inspection device 50A. Ru.
  • the first transfer device 80 places the work 1 on the mounting table 52
  • a signal indicating that the work 1 has been placed is the first transfer. It is transmitted from the device 80 to the second appearance inspection device 50B.
  • the control unit 53 controls the first robot arm unit 60 and the second robot arm unit 70 to make the front 3 of the housing 2 , And three planes in total of the first side 5a and the second side 5b (step 202). The scanning of these three planes will be described in detail later with reference to FIGS. 12 to 19.
  • Step 203 based on the images obtained by the first line camera 67 and the second line camera 77, the control unit 53 determines whether or not the appearance abnormality is detected in the work 1 (good or bad of the work 1).
  • control unit 53 has an appearance abnormality It is determined that it has been detected (YES in step 203).
  • control unit 53 determines that an abnormality has been detected (YES in step 203).
  • control unit 53 sends the second conveyance device 90 information indicating that the work 1 is good along with the identification information of the work 1 And (step 204).
  • control unit 53 uses the second conveyance device, together with the identification information of the work 1, the information indicating that the work 1 is a defective product. Send to 90 (step 205).
  • the work 1 determined as a defect product in the first appearance inspection device 50A is stored by the second transport device 90 in a storage shelf for storing a defect product, As a result, defective products are separated from non-defective products.
  • FIG. 12 is a diagram showing a trace of scanning by the first scanning unit 62 and the second scanning unit 72 in the first appearance inspection apparatus 50A.
  • the solid-line arrow indicates the scanning locus by the first scanning unit 62
  • the broken-line arrow indicates the scanning locus by the second scanning unit 72.
  • the solid arrows indicate 1. To 12. The numbers up to are assigned, and the numbers indicate the order in which the first scanning unit 62 performs scanning. Further, numbers of “1” to “8” are attached to the broken arrows, and the numbers indicate the order in which the second scanning unit 72 performs scanning.
  • the imaging angles of the line cameras 67 and 77 are set to the first imaging angle (90 °) with respect to the specific surface of the workpiece 1, and the irradiation of the light emitting portions 68 and 78 is performed. It means that the angle is set to the first irradiation angle (30 °) (see FIG. 7).
  • the numbers 2 in () indicate that the imaging angles of the line cameras 67 and 77 are set to the second imaging angle (60 °) with respect to the specific surface of the work 1 and the light emitting portions 68 and 78 It means that the irradiation angle of is set to the second irradiation angle (60.degree.) (See FIG. 8).
  • the number 1 or 2 indicates the imaging angle with respect to the front face 3 and the irradiation angle.
  • the number 1 or 2 indicates the imaging angle and the irradiation angle with respect to the first side surface 5 a.
  • the number of 1 or 2 has shown the imaging angle with respect to the 2nd side 5b, and an irradiation angle.
  • the front 3, the first side 5a, and the second side 5b are described as “upper”, “lower”, “left”, and “right”, respectively.
  • the terms “upper”, “lower”, “left” and “right” with respect to the front 3, the first side 5 a and the second side 5 b correspond to the directions shown in FIG. 12. It will be described as being shown (same in FIGS. 13 to 19 described later).
  • the vertical direction and the horizontal direction in the front 3 are directions orthogonal to each other in the horizontal plane of the earth seat system.
  • the vertical direction of the first side surface 5a and the second side surface 5b is the vertical direction in the earth coordinate system
  • the horizontal direction of the first side surface 5a and the second side surface 5b is in the horizontal plane of the earth seat system It is a direction.
  • scanning of the front surface 3 of the workpiece 1 is in charge of the first scanning unit 62 (see solid arrows in the front surface 3), and scanning of the first side surface 5 a of the workpiece 1 is It is in charge of the second scanning unit 72 (refer to the broken arrow in the first side surface 5a).
  • scanning with respect to the second side surface 5b is performed cooperatively by the first scanning unit 62 and the second scanning unit 72 (refer to solid arrows and broken arrows in the second side 5b).
  • the same region of the workpiece 1 is used multiple times at different imaging angles (first imaging angle, second imaging angle) and different irradiation angles (first irradiation angle, second irradiation angle). It is scanned.
  • two patterns are used as the imaging angle and the irradiation angle, but three or more patterns may be used as the imaging angle and the irradiation angle.
  • the same area of the front 3 (left side of the front 3) is scanned twice by the first scanning unit 62 at different imaging angles and different irradiation angles.
  • the same region (the left side of the first side surface 5a) of the first side surface 5a is obtained by the second scanning unit 72, for example. Two scans at different imaging angles and different illumination angles.
  • the same area of the workpiece 1 is scanned a plurality of times in different scanning directions (vertical direction, horizontal direction).
  • two directions of the vertical direction and the lateral direction are used as the scanning direction, but three or more directions may be used as the scanning direction.
  • the scanning direction is the vertical direction
  • the same scanning direction is used regardless of whether it is upward or downward.
  • the scanning direction is the left-right direction, the same scanning direction is treated as either the right direction or the left direction.
  • the share of the first scanning unit 62 and the second scanning unit 72 is divided according to the scanning direction. That is, the first scanning unit 62 takes charge of scanning in the vertical direction on the second side surface 5b (6. (1 "), 7. (1"), 10. (2 "), 11. (2).
  • the second scanning unit 72 takes charge of scanning in the left-right direction on the second side surface 5b (see “7” (1 ”) and“ 8 ”(2”)).
  • the width of the front side 3 in the left-right direction, the width in the vertical direction, the width in the left-right direction of the first side surface 5a, and the width in the left-right direction of the second side surface 5b The width is over. For this reason, scanning in the vertical direction and horizontal direction on the front surface 3, scanning in the vertical direction on the first side surface 5a, and scanning in the vertical direction on the second side surface 5b are performed twice in the same scanning direction ( Since it is necessary to make the imaging angle and the irradiation angle different, a total of 4 times in the same scanning direction).
  • the width in the vertical direction of the first side surface 5a and the width in the vertical direction of the second side surface 5b are equal to or smaller than the width which the scanning units 62 and 72 can scan at one time. Therefore, it is not necessary to perform scanning in the left-right direction on the first side surface 5a and scanning in the left-right direction on the second side surface 5b in two steps in the same scanning direction (the imaging angle and the irradiation angle need to be different) So there are two times in total, in the same scan direction).
  • FIGS. 13 to 19 are diagrams showing the movement at the time of scanning in the first scanning unit 62 and the second scanning unit 72 in the first appearance inspection apparatus 50A.
  • FIGS. 13 to 19 only the first light emitting unit 68 and the second light emitting unit 78 of the first scanning unit 62 and the second scanning unit 72 are illustrated for easy viewing of the drawings.
  • the first line camera 67 and the second line camera 77 are not shown.
