JPS5472973A - Rotary applying unit - Google Patents
Rotary applying unitInfo
- Publication number
- JPS5472973A JPS5472973A JP13997877A JP13997877A JPS5472973A JP S5472973 A JPS5472973 A JP S5472973A JP 13997877 A JP13997877 A JP 13997877A JP 13997877 A JP13997877 A JP 13997877A JP S5472973 A JPS5472973 A JP S5472973A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- applying unit
- container
- applied body
- sticking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13997877A JPS5472973A (en) | 1977-11-24 | 1977-11-24 | Rotary applying unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13997877A JPS5472973A (en) | 1977-11-24 | 1977-11-24 | Rotary applying unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5472973A true JPS5472973A (en) | 1979-06-11 |
Family
ID=15258088
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13997877A Pending JPS5472973A (en) | 1977-11-24 | 1977-11-24 | Rotary applying unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5472973A (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57121227A (en) * | 1981-01-20 | 1982-07-28 | Toshiba Corp | Resist applying device |
JPS592134U (ja) * | 1982-06-28 | 1984-01-09 | 株式会社東芝 | 回転塗布装置 |
JPS6146028A (ja) * | 1984-08-10 | 1986-03-06 | Fujitsu Ltd | レジスト塗布装置 |
JPS62140674A (ja) * | 1985-12-12 | 1987-06-24 | Matsushita Electric Ind Co Ltd | レジスト塗布装置 |
JPS6470168A (en) * | 1987-09-11 | 1989-03-15 | Hitachi Ltd | Liquid chemical applicator |
JPH01254277A (ja) * | 1988-03-31 | 1989-10-11 | Matsushita Electric Ind Co Ltd | スピナー回転処理装置 |
-
1977
- 1977-11-24 JP JP13997877A patent/JPS5472973A/ja active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57121227A (en) * | 1981-01-20 | 1982-07-28 | Toshiba Corp | Resist applying device |
JPS6217851B2 (ja) * | 1981-01-20 | 1987-04-20 | Tokyo Shibaura Electric Co | |
JPS592134U (ja) * | 1982-06-28 | 1984-01-09 | 株式会社東芝 | 回転塗布装置 |
JPS6339966Y2 (ja) * | 1982-06-28 | 1988-10-19 | ||
JPS6146028A (ja) * | 1984-08-10 | 1986-03-06 | Fujitsu Ltd | レジスト塗布装置 |
JPS62140674A (ja) * | 1985-12-12 | 1987-06-24 | Matsushita Electric Ind Co Ltd | レジスト塗布装置 |
JPS6470168A (en) * | 1987-09-11 | 1989-03-15 | Hitachi Ltd | Liquid chemical applicator |
JPH01254277A (ja) * | 1988-03-31 | 1989-10-11 | Matsushita Electric Ind Co Ltd | スピナー回転処理装置 |
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