FR2583734B1 - Procede pour la production de nitrure de silicium a partir de polycarbosilane. - Google Patents

Procede pour la production de nitrure de silicium a partir de polycarbosilane.

Info

Publication number
FR2583734B1
FR2583734B1 FR868608925A FR8608925A FR2583734B1 FR 2583734 B1 FR2583734 B1 FR 2583734B1 FR 868608925 A FR868608925 A FR 868608925A FR 8608925 A FR8608925 A FR 8608925A FR 2583734 B1 FR2583734 B1 FR 2583734B1
Authority
FR
France
Prior art keywords
polycarbosilane
production
silicon nitride
nitride
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR868608925A
Other languages
English (en)
Other versions
FR2583734A1 (fr
Inventor
Toshikatsu Ishikawa
Haruo Teranishi
Hiroshi Ichikawa
Shiro Mitsuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Carbon Co Ltd
Original Assignee
Nippon Carbon Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Carbon Co Ltd filed Critical Nippon Carbon Co Ltd
Publication of FR2583734A1 publication Critical patent/FR2583734A1/fr
Application granted granted Critical
Publication of FR2583734B1 publication Critical patent/FR2583734B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/589—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained from Si-containing polymer precursors or organosilicon monomers
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/005—Growth of whiskers or needles
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/38—Nitrides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Structural Engineering (AREA)
  • Inorganic Fibers (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Ceramic Products (AREA)
FR868608925A 1985-06-21 1986-06-20 Procede pour la production de nitrure de silicium a partir de polycarbosilane. Expired - Fee Related FR2583734B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60134350A JPS61295298A (ja) 1985-06-21 1985-06-21 窒化ケイ素の製造方法

Publications (2)

Publication Number Publication Date
FR2583734A1 FR2583734A1 (fr) 1986-12-26
FR2583734B1 true FR2583734B1 (fr) 1990-08-31

Family

ID=15126305

Family Applications (1)

Application Number Title Priority Date Filing Date
FR868608925A Expired - Fee Related FR2583734B1 (fr) 1985-06-21 1986-06-20 Procede pour la production de nitrure de silicium a partir de polycarbosilane.

Country Status (5)

Country Link
JP (1) JPS61295298A (fr)
CA (1) CA1247326A (fr)
DE (1) DE3619888A1 (fr)
FR (1) FR2583734B1 (fr)
GB (1) GB2178417B (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3707225A1 (de) * 1987-03-06 1988-09-15 Wacker Chemie Gmbh Verfahren zur herstellung von siliciumcarbidfaser
US5814290A (en) * 1995-07-24 1998-09-29 Hyperion Catalysis International Silicon nitride nanowhiskers and method of making same
CN102659086B (zh) * 2012-05-04 2014-08-20 中国人民解放军国防科学技术大学 一种氮化硅纳米纤维毡的制备方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3399979A (en) * 1963-11-01 1968-09-03 Union Carbide Corp Process for producing metal nitride fibers, textiles and shapes
US4097294A (en) * 1976-08-23 1978-06-27 The United States Of America As Represented By The Secretary Of The Navy Preparation of ceramics
US4761389A (en) * 1985-04-01 1988-08-02 Dow Corning Corporation Process for preparing ceramic materials with reduced carbon levels

Also Published As

Publication number Publication date
GB