  • the symbols (1), (2), (1 ′), (2 ′), (1 ′ ′) and (2 ′ ′) are used in the same meaning as in FIG. .
  • control unit 53 controls first arm unit 61 to move first scanning unit 62 to the upper left position of front surface 3 (note that front surface 3 in front surface 3). For the terms top, bottom, left, right, see Figure 12). Then, the control unit 53 sets the imaging angle of the first line camera 67 with respect to the front surface 3 to the first imaging angle (90 °), and the irradiation angle of the first light emitting unit 68 with respect to the front surface 3 is the first irradiation. Set to an angle (30 °).
  • control unit 53 controls the second arm unit 71 to move the second scanning unit 72 to the upper left position of the first side surface 5a (note that the upper side of the first side surface 5a, For the terms bottom, left, right, see Figure 12). Then, the control unit 53 sets the imaging angle of the second line camera 77 with respect to the first side surface 5a to the first imaging angle (90 °), and the irradiation of the second light emitting unit 78 with respect to the first side surface 5a. The angle is set to the first illumination angle (30 °).
  • control unit 53 turns on the first light emitting unit 68 in the first scanning unit 62. Then, the control unit 53 causes the first arm unit 61 to move the first scanning unit 62 downward (in the horizontal plane in the earth coordinate system) on the front surface 3 of the work 1 while The front 3 of the work 1 is imaged by the first line camera 67 in the first scan unit 62. Thereby, the left side of the front surface 3 of the workpiece 1 is scanned downward at the first imaging angle and the first irradiation angle by the first scanning unit 62 (see 1. (1) in FIG. 12). ).
  • the control unit 53 turns on the second light emitting unit 78 in the second scanning unit 72 simultaneously with the lighting of the first light emitting unit 68. Then, the control unit 53 causes the second arm unit 71 to move the second scanning unit 72 downward (also downward in the earth coordinate system) on the first side surface 5a of the work 1.
  • the second line camera 77 in the second scanning unit 72 captures an image of the first side surface 5 a of the work 1.
  • the left side of the first side surface 5a of the workpiece 1 is scanned downward by the second imaging unit 72 at the first imaging angle and the first irradiation angle (“1” in FIG. 12). (See 1 ')).
  • control unit 53 stops the downward movement of second scanning unit 72. . Then, the control unit 53 causes the second scanning unit 72 to stop the imaging of the second line camera 77 and turn off the second light emitting unit 78. At this time, the first scanning unit 62 still scans the front 3 of the workpiece 1. Next, the control unit 53 controls the second arm unit 71 to move the second scanning unit 72 in the right direction.
  • the control unit 53 causes the second scanning unit 72 to move in the right direction. Stop it. Next, the control unit 53 turns on the second light emitting unit 78 in the second scanning unit 72.
  • control unit 53 causes the second arm unit 71 to move the second scanning unit 72 upward (in the earth coordinate system, upward) on the first side surface 5 a as a second operation.
  • the second line camera 77 in the scanning unit 72 captures an image of the first side surface 5 a of the work 1.
  • the right side of the first side surface 5a of the workpiece 1 is scanned upward by the second imaging unit 72 at the first imaging angle and the first irradiation angle ("2" in FIG. 12). (See 1 ')).
  • the control unit 53 stops the downward movement of the first scanning unit 62. Then, the control unit 53 causes the first scanning unit 62 to stop the imaging of the first line camera 67 and turn off the first light emitting unit 68. Next, the control unit 53 controls the first arm unit 61 to move the first scanning unit 62 in the right direction.
  • the control unit 53 stops the movement of the first scanning unit 62 in the right direction. Next, the control unit 53 turns on the first light emitting unit 68 in the first scanning unit 62.
  • the control unit 53 causes the first scanning unit 62 to move the first scanning unit 62 upward (in the horizontal direction in the earth coordinate system) on the front surface 3 by the first arm unit 61, while performing the first scanning.
  • the front 3 of the work 1 is imaged by the first line camera 67 in the unit 62.
  • the right side of the front surface 3 of the workpiece 1 is scanned upward at the first imaging angle and the first irradiation angle by the first scanning unit 62 (see 2. (1) in FIG. 12). ).
  • the control unit 53 stops the upward movement of the second scanning unit 72. Then, the control unit 53 causes the second scanning unit 72 to stop the imaging of the second line camera 77 and turn off the second light emitting unit 78. Then, the control unit 53 causes the second scanning unit 72 to stand by at the upper right position of the first side surface 5a.
  • the control unit 53 stops the upward movement of the first scanning unit 62. Then, the control unit 53 causes the first scanning unit 62 to stop the imaging of the first line camera 67 and turn off the first light emitting unit 68. At this time, the second scanning unit 72 is still on standby at the upper right position of the first side surface 5a.
  • the control unit 53 sets the imaging angle of the first line camera 67 to the second imaging with respect to the front 3 from the first imaging angle (90 °) with respect to the front 3 Change to angle (60 °). Further, the control unit 53 changes the irradiation angle of the first light emitting unit 68 from the first irradiation angle (30 °) to the front surface 3 to the second irradiation angle (60 °) to the front surface 3.
  • control unit 53 sets the imaging angle of the second line camera 77 from the first imaging angle (90 °) to the first side surface 5a to the second imaging angle (60 to the first side surface 5a). Change to °). Further, the control unit 53 sets the irradiation angle of the second light emitting unit 78 from the first irradiation angle (30 °) to the first side surface 5a to the second irradiation angle (60 °) to the first side surface 5a. Change to
  • control unit 53 causes first light emitting unit 68 in first scanning unit 62 to light. Then, the control unit 53 causes the first arm unit 61 to move the first scanning unit 62 downward (in the horizontal plane in the earth coordinate system) on the front surface 3 of the work 1 while The front 3 of the work 1 is imaged by the first line camera 67 in the first scan unit 62. Thereby, the right side of the front surface 3 of the workpiece 1 is scanned downward at the second imaging angle and the second irradiation angle by the first scanning unit 62 (FIG. 12, 3. (2)) reference).
  • the control unit 53 turns on the second light emitting unit 78 in the second scanning unit 72 simultaneously with the lighting of the first light emitting unit 68. Then, the control unit 53 causes the second arm unit 71 to move the second scanning unit 72 downward (also downward in the earth coordinate system) on the first side surface 5a of the work 1.
  • the second line camera 77 in the second scanning unit 72 captures an image of the first side surface 5 a of the work 1. As a result, the right side of the first side surface 5a of the workpiece 1 is scanned downward by the second scanning unit 72 at the second imaging angle and the second irradiation angle ("3" in FIG. 12). (See 2 ')).
  • the control unit 53 stops the downward movement of the second scanning unit 72. Let Then, the control unit 53 causes the second scanning unit 72 to stop the imaging of the second line camera 77 and turn off the second light emitting unit 78. At this time, the first scanning unit 62 still scans the front 3 of the workpiece 1. Next, the control unit 53 controls the second arm unit 71 to move the second scanning unit 72 in the left direction.
