WO2012008321A1 - 産業用ロボット、産業用ロボットの制御方法および産業用ロボットの教示方法 - Google Patents
産業用ロボット、産業用ロボットの制御方法および産業用ロボットの教示方法 Download PDFInfo
- Publication number
- WO2012008321A1 WO2012008321A1 PCT/JP2011/065195 JP2011065195W WO2012008321A1 WO 2012008321 A1 WO2012008321 A1 WO 2012008321A1 JP 2011065195 W JP2011065195 W JP 2011065195W WO 2012008321 A1 WO2012008321 A1 WO 2012008321A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- hand
- arm
- center
- pulley
- industrial robot
- Prior art date
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
- B25J11/0095—Manipulators transporting wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/06—Programme-controlled manipulators characterised by multi-articulated arms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/102—Gears specially adapted therefor, e.g. reduction gears
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
Definitions
- the present invention relates to an industrial robot that transports a predetermined transport object.
- the present invention also relates to a method for controlling and teaching such an industrial robot.
- Patent Document 1 an industrial robot that transports a glass substrate for a liquid crystal display is known (for example, see Patent Document 1).
- the industrial robot described in Patent Literature 1 includes a hand on which a glass substrate is mounted, an arm to which the hand is rotatably attached, and a main body to which the arm is rotatably attached.
- the arm is composed of a first arm and a second arm.
- the main body is placed on a gantry and can move linearly in a predetermined direction.
- the arm expands and contracts so that the hand moves in a straight line with a predetermined direction.
- this industrial robot usually moves the hand in a direction orthogonal to the moving direction of the main body with respect to the gantry, and carries out the glass substrate disposed in the cassette.
- a sensor for detecting the inclination of the glass substrate arranged in the cassette in the horizontal plane is attached to the hand.
- the industrial robot is configured such that the glass substrate that is unloaded from the cassette and loaded into a predetermined loading position in the moving direction of the main body.
- the main body is moved in a predetermined direction with respect to the gantry and the arm is rotated by a predetermined amount with respect to the main body so that the shift is suppressed and the inclination of the glass substrate is corrected.
- the arm is expanded and contracted, the glass substrate is taken out from the cassette, the main body is moved in the reverse direction, and the arm is turned in the reverse direction to correct the tilt and the positional deviation. Carry in to the loading position.
- an object of the present invention is to provide an industrial robot capable of correcting the inclination while suppressing the positional deviation of the transported object to be transported regardless of the moving direction of the hand when the transported object is unloaded. It is to provide.
- an industrial robot of the present invention includes a hand on which an object to be transported is mounted, a second arm portion that rotatably supports the hand on its distal end side, and a base end of the second arm portion.
- An arm having at least two arm parts, a first arm part that rotatably supports the side at its tip side, a first drive motor for extending and retracting the arm, and a hand relative to the second arm part
- a power transmission mechanism for transmitting the power of the first drive motor and the power of the second drive motor.
- the power transmission mechanism has a hand in a predetermined direction. The power of the first drive motor is transmitted to the arm and the hand so as to move substantially linearly in a state of facing, and the hand of the second drive motor is rotated relative to the second arm portion. Specially transmitted power to the hand To.
- the industrial robot of the present invention is configured to transmit a second drive motor for rotating the hand relative to the second arm portion, the power of the first drive motor and the power of the second drive motor.
- a power transmission mechanism, and the power transmission mechanism transmits the power of the second drive motor to the hand so that the hand rotates relative to the second arm portion. Therefore, in the present invention, the hand can be freely rotated relative to the second arm portion regardless of the direction of movement of the hand when carrying out the object to be conveyed.
- the hand when the inclination of the conveyance object is detected regardless of the moving direction of the hand when the conveyance object is carried out, the hand is rotated relative to the second arm unit, for example, If the main body of the industrial robot is rotated, it is possible to correct the inclination while suppressing the displacement of the object to be carried.
- the present invention even if there is no moving mechanism for moving the main body of the industrial robot in a predetermined direction, it is possible to correct the inclination while suppressing the displacement of the object to be carried. . Therefore, in the present invention, it is possible to reduce the size of the industrial robot even if it is possible to correct the inclination while suppressing the positional deviation of the conveyed object to be carried. Furthermore, in the present invention, compared to the case where the main body of the industrial robot is moved in a predetermined direction when correcting the inclination while suppressing the positional deviation of the object to be carried in, as in the prior art, It is possible to shorten the tact time when correcting the tilt of the object.
- the power transmission mechanism stops the second drive motor in order to transmit the power of the first drive motor to the arm and the hand so that the hand moves substantially linearly in a state where the hand faces a predetermined direction.
- the hand stops after moving a predetermined amount in a substantially straight line while facing a predetermined direction. That is, if the second drive motor is in a stopped state, even if the operating industrial robot is stopped in an emergency, the hand is kept in a certain direction, so the industrial robot at the time of an emergency stop is maintained. It becomes possible to suppress the disorder of the posture. Therefore, according to the present invention, even if the industrial robot is emergency stopped, it is possible to prevent the hand from colliding with an unexpected part of the peripheral device of the industrial robot.
- the second drive motor is attached to the first arm portion, and the power transmission mechanism is arranged at the connecting portion between the first arm portion and the second arm portion to transmit the power of the first drive motor.
- the output portion of the second reduction gear is rotatably held at the distal end side of the first arm portion and is fixed to the proximal end side of the second arm portion, and the input portion of the second reduction gear.
- the output part of the third reducer is rotatably held at the distal end side of the first arm part
- the input part of the third reducer is 3 It is rotatably held at the output part of the reduction gear.
- the input part and output part of a 2nd reduction gear are formed in a substantially cylindrical shape, the input part of a 2nd reduction gear is arrange
- the second drive motor is attached to the second arm portion, and the power transmission mechanism is arranged at the connecting portion between the first arm portion and the second arm portion to transmit the power of the first drive motor.
- a sixth pulley fixed to the rotary shaft of the second drive motor, a first pulley, and a first pulley A first belt to be stretched and the pulley, it is preferable to provide a second belt to be stretched and the second pulley and a fourth pulley, and a third belt to be stretched and fifth pulley and the sixth pulley.
- the output portion of the second reduction gear is rotatably held at the distal end side of the first arm portion and is fixed to the proximal end side of the second arm portion, and the input portion of the second reduction gear.
- the output portion of the fourth reducer is rotatably held at the distal end side of the second arm portion and fixed to the proximal end side of the hand,
- the input part of the fourth reduction gear is rotatably held by the output part of the fourth reduction gear
- the internal gear is rotatably held by the second arm part.
- the second drive motor is attached to the second arm portion, and the power transmission mechanism is arranged at the connecting portion between the first arm portion and the second arm portion to transmit the power of the first drive motor.
- a second bevel gear that meshes with the first bevel gear and the first bevel gear and is disposed opposite to each other, a third bevel gear, and a holding member that rotatably holds the first bevel gear.
- a third speed reducer connected to the second drive motor, a fourth speed reducer disposed at the connection portion between the second arm portion and the hand, and a second speed reducer disposed on the base end side of the second arm portion.
- the fourth speed reducer is arranged at the connecting portion between the second arm portion and the hand, it is possible to increase the rigidity of the connecting portion between the second arm portion and the hand. Therefore, in order to correct the inclination while suppressing the displacement of the object to be transported, even if the hand is rotated relative to the second arm portion by the power of the second drive motor, the hand is appropriately Can be rotated.
- the output portion of the second reduction gear is rotatably held at the distal end side of the first arm portion and is fixed to the proximal end side of the second arm portion, and the input portion of the second reduction gear.
- the output portion of the fourth reducer is rotatably held at the distal end side of the second arm portion and fixed to the proximal end side of the hand,
- the input part of the fourth reducer is rotatably held by the output part of the fourth reducer, and the holding member is rotatably held by the second arm part.
- the industrial robot includes an arm support member that rotatably supports the base end side of the first arm portion, and the first drive motor is attached to the first arm portion or the arm support member.
- the power transmission mechanism further includes a first speed reducer that is disposed at a connection portion between the arm support member and the first arm portion and is connected to the first drive motor.
- the output portion of the first reduction gear is rotatably held on the proximal end side of the first arm portion and is fixed to the arm support member, and the input portion of the first reduction gear is the first The output part of the speed reducer is held rotatably.
- the second drive motor preferably includes a brake that stops the rotation shaft of the second drive motor. If comprised in this way, it will become possible to stop the rotating shaft of the 2nd drive motor reliably at the time of the conveyance of a normal conveyance target object. Therefore, when the industrial robot that is operating is brought to an emergency stop, the hand that moves in a substantially linear shape can be surely directed in a predetermined direction. Therefore, it is possible to reliably prevent the hand from colliding with an unexpected part of the peripheral device of the industrial robot when the industrial robot is brought to an emergency stop.
- the industrial robot includes an arm support member that rotatably supports the base end side of the first arm portion with the vertical direction as the axis direction of rotation, and an arm support member with the vertical direction as the axis direction of rotation.
- a turning mechanism for turning and a control unit for controlling the industrial robot are provided, and when the arm is extended, the hand enters the accommodating part for accommodating the object to be conveyed, and when the arm is contracted, the object is conveyed from the accommodating part.
- the end part of the object to be arranged arranged on the back side of the accommodating part is defined as the rear end, and the object to be conveyed is in the accommodating part.
- the end of the object to be transported that is placed on the front side of the storage unit when stored is the front side end, and the center and front of the back end of the transport object when the transport target is stored in the storage unit
- the line passing through the center of the side edge is the reference line
- the arm extends to a position where the object to be transported accommodated in the accommodating portion can be mounted on the hand, the hand arranged at the connecting portion between the second arm portion and the hand when viewed from above and below.
- the center of rotation of the hand is arranged on the reference line
- the center of the tip of the hand is arranged on the reference line
- the arm is retracted to a position where the turning radius of the industrial robot when turning by the turning mechanism is minimized.
