KR101737680B1 - 기판 처리 장치, 디바이스 제조 시스템 및 디바이스 제조 방법 - Google Patents
기판 처리 장치, 디바이스 제조 시스템 및 디바이스 제조 방법 Download PDFInfo
- Publication number
- KR101737680B1 KR101737680B1 KR1020147016863A KR20147016863A KR101737680B1 KR 101737680 B1 KR101737680 B1 KR 101737680B1 KR 1020147016863 A KR1020147016863 A KR 1020147016863A KR 20147016863 A KR20147016863 A KR 20147016863A KR 101737680 B1 KR101737680 B1 KR 101737680B1
- Authority
- KR
- South Korea
- Prior art keywords
- illumination
- optical system
- projection
- substrate
- plane
- Prior art date
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70241—Optical aspects of refractive lens systems, i.e. comprising only refractive elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/22—Telecentric objectives or lens systems
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/24—Optical objectives specially designed for the purposes specified below for reproducing or copying at short object distances
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/008—Systems specially adapted to form image relays or chained systems
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/08—Catadioptric systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/08—Catadioptric systems
- G02B17/0804—Catadioptric systems using two curved mirrors
- G02B17/0812—Catadioptric systems using two curved mirrors off-axis or unobscured systems in which all of the mirrors share a common axis of rotational symmetry
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/24—Curved surfaces
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Lenses (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
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JP2011278290 | 2011-12-20 | ||
JPJP-P-2011-278290 | 2011-12-20 | ||
JP2012024058 | 2012-02-07 | ||
JPJP-P-2012-024058 | 2012-02-07 | ||
PCT/JP2012/076326 WO2013094286A1 (ja) | 2011-12-20 | 2012-10-11 | 基板処理装置、デバイス製造システム、及びデバイス製造方法 |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020177010558A Division KR101849508B1 (ko) | 2011-12-20 | 2012-10-11 | 기판 처리 장치, 디바이스 제조 시스템 및 디바이스 제조 방법 |
KR1020177010559A Division KR101848590B1 (ko) | 2011-12-20 | 2012-10-11 | 기판 처리 장치, 디바이스 제조 시스템 및 디바이스 제조 방법 |
Publications (2)
Publication Number | Publication Date |
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KR20140109892A KR20140109892A (ko) | 2014-09-16 |
KR101737680B1 true KR101737680B1 (ko) | 2017-05-18 |
Family
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Family Applications (5)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020187034105A KR101961605B1 (ko) | 2011-12-20 | 2012-10-11 | 기판 처리 장치, 디바이스 제조 시스템 및 디바이스 제조 방법 |
KR1020147016863A KR101737680B1 (ko) | 2011-12-20 | 2012-10-11 | 기판 처리 장치, 디바이스 제조 시스템 및 디바이스 제조 방법 |
KR1020187009744A KR101924309B1 (ko) | 2011-12-20 | 2012-10-11 | 기판 처리 장치, 디바이스 제조 시스템 및 디바이스 제조 방법 |
KR1020177010558A KR101849508B1 (ko) | 2011-12-20 | 2012-10-11 | 기판 처리 장치, 디바이스 제조 시스템 및 디바이스 제조 방법 |
KR1020177010559A KR101848590B1 (ko) | 2011-12-20 | 2012-10-11 | 기판 처리 장치, 디바이스 제조 시스템 및 디바이스 제조 방법 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020187034105A KR101961605B1 (ko) | 2011-12-20 | 2012-10-11 | 기판 처리 장치, 디바이스 제조 시스템 및 디바이스 제조 방법 |
Family Applications After (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020187009744A KR101924309B1 (ko) | 2011-12-20 | 2012-10-11 | 기판 처리 장치, 디바이스 제조 시스템 및 디바이스 제조 방법 |
KR1020177010558A KR101849508B1 (ko) | 2011-12-20 | 2012-10-11 | 기판 처리 장치, 디바이스 제조 시스템 및 디바이스 제조 방법 |
KR1020177010559A KR101848590B1 (ko) | 2011-12-20 | 2012-10-11 | 기판 처리 장치, 디바이스 제조 시스템 및 디바이스 제조 방법 |
Country Status (5)
Country | Link |
---|---|
JP (6) | JP6056770B2 (zh) |
KR (5) | KR101961605B1 (zh) |
CN (3) | CN105425553B (zh) |
TW (5) | TWI648601B (zh) |
WO (1) | WO2013094286A1 (zh) |
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KR101961605B1 (ko) * | 2011-12-20 | 2019-03-22 | 가부시키가이샤 니콘 | 기판 처리 장치, 디바이스 제조 시스템 및 디바이스 제조 방법 |