  • the control unit 53 stops the leftward movement of the second scanning unit 72. Let Next, the control unit 53 turns on the second light emitting unit 78 in the second scanning unit 72.
  • control unit 53 causes the second arm unit 71 to move the second scanning unit 72 upward (in the earth coordinate system, upward) on the first side surface 5 a as a second operation.
  • the second line camera 77 in the scanning unit 72 captures an image of the first side surface 5 a of the work 1.
  • the left side of the first side surface 5a of the workpiece 1 is scanned upward by the second imaging unit 72 by the second scanning unit 72 ("4" in FIG. 12). (See 2 ')).
  • the control unit 53 stops the downward movement of the first scanning unit 62. Then, the control unit 53 causes the first scanning unit 62 to stop the imaging of the first line camera 67 and turn off the first light emitting unit 68. Next, the control unit 53 controls the first arm unit 61 to move the first scanning unit 62 in the left direction.
  • the control unit 53 stops the movement of the first scanning unit 62 in the left direction. Next, the control unit 53 turns on the first light emitting unit 68 in the first scanning unit 62.
  • the control unit 53 causes the first scanning unit 62 to move the first scanning unit 62 upward (in the horizontal direction in the earth coordinate system) on the front surface 3 by the first arm unit 61, while performing the first scanning.
  • the front 3 of the work 1 is imaged by the first line camera 67 in the unit 62.
  • the left side of the front surface 3 of the workpiece 1 is scanned upward at the second imaging angle and the second irradiation angle by the first scanning unit 62 (see 4. (2) in FIG. 12). ).
  • the control unit 53 stops the upward movement of the second scanning unit 72. Then, the control unit 53 causes the second scanning unit 72 to stop the imaging of the second line camera 77 and turn off the second light emitting unit 78.
  • the control unit 53 causes the second scanning unit 72 to be rotated by the second arm unit 71 so that the second scanning unit 72 is formed on the first side surface 5a. Position on the left side. As a result, the scanning direction with respect to the second side surface 5 b in the second scanning unit 72 is changed from the vertical direction to the horizontal direction.
  • control unit 53 sets the imaging angle of the second line camera 77 from the second imaging angle (60 ° with respect to the first side surface 5a to the first imaging angle with respect to the first side surface 5a Change to 90 °). Further, the control unit 53 sets the irradiation angle of the second light emitting unit 78 to the first irradiation angle (30 °) with respect to the first side surface 5a from the second irradiation angle (60 °) with respect to the first side surface 5a. Change to
  • the first scanning unit 62 When the rotation in the second scanning unit 72 and the change in the imaging angle and the irradiation angle are completed, the first scanning unit 62 has reached the upper left position of the front surface 3.
  • the control unit 53 stops the upward movement of the first scanning unit 62. Then, the control unit 53 causes the first scanning unit 62 to stop the imaging of the first line camera 67 and turn off the first light emitting unit 68.
  • the control unit 53 controls the second light emitting unit 78 in the second scanning unit 72. Lights up. Then, the control unit 53 causes the second arm unit 71 to move the second scanning unit 72 in the right direction on the first side surface 5 a of the work 1, while the second scanning unit 72 performs the second operation.
  • the line camera 77 captures an image of the first side surface 5 a of the work 1. Thereby, the first side surface 5a of the work 1 is scanned rightward at the first imaging angle and the first irradiation angle by the second scanning unit 72 (see “5” in FIG. 12 (1 ')reference).
  • the control unit 53 controls the first arm unit 61 to perform the first operation.
  • the scanning unit 62 is rotated to position the first scanning unit 62 at the upper left of the front surface 3.
  • the scanning direction with respect to the front surface 3 in the first scanning unit 62 is changed from the vertical direction to the horizontal direction.
  • control unit 53 changes the imaging angle of the first line camera 67 from the second imaging angle (60 °) to the front 3 to the first imaging angle (90 °) to the front 3 . Further, the control unit 53 changes the irradiation angle of the first light emitting unit 68 from the second irradiation angle (60 °) to the front surface 3 to the first irradiation angle (30 °) to the front surface 3.
  • the second scanning unit 72 still scans the first side surface 5 a in the right direction.
  • the control unit 53 controls the first light emitting unit 68 in the first scanning unit 62. Lights up. Then, the control unit 53 causes the first line camera 67 in the first scanning unit 62 to move the first scanning unit 62 in the right direction on the front surface 3 of the workpiece 1 by the first arm unit 61. The front surface 3 of the work 1 is imaged by this. Accordingly, the upper side of the front surface 3 of the workpiece 1 is scanned rightward at the first imaging angle and the first irradiation angle by the first scanning unit 62 (see 5. (1) in FIG. 12). ).
  • the control unit 53 stops the movement of the second scanning unit 72 in the right direction. . Then, the control unit 53 causes the second scanning unit 72 to stop the imaging of the second line camera 77 and turn off the second light emitting unit 78. At this time, the first scanning unit 62 still scans the front surface 3 of the workpiece 1 in the right direction.
  • control unit 53 sets the imaging angle of second line camera 77 to the first side surface from the first imaging angle (90 °) with respect to first side surface 5a. Change to the second imaging angle (60 °) with respect to 5a. Further, the control unit 53 sets the irradiation angle of the second light emitting unit 78 from the first irradiation angle (30 °) to the first side surface 5a to the second irradiation angle (60 °) to the first side surface 5a. Change to
  • the first scanning unit 62 has reached the upper right position of the front surface 3.
  • the control unit 53 stops the movement of the first scanning unit 62 in the right direction. Then, the control unit 53 causes the first scanning unit 62 to stop the imaging of the first line camera 67 and turn off the first light emitting unit 68.
  • the control unit 53 turns on the second light emitting unit 78 in the second scanning unit 72. Then, the control unit 53 causes the second arm unit 71 to move the second scanning unit 72 in the left direction on the first side surface 5 a of the workpiece 1, and the second scanning unit 72 in the second scanning unit 72.
  • the line camera 77 captures an image of the first side surface 5 a of the work 1. Thereby, the first side surface 5a of the work 1 is scanned leftward at the second imaging angle and the second irradiation angle by the second scanning unit 72 ("6" in FIG. 12 (2 ')reference).
  • the control unit 53 sets the imaging angle of the first line camera 67 as follows.
  • the first imaging angle (90 °) with respect to the front surface 3 is changed to the first imaging angle (90 °) with respect to the second side surface 5 b.
  • the control unit 53 changes the irradiation angle of the first light emitting unit 68 from the first irradiation angle (30 °) to the front surface 3 to the first irradiation angle (30 °) to the second side surface 5 b.