- the center of rotation of the hand and the center of the tip of the hand is arranged on the center line of the hand connecting the two, and the center of the back side end of the conveyed object is arranged on the reference line.
- a hand of an industrial robot that can move in the horizontal direction moves in the movement direction of the industrial robot to convey the object to be conveyed.
- the center and the turning center of the arm support member are deviated in the direction orthogonal to the moving direction of the industrial robot, it is possible to appropriately carry out the conveyance object from the storage unit.
- the industrial robot cannot move in the horizontal direction, the direction in which the hand moves between the center of the object to be transported accommodated in the accommodating portion and the turning center of the arm support member toward the accommodating portion. Even in the case of being shifted in the direction orthogonal to the direction, it is possible to appropriately carry out the conveyance object from the storage unit.
- the industrial robot includes an arm support member that rotatably supports the base end side of the first arm portion with the vertical direction as the axis direction of rotation, and an arm support member with the vertical direction as the axis direction of rotation.
- a turning mechanism for turning and a control unit for controlling the industrial robot are provided, and when the arm is extended, the hand enters the accommodating part for accommodating the object to be conveyed, and when the arm is contracted, the object is conveyed from the accommodating part.
- the end part of the object to be arranged arranged on the back side of the accommodating part is defined as the rear end, and the object to be conveyed is in the accommodating part.
- the end of the object to be transported that is placed on the front side of the storage unit when stored is the front side end, and the center and front of the back end of the transport object when the transport target is stored in the storage unit
- the line passing through the center of the side edge is the reference line
- the controller is teaching an industrial robot
- when the arm is extended to a position where the object to be transported accommodated in the accommodating part can be mounted on the hand, when viewed from the up and down direction The center of rotation of the hand and the center of the tip of the hand arranged at the connecting portion between the second arm and the hand are arranged on the reference line, and the center of rotation of the hand and the center of the tip of the hand
- the pivot center of the arm support member that is pivoted by the pivot mechanism is not arranged on the hand center line that is connected to the hand, while maintaining the state where the pivot center of the hand and the center of the tip of the hand are arranged on the reference line
- the industrial robot is preferably operated so that the turning center of the arm support member is arranged on the hand
- the industrial robot according to the present invention includes an arm support member that rotatably supports the base end side of the first arm portion with the vertical direction as an axial direction of rotation, and an arm support member with the vertical direction as an axial direction of rotation.
- An industrial robot including a turning mechanism for turning the object includes an end portion of the conveyance object disposed on the back side of the accommodation unit when the conveyance object is accommodated in the accommodation unit in which the conveyance object is accommodated.
- the end of the transport object placed on the front side of the storage unit when the transfer target is stored in the storage unit When a line passing through the center of the back side end and the center of the front side end of the transport object is a reference line, the hand is arranged at the connecting part between the second arm part and the hand when viewed from above and below.
- the center of rotation is located on the reference line and the tip of the hand
- the arm extends to a position where the object to be transported accommodated in the accommodating portion can be mounted on the hand so that the center of the hand is placed on the reference line.
- the pivot center of the arm support member that pivots by the pivoting mechanism is arranged on the hand center line connecting the center of the part, and the center of the back end of the conveyed object to be carried is arranged on the reference line.
- the arm shrinks to a position where the turning radius of the industrial robot when turning by the turning mechanism is minimized (that is, the hand moves to a position where the turning radius of the industrial robot when turning by the turning mechanism is minimized), It is preferable that the arm support member is swung by the swivel mechanism, and the arm is expanded and contracted while the hand is rotated, and controlled by a control method for transporting the object to be transported. .
- a hand of an industrial robot that can move in the horizontal direction moves in the movement direction of the industrial robot to convey the object to be conveyed.
- the center and the turning center of the arm support member are deviated in the direction orthogonal to the moving direction of the industrial robot, it is possible to appropriately carry out the conveyance object from the storage unit.
- the industrial robot cannot move in the horizontal direction, the direction in which the hand moves between the center of the object to be transported accommodated in the accommodating portion and the turning center of the arm support member toward the accommodating portion. Even in the case of being shifted in the direction orthogonal to the direction, it is possible to appropriately carry out the conveyance object from the storage unit.
- the industrial robot according to the present invention includes an arm support member that rotatably supports the base end side of the first arm portion with the vertical direction as an axial direction of rotation, and an arm support member with the vertical direction as an axial direction of rotation.
- An industrial robot including a turning mechanism for turning the object includes an end portion of the conveyance object disposed on the back side of the accommodation unit when the conveyance object is accommodated in the accommodation unit in which the conveyance object is accommodated.
- the arm When the transport object is stored in the storage unit, the end of the transport object placed on the front side of the storage unit when the transfer target is stored in the storage unit When the line passing through the center of the back side end and the center of the front side end of the transport object is a reference line, the arm extends to a position where the transport object stored in the storage unit can be mounted on the hand When viewed from above and below, the second arm and the hand The center of rotation of the hand and the center of the tip of the hand that are located at the connection part are arranged on the reference line, and the center of the hand connects the center of rotation of the hand and the center of the tip of the hand.
- the pivot center of the arm support member that pivots by the pivot mechanism is not disposed on the arm support member, the pivot center of the arm support member is maintained while maintaining the state where the pivot center of the hand and the center of the tip of the hand are disposed on the reference line.
- the hand between the object to be transported and the hand is rotated. It is preferable to match the orientation. If comprised in this way, compared with the case where the direction of a conveyance target object and a hand is matched using a turning mechanism etc., orientation of a conveyance target object and a hand becomes easy.
- FIG. 1 It is a top view of the industrial robot concerning an embodiment of the invention. It is a side view which shows an industrial robot from the EE direction of FIG. It is a block diagram which shows the various motors connected to the control part of an industrial robot shown in FIG. 1, and a control part. It is the schematic for demonstrating the structure of the power transmission mechanism concerning embodiment of this invention. It is an enlarged view of the F section of FIG. It is a top view for demonstrating the relationship between the inclination at the time of mounting the board
- FIG. 1 is a plan view of an industrial robot 1 according to an embodiment of the present invention.
- FIG. 2 is a side view showing the industrial robot 1 from the EE direction of FIG.
- FIG. 3 is a block diagram showing the control unit 20 of the industrial robot 1 shown in FIG. 1 and various motors connected to the control unit 20.
- each of the three directions orthogonal to each other is defined as an X direction, a Y direction, and a Z direction.
- the Z direction coincides with the vertical direction.
- the X direction is the front-rear direction and the Y direction is the left-right direction.
- the industrial robot 1 of this embodiment (hereinafter referred to as “robot 1”) is used for transporting a glass substrate 2 for liquid crystal display (hereinafter referred to as “substrate 2”) as a transport object.
- This is an articulated robot.
- the robot 1 includes two hands 3 on which a substrate 2 is mounted, two arms 4 each of which is connected to the tip side, and two hands 3.
- a base member 6 that supports the main body part 5 so as to be movable in the horizontal direction (specifically, the left-right direction).
- the main body 5 has an arm support member 7 that supports the base end sides of the two arms 4, an elevating member 8 that can be moved up and down while the arm support member 7 is fixed, and an elevating member 8 that can move up and down.
- the main body 5 is movable in the left-right direction with respect to the base member 6, and the robot 1 is provided with a horizontal movement mechanism that moves the main body 5 in the left-right direction.
- the horizontal movement mechanism includes a horizontal drive motor 12 (see FIG. 3) for moving the main body 5 in the left-right direction.
- the elevating member 8 is movable in the vertical direction with respect to the columnar member 9, and the robot 1 includes an elevating mechanism for elevating the elevating member 8.
- the elevating mechanism includes an elevating drive motor 13 (see FIG. 3) for elevating the elevating member 8.
- the turning member 11 can turn with respect to the base 10 with the vertical direction as an axial direction, and the robot 1 can be moved together with the hand 3, the arm 4, the arm support member 7, the elevating member 8, and the columnar member 9.
- a turning mechanism for turning the turning member 11 is provided.
- the turning mechanism includes a turning drive motor 14 (see FIG. 3) for turning the turning member 11.
- the proximal end side of the hand 3 is rotatably connected to the distal end side of the arm 4 with the vertical direction as the axial direction of rotation.
- a sensor (not shown) for detecting the inclination of the substrate 2 with respect to the carrying-out direction of the substrate 2 is attached.
- the arm 4 includes two arm parts, a first arm part 15 and a second arm part 16, and is configured to expand and contract with respect to the main body part 5.
- the proximal end side of the first arm portion 15 is rotatably supported on the distal end side of the arm support member 7 with the vertical direction as the axial direction of rotation.
- the base end side of the second arm portion 16 is rotatably supported on the distal end side of the first arm portion 15 with the vertical direction as the axial direction of rotation.
- the proximal end side of the hand 3 is rotatably supported on the distal end side of the second arm portion 16.
- the first arm portion 15 and the second arm portion 16 are formed in a hollow shape.
- the base end side of the arm support member 7 is fixed to the elevating member 8.
- the two hands 3, the two arms 4, and the two arm support members 7 are arranged so as to overlap in the vertical direction. That is, the robot 1 of this embodiment is a double arm type robot.
- the elevating member 8 moves up and down together with the hand 3 and the arm 4 with respect to the columnar member 9. Further, the arm 4 expands and contracts with respect to the main body 5. Specifically, the arm 4 expands and contracts so that the hand 3 moves linearly with the hand 3 facing a predetermined direction. Further, the base 10 moves horizontally with respect to the base member 6. Further, the turning member 11 turns with respect to the base 10.
- the robot 1 transports the substrate 2 from the accommodating portion in which the substrate 2 is accommodated to a work position where a predetermined work is performed on the substrate 2.
- the arm 4 when the arm 4 extends, the hand 3 enters the accommodating portion, and when the arm 4 contracts, the substrate 2 mounted on the hand 3 is unloaded from the accommodating portion.
- the robot 1 includes a first drive motor 21 for extending and retracting the arm 4 and a first arm for rotating the hand 3 relative to the second arm portion 16.
