JPS5472973A - Rotary applying unit - Google Patents

Rotary applying unit

Info

Publication number
JPS5472973A
JPS5472973A JP13997877A JP13997877A JPS5472973A JP S5472973 A JPS5472973 A JP S5472973A JP 13997877 A JP13997877 A JP 13997877A JP 13997877 A JP13997877 A JP 13997877A JP S5472973 A JPS5472973 A JP S5472973A
Authority
JP
Japan
Prior art keywords
wafer
applying unit
container
applied body
sticking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13997877A
Other languages
English (en)
Inventor
Tamotsu Sasaki
Toshio Nonaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13997877A priority Critical patent/JPS5472973A/ja
Publication of JPS5472973A publication Critical patent/JPS5472973A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP13997877A 1977-11-24 1977-11-24 Rotary applying unit Pending JPS5472973A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13997877A JPS5472973A (en) 1977-11-24 1977-11-24 Rotary applying unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13997877A JPS5472973A (en) 1977-11-24 1977-11-24 Rotary applying unit

Publications (1)

Publication Number Publication Date
JPS5472973A true JPS5472973A (en) 1979-06-11

Family

ID=15258088

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13997877A Pending JPS5472973A (en) 1977-11-24 1977-11-24 Rotary applying unit

Country Status (1)

Country Link
JP (1) JPS5472973A (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57121227A (en) * 1981-01-20 1982-07-28 Toshiba Corp Resist applying device
JPS592134U (ja) * 1982-06-28 1984-01-09 株式会社東芝 回転塗布装置
JPS6146028A (ja) * 1984-08-10 1986-03-06 Fujitsu Ltd レジスト塗布装置
JPS62140674A (ja) * 1985-12-12 1987-06-24 Matsushita Electric Ind Co Ltd レジスト塗布装置
JPS6470168A (en) * 1987-09-11 1989-03-15 Hitachi Ltd Liquid chemical applicator
JPH01254277A (ja) * 1988-03-31 1989-10-11 Matsushita Electric Ind Co Ltd スピナー回転処理装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57121227A (en) * 1981-01-20 1982-07-28 Toshiba Corp Resist applying device
JPS6217851B2 (ja) * 1981-01-20 1987-04-20 Tokyo Shibaura Electric Co
JPS592134U (ja) * 1982-06-28 1984-01-09 株式会社東芝 回転塗布装置
JPS6339966Y2 (ja) * 1982-06-28 1988-10-19
JPS6146028A (ja) * 1984-08-10 1986-03-06 Fujitsu Ltd レジスト塗布装置
JPS62140674A (ja) * 1985-12-12 1987-06-24 Matsushita Electric Ind Co Ltd レジスト塗布装置
JPS6470168A (en) * 1987-09-11 1989-03-15 Hitachi Ltd Liquid chemical applicator
JPH01254277A (ja) * 1988-03-31 1989-10-11 Matsushita Electric Ind Co Ltd スピナー回転処理装置

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