  • the first scanning unit 62 is positioned at the upper right position with respect to the second side surface 5 b (the terms of upper, lower, left, and right in the second side 5 b are illustrated in FIG. 12).
  • the second scanning unit 72 still scans the first side surface 5 a in the left direction.
  • the control unit 53 turns on the first light emitting unit 68 in the first scanning unit 62. Then, the control unit 53 moves the first scanning unit 62 downward (also downward in the earth coordinate system) on the second side surface 5 b of the work 1 by the first arm unit 61. The second line 5 b of the work 1 is imaged by the first line camera 67 in the first scan unit 62. Thus, the right side of the second side surface 5b of the workpiece 1 is scanned downward by the first scanning unit 62 at the first imaging angle and the first irradiation angle (6. 1))).
  • the control unit 53 stops the downward movement of the first scanning unit 62. Let Then, the control unit 53 causes the first scanning unit 62 to stop the imaging of the first line camera 67 and turn off the first light emitting unit 68. Next, the control unit 53 controls the first arm unit 61 to move the first scanning unit 62 in the left direction with respect to the second side surface 5 b.
  • the control unit 53 stops the movement of the second scanning unit 72 in the left direction. Then, the control unit 53 causes the second scanning unit 72 to stop the imaging of the second line camera 77 and turn off the second light emitting unit 78.
  • the control unit 53 stops the leftward movement of the first scanning unit 62. .
  • the control unit 53 turns on the first light emitting unit 68 in the first scanning unit 62.
  • the control unit 53 causes the first scanning unit 62 to move the first scanning unit 62 upward (also upward in the earth coordinate system) on the second side surface 5 b by the first arm unit 61.
  • the second line 5 b of the work 1 is imaged by the first line camera 67 in the unit 62.
  • the left side of the second side surface 5b of the workpiece 1 is scanned upward by the first scanning unit 62 at the first imaging angle and the first irradiation angle (7 in FIG. 12). (See “1").
  • control unit 53 causes the second arm unit 71 to move the second scanning unit 72 to the standby position, and places the second scanning unit 72 in the standby state.
  • the control unit 53 stops the upward movement of the first scanning unit 62. . Then, the control unit 53 causes the first scanning unit 62 to stop the imaging of the first line camera 67 and turn off the first light emitting unit 68.
  • the control unit 53 sets the imaging angle of the first line camera 67 to the first imaging angle (90 °) with respect to the second side surface 5b with respect to the front 3 Change to an imaging angle of 1 (90 °). Further, the control unit 53 changes the irradiation angle of the first light emitting unit 68 from the first irradiation angle (60 °) to the second side surface 5 b to the first irradiation angle (60 °) to the front surface 3 . At this time, the first scanning unit 62 is positioned at the lower right position with respect to the front surface 3 (refer to FIG. 12 for the terms top, bottom, left, and right in the front surface 3).
  • the control unit 53 turns on the first light emitting unit 68 in the first scanning unit 62. Then, the control unit 53 causes the first line camera 67 in the first scanning unit 62 to move the first scanning unit 62 in the left direction on the front surface 3 of the work 1 by the first arm unit 61. The front surface 3 of the work 1 is imaged by this. Accordingly, the lower side of the front surface 3 of the workpiece 1 is scanned leftward at the first imaging angle and the first irradiation angle by the first scanning unit 62 (see 8. (1) in FIG. 12). ).
  • the control unit 53 stops the movement of the first scanning unit 62 in the left direction. Then, the control unit 53 causes the first scanning unit 62 to stop the imaging of the first line camera 67 and turn off the first light emitting unit 68.
  • control unit 53 sets the imaging angle of first line camera 67 to the second imaging with respect to front 3 from the first imaging angle (90 °) with respect to front 3. Change to angle (60 °). Further, the control unit 53 changes the irradiation angle of the first light emitting unit 68 from the first irradiation angle (30 °) to the front surface 3 to the second irradiation angle (60 °) to the front surface 3.
  • control unit 53 turns on first light emitting unit 68 in first scanning unit 62. Then, the control unit 53 causes the first line camera 67 in the first scanning unit 62 to move the first scanning unit 62 in the right direction on the front surface 3 of the workpiece 1 by the first arm unit 61. The front surface 3 of the work 1 is imaged by this. Accordingly, the lower side of the front surface 3 of the workpiece 1 is scanned rightward at the second imaging angle and the second irradiation angle by the first scanning unit 62 (see 9. (2) in FIG. 12). ).
  • the control unit 53 stops the movement of the first scanning unit 62 in the right direction. Then, the control unit 53 causes the first scanning unit 62 to stop the imaging of the first line camera 67 and turn off the first light emitting unit 68.
  • the control unit 53 sets the imaging angle of the first line camera 67 from the second imaging angle (60 °) to the front surface 3 to the second side surface 5 b. Change to the second imaging angle (60 °). Further, the control unit 53 changes the irradiation angle of the first light emitting unit 68 from the second irradiation angle (60 °) to the front surface 3 to the second irradiation angle (60 °) to the second side surface 5 b. . At this time, the first scanning unit 62 is positioned at the upper left position with respect to the second side surface 5 b (the terms of upper, lower, left, and right in the second side 5 b are illustrated in FIG. 12).
  • control unit 53 turns on first light emitting unit 68 in first scanning unit 62. Then, the control unit 53 moves the first scanning unit 62 downward (also downward in the earth coordinate system) on the second side surface 5 b of the work 1 by the first arm unit 61. The second line 5 b of the work 1 is imaged by the first line camera 67 in the first scan unit 62. Thus, the left side of the second side surface 5b of the workpiece 1 is scanned downward by the first imaging unit 62 at the second imaging angle and the second irradiation angle (10. (FIG. 12 (10. ( 2))).
  • the control unit 53 stops the downward movement of the first scanning unit 62. Let Then, the control unit 53 causes the first scanning unit 62 to stop the imaging of the first line camera 67 and turn off the first light emitting unit 68. Next, the control unit 53 controls the first arm unit 61 to move the first scanning unit 62 in the right direction with respect to the second side surface 5 b.
  • the control unit 53 causes the first scanning unit 62 to move in the right direction. Stop it. Next, the control unit 53 turns on the first light emitting unit 68 in the first scanning unit 62.
  • the control unit 53 causes the first scanning unit 62 to move the first scanning unit 62 upward (also upward in the earth coordinate system) on the second side surface 5 b by the first arm unit 61.
  • the second line 5 b of the work 1 is imaged by the first line camera 67 in the unit 62.
  • the right side of the first side surface 5a of the work 1 is scanned upward by the first scanning unit 62 at the second imaging angle and the second irradiation angle (11. in FIG. 12). (See 2 ").
  • the control unit 53 stops the upward movement of the first scanning unit 62. Let Then, the control unit 53 causes the first scanning unit 62 to stop the imaging of the first line camera 67 and turn off the first light emitting unit 68.