- a two-drive motor 22 and a power transmission mechanism 23 for transmitting the power of the first drive motor 21 and the second drive motor 22 are provided.
- the first drive motor 21 and the second drive motor 22 are connected to a control unit 20 that controls the robot 1.
- a horizontal drive motor 12, a lift drive motor 13, and a turning drive motor 14 are also connected to the control unit 20.
- FIG. 4 is a schematic diagram for explaining the configuration of the power transmission mechanism 23 according to the embodiment of the present invention.
- FIG. 5 is an enlarged view of a portion F in FIG.
- the first drive motor 21 is attached to the first arm portion 15. Specifically, the first drive motor 21 is attached to the first arm portion 15 at a position relatively close to the connecting portion between the first arm portion 15 and the second arm portion 16. A pulley 24 is fixed to the rotation shaft of the first drive motor 21.
- the second drive motor 22 is also attached to the first arm portion 15. Specifically, the second drive motor 22 is attached to the first arm portion 15 at a position closer to the connecting portion between the first arm portion 15 and the second arm portion 16 than the first drive motor 21. Yes.
- the second drive motor 22 is a motor with a brake. That is, the second drive motor 22 includes a brake that stops the rotation shaft.
- a pulley 25 is fixed to the rotation shaft of the second drive motor 22.
- the power transmission mechanism 23 is disposed at a connecting portion between the arm support member 7 and the first arm portion 15 and is connected to the first driving motor 21.
- a reduction gear 26 serving as a first reduction device, the first arm portion 15,
- a speed reducer 27 as a second speed reducer disposed at a connection portion with the second arm portion 16 and connected to the first drive motor 21 and a speed reduction as a third speed reducer connected to the second drive motor 22 Machine 28.
- the speed reducer 26 includes an input unit 30, an output unit 31, and a fixing flange 32 that rotatably holds the output unit 31.
- the fixing flange 32 is fixed to the proximal end side of the first arm portion 15.
- the output part 31 is rotatably held on the proximal end side of the first arm part 15 via the fixing flange 32.
- the output unit 31 is fixed to the distal end side of the arm support member 7.
- the input unit 30 is rotatably held on the inner peripheral side of the output unit 31 formed in a cylindrical shape.
- a pulley 33 is fixed to one end of the input unit 30 (the upper end in the example shown in FIG. 4).
- the pulley 33 is disposed inside the base end side of the first arm portion 15.
- a belt 34 is stretched between the pulley 24 and the pulley 33 fixed to the rotation shaft of the first drive motor 21.
- the power of the first drive motor 21 transmitted to the input unit 30 via the belt 34 and the pulley 33 is decelerated and transmitted to the output unit 31.
- the pulley 33 may be formed integrally with the input unit 30.
- the speed reducer 27 includes an input unit 35, an output unit 36, and a fixing flange 37 that holds the output unit 36 rotatably.
- the fixing flange 37 is fixed to the distal end side of the first arm portion 15. In the example shown in FIGS. 4 and 5, the fixing flange 37 is fixed to the upper surface side of the distal end side of the first arm portion 15.
- the output part 36 is rotatably held on the distal end side of the first arm part 15 via a fixing flange 37.
- the output unit 36 is fixed to the proximal end side of the second arm unit 16.
- the input part 35 is rotatably held on the inner peripheral side of the output part 36 formed in a cylindrical shape.
- a pulley 38 is fixed to one end of the input unit 35.
- the pulley 38 is disposed inside the front end side of the first arm portion 15.
- a belt 39 is stretched between the pulley 24 and the pulley 38 fixed to the rotation shaft of the first drive motor 21.
- the power of the first drive motor 21 transmitted to the input unit 35 via the belt 39 and the pulley 38 is decelerated and transmitted to the output unit 36.
- the pulley 38 may be formed integrally with the input unit 35.
- the speed reducer 28 includes an input unit 40, an output unit 41, and a fixing flange 42 that rotatably holds the output unit 41.
- the fixing flange 42 is fixed to the distal end side of the first arm portion 15. In the example shown in FIGS. 4 and 5, the fixing flange 42 is fixed to the lower surface side of the distal end side of the first arm portion 15.
- the output part 41 is rotatably held on the distal end side of the first arm part 15 via a fixing flange 42.
- a pulley 43 as a first pulley is fixed to one end of the output unit 41 (the upper end in the examples shown in FIGS. 4 and 5).
- the pulley 43 is disposed inside the proximal end side of the second arm portion 16.
- the output part 41 is arrange
- the input unit 40 is rotatably held on the other end side of the output unit 41.
- a pulley 44 is fixed to the input unit 40.
- a belt 45 is stretched between the pulley 25 and the pulley 44 fixed to the rotation shaft of the second drive motor 22. The power of the second drive motor 22 transmitted to the input unit 40 via the belt 45 and the pulley 44 is decelerated and transmitted to the output unit 41.
- the pulley 44 may be formed integrally with the input unit 40.
- a pulley 46 as a second pulley is arranged inside the tip end side of the second arm portion 16. That is, the pulley 46 is disposed at the connecting portion between the second arm portion 16 and the hand 3. The pulley 46 is fixed to the proximal end side of the hand 3. A belt 47 is stretched between the pulley 43 and the pulley 46.
- the arm 4 when the first drive motor 21 is driven, the arm 4 expands and contracts.
- the length of the first arm portion 15 and the length of the second arm portion 16 are set so that the power of the first drive motor 21 moves linearly with the hand 3 facing a predetermined direction.
- the reduction ratio of the reducers 26 and 27 and the diameters of the pulleys 24, 33, 38, 43, and 46 are set.
- the power of the first drive motor 21 causes the hand 3 to move linearly in the front-rear direction with the hand 3 facing in the front-rear direction, or straight in the left-right direction with the hand 3 facing in the left-right direction.
- the length of the first arm portion 15, the length of the second arm portion 16, the reduction ratio of the reducers 26 and 27, and the diameters of the pulleys 24, 33, 38, 43, and 46 are set so as to move. .
- the hand 3 rotates relative to the second arm portion 16 even if the first drive motor 21 is stopped.
- FIG. 6 is a plan view for explaining the relationship between the inclination of the substrate 2 and the hand 3 when the substrate 2 is mounted in the industrial robot 1 shown in FIG.
- the control unit 20 first drives the first drive motor 21 to expand and contract the arm 4 to thereby extend the hand. 3 is used to detect the inclination of the substrate 2 with respect to the unloading direction of the substrate 2. At this time, the brake is applied to the second drive motor 22 and the rotation shaft of the second drive motor 22 is stopped.
- the control unit 20 drives the first drive motor 21 again. Then, the arm 4 is expanded and contracted, the substrate 2 is unloaded from the accommodating portion, and the unloaded substrate 2 is loaded into a predetermined work position.
- the arm 4 expands and contracts, the hand 3 moves linearly in the front-rear direction while facing the front-rear direction, or moves linearly in the left-right direction while facing the left-right direction.
- the state of the hand 3 when the substrate 2 is mounted in the accommodating portion is the state indicated by the two-dot chain line in FIG. That is, at this time, the hand 3 is substantially parallel to the carrying-out direction of the substrate 2.
- the second drive motor 22 is braked, and the rotation shaft of the second drive motor 22 is stopped.
- the control unit 20 drives the second drive motor 22 to rotate the hand 3 by a predetermined amount with respect to the second arm unit 16.
- the turning drive motor 14 is driven to turn the turning member 11 by a predetermined amount with respect to the base 10.
- This operation may be performed with the arm 4 contracted or may be performed with the arm 4 extended.
- the control unit 20 applies a brake to stop the second drive motor 22 and stop the turning drive motor 14.
- the first drive motor 21 is driven to extend the arm 4, and then the lift drive motor 13 is driven to mount the substrate 2 on the hand 3 in the accommodating portion.
- the state of the hand 3 when the substrate 2 is mounted in the accommodating portion is the state indicated by the solid line in FIG. That is, at this time, the hand 3 is inclined to the same extent as the inclination of the substrate 2 with respect to the carrying-out direction of the substrate 2.
- the control unit 20 With the second drive motor 22 and the turning drive motor 14 stopped, the first drive motor 21 is driven to extend the arm 4, and then the second drive motor 22 is driven to move the hand 3. Is rotated by a predetermined amount, and the turning drive motor 14 is driven to turn the turning member 11 by a predetermined amount, and then the elevating drive motor 13 is driven to place the substrate 2 on the hand 3 in the accommodating portion. Is installed. At this time, the state of the hand 3 when the substrate 2 is mounted in the accommodating portion is the state indicated by the solid line in FIG.
- the control portion 20 drives the second drive motor 22 to turn the hand 3 by a predetermined amount in the direction opposite to the previous turning direction, and also turns.
- the motor 14 is driven to rotate the turning member 11 by a predetermined amount in the direction opposite to the previous turning direction. Then, the state of the hand 3 on which the substrate 2 is mounted in the accommodating portion becomes a state indicated by a two-dot chain line in FIG. 6, and the inclination of the substrate 2 accommodated in the accommodating portion is in a direction orthogonal to the carry-out direction of the substrate 2. Correction is performed in a state in which the positional deviation of the substrate 2 is suppressed.
- the control unit 20 drives the first driving motor 21 in a state where the second driving motor 22 and the turning driving motor 14 are stopped, shrinks the hand 3, and carries the substrate 2 out of the housing unit. .
- the hand 3 moves linearly in the front-rear direction while facing the front-rear direction, or moves linearly in the left-right direction while facing the left-right direction.
- the control unit 20 drives the turning drive motor 14 and the like to cause the robot 1 to perform a predetermined operation, and then stops the second drive motor 22 and the turning drive motor 14.
- the first driving motor 21 is driven, the arm 4 is expanded and contracted, and the substrate 2 is carried into the working position.
- the hand 3 moves linearly in the front-rear direction while facing the front-rear direction, or moves linearly in the left-right direction while facing the left-right direction.
