JPWO2009144948A1 - 試験用ユニットおよび試験システム - Google Patents

試験用ユニットおよび試験システム Download PDF

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Publication number
JPWO2009144948A1
JPWO2009144948A1 JP2010514379A JP2010514379A JPWO2009144948A1 JP WO2009144948 A1 JPWO2009144948 A1 JP WO2009144948A1 JP 2010514379 A JP2010514379 A JP 2010514379A JP 2010514379 A JP2010514379 A JP 2010514379A JP WO2009144948 A1 JPWO2009144948 A1 JP WO2009144948A1
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JP
Japan
Prior art keywords
test
unit
power supply
semiconductor chip
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2010514379A
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English (en)
Japanese (ja)
Inventor
芳雄 甲元
芳雄 甲元
芳春 梅村
芳春 梅村
新一 濱口
新一 濱口
康男 徳永
康男 徳永
康 川口
康 川口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
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Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Publication of JPWO2009144948A1 publication Critical patent/JPWO2009144948A1/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/3185—Reconfiguring for testing, e.g. LSSD, partitioning
    • G01R31/318505—Test of Modular systems, e.g. Wafers, MCM's
    • G01R31/318511—Wafer Test
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/30—Marginal testing, e.g. by varying supply voltage
    • G01R31/3004—Current or voltage test
    • G01R31/3008—Quiescent current [IDDQ] test or leakage current test

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
JP2010514379A 2008-05-30 2009-05-28 試験用ユニットおよび試験システム Pending JPWO2009144948A1 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPPCT/JP2008/060079 2008-05-30
PCT/JP2008/060079 WO2009144828A1 (ja) 2008-05-30 2008-05-30 試験用ウエハユニットおよび試験システム
PCT/JP2009/002370 WO2009144948A1 (ja) 2008-05-30 2009-05-28 試験用ユニットおよび試験システム

Publications (1)

Publication Number Publication Date
JPWO2009144948A1 true JPWO2009144948A1 (ja) 2011-10-06

Family

ID=41376727

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010514379A Pending JPWO2009144948A1 (ja) 2008-05-30 2009-05-28 試験用ユニットおよび試験システム

Country Status (3)

Country Link
JP (1) JPWO2009144948A1 (zh)
TW (1) TWI393200B (zh)
WO (2) WO2009144828A1 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1289565B1 (en) 2000-06-02 2015-04-22 Bracco Suisse SA Compounds for targeting endothelial cells
US8384411B2 (en) 2009-12-18 2013-02-26 Tektronix, Inc. Method and device for measuring inter-chip signals
CN110634840B (zh) 2019-09-24 2021-08-20 京东方科技集团股份有限公司 检测基板及其制备方法、检测装置和检测方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1144709A (ja) * 1997-07-29 1999-02-16 Texas Instr Japan Ltd プローブカード
JPH11214455A (ja) * 1997-10-20 1999-08-06 Matsushita Electric Ind Co Ltd プローブカード
JPH11274252A (ja) * 1998-03-19 1999-10-08 Mitsubishi Electric Corp 半導体装置の検査装置及びその検査方法
JP2000074986A (ja) * 1998-08-31 2000-03-14 Ando Electric Co Ltd デバイス試験装置
JP2002156403A (ja) * 2000-11-20 2002-05-31 Advantest Corp 電子デバイスの試験装置
JP2007240376A (ja) * 2006-03-09 2007-09-20 Matsushita Electric Ind Co Ltd 半導体集積回路の静止電源電流検査方法および装置
WO2007146581A2 (en) * 2006-06-06 2007-12-21 Formfactor, Inc. Method of expanding tester drive and measurement capability

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW518701B (en) * 2000-04-19 2003-01-21 Samsung Electronics Co Ltd Interface board and method for testing semiconductor integrated circuit device by using the interface board
JP4708269B2 (ja) * 2006-06-22 2011-06-22 シャープ株式会社 半導体装置、及び半導体装置の検査方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1144709A (ja) * 1997-07-29 1999-02-16 Texas Instr Japan Ltd プローブカード
JPH11214455A (ja) * 1997-10-20 1999-08-06 Matsushita Electric Ind Co Ltd プローブカード
JPH11274252A (ja) * 1998-03-19 1999-10-08 Mitsubishi Electric Corp 半導体装置の検査装置及びその検査方法
JP2000074986A (ja) * 1998-08-31 2000-03-14 Ando Electric Co Ltd デバイス試験装置
JP2002156403A (ja) * 2000-11-20 2002-05-31 Advantest Corp 電子デバイスの試験装置
JP2007240376A (ja) * 2006-03-09 2007-09-20 Matsushita Electric Ind Co Ltd 半導体集積回路の静止電源電流検査方法および装置
WO2007146581A2 (en) * 2006-06-06 2007-12-21 Formfactor, Inc. Method of expanding tester drive and measurement capability

Also Published As

Publication number Publication date
WO2009144828A1 (ja) 2009-12-03
TW200952107A (en) 2009-12-16
WO2009144948A1 (ja) 2009-12-03
TWI393200B (zh) 2013-04-11

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