  • control unit 53 sets the imaging angle of first line camera 67 to front surface 3 from the second imaging angle (60 °) with respect to second side surface 5 b. Change to the second imaging angle (60 °). Further, the control unit 53 changes the irradiation angle of the first light emitting unit 68 from the second irradiation angle (60 °) to the second side surface 5 b to the second irradiation angle (60 °) to the front surface 3 . At this time, the first scanning unit 62 is positioned at the upper right position with respect to the front surface 3 (refer to FIG. 12 for the terms top, bottom, left, and right in the front surface 3).
  • control unit 53 causes first light emitting unit 68 in first scanning unit 62 to light. Then, the control unit 53 causes the first line camera 67 in the first scanning unit 62 to move the first scanning unit 62 in the left direction on the front surface 3 of the work 1 by the first arm unit 61. The front surface 3 of the work 1 is imaged by this. Thereby, the upper side of the front surface 3 of the workpiece 1 is scanned leftward at the second imaging angle and the second irradiation angle by the first scanning unit 62 (see 12. (2) in FIG. 12). ).
  • the control unit 53 stops the leftward movement of the first scanning unit 62. Then, the control unit 53 causes the first scanning unit 62 to stop the imaging of the first line camera 67 and turn off the first light emitting unit 68.
  • control unit 53 controls the second arm unit 71 to position the second scanning unit 72 on the left side of the second side surface 5 b (up, down, left, and the like in the second side surface 5 b). For terms with the right, see Figure 12). Then, the control unit 53 sets the imaging angle of the second line camera 77 to the first imaging angle (90 °) with respect to the second side surface 5 b, and the irradiation angle of the second light emitting unit 78 is the second It sets to the 1st irradiation angle (30 degrees) with respect to the side 5b of.
  • control unit 53 turns on the second light emitting unit 78 in the second scanning unit 72. Then, the control unit 53 causes the second arm unit 71 to move the second scanning unit 72 in the right direction on the second side surface 5 b of the workpiece 1, while the second scanning unit 72 performs the second operation.
  • the second side surface 5 b of the work 1 is imaged by the line camera 77. Thereby, the second side surface 5b of the work 1 is scanned rightward at the first imaging angle and the first irradiation angle by the second scanning unit 72 (see "7" in FIG. 12 (1 ”)reference).
  • the control unit 53 causes the second scanning unit 72 to move in the right direction. Stop it. Then, the control unit 53 causes the second scanning unit 72 to stop the imaging of the second line camera 77 and turn off the second light emitting unit 78.
  • control unit 53 causes the first arm unit 61 to move the first scanning unit 62 to the standby position, and places the first scanning unit 62 in the standby state.
  • the control unit 53 sets the imaging angle of the second line camera 77 to a second imaging angle (90 °) with respect to the second side surface 5b. It changes to the 2nd imaging angle (60 degrees) to side 5b. Further, the control unit 53 sets the irradiation angle of the second light emitting unit 78 from the first irradiation angle (30 °) to the second side surface 5b to the second irradiation angle (60 °) to the second side surface 5b. Change to
  • control unit 53 turns on second light emitting unit 78 in second scanning unit 72. Then, the control unit 53 causes the second arm 71 to move the second scanning unit 72 in the left direction on the second side surface 5 b of the workpiece 1, and the second scanning unit 72 in the second scanning unit 72.
  • the second side surface 5 b of the work 1 is imaged by the line camera 77. Thereby, the second side face 5b of the workpiece 1 is scanned leftward at the second imaging angle and the second irradiation angle by the second scanning unit 72 (see “8" in FIG. 12 (2 ”)reference).
  • control unit 53 stops the movement of second scanning unit 72 in the left direction. Let Then, the control unit 53 causes the second scanning unit 72 to stop the imaging of the second line camera 77 and turn off the second light emitting unit 78.
  • control unit 53 causes second arm unit 71 to move second scanning unit 72 to the standby position, and causes second scanning unit 72 to enter the standby state. Do.
  • the work 1 is turned upside down by the first transfer device 80, and placed on the mounting table 52 of the second appearance inspection device 50B such that the back surface 4 faces upward. Then, the back surface 4, the third side surface 5 c and the fourth side surface 5 d of the work 1 are inspected by the second appearance inspection apparatus 50 B in the same flow as the above-described flow.
  • first scanning unit 62 and the second scanning unit 72 Complete the scanning of the three surfaces in the shortest possible time by the first scanning unit 62 and the second scanning unit 72 (shortening of the inspection time). 2) Inspecting the appearance of the workpiece 1 as accurately as possible by the first scanning unit 62 and the second scanning unit 72. 3) The first scanning unit 62 and the second scanning unit 72 do not collide with each other. 4) Avoid light interference in which the light from the first light emitting unit 68 in the first scanning unit 62 adversely affects the imaging of the second line camera 77 in the second scanning unit 72. Similarly, light interference by the light from the second light emitting unit 78 in the second scanning unit 72 may not adversely affect the imaging of the first line camera 67 in the first scanning unit 62. .
  • control unit 53 simultaneously scans the front surface 3 of the workpiece 1 by the first scanning unit 62, and simultaneously performs the first scanning of the workpiece 1 by the second scanning unit 72.
  • the side surface 5a is scanned.
  • control unit 53 cooperates with the first scanning unit 62 and the second scanning unit 72 to sharely scan the second side surface 5 b.
  • control unit 53 causes the first scanning unit 62 to scan the front surface 3 of the workpiece 1 a plurality of times at different imaging angles and different irradiation angles. Moreover, the control unit 53 causes the second scanning unit 72 to scan the first side surface 5 a of the workpiece 1 a plurality of times at different imaging angles and different irradiation angles.
  • control unit 53 scans the front surface 3 of the work 1 by the first scanning unit 62 a plurality of times in different scanning directions (vertical direction, horizontal direction) I am doing it. Similarly, the control unit 53 causes the second scanning unit 72 to scan the first side surface 5 a of the workpiece 1 a plurality of times in different scanning directions.
  • the share of the first scanning unit 62 and the second scanning unit 72 is divided according to the scanning direction.
  • the control unit 53 causes the first scanning unit 62 to scan the second side surface 5 b in the vertical direction
  • the second scanning unit 72 causes the second side surface 5 d to It is made to scan in the direction.
  • FIG. (1) 6. (1 "), 7. (1"), 8. Focus on the movement of the first scanning unit 62 in (1) (corresponding to FIG. 15 (N) to FIG. 17 (Y)).
  • the first scanning unit 62 scans the upper side of the front surface 3 in the right direction, and reaches the upper right position of the front surface 3 (5. (1) in FIG. 12).
  • a second side surface 5b is present beyond the upper right position of the front surface 3, and the first scanning unit 62 scans the right side of the first side surface 5a downward in the same flow. (6 (1) in FIG. 12).