- the hand 3 When the tilt of the substrate 2 is detected by the tilt detection operation of the substrate 2, the hand 3 is rotated by a predetermined amount with respect to the second arm portion 16 according to the tilt of the substrate 2, and the base 10 is moved. On the other hand, the substrate 2 is unloaded from the accommodating portion while the swiveling member 11 is rotated by a predetermined amount, and then the hand 3 is rotated by a predetermined amount in the reverse direction and the swiveling member 11 is rotated in the reverse direction by a predetermined amount. After rotating, the substrate 2 may be carried into the working position.
- the inclination of the substrate 2 accommodated in the accommodating portion is corrected when the substrate 2 is carried into the work position in a state where the positional deviation of the substrate 2 in the direction orthogonal to the carrying-out direction of the substrate 2 is suppressed.
- the tilt detection operation of the substrate 2 detects the tilt of the substrate 2
- the hand 3 is rotated by a predetermined amount with respect to the second arm portion 16 according to the tilt of the substrate 2, and the base 10
- the arm 4 can be expanded and contracted while rotating the turning member 11 by a predetermined amount.
- FIG. 7 is a plan view for explaining the teaching method of the industrial robot 1 shown in FIG.
- a teaching method of the robot 1 in the housing unit that is, in a state where the arm 4 is extended
- the hand 3 moves linearly in the front-rear direction (X direction) and conveys the substrate 2
- teaching of the robot 1 is performed by an operator using a teaching operation terminal (teaching pendant) connected to the control unit 20.
- substrate 2 is formed in the rectangular plate shape, and, in the following description, when the board
- a line passing through the center C10 of the back side end 2a and the center C20 of the front side end 2b when the substrate 2 is housed in the housing part is defined as a reference line LB.
- the substrate 2 is accommodated in the accommodating portion without being inclined with respect to the front-rear direction, and the reference line LB is substantially parallel to the front-rear direction.
- the robot 1 When teaching the robot 1 in the accommodating portion when the hand 3 in the front-rear direction moves linearly in the front-rear direction to convey the substrate 2, first, as shown in FIG.
- the arm 4 is extended to a position where the substrate 2 accommodated in the unit can be mounted on the hand 3, and the hand 3 is placed in the accommodating unit. Thereafter, when viewed from above and below, the pivot center C1 of the hand 3 and the center of the tip of the hand 3 (more specifically, the hand fork) So that the hand center line LH connecting C2 in the direction orthogonal to the direction in which the hand 3 extends is substantially parallel to the reference line LB (that is, the hand center line LH is substantially in the front-rear direction).
- the second drive motor 22 is driven to rotate the hand 3 so that the hand 3 is parallel. That is, the orientation of the substrate 2 and the hand 3 is matched while rotating the hand 3.
- the substrate 2 in the left-right direction is maintained while maintaining the hand center line LH substantially parallel to the reference line LB when viewed in the up-down direction. So that the distance L1 between one end surface of the substrate 3 and one end of the hand 3 is equal to the distance L2 between the other end surface of the substrate 2 and the other end of the hand 3 in the left-right direction (that is, the hand center line LH is equal to the reference line LB).
- the horizontal driving motor 12, the turning driving motor 14, and / or the first driving motor 21 are driven so as to move the hand 3 in the left-right direction.
- the hand 3 is moved in the front-rear direction so that the relative position between the substrate 2 and the hand 3 in the front-rear direction becomes a predetermined position. That is, the substrate 2 and the hand 3 are aligned by performing a jog operation so that the hand center line LH overlaps the reference line LB when viewed from above and below.
- the turning center C3 of the turning member 11 turning by the turning mechanism is not arranged on the hand center line LH, and as shown in FIG. There may occur a situation in which the turning center C3 of the member 11 is disposed on the hand center line LH.
- the teaching work of the robot 1 in the housing unit is finished.
- the turning center C3 of the turning member 11 is not disposed on the hand center line LH, the turning center C3 of the turning member 11 is maintained while maintaining the state where the hand center line LH overlaps the reference line LB.
- the horizontal drive motor 12, the turning drive motor 14, and / or the first drive motor 21 is driven to operate the robot 1 so as to be arranged on the hand center line LH, and then the robot 1 in the housing unit is operated.
- the teaching work is finished. By performing such teaching work, it is possible to move the substrate 2 appropriately by moving in a straight line in the front-rear direction with the hand 3 facing the front-rear direction.
- the jog operation is performed so that the hand center line LH overlaps the reference line LB when viewed from above and below, and after the positioning of the substrate 2 and the hand 3 is performed,
- the control unit 20 automatically drives the horizontal driving motor 12, the turning driving motor 14, and / or the first driving motor 21.
- the robot 1 is operated so that the turning center C3 of the turning member 11 is arranged on the hand center line LH while maintaining the state where the hand center line LH overlaps the reference line LB.
- the connecting portion between the arm support member 7 and the first arm portion 15 is provided.
- the rotation center C4 of the first arm portion 15 to be arranged is also arranged on the hand center line LH.
- the hand 3 rotates relative to the second arm portion 16. Therefore, in this embodiment, the hand 3 can be freely rotated relative to the second arm portion 16 regardless of the moving direction of the hand 3 when the substrate 2 is unloaded from the housing portion. That is, the hand 3 is freely rotated relative to the second arm portion 16 regardless of whether the movement direction of the hand 3 when unloading the substrate 2 from the accommodating portion is, for example, the front-rear direction or the left-right direction. be able to.
- the hand 3 when the inclination of the substrate 2 is detected, the hand 3 is rotated relative to the second arm portion 16 and the base stand regardless of the moving direction of the hand 3 when the substrate 2 is unloaded.
- the tilting of the substrate 2 can be corrected while the positional deviation of the substrate 2 is suppressed by rotating the swivel member 11 relative to 10.
- the main body portion 5 of the robot 1 it is not necessary to move the main body portion 5 of the robot 1 in the left-right direction when correcting the tilt of the substrate 2 while suppressing the positional deviation of the substrate 2.
- the main body 5 of the robot 1 is moved in the left-right direction when correcting the tact time, it is possible to shorten the tact time when correcting the tilt of the substrate 2. That is, when the main body 5 of the robot 1 is moved in the left-right direction when correcting the tilt of the substrate 2 while suppressing the displacement of the substrate 2, the state shown by the solid line from the state shown by the two-dot chain line in FIG. Up to this point, it is necessary to largely move the main body 5 of the robot 1. However, in this embodiment, it is not necessary to move the main body 5 and accordingly, the tact time can be shortened accordingly.
- the brake when the substrate 2 is transported from the accommodating portion to the work position, the brake is applied to the second drive motor 22, and the hand 3 is directed in a predetermined direction by the power of the first drive motor 21.
- the arm 4 expands and contracts to move linearly in the state. For this reason, if the robot 1 is brought to an emergency stop while the substrate 2 is being transferred, the hand 3 stops after moving a predetermined amount in a substantially straight line while facing the predetermined direction. That is, even if the operating robot 1 is emergency-stopped, the state in which the hand 3 is facing a certain direction is maintained, so that it is possible to suppress the disturbance of the posture of the robot 1 during the emergency stop. Therefore, in this embodiment, it is possible to prevent the hand 3 from colliding with an unexpected part of the peripheral device of the robot 1 even if the robot 1 is emergency stopped.
- the pulley 43 is fixed to the output portion 41 of the speed reducer 28 connected to the second drive motor 22, and the pulley 46 is fixed to the proximal end side of the hand 3.
- the belt 47 is stretched over. Therefore, the configuration of the power transmission mechanism 23 can be relatively simplified.
- the output unit 41 is disposed so as to pass through the inner peripheral side of the input unit 35 of the reduction gear 27 formed in a cylindrical shape, and therefore the output unit 41 is disposed outside the reduction gear 27. Compared with the case where it is made, the connection part of the 1st arm part 15 and the 2nd arm part 16 can be reduced in size.
- the substrate 2 accommodated in the accommodating portion can be mounted on the hand 3.
- the second drive motor 22 is driven so that the hand center line LH is substantially parallel to the reference line LB when viewed from above and below, and the substrate 2 and the hand 3 and the direction. Therefore, in this embodiment, it is easy to align the substrate 2 and the hand 3.
- the second drive motor 22 is driven to match the orientation of the substrate 2 and the hand 3, and the distance between the rotation center C1 of the hand 3 and the tip of the hand 3 is short. Therefore, the movement amount of the tip of the hand 3 with respect to the rotation amount of the second drive motor 22 can be suppressed, and the substrate 2 and the hand 3 can be easily faced.
- the hand center line LH is the reference line LB when viewed from the up-down direction.
- the horizontal drive motor 12 The turning center C3 is arranged on the hand center line LH while driving the turning driving motor 14 and / or the first driving motor 21 to maintain the hand center line LH overlapping the reference line LB.
- control unit 20 automatically drives the horizontal drive motor 12, the turning drive motor 14, and / or the first drive motor 21 so that the hand center line LH overlaps the reference line LB. Since the robot 1 is operated so that the turning center C3 is disposed on the hand center line LH while maintaining the state, the teaching work of the operator becomes easier.
- FIG. 9 is a schematic diagram for explaining the configuration of a power transmission mechanism 53 according to another embodiment of the present invention.
- FIG. 10 is an enlarged view of a portion G in FIG.
- FIG. 11 is a schematic diagram for explaining the configuration of the speed reducer 58 and its peripheral portion shown in FIG.
- the pulley 46 is disposed at the connecting portion between the second arm portion 16 and the hand 3.
- a speed reducer 50 as a fourth speed reducer may be arranged at the connecting portion between the second arm portion 16 and the hand 3.
- the rigidity of the connecting portion between the second arm portion 16 and the hand 3 can be increased. Therefore, even if the hand 3 is rotated relative to the second arm portion 16 by the power of the second driving motor 22 in order to correct the inclination while suppressing the positional deviation of the substrate 2, 3 can be appropriately rotated.
- a power transmission mechanism 53 is provided in place of the power transmission mechanism 23 described above.