KR101880792B1 (ko) * | 2012-07-13 | 2018-07-20 | 가부시키가이샤 니콘 | 기판 처리 장치 및 디바이스 제조 방법 |
JP6160620B2 (ja) * | 2012-08-06 | 2017-07-12 | 株式会社ニコン | 処理装置およびデバイス製造方法 |
CN104885012B (zh) * | 2012-11-06 | 2017-07-28 | 株式会社尼康 | 偏振光分束器、基板处理装置、器件制造***及器件制造方法 |
JP6217651B2 (ja) * | 2012-12-18 | 2017-10-25 | 株式会社ニコン | 基板処理装置、デバイス製造システム及びデバイス製造方法 |
CN110451316B (zh) * | 2014-09-04 | 2021-01-05 | 株式会社尼康 | 基板处理装置 |
TW201624142A (zh) * | 2014-09-26 | 2016-07-01 | Orc Mfg Co Ltd | 直接曝光裝置 |
CN106292187A (zh) * | 2015-05-13 | 2017-01-04 | 鸿富锦精密工业(深圳)有限公司 | 曝光方法 |
US10983389B2 (en) | 2016-03-04 | 2021-04-20 | Applied Materials, Inc. | Wire grid polarizer manufacturing method |
JP6700936B2 (ja) * | 2016-04-25 | 2020-05-27 | キヤノン株式会社 | インプリント装置、インプリント方法、および物品の製造方法 |
EP3485322A4 (en) * | 2016-07-15 | 2020-08-19 | Light Field Lab, Inc. | SELECTIVE PROPAGATION OF ENERGY IN A LUMINOUS FIELD AND HOLOGRAPHIC WAVE GUIDE NETWORKS |
KR101856500B1 (ko) * | 2016-07-26 | 2018-06-21 | 재단법인 대구경북첨단의료산업진흥재단 | 레이저 가공된 포토마스크를 이용한 미세유체칩 제조방법 |
AU2019206621A1 (en) | 2018-01-14 | 2020-07-30 | Light Field Lab, Inc. | Systems and methods for transverse energy localization in energy relays using ordered structures |
DE102019128198B3 (de) * | 2019-10-18 | 2021-02-25 | Laser Imaging Systems Gmbh | Vorrichtung zur Mustereinbringung mittels Strahlung an einem aufgewickelten Endlossubstrat |
TWI730831B (zh) * | 2020-07-02 | 2021-06-11 | 光群雷射科技股份有限公司 | 增亮膜的轉印式製造方法及增亮膜 |
JP2022023357A (ja) | 2020-07-27 | 2022-02-08 | デンカ株式会社 | シグナルの低下を改善した検査試薬 |
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KR101961605B1 (ko) * | 2011-12-20 | 2019-03-22 | 가부시키가이샤 니콘 | 기판 처리 장치, 디바이스 제조 시스템 및 디바이스 제조 방법 |
JP6217651B2 (ja) * | 2012-12-18 | 2017-10-25 | 株式会社ニコン | 基板処理装置、デバイス製造システム及びデバイス製造方法 |
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2012
- 2012-10-11 KR KR1020187034105A patent/KR101961605B1/ko active IP Right Grant
- 2012-10-11 CN CN201510964816.0A patent/CN105425553B/zh active Active
- 2012-10-11 CN CN201710321582.7A patent/CN107255858B/zh active Active
- 2012-10-11 KR KR1020147016863A patent/KR101737680B1/ko active Application Filing
- 2012-10-11 WO PCT/JP2012/076326 patent/WO2013094286A1/ja active Application Filing
- 2012-10-11 JP JP2013550164A patent/JP6056770B2/ja active Active
- 2012-10-11 KR KR1020187009744A patent/KR101924309B1/ko active IP Right Grant
- 2012-10-11 KR KR1020177010558A patent/KR101849508B1/ko active IP Right Grant
- 2012-10-11 KR KR1020177010559A patent/KR101848590B1/ko active IP Right Grant
- 2012-10-11 CN CN201280063563.4A patent/CN104011597B/zh active Active
- 2012-11-29 TW TW106109149A patent/TWI648601B/zh active
- 2012-11-29 TW TW107144809A patent/TWI691805B/zh active
- 2012-11-29 TW TW109108967A patent/TWI709830B/zh active
- 2012-11-29 TW TW107144810A patent/TWI668526B/zh active
- 2012-11-29 TW TW101144692A patent/TWI585541B/zh active
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2016
- 2016-12-06 JP JP2016236579A patent/JP6323542B2/ja active Active
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- 2017-11-17 JP JP2017221825A patent/JP6436216B2/ja active Active
- 2017-11-17 JP JP2017221826A patent/JP6512265B2/ja active Active
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- 2019-04-03 JP JP2019071211A patent/JP6677333B2/ja active Active
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- 2020-03-03 JP JP2020035758A patent/JP6927348B2/ja active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2006098719A (ja) * | 2004-09-29 | 2006-04-13 | Fuji Photo Film Co Ltd | 露光装置 |
JP2011203311A (ja) * | 2010-03-24 | 2011-10-13 | Nikon Corp | マスクホルダ、円筒型マスク、露光装置、基板処理装置及びデバイス製造方法 |
JP2011221538A (ja) * | 2010-04-13 | 2011-11-04 | Nikon Corp | マスクケース、マスクユニット、露光装置、基板処理装置及びデバイス製造方法 |
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