  • the first scanning unit 62 scans the left side of the second side surface 5b upward to reach the upper left position of the second side surface 5b (7 (1 ′ ′ in FIG. 12)).
  • the front 3 is present beyond the upper left position of the second side surface 5b, and the first scanning unit 62 scans the lower side of the front 3 in the left direction in the same flow ((1) 8. (1) in FIG.
  • control unit 53 causes the first scanning unit 62 to scan the front surface 3 of the workpiece 1 in the left-right direction and the first side surface 5 a of the workpiece 1 (in the scanning direction
  • the inspection time is shortened by performing scanning in the vertical direction on the adjacent surface as a series of flows.
  • control unit 53 controls the movement of scanning by the first scanning unit 62 and the second scanning unit 72 so that light interference does not occur.
  • control unit 53 controls the first scanning unit 62 and the second scanning unit 72 so that the distance between the first scanning unit 62 and the second scanning unit 72 performing scanning does not approach as much as possible. Control the movement of
  • FIGS. 13A and 14G when the first scanning unit 62 is moved downward on the front surface 3 of the workpiece 1, the second scanning unit 72 is configured to It is moved downward on the side surface 5 a of 1. Thereby, the distance between the first scanning unit 62 and the second scanning unit 72 is maintained, and light interference is prevented.
  • the control unit 53 turns on / off the first light emitting unit 68 and the second light emitting unit 78.
  • the timing, the imaging start of the first line camera 67 and the second line camera 77, and the imaging end timing (scanning start, end timing) are controlled.
  • the distance between the first scanning unit 62 and the second scanning unit 72 is equal to or less than a predetermined distance.
  • the second light emitting unit 78 The light is emitted and imaging of the second line camera 77 is started. This prevents light interference.
  • the distance between the first scanning unit 62 and the second scanning unit 72 is equal to or less than a predetermined distance.
  • the first light emitting unit The light 68 is emitted to start imaging of the first line camera 67. This prevents light interference.
  • the distance between the first scanning unit 62 and the second scanning unit 72 is equal to or less than a predetermined distance.
  • the second light emitting unit 78 emits light at the timing when the first scanning unit 62 reaches the right side of the front 3 and the imaging of the first line camera 67 is finished and the first light emitting unit 68 is turned off. Then, imaging of the second line camera 77 is started. This prevents light interference.
  • the second scanning unit 72 is in a state where the second light emitting unit 78 is erected (the longitudinal direction of the first light emitting unit 68 is The first side surface 5a is scanned in the state of being in the vertical direction of the earth coordinate system). Further, referring to FIG. 18 (J ′) to FIG. 19 (N ′), second scanning unit 72 scans second side surface 5 b in a state where second light emitting unit 78 is erected. .
  • the width in the vertical direction of the first side surface 5 a and the second side surface 5 b is smaller than the length of the second light emitting portion 78. Therefore, when light is irradiated to the side surface 5 in a state where the second light emitting portion 78 is erected, a state in which the second light emitting portion 78 is laid down (the longitudinal direction of the second light emitting portion 78 is the earth In the state in which the coordinate system is in the horizontal direction), the amount of light leaking to the front surface 3 is larger than in the case where the side surface 5 is irradiated with light.
  • the second light emitting unit 78 in the second scanning unit 72 is the first scanning unit more than in the state in which the second light emitting unit 78 is laid down.
  • Light interference that adversely affects the imaging by the first line camera 67 at 62 is likely to occur.
  • the side surface 5 is scanned by the second scanning unit 72 in a state where the second light emitting unit 78 is erected.
  • the first scanning unit 62 does not scan the front surface 3.
  • FIG. 14L to FIG. 15O when the side surface 5 is scanned by the second scanning unit 72 in a state where the second light emitting unit 78 is erected, the first light
  • the scanning unit 62 may scan the front surface 3, but in this case, at least the distance between the first scanning unit 62 and the second scanning unit 72 is maintained at a certain distance or more.
  • the second light emitting unit 78 may be configured to be able to partially light. In this case, in the erected state, the second light emitting unit 78 partially illuminates a portion corresponding to the width of the side surface 5 in the vertical direction, and turns off the other portions. This prevents light interference.
  • first light emitting unit 68 and the second light emitting unit 78 may be configured to be capable of emitting light in different wavelength regions. Such methods can also prevent light interference.
  • the arm unit 21 moves the hand unit 31 in a state of holding the work 1 to convey the work 1, and the sound detection unit 35 The sound of the work 1 is detected when the paper is being transported. Then, based on the detected sound signal, the abnormal noise generated from the work 1 is inspected.
  • the abnormal noise inspection device 10 has two functions of a function as a conveyance device for conveying the work 1 and a function as a abnormal noise inspection device for inspecting abnormal noise generated from the work 1 ing. Therefore, in the abnormal noise inspection device 10, abnormal noise of the workpiece 1 can be inspected while the workpiece 1 is being transported, and the abnormal noise inspection of the workpiece 1 can be performed efficiently. Furthermore, in the abnormal noise inspection device 10 according to the present embodiment, the cost can be reduced as compared to the case where the transport device and the abnormal noise inspection device are separately prepared.
  • the hand unit 31 in the state of holding the work 1 is moved clockwise, and the work 1 is conveyed to the seal sticking device 40.
  • the hand unit 31 holding the work 1 is moved counterclockwise, and the work 1 is transported from the seal sticking apparatus 40 to the first appearance inspection apparatus 50A.
  • the sound detection unit 35 detects and detects a sound generated from the work 1 according to the movement of the work 1 clockwise and a sound generated from the work 1 according to the movement counterclockwise of the work 1 Based on the received sound signal, abnormal noise generated from the work 1 is inspected.
  • the workpiece 1 is conveyed clockwise and counterclockwise, and the abnormal noise is appropriately inspected by inspecting the abnormal noise generated from the workpiece 1 based on the sound generated from the workpiece 1 at that time. be able to.
  • the direction in which the work 1 is moved may be upward or downward in the earth coordinate system.
  • the seal sticking device 40 can perform the process on the work 1, so that The posture (the posture of the hand unit 31) is changed.
  • the work 1 is transported from the seal sticking apparatus 40 to the first appearance inspection apparatus 50A, the work 1 is placed to place the work 1 on the mounting table 52 of the first appearance inspection apparatus 50A. The posture (the posture of the hand unit 31) is changed.
  • a sound generated from the work 1 in accordance with a change in the posture of the work 1 is detected by the sound detection unit 35, and abnormal noise generated from the work 1 is inspected based on the detected sound signal.
  • the posture of the work 1 is changed while the work 1 is being transported, and the abnormal noise is appropriately determined by examining the abnormal noise generated from the work 1 based on the sound generated from the workpiece 1 at that time. It can be inspected.
  • the sound detection unit 35 is provided in the hand unit 31. Thereby, the sound generated from the work 1 can be properly detected while the work 1 is being transported.