- the configuration of the power transmission mechanism 53 will be described.
- the configuration of the power transmission mechanism 53 that is the same as the configuration of the power transmission mechanism 23 is denoted by the same reference numeral, and the description thereof is omitted or simplified.
- the power transmission mechanism 53 includes the reducer 26 and the reducer 27 described above in addition to the reducer 50.
- the power transmission mechanism 53 includes a speed reducer 58 as a third speed reducer coupled to the second drive motor 22.
- the first drive motor 21 is attached to the first arm portion 15 in the same manner as described above.
- the second drive motor 22 is attached to the second arm portion 16.
- the second drive motor 22 is disposed inside the base end side of the second arm portion 16.
- the speed reducer 27 includes the input unit 35, the output unit 36, and the fixing flange 37.
- the pulley is not fixed to the other end of the input unit 35, but in the first modification, the pulley 60 as the first pulley is fixed to the other end of the input unit 35.
- the speed reducer 58 is a planetary gear speed reducer having a sun gear 62, a plurality of planetary gears 63, an internal gear 64, and a planetary carrier 65 that rotatably holds the planetary gear 63. .
- the reduction gear 58 is disposed inside the second arm portion 16.
- a pulley 66 as a third pulley is fixed to the sun gear 62.
- a pulley 67 as a fourth pulley is fixed to the planet carrier 65.
- the internal gear 64 is attached to the second arm portion 16 via a bearing 68 and is rotatable with respect to the second arm portion 16. That is, the internal gear 64 is rotatably held by the second arm portion 16.
- a pulley 69 as a fifth pulley is fixed to the internal gear 64.
- the pulley 69 may be formed integrally with the internal gear 64.
- the reduction gear 50 includes an input unit 70, an output unit 71, and a fixing flange 72 that rotatably holds the output unit 71.
- the fixing flange 72 is fixed to the distal end side of the second arm portion 16.
- the output portion 71 is rotatably held on the distal end side of the second arm portion 16 via a fixing flange 72.
- One end of the output unit 71 is fixed to the proximal end side of the hand 3.
- the input unit 70 is rotatably held on the other end side of the output unit 71.
- a pulley 73 as a second pulley is fixed to the input unit 70.
- the pulley 73 is disposed inside the distal end side of the second arm portion 16.
- the pulley 73 may be formed integrally with the input unit 70.
- a belt 74 as a first belt is bridged between a pulley 60 fixed to the input unit 35 of the speed reducer 27 and a pulley 66 fixed to the sun gear 62 of the speed reducer 58.
- a belt 75 as a second belt is bridged between a pulley 73 fixed to the input unit 70 of the speed reducer 50 and a pulley 67 fixed to the planetary carrier 65 of the speed reducer 58.
- a belt 77 as a third belt is bridged between a pulley 76 as a sixth pulley fixed to the rotation shaft of the second drive motor 22 and a pulley 69 fixed to the internal gear 64 of the speed reducer 58. ing.
- the length of the first arm portion 15 and the length of the second arm portion 16 are set so that the hand 3 moves linearly in a state in which the hand 3 faces a predetermined direction by the power of the first drive motor 21.
- the reduction ratios of the reduction gears 26, 27, 50, and 58, the diameters of the pulleys 24, 33, 38, 60, 66, 67, and 73 are set.
- the internal gear 64 rotates and the planetary gear 63 rotates, so that the planetary carrier 65, pulleys 67 and 73, the belt 75, and the speed reducer 50 are used.
- the power of the second drive motor 22 is transmitted to the hand 3 and the hand 3 rotates relative to the second arm portion 16.
- the robot 1 drives the second driving motor 22 to rotate the hand 3 by a predetermined amount relative to the second arm portion 16 and rotates the turning member 11 by a predetermined amount relative to the base 10.
- FIG. 12 is a schematic diagram for explaining the configuration of the speed reducer 88 and its peripheral part according to another embodiment of the present invention.
- a speed reducer 58 which is a planetary gear speed reducer, is connected to the second drive motor 22 via a belt 77.
- the first bevel gear 81, the second bevel gear 82 and the third bevel gear 83 that mesh with the first bevel gear 81, and the first bevel gear 81 are rotatably held.
- a reduction gear 88 including a holding member 84 may be coupled to the second drive motor 22 via a belt 77.
- the second bevel gear 82 and the third bevel gear 83 are arranged so as to face each other in the vertical direction.
- the pulley 66 described above is fixed to the second bevel gear 82 via the shaft 85
- the pulley 67 described above is fixed to the third bevel gear 83 via the shaft 85.
- the first bevel gear 81 is fixed to a shaft 86 arranged with the horizontal direction as an axial direction, and the shaft 86 is rotatably held by a holding member 84.
- the holding member 84 is attached to the second arm portion 16 via a bearing 87 and is rotatable with respect to the second arm portion 16. That is, the holding member 84 is rotatably held by the second arm portion 16.
- a pulley 89 as a fifth pulley is fixed to the holding member 84.
- a belt 77 is stretched around a pulley 76 and a pulley 89 that are fixed to the rotation shaft of the second drive motor 22.
- the pulley 89 may be formed integrally with the holding member 84.
- the length of the first arm portion 15 and the length of the second arm portion 16 are set so that the hand 3 moves linearly in a state in which the hand 3 faces a predetermined direction by the power of the first drive motor 21.
- the reduction ratios of the reduction gears 26, 27, and 50, the diameters of the pulleys 24, 33, 38, 60, 66, 67, and 73 are set.
- the second drive motor 22 when the second drive motor 22 is driven, the holding member 84 is rotated and the first bevel gear 81 is rotated. Therefore, the third bevel gear 83, the pulleys 67 and 73, the belt 75, and the speed reducer are reduced.
- the power of the second drive motor 22 is transmitted to the hand 3 via the machine 50, and the hand 3 rotates relative to the second arm portion 16.
- FIG. 13 is a plan view for explaining a control method of the industrial robot 1 according to another embodiment of the present invention.
- the control unit 20 drives the first drive motor 21 in a state where the second drive motor 22 and the turning drive motor 14 are stopped, expands and contracts the arm 4, and transports the substrate 2. is doing.
- the hand 3 moves in the left-right direction (Y direction) to transport the substrate 2, and the turning center C ⁇ b> 3 of the turning member 11 is deviated from the center of the housing portion in the front-rear direction.
- the controller 20 may drive the first drive motor 21 while driving the second drive motor 22 and the turning drive motor 14 to expand and contract the arm 4 and transport the substrate 2.
- the arm 4 is contracted to a position where the turning radius of the robot 1 is minimized when turning about the turning center C3 of the turning member 11 (the turning center C3 is In the state where the hand 3 is at a position where the turning radius of the robot 1 when turning about the center is the smallest), the turning center C3 is arranged on the hand center line LH when viewed from above and below, and the robot 1 is carried out.
- the center C10 of the back side end 2a of the substrate 2 is arranged on the reference line LB.
- the control unit 20 conveys the substrate 2 by extending and retracting the arm 4 while turning the turning member 11 and turning the hand 3.
- the robot 1 when operating the robot 1 between the state where the arm 4 is extended and the state where the arm 4 is contracted, it is preferable to operate the robot 1 by the PTP operation.
- the robot 1 when the robot 1 is operated by the PTP operation, it is possible to suppress the vibration of the hand 3 compared to the case where the robot 1 is operated by the interpolation operation.
- the robot 1 may be operated by an interpolation operation so that the center C10 of the back end 2a of the substrate 2 passes on the reference line LB.
- the robot 1 includes the base member 6 that supports the main body 5, but the robot 1 may not include the base member 6. That is, the main body 5 may not be movable in the left-right direction.
- the hand 3 is rotated by a predetermined amount with respect to the second arm portion 16 according to the inclination of the substrate 2 and the turning member 11 is rotated by a predetermined amount with respect to the base 10.
- the inclination of the substrate 2 can be corrected while suppressing the positional deviation of the substrate 2. Therefore, in this case, the robot 1 can be reduced in size even if the inclination of the substrate 2 can be corrected while suppressing the positional deviation.
- the main body 5 is not movable in the left-right direction, and the turning center C3 of the turning member 11 is deviated from the center of the housing part in the direction orthogonal to the moving direction of the hand 3.
- the first drive motor 21 is driven while the second drive motor 22 and the turning drive motor 14 are driven, and the arm 4 is expanded and contracted, so that the substrate 2 can be extended. Can be carried out properly.
- the first drive motor 21 is attached to the first arm portion 15.
- the first drive motor 21 may be attached to the arm support member 7.
- a pulley is fixed to the other end (the lower end in the example shown in FIG. 4) of the input unit 30 of the speed reducer 26, and a belt is connected to this pulley and a pulley attached to the rotating shaft of the first drive motor 21. Is overlaid. Further, a belt is stretched between a pulley 33 fixed to the input unit 30 of the speed reducer 26 and a pulley 38 fixed to the input unit 35 of the speed reducer 27.
- the proximal end side of the arm 4 is rotatably supported on the distal end side of the arm support member 7.
- the proximal end side of the arm 4 may be rotatably supported by the turning member 11.
- the swivel member 11 in this case is an arm support member that rotatably supports the proximal end side of the arm 4.
- the arm 4 is constituted by two arm parts, the first arm part 15 and the second arm part 16, but the arm 4 may be constituted by three or more arm parts.
- the robot 1 is a so-called double arm type robot including two hands 3 and two arms 4.
- the robot 1 includes one hand 3 and one arm 4.
- a single arm type robot provided with the transfer target object transferred by the robot 1 is the substrate 2.
- the transfer target object transferred by the robot 1 may be a semiconductor wafer other than the substrate 2.
