JPH0477719B2 - - Google Patents
Info
- Publication number
- JPH0477719B2 JPH0477719B2 JP60134350A JP13435085A JPH0477719B2 JP H0477719 B2 JPH0477719 B2 JP H0477719B2 JP 60134350 A JP60134350 A JP 60134350A JP 13435085 A JP13435085 A JP 13435085A JP H0477719 B2 JPH0477719 B2 JP H0477719B2
- Authority
- JP
- Japan
- Prior art keywords
- silicon nitride
- frm
- ammonia
- polycarbosilane
- ammonia gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 20
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 20
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 19
- 238000010304 firing Methods 0.000 claims description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 9
- 229920003257 polycarbosilane Polymers 0.000 claims description 8
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 239000000843 powder Substances 0.000 claims description 2
- 239000000835 fiber Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 229910021529 ammonia Inorganic materials 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000001125 extrusion Methods 0.000 description 2
- 238000005242 forging Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 239000000571 coke Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 239000012779 reinforcing material Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000005049 silicon tetrachloride Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
- C04B35/589—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained from Si-containing polymer precursors or organosilicon monomers
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/005—Growth of whiskers or needles
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/38—Nitrides
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Metallurgy (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Structural Engineering (AREA)
- Inorganic Fibers (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Ceramic Products (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60134350A JPS61295298A (ja) | 1985-06-21 | 1985-06-21 | 窒化ケイ素の製造方法 |
GB08613939A GB2178417B (en) | 1985-06-21 | 1986-06-09 | Process for production of silicon nitride |
DE19863619888 DE3619888A1 (de) | 1985-06-21 | 1986-06-13 | Verfahren zur herstellung von siliciumnitrid |
CA000512074A CA1247326A (fr) | 1985-06-21 | 1986-06-20 | Procede de production de nitrure de silicium |
FR868608925A FR2583734B1 (fr) | 1985-06-21 | 1986-06-20 | Procede pour la production de nitrure de silicium a partir de polycarbosilane. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60134350A JPS61295298A (ja) | 1985-06-21 | 1985-06-21 | 窒化ケイ素の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61295298A JPS61295298A (ja) | 1986-12-26 |
JPH0477719B2 true JPH0477719B2 (fr) | 1992-12-09 |
Family
ID=15126305
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60134350A Granted JPS61295298A (ja) | 1985-06-21 | 1985-06-21 | 窒化ケイ素の製造方法 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPS61295298A (fr) |
CA (1) | CA1247326A (fr) |
DE (1) | DE3619888A1 (fr) |
FR (1) | FR2583734B1 (fr) |
GB (1) | GB2178417B (fr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3707225A1 (de) * | 1987-03-06 | 1988-09-15 | Wacker Chemie Gmbh | Verfahren zur herstellung von siliciumcarbidfaser |
US5814290A (en) * | 1995-07-24 | 1998-09-29 | Hyperion Catalysis International | Silicon nitride nanowhiskers and method of making same |
CN102659086B (zh) * | 2012-05-04 | 2014-08-20 | 中国人民解放军国防科学技术大学 | 一种氮化硅纳米纤维毡的制备方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3399979A (en) * | 1963-11-01 | 1968-09-03 | Union Carbide Corp | Process for producing metal nitride fibers, textiles and shapes |
US4097294A (en) * | 1976-08-23 | 1978-06-27 | The United States Of America As Represented By The Secretary Of The Navy | Preparation of ceramics |
US4761389A (en) * | 1985-04-01 | 1988-08-02 | Dow Corning Corporation | Process for preparing ceramic materials with reduced carbon levels |
-
1985
- 1985-06-21 JP JP60134350A patent/JPS61295298A/ja active Granted
-
1986
- 1986-06-09 GB GB08613939A patent/GB2178417B/en not_active Expired
- 1986-06-13 DE DE19863619888 patent/DE3619888A1/de not_active Withdrawn
- 1986-06-20 FR FR868608925A patent/FR2583734B1/fr not_active Expired - Fee Related
- 1986-06-20 CA CA000512074A patent/CA1247326A/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
DE3619888A1 (de) | 1987-01-02 |
GB2178417B (en) | 1988-10-26 |
FR2583734A1 (fr) | 1986-12-26 |
GB8613939D0 (en) | 1986-07-16 |
JPS61295298A (ja) | 1986-12-26 |
CA1247326A (fr) | 1988-12-28 |
GB2178417A (en) | 1987-02-11 |
FR2583734B1 (fr) | 1990-08-31 |
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