  • the sound detection unit 35 may be provided in another portion (arm unit 21 or the like) of the robot arm unit 12.
  • the sound detection unit 35 is configured to be in contact with the work 1 to detect the sound, and the sound detection unit 35 is configured by an AE sensor ing. Thereby, abnormal noise generated from the work 1 can be detected more appropriately.
  • the sound detection unit 35 may be configured to detect the sound without touching the work 1.
  • the sound detection unit 35 may be configured by a microphone. Even if the sound detection unit 35 is configured as such, it is possible to appropriately detect abnormal noise generated from the work 1.
  • the frequency band of the abnormal sound to be detected may be the same frequency band as the frequency band of the surrounding environmental sound.
  • the sound detection unit 35 of the type that detects the sound without touching the work 1 the abnormal sound may not be properly detected due to the surrounding environmental sound. Therefore, for example, in such a case, a sound detection unit 35 of a type that contacts the work 1 to detect sound may be used.
  • the abnormal noise generated from the work 1 is inspected based on the signal of the specific frequency band (frequency band corresponding to the abnormal noise) in the sound signal detected by the sound detection unit 35. . Thereby, abnormal noise can be inspected appropriately.
  • the abnormal noise inspection device 10 in the abnormal noise inspection device 10, a signal of a specific frequency band (a frequency band corresponding to abnormal noise) is integrated, and is generated from the work 1 based on the integral value. Abnormal noise is examined. As a result, since the average magnitude of the abnormal noise can be determined in the frequency band corresponding to the abnormal noise, the abnormal noise can be inspected more appropriately.
  • the appearance inspection apparatus 50 In the appearance inspection apparatus 50 according to the present embodiment, when the front surface 3 (back surface 4) of the workpiece is scanned by the first scanning unit 62, the second scanning unit 72 simultaneously performs the first side surface 5a (first The side 5c) of 3 is scanned. Thereby, in the appearance inspection apparatus according to the present embodiment, the appearance inspection of the work 1 can be completed efficiently and quickly.
  • one appearance inspection apparatus 50 includes two robot arm units 60 and 70, for example, one appearance inspection apparatus 50 includes one robot arm unit.
  • the number of appearance inspection apparatuses 50 can be reduced compared to the case. This can reduce costs.
  • the installation space of the inspection system 100 can be reduced, and the degree of freedom in space management of the production area is increased.
  • the first scanning unit 62 includes the first light emitting unit 68
  • the second scanning unit 72 includes the second light emitting unit 78. ing.
  • the imaging angle at which the first line camera 67 captures the front 3 (rear surface 4) of the work 1 in the first scanning unit 62 is adjusted, and The irradiation angle at which the light emitting unit 68 irradiates light to the front surface 3 (rear surface 4) of the work 1 is adjusted.
  • the imaging angle at which the second line camera 77 captures the first side 5a (third side 5c) of the workpiece 1 is adjusted.
  • the imaging angle at which the second line camera 77 captures the first side 5a (third side 5c) of the workpiece 1 is The irradiation angle at which the second light emitting unit 78 irradiates the light to the first side surface 5 a (third side surface 5 c) of the workpiece 1 is adjusted.
  • the front surface 3 (back surface 4) of the workpiece 1 is scanned by the first scanning unit 62 a plurality of times at different imaging angles and different irradiation angles. Thereby, the appearance of the work 1 can be inspected more accurately.
  • the second scanning unit 72 causes the first side surface 5a (third side surface 5c) of the workpiece 1 to be multiple times at different imaging angles and different irradiation angles. Is scanned across Thereby, the appearance of the work 1 can be inspected more accurately.
  • the front surface 3 (rear surface 4) of the workpiece 1 is scanned a plurality of times in different scanning directions by the first scanning unit 62. Thereby, the appearance of the work 1 can be inspected more accurately.
  • the second side scan unit 72 scans the first side surface 5a (third side surface 5c) of the workpiece 1 a plurality of times in different scanning directions. Thereby, the appearance of the work 1 can be inspected more accurately.
  • the second side surface 5 b (the fourth side surface 5 d) is cooperatively scanned by the first scanning unit 62 and the second scanning unit 72. This can further shorten the inspection time in the appearance inspection.
  • the second scanning unit 62 scans the second side surface 5 b (fourth side surface 5 d) in the vertical direction, and the second scanning unit 72 detects the second scanning unit 72.
  • the side surface 5b (fourth side surface 5d) is scanned in the left-right direction. This can further shorten the inspection time in the appearance inspection.
  • the share of the first scanning unit 62 and the second scanning unit 72 may be divided according to the imaging angle and the irradiation angle. .
  • light interference from which the light from the first light emitting unit 68 interferes with the imaging of the second line camera 77 and the light from the second light emitting unit 78 The movement of scanning by the first scanning unit 62 and the second scanning unit 72 is controlled so that light interference does not occur in which light interferes with the imaging of the first line camera 67. Thereby, light interference can be appropriately prevented.
  • the on / off timing of the first light emitting unit 68 and the second light emitting unit 78 is controlled so as not to cause light interference. Thereby, light interference can be more appropriately prevented.
  • the imaging start and imaging end timings of the first line camera 67 and the second line camera 77 are controlled so as not to cause light interference. Thereby, light interference can be more appropriately prevented.
  • the front surface 3 (rear surface 4) in which the first scanning unit 62 is in charge of scanning
  • the side surface 5c) of 3 and the second side surface 5b (fourth side surface 5d) in which the first scanning unit 62 and the second scanning unit 72 jointly take charge of scanning are mutually adjacent surfaces.
  • the first appearance inspection apparatus 50A and the second appearance inspection apparatus 50B are respectively unitized.
  • the appearance inspection apparatus 50 it is possible to appropriately cope with fluctuations in the amount of production of the work 1 in the production line (increase and decrease in the amount of production).
  • the appearance inspection apparatus 50 it is possible to appropriately cope with fluctuations in the production amount in fractional multiples such that the production amount of the work 1 is 1.3 times or 1.5 times. Can.
  • another visual inspection device 50 may be arranged in series behind the first visual inspection device 50A and the second visual inspection device 50B.
  • the three appearance inspection apparatuses 50 may inspect two of the six surfaces of the work 1.
  • the additional appearance inspection apparatus 50 may be arranged in parallel to the first appearance inspection apparatus 50A and the second appearance inspection apparatus 50B.
  • the number of appearance inspection devices 50 to be added is not limited to one.
  • one of the first appearance inspection device 50A and the second appearance inspection device 50B may be omitted. In this case, one appearance inspection apparatus 50 inspects all six sides of the work 1.
  • the work 1 is a stationary game machine
  • the work 1 may be various electronic devices other than the stationary game machine, various automobile parts, and the like.