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
図1は、本発明の実施の形態にかかる産業用ロボット1の平面図である。図2は、図1のE-E方向から産業用ロボット1を示す側面図である。図3は、図1に示す産業用ロボット1の制御部20および制御部20に接続される各種モータを示すブロック図である。なお、以下の説明では、互いに直交する3方向のそれぞれをX方向、Y方向およびZ方向とする。本形態では、Z方向が上下方向と一致する。また、以下の説明では、X方向を前後方向、Y方向を左右方向とする。
図4は、本発明の実施の形態にかかる動力伝達機構23の構成を説明するための概略図である。図5は、図4のF部の拡大図である。
図6は、図1に示す産業用ロボット1における基板2の傾きと基板2を搭載する際のハンド3との関係を説明するための平面図である。
図7は、図1に示す産業用ロボット1の教示方法を説明するための平面図である。以下では、前後方向(X方向)へハンド3が直線状に動いて基板2を搬送する場合の収容部内での(すなわち、アーム4が伸びている状態での)ロボット1の教示方法を説明する。ロボット1の教示は、制御部20に接続される教示操作端末(ティーチングペンダント)を用いて、オペレータが行う。
以上説明したように、本形態では、第2駆動用モータ22が駆動すると、第2アーム部16に対してハンド3が相対回動する。そのため、本形態では、収容部から基板2を搬出する際のハンド3の移動方向にかかわらず、第2アーム部16に対してハンド3を自由に相対回動させることができる。すなわち、収容部から基板2を搬出する際のハンド3の移動方向が、たとえば、前後方向であっても左右方向であっても第2アーム部16に対してハンド3を自由に相対回動させることができる。したがって、本形態では、基板2の傾きが検出されたときには、基板2を搬出する際のハンド3の移動方向にかかわらず、第2アーム部16に対してハンド3を相対回動させるとともに基台10に対して旋回部材11を相対回動させて、基板2の位置ずれを抑制しつつ基板2の傾きを補正することが可能になる。
図9は、本発明の他の実施の形態にかかる動力伝達機構53の構成を説明するための概略図である。図10は、図9のG部の拡大図である。図11は、図10に示す減速機58およびその周辺部の構成を説明するための概略図である。
図12は、本発明の他の実施の形態にかかる減速機88およびその周辺部の構成を説明するための概略図である。
図13は、本発明の他の実施の形態にかかる産業用ロボット1の制御方法を説明するための平面図である。
上述した形態は、本発明の好適な形態の一例ではあるが、これに限定されるものではなく本発明の要旨を変更しない範囲において種々変形実施が可能である。
2 基板(ガラス基板、搬送対象物)
2a 奥側端
2b 手前側端
3 ハンド
4 アーム
7 アーム支持部材
15 第1アーム部
16 第2アーム部
20 制御部
21 第1駆動用モータ
22 第2駆動用モータ
23、53 動力伝達機構
26 減速機(第1減速機)
27 減速機(第2減速機)
28 減速機(第3減速機)
30 入力部(第1減速機の入力部)
31 出力部(第1減速機の出力部)
35 入力部(第2減速機の入力部)
36 出力部(第2減速機の出力部)
40 入力部(第3減速機の入力部)
41 出力部(第3減速機の出力部)
43 プーリ(第1プーリ)
46 プーリ(第2プーリ)
47 ベルト
50 減速機(第4減速機)
58 減速機(第3減速機)
60 プーリ(第1プーリ)
62 太陽歯車
63 遊星歯車
64 内歯車
65 遊星キャリヤ
66 プーリ(第3プーリ)
67 プーリ(第4プーリ)
69 プーリ(第5プーリ)
70 入力部(第4減速機の入力部)
71 出力部(第4減速機の出力部)
73 プーリ(第2プーリ)
74 ベルト(第1ベルト)
75 ベルト(第2ベルト)
76 プーリ(第6プーリ)
77 ベルト(第3ベルト)
81 第1かさ歯車
82 第2かさ歯車
83 第3かさ歯車
84 保持部材
88 減速機(第3減速機)
89 プーリ(第5プーリ)
C1 ハンドの回動中心
C2 ハンドの先端部の中心
C3 旋回中心
C10 奥側端の中心(搬送対象物の奥側端の中心)
C20 手前側端の中心(搬送対象物の手前側端の中心)
LB 基準線
LH ハンド中心線
Claims (16)
- 搬送対象物が搭載されるハンドと、前記ハンドをその先端側で回動可能に支持する第2アーム部と前記第2アーム部の基端側をその先端側で回動可能に支持する第1アーム部との少なくとも2個のアーム部を有するアームと、前記アームを伸縮させるための第1駆動用モータと、前記第2アーム部に対して前記ハンドを相対回動させるための第2駆動用モータと、前記第1駆動用モータの動力および前記第2駆動用モータの動力を伝達するための動力伝達機構とを備え、
前記動力伝達機構は、前記ハンドが所定方向を向いた状態で略直線状に動くように前記第1駆動用モータの動力を前記アームおよび前記ハンドに伝達し、かつ、前記第2アーム部に対して前記ハンドが相対回動するように前記第2駆動用モータの動力を前記ハンドに伝達することを特徴とする産業用ロボット。 - 前記第2駆動用モータは、前記第1アーム部に取り付けられ、
前記動力伝達機構は、前記第1アーム部と前記第2アーム部との連結部に配置され前記第1駆動用モータの動力が伝達される第2減速機と、前記第2駆動用モータに連結される第3減速機と、前記第2アーム部の基端側に配置され前記第3減速機の出力部に固定される第1プーリと、前記第2アーム部の先端側に配置され前記ハンドの基端側に固定される第2プーリと、前記第1プーリと前記第2プーリとに架け渡されるベルトとを備えることを特徴とする請求項1記載の産業用ロボット。 - 前記第2減速機の出力部は、前記第1アーム部の先端側に回動可能に保持されるとともに前記第2アーム部の基端側に固定され、
前記第2減速機の入力部は、前記第2減速機の出力部に回転可能に保持され、
前記第3減速機の出力部は、前記第1アーム部の先端側に回動可能に保持され、
前記第3減速機の入力部は、前記第3減速機の出力部に回転可能に保持されていることを特徴とする請求項2記載の産業用ロボット。 - 前記第2減速機の入力部および出力部は、略筒状に形成され、
前記第2減速機の出力部の内周側に前記第2減速機の入力部が配置され、
前記第2減速機の入力部の内周側を通過するように前記第3減速機の出力部が配置されていることを特徴とする請求項2または3記載の産業用ロボット。 - 前記第2駆動用モータは、前記第2アーム部に取り付けられ、
前記動力伝達機構は、前記第1アーム部と前記第2アーム部との連結部に配置され前記第1駆動用モータの動力が伝達される第2減速機と、太陽歯車と遊星歯車と内歯車と前記遊星歯車を回転可能に保持する遊星キャリヤとを有し前記第2駆動用モータに連結される第3減速機と、前記第2アーム部と前記ハンドとの連結部に配置される第4減速機と、前記第2アーム部の基端側に配置され前記第2減速機の入力部に固定される第1プーリと、前記第2アーム部の先端側に配置され前記第4減速機の入力部に固定される第2プーリと、前記太陽歯車に固定される第3プーリと、前記遊星キャリヤに固定される第4プーリと、前記内歯車に固定される第5プーリと、前記第2駆動用モータの回転軸に固定される第6プーリと、前記第1プーリと前記第3プーリとに架け渡される第1ベルトと、前記第2プーリと前記第4プーリとに架け渡される第2ベルトと、前記第5プーリと前記第6プーリとに架け渡される第3ベルトとを備えることを特徴とする請求項1記載の産業用ロボット。 - 前記第2減速機の出力部は、前記第1アーム部の先端側に回動可能に保持されるとともに前記第2アーム部の基端側に固定され、
前記第2減速機の入力部は、前記第2減速機の出力部に回転可能に保持され、
前記第4減速機の出力部は、前記第2アーム部の先端側に回動可能に保持されるとともに前記ハンドの基端側に固定され、
前記第4減速機の入力部は、前記第4減速機の出力部に回転可能に保持され、
前記内歯車は、前記第2アーム部に回動可能に保持されていることを特徴とする請求項5記載の産業用ロボット。 - 前記第2駆動用モータは、前記第2アーム部に取り付けられ、
前記動力伝達機構は、前記第1アーム部と前記第2アーム部との連結部に配置され前記第1駆動用モータの動力が伝達される第2減速機と、第1かさ歯車と前記第1かさ歯車に噛み合うとともに互いに対向配置される第2かさ歯車および第3かさ歯車と前記第1かさ歯車を回転可能に保持する保持部材とを有し前記第2駆動用モータに連結される第3減速機と、前記第2アーム部と前記ハンドとの連結部に配置される第4減速機と、前記第2アーム部の基端側に配置され前記第2減速機の入力部に固定される第1プーリと、前記第2アーム部の先端側に配置され前記第4減速機の入力部に固定される第2プーリと、前記第2かさ歯車に固定される第3プーリと、前記第3かさ歯車に固定される第4プーリと、前記保持部材に固定される第5プーリと、前記第2駆動用モータの回転軸に固定される第6プーリとを備え、前記第1プーリと前記第3プーリとに架け渡される第1ベルトと、前記第2プーリと前記第4プーリとに架け渡される第2ベルトと、前記第5プーリと前記第6プーリとに架け渡される第3ベルトとを備えることを特徴とする請求項1記載の産業用ロボット。 - 前記第2減速機の出力部は、前記第1アーム部の先端側に回動可能に保持されるとともに前記第2アーム部の基端側に固定され、
前記第2減速機の入力部は、前記第2減速機の出力部に回転可能に保持され、
前記第4減速機の出力部は、前記第2アーム部の先端側に回動可能に保持されるとともに前記ハンドの基端側に固定され、
前記第4減速機の入力部は、前記第4減速機の出力部に回転可能に保持され、
前記保持部材は、前記第2アーム部に回動可能に保持されていることを特徴とする請求項7記載の産業用ロボット。 - 前記第1アーム部の基端側を回動可能に支持するアーム支持部材を備え、
前記第1駆動用モータは、前記第1アーム部または前記アーム支持部材に取り付けられ、
前記動力伝達機構は、さらに、前記アーム支持部材と前記第1アーム部との連結部に配置され前記第1駆動用モータに連結される第1減速機を備えることを特徴とする請求項1から8のいずれかに記載の産業用ロボット。 - 前記第1減速機の出力部は、前記第1アーム部の基端側に回動可能に保持されるとともに前記アーム支持部材に固定され、
前記第1減速機の入力部は、前記第1減速機の出力部に回転可動に保持されていることを特徴とする請求項9記載の産業用ロボット。 - 前記第2駆動用モータは、前記第2駆動用モータの回転軸を停止させるブレーキを備えることを特徴とする請求項1から10のいずれかに記載の産業用ロボット。
- 上下方向を回動の軸方向として前記第1アーム部の基端側を回動可能に支持するアーム支持部材と、上下方向を旋回の軸方向として前記アーム支持部材を旋回させるための旋回機構と、前記産業用ロボットを制御する制御部とを備えるとともに、
前記アームが伸びると前記搬送対象物が収容される収容部の中に前記ハンドが入り、前記アームが縮むと前記収容部から前記搬送対象物が搬出されるように構成され、
前記搬送対象物が前記収容部内に収容されたときに前記収容部の奥側に配置される前記搬送対象物の端部を奥側端とし、前記搬送対象物が前記収容部内に収容されたときに前記収容部の手前側に配置される前記搬送対象物の端部を手前側端とし、前記搬送対象物が前記収容部内に収容されているときの前記奥側端の中心と前記手前側端の中心とを通過する線を基準線とすると、
前記収容部内に収容される前記搬送対象物を前記ハンドに搭載可能な位置まで前記アームが伸びている状態では、上下方向から見たときに、前記第2アーム部と前記ハンドとの連結部に配置される前記ハンドの回動中心が前記基準線上に配置されるとともに、前記ハンドの先端部の中心が前記基準線上に配置され、
前記旋回機構によって旋回する際の前記産業用ロボットの旋回半径が最小になる位置まで前記アームが縮んでいる状態では、上下方向から見たときに、前記ハンドの回動中心と前記ハンドの先端部の中心とを結んだハンド中心線上に前記アーム支持部材の旋回中心が配置されるとともに、搬出された前記搬送対象物の前記奥側端の中心が前記基準線上に配置され、
前記制御部は、前記旋回機構によって前記アーム支持部材を旋回させ、かつ、前記ハンドを回動させながら、前記アームを伸縮させて、前記搬送対象物を搬送することを特徴とする請求項1から11のいずれかに記載の産業用ロボット。 - 上下方向を回動の軸方向として前記第1アーム部の基端側を回動可能に支持するアーム支持部材と、上下方向を旋回の軸方向として前記アーム支持部材を旋回させるための旋回機構と、前記産業用ロボットを制御する制御部とを備えるとともに、
前記アームが伸びると前記搬送対象物が収容される収容部の中に前記ハンドが入り、前記アームが縮むと前記収容部から前記搬送対象物が搬出されるように構成され、
前記搬送対象物が前記収容部内に収容されたときに前記収容部の奥側に配置される前記搬送対象物の端部を奥側端とし、前記搬送対象物が前記収容部内に収容されたときに前記収容部の手前側に配置される前記搬送対象物の端部を手前側端とし、前記搬送対象物が前記収容部内に収容されているときの前記奥側端の中心と前記手前側端の中心とを通過する線を基準線とすると、
前記制御部は、前記産業用ロボットの教示を行っている場合に、前記収容部内に収容される前記搬送対象物を前記ハンドに搭載可能な位置まで前記アームが伸びている状態で、上下方向から見たときに、前記第2アーム部と前記ハンドとの連結部に配置される前記ハンドの回動中心および前記ハンドの先端部の中心が前記基準線上に配置されており、かつ、前記ハンドの回動中心と前記ハンドの先端部の中心とを結んだハンド中心線上に前記旋回機構によって旋回する前記アーム支持部材の旋回中心が配置されていなければ、前記ハンドの回動中心および前記ハンドの先端部の中心が前記基準線上に配置された状態を維持しつつ、前記アーム支持部材の旋回中心が前記ハンド中心線上に配置されるように、前記産業用ロボットを動作させることを特徴とする請求項1から12のいずれかに記載の産業用ロボット。 - 上下方向を回動の軸方向として前記第1アーム部の基端側を回動可能に支持するアーム支持部材と、上下方向を旋回の軸方向として前記アーム支持部材を旋回させるための旋回機構とを備える請求項1から11のいずれかに記載の産業用ロボットの制御方法であって、
前記搬送対象物が収容される収容部内に前記搬送対象物が収容されたときに前記収容部の奥側に配置される前記搬送対象物の端部を奥側端とし、前記搬送対象物が前記収容部内に収容されたときに前記収容部の手前側に配置される前記搬送対象物の端部を手前側端とし、前記搬送対象物が前記収容部内に収容されているときの前記奥側端の中心と前記手前側端の中心とを通過する線を基準線とすると、
上下方向から見たときに、前記第2アーム部と前記ハンドとの連結部に配置される前記ハンドの回動中心が前記基準線上に配置されるとともに、前記ハンドの先端部の中心が前記基準線上に配置されるように、前記収容部に収容される前記搬送対象物を前記ハンドに搭載可能な位置まで前記アームが伸び、
上下方向から見たときに、前記ハンドの回動中心と前記ハンドの先端部の中心とを結んだハンド中心線上に前記旋回機構によって旋回する前記アーム支持部材の旋回中心が配置されるとともに、搬出された前記搬送対象物の前記奥側端の中心が前記基準線上に配置されるように、前記旋回機構によって旋回する際の前記産業用ロボットの旋回半径が最小になる位置まで前記アームが縮み、
前記旋回機構によって前記アーム支持部材を旋回させ、かつ、前記ハンドを回動させながら、前記アームを伸縮させて、前記搬送対象物を搬送することを特徴とする産業用ロボットの制御方法。 - 上下方向を回動の軸方向として前記第1アーム部の基端側を回動可能に支持するアーム支持部材と、上下方向を旋回の軸方向として前記アーム支持部材を旋回させるための旋回機構とを備える請求項1から12のいずれかに記載の産業用ロボットの教示方法であって、
前記搬送対象物が収容される収容部内に前記搬送対象物が収容されたときに前記収容部の奥側に配置される前記搬送対象物の端部を奥側端とし、前記搬送対象物が前記収容部内に収容されたときに前記収容部の手前側に配置される前記搬送対象物の端部を手前側端とし、前記搬送対象物が前記収容部内に収容されているときの前記奥側端の中心と前記手前側端の中心とを通過する線を基準線とすると、
前記収容部内に収容された前記搬送対象物を前記ハンドに搭載可能な位置まで前記アームが伸びている状態で、上下方向から見たときに、前記第2アーム部と前記ハンドとの連結部に配置される前記ハンドの回動中心および前記ハンドの先端部の中心が前記基準線上に配置されており、かつ、前記ハンドの回動中心と前記ハンドの先端部の中心とを結んだハンド中心線上に前記旋回機構によって旋回する前記アーム支持部材の旋回中心が配置されていなければ、前記ハンドの回動中心および前記ハンドの先端部の中心が前記基準線上に配置された状態を維持しつつ、前記アーム支持部材の旋回中心が前記ハンド中心線上に配置されるように、前記産業用ロボットを動作させることを特徴とする産業用ロボットの教示方法。 - 前記収容部内に収容された前記搬送対象物を前記ハンドに搭載可能な位置まで前記アームが伸びている状態で、前記ハンドを回動させながら、前記搬送対象物と前記ハンドとの向きを合わせることを特徴とする請求項15記載の産業用ロボットの教示方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012524516A JP5798118B2 (ja) | 2010-07-14 | 2011-07-01 | 産業用ロボット、産業用ロボットの制御方法および産業用ロボットの教示方法 |
CN201180034062.9A CN102985231B (zh) | 2010-07-14 | 2011-07-01 | 工业用机器人、工业用机器人的控制方法及工业用机器人的指示方法 |
KR1020137000963A KR101452650B1 (ko) | 2010-07-14 | 2011-07-01 | 산업용 로보트, 산업용 로보트의 제어방법 및 산업용 로보트의 교시방법 |
TW100124830A TWI572467B (zh) | 2010-07-14 | 2011-07-13 | Industrial robots, control methods for industrial robots, and teaching methods for industrial robots |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010159770 | 2010-07-14 | ||
JP2010-159770 | 2010-07-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2012008321A1 true WO2012008321A1 (ja) | 2012-01-19 |
Family
ID=45469325
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2011/065195 WO2012008321A1 (ja) | 2010-07-14 | 2011-07-01 | 産業用ロボット、産業用ロボットの制御方法および産業用ロボットの教示方法 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP5798118B2 (ja) |
KR (1) | KR101452650B1 (ja) |
CN (3) | CN102985231B (ja) |
TW (1) | TWI572467B (ja) |
WO (1) | WO2012008321A1 (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014008579A (ja) * | 2012-06-29 | 2014-01-20 | Daihen Corp | 基板搬送装置 |
WO2014024690A1 (ja) * | 2012-08-09 | 2014-02-13 | 日本電産サンキョー株式会社 | 産業用ロボット |
JP2014034106A (ja) * | 2012-08-09 | 2014-02-24 | Nidec Sankyo Corp | 産業用ロボット |
CN110666784A (zh) * | 2018-07-03 | 2020-01-10 | 日本电产三协株式会社 | 工业用机器人 |
CN114538102A (zh) * | 2020-11-24 | 2022-05-27 | 日本电产三协株式会社 | 工业用机器人 |
JP7442825B2 (ja) | 2018-12-21 | 2024-03-05 | ホーコス株式会社 | ワーク搬入出装置 |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5927724B2 (ja) * | 2012-09-06 | 2016-06-01 | 本田技研工業株式会社 | 移動装置 |
CN104271321B (zh) * | 2013-01-07 | 2016-04-20 | 日本电产三协株式会社 | 工业用机器人 |
KR101458697B1 (ko) * | 2013-04-19 | 2014-11-05 | 현대중공업 주식회사 | 기판 이송장치 및 이를 이용한 기판 이송방법 |
KR101597776B1 (ko) * | 2014-01-13 | 2016-02-25 | 주식회사 에스에프에이 | 기판 이송 로봇 |
JP2015178161A (ja) * | 2014-03-19 | 2015-10-08 | 株式会社安川電機 | 搬送ロボットおよび搬送システム |
JP6918698B2 (ja) * | 2016-07-28 | 2021-08-11 | 日本電産サンキョー株式会社 | 産業用ロボット |
JP6786291B2 (ja) * | 2016-07-28 | 2020-11-18 | 日本電産サンキョー株式会社 | 産業用ロボット |
JP2018089765A (ja) * | 2016-12-07 | 2018-06-14 | 日本電産サンキョー株式会社 | 産業用ロボット |
CN106956290B (zh) * | 2017-04-17 | 2019-09-10 | 京东方科技集团股份有限公司 | 机械臂及其操作方法、机械臂装置及显示面板生产设备 |
JP6495405B1 (ja) * | 2017-09-29 | 2019-04-03 | 株式会社バンダイ | ロボット装置 |
TWI703188B (zh) * | 2017-12-29 | 2020-09-01 | 財團法人工業技術研究院 | 聚醯亞胺混成材料、其前驅液及其製法 |
US10995237B2 (en) | 2017-12-29 | 2021-05-04 | Industrial Technology Research Institute | Polyimide hybrid material, precursor solution and manufacture method thereof |
JP2022076060A (ja) * | 2020-11-09 | 2022-05-19 | 日本電産サンキョー株式会社 | 産業用ロボットの教示方法 |
KR102660372B1 (ko) * | 2021-12-15 | 2024-04-26 | 현대무벡스 주식회사 | 화물 자동 운반 장치 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01240288A (ja) * | 1988-03-18 | 1989-09-25 | Mitsubishi Electric Corp | 産業用ロボット |
JPH04315593A (ja) * | 1991-04-12 | 1992-11-06 | Matsushita Electric Ind Co Ltd | 産業用ロボット |