  • the work 1 may be any inspection object (may be thin like a substrate) as long as it has a multi-sided shape.
  • a first robot arm unit including a first arm unit, a first line camera, and a first scanning unit provided in the first arm unit;
  • a second robot arm unit including a second arm unit, a second line camera, and a second scanning unit provided on the second arm unit;
  • the first scanning unit further includes a first light emitting unit which is moved in the scanning direction together with the first line camera, and emits light to a place where the first line camera performs imaging. apparatus.
  • the control unit adjusts an imaging angle at which the first line camera captures the first surface, and adjusts an irradiation angle at which the first light emitting unit emits light to the first surface Appearance inspection device.
  • the control unit causes the first scanning unit to scan the first surface a plurality of times at different imaging angles and different irradiation angles.
  • the second scanning unit further includes a second light emitting unit which is moved in the scanning direction together with the second line camera and emits light to a place where the second line camera performs imaging. apparatus.
  • the control unit adjusts an imaging angle at which the second line camera captures the second surface, and adjusts an irradiation angle at which the second light emitting unit emits light to the second surface. Appearance inspection device.
  • the control unit causes the second scanning unit to scan the second surface a plurality of times at different imaging angles and different irradiation angles.
  • the control unit causes the first scanning unit to scan the first surface a plurality of times in different scanning directions.
  • the control unit causes the second scanning unit to scan the second surface a plurality of times in different scanning directions.
  • the work further has a third surface, The control unit causes the first scanning unit and the second scanning unit to cooperatively scan the third surface.
  • the control unit causes the first scanning unit to scan the third surface in a predetermined scanning direction, and the second scanning unit performs scanning that the third surface is different from the predetermined scanning direction Appearance inspection device that scans in the direction.
  • the control unit is configured to cause light interference that light from the first light emitting unit interferes with imaging of the second line camera, and light from the second light emitting unit to be the first line camera And a control unit configured to control movement of scanning by the first scanning unit and the second scanning unit so as not to cause light interference that interferes with imaging of the object.
  • the visual inspection apparatus controls the on / off timing of the first light emitting unit and the second light emitting unit so that the light interference does not occur. Appearance inspection apparatus.
  • the visual inspection apparatus according to (12) or (13) above, The appearance inspection device, wherein the control unit controls imaging start timing and imaging end timing by the first line camera and the second line camera such that the light interference does not occur.
  • the visual inspection apparatus according to any one of (1) to (14) above, The first surface and the second surface are surfaces adjacent to each other.
  • the visual inspection apparatus according to (10) above, The first surface, the second surface, and the third surface are surfaces adjacent to each other.
  • a first scan of the first robot arm on the first surface of a work having a first surface and a second surface by the first arm of the first robot arm Causing the first line camera of the first scanning unit to image the first surface while moving the unit in the scanning direction, and causing the first scanning unit to scan the first surface;
  • the second arm of the second robot arm causes the second robot arm to generate the second robot arm on the second surface.
  • a first scan of the first robot arm on the first surface of a work having a first surface and a second surface by the first arm of the first robot arm Causing the first line camera of the first scanning unit to image the first surface while moving the unit in the scanning direction, and causing the first scanning unit to scan the first surface;
  • the second arm of the second robot arm causes the second robot arm to generate the second robot arm on the second surface.
  • Causing the second line camera of the second scanning unit to image the second surface while moving the scanning unit in the scanning direction, and causing the second scanning unit to scan the second surface A program that causes a computer to function as a control unit.
  • a first scan of the first robot arm on the first surface of a work having a first surface and a second surface by the first arm of the first robot arm Causing the first line camera of the first scanning unit to image the first surface while moving the unit in the scanning direction, and causing the first scanning unit to scan the first surface;
  • the second arm of the second robot arm causes the second robot arm to generate the second robot arm on the second surface.
  • a method of manufacturing a workpiece which determines the quality of the workpiece based on an image captured by a first line camera and an image captured by a second line camera.

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Abstract

La présente invention concerne un dispositif d'inspection d'apparence pourvu d'un premier bras de robot, d'un second bras de robot et d'une unité de commande. Le premier bras de robot a un premier bras et une première unité de balayage qui comprend une première caméra en ligne et est disposée sur le premier bras. Le second bras de robot a un second bras et une seconde unité de balayage qui comprend une seconde caméra en ligne et est disposée sur le second bras. L'unité de commande, tout en amenant le premier bras à déplacer la première unité de balayage dans la direction de balayage sur la première surface d'une pièce à travailler ayant une première surface et une seconde surface, amène la première caméra en ligne à former une image de la première surface et la première unité de balayage à balayer la première surface et, lorsque la première surface est balayée par la première unité de balayage, tout en amenant le second bras à déplacer la seconde unité de balayage dans la direction de balayage sur la seconde surface, amène la seconde caméra en ligne à former une image de la seconde surface et la seconde unité de balayage à balayer la seconde surface.<u> <b/> </u> <u> <b/> </u>
PCT/JP2018/045789 2017-12-26 2018-12-13 Dispositif d'inspection d'apparence, procédé d'inspection d'apparence, programme et procédé de fabrication de pièce WO2019131155A1 (fr)

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CN201880082194.0A CN111492231B (zh) 2017-12-26 2018-12-13 外观检查设备、外观检查方法、程序和工件制造方法
JP2019562965A JP7415560B2 (ja) 2017-12-26 2018-12-13 外観検査装置、外観検査方法、プログラム及びワークの製造方法

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JP2021050940A (ja) * 2019-09-20 2021-04-01 株式会社Ｓｃｒｅｅｎホールディングス 撮像装置
CN112729251A (zh) * 2020-12-23 2021-04-30 上海微电机研究所(中国电子科技集团公司第二十一研究所) 一种柔性扫描机械臂***及柔性扫描方法
JP2023036167A (ja) * 2021-09-02 2023-03-14 株式会社ジーテクト 外観検査装置
JP7436781B2 (ja) 2019-09-25 2024-02-22 キョーラク株式会社 検査システム
JP7486715B1 (ja) 2023-01-27 2024-05-20 ダイトロン株式会社 外観検査装置及び外観検査方法

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JP7436781B2 (ja) 2019-09-25 2024-02-22 キョーラク株式会社 検査システム
CN112729251A (zh) * 2020-12-23 2021-04-30 上海微电机研究所(中国电子科技集团公司第二十一研究所) 一种柔性扫描机械臂***及柔性扫描方法
JP2023036167A (ja) * 2021-09-02 2023-03-14 株式会社ジーテクト 外観検査装置
JP7316332B2 (ja) 2021-09-02 2023-07-27 株式会社ジーテクト 外観検査装置
JP7486715B1 (ja) 2023-01-27 2024-05-20 ダイトロン株式会社 外観検査装置及び外観検査方法

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TW201930826A (zh) 2019-08-01

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