JPH09162257A (ja) * | 1995-12-05 | 1997-06-20 | Metsukusu:Kk | 薄型基板の搬送装置 |
JP2003117862A (ja) * | 2001-08-07 | 2003-04-23 | Sankyo Seiki Mfg Co Ltd | ハンドの位置合わせ方法およびその装置 |
JP2003291081A (ja) * | 2002-03-29 | 2003-10-14 | Sankyo Seiki Mfg Co Ltd | アーム駆動装置 |
JP2005005608A (ja) * | 2003-06-13 | 2005-01-06 | Ebara Corp | 基板搬送ロボットのティーチング装置及びティーチング方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62144186U (ja) * | 1986-03-06 | 1987-09-11 | ||
US6485250B2 (en) * | 1998-12-30 | 2002-11-26 | Brooks Automation Inc. | Substrate transport apparatus with multiple arms on a common axis of rotation |
JP4731267B2 (ja) * | 2005-09-29 | 2011-07-20 | 日本電産サンキョー株式会社 | ロボットのハンドおよびこれを用いたワーク搬送ロボット |
JP4605560B2 (ja) * | 2005-12-05 | 2011-01-05 | 日本電産サンキョー株式会社 | 産業用ロボット |
JP5124096B2 (ja) * | 2006-03-03 | 2013-01-23 | 川崎重工業株式会社 | 清潔空間用ロボットシステム |
JP5016302B2 (ja) * | 2006-12-01 | 2012-09-05 | 日本電産サンキョー株式会社 | アーム駆動装置及び産業用ロボット |
JP4970128B2 (ja) * | 2007-04-27 | 2012-07-04 | 日本電産サンキョー株式会社 | 産業用ロボット及び集合処理装置 |
JP5280132B2 (ja) * | 2008-08-26 | 2013-09-04 | 日本電産サンキョー株式会社 | 産業用ロボット |
JP5178432B2 (ja) * | 2008-09-26 | 2013-04-10 | 日本電産サンキョー株式会社 | 産業用ロボット |
-
2011
- 2011-07-01 WO PCT/JP2011/065195 patent/WO2012008321A1/ja active Application Filing
- 2011-07-01 KR KR1020137000963A patent/KR101452650B1/ko active IP Right Grant
- 2011-07-01 CN CN201180034062.9A patent/CN102985231B/zh active Active
- 2011-07-01 CN CN201510028120.7A patent/CN104626133B/zh active Active
- 2011-07-01 JP JP2012524516A patent/JP5798118B2/ja active Active
- 2011-07-01 CN CN201510028045.4A patent/CN104647363B/zh active Active
- 2011-07-13 TW TW100124830A patent/TWI572467B/zh active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01240288A (ja) * | 1988-03-18 | 1989-09-25 | Mitsubishi Electric Corp | 産業用ロボット |
JPH04315593A (ja) * | 1991-04-12 | 1992-11-06 | Matsushita Electric Ind Co Ltd | 産業用ロボット |
JPH09162257A (ja) * | 1995-12-05 | 1997-06-20 | Metsukusu:Kk | 薄型基板の搬送装置 |
JP2003117862A (ja) * | 2001-08-07 | 2003-04-23 | Sankyo Seiki Mfg Co Ltd | ハンドの位置合わせ方法およびその装置 |
JP2003291081A (ja) * | 2002-03-29 | 2003-10-14 | Sankyo Seiki Mfg Co Ltd | アーム駆動装置 |
JP2005005608A (ja) * | 2003-06-13 | 2005-01-06 | Ebara Corp | 基板搬送ロボットのティーチング装置及びティーチング方法 |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014008579A (ja) * | 2012-06-29 | 2014-01-20 | Daihen Corp | 基板搬送装置 |
US10226863B2 (en) | 2012-08-09 | 2019-03-12 | Nidec Sankyo Corporation | Industrial robot |
JP2014034106A (ja) * | 2012-08-09 | 2014-02-24 | Nidec Sankyo Corp | 産業用ロボット |
JP2014034109A (ja) * | 2012-08-09 | 2014-02-24 | Nidec Sankyo Corp | 産業用ロボットおよび産業用ロボットの制御方法 |
TWI581927B (zh) * | 2012-08-09 | 2017-05-11 | Nidec Sankyo Corp | Industrial robots |
US9764461B2 (en) | 2012-08-09 | 2017-09-19 | Nidec Sankyo Corporation | Industrial robot |
WO2014024690A1 (ja) * | 2012-08-09 | 2014-02-13 | 日本電産サンキョー株式会社 | 産業用ロボット |
US10265845B2 (en) | 2012-08-09 | 2019-04-23 | Nidec Sankyo Corporation | Industrial robot |
US10350750B2 (en) | 2012-08-09 | 2019-07-16 | Nidec Sankyo Corporation | Industrial robot |
CN110666784A (zh) * | 2018-07-03 | 2020-01-10 | 日本电产三协株式会社 | 工业用机器人 |
CN110666784B (zh) * | 2018-07-03 | 2022-06-07 | 日本电产三协株式会社 | 工业用机器人 |
JP7442825B2 (ja) | 2018-12-21 | 2024-03-05 | ホーコス株式会社 | ワーク搬入出装置 |
CN114538102A (zh) * | 2020-11-24 | 2022-05-27 | 日本电产三协株式会社 | 工业用机器人 |
CN114538102B (zh) * | 2020-11-24 | 2024-02-06 | 日本电产三协株式会社 | 工业用机器人 |
Also Published As
Publication number | Publication date |
---|---|
CN104626133A (zh) | 2015-05-20 |
JPWO2012008321A1 (ja) | 2013-09-09 |
KR101452650B1 (ko) | 2014-10-22 |
JP5798118B2 (ja) | 2015-10-21 |
CN104626133B (zh) | 2016-08-24 |
TW201208839A (en) | 2012-03-01 |
CN104647363A (zh) | 2015-05-27 |
KR20130031335A (ko) | 2013-03-28 |
TWI572467B (zh) | 2017-03-01 |
CN104647363B (zh) | 2016-04-20 |
CN102985231B (zh) | 2015-06-10 |
CN102985231A (zh) | 2013-03-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5798118B2 (ja) | 産業用ロボット、産業用ロボットの制御方法および産業用ロボットの教示方法 | |
JP6110636B2 (ja) | 産業用ロボット | |
US20110135437A1 (en) | Horizontal multi-joint robot and transportation apparatus including the same | |
JP5199117B2 (ja) | ワーク搬送システム | |
JP4970128B2 (ja) | 産業用ロボット及び集合処理装置 | |
JP5462064B2 (ja) | 産業用ロボット | |
US8882431B2 (en) | Substrate transfer robot and substrate transfer system | |
JP5578973B2 (ja) | 産業用ロボット | |
JP4852719B2 (ja) | 多関節型ロボット | |
JPH1133950A (ja) | 2アーム方式の搬送用ロボット装置 | |
JP2006289555A (ja) | 多関節型ロボット | |
JP4697791B2 (ja) | 基板搬送装置 | |
JP4648161B2 (ja) | ダブルアーム列式基板搬送用ロボット | |
JP6128085B2 (ja) | 昇降装置および補助駆動ユニット | |
JP6588192B2 (ja) | ワーク搬送装置 | |
JP5921902B2 (ja) | ロボット制御装置 | |
CN115351788A (zh) | 一种工业用机器人 | |
JP2009208174A (ja) | 産業用ロボット | |
JP6144978B2 (ja) | 搬送装置 | |
JP5309324B2 (ja) | 基板搬送システム | |
JP2001212776A (ja) | マニプレータ |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 201180034062.9 Country of ref document: CN |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 11806651 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 20137000963 Country of ref document: KR Kind code of ref document: A |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
ENP | Entry into the national phase |
Ref document number: 2012524516 Country of ref document: JP Kind code of ref document: A |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 11806651 Country of ref document: EP Kind code of ref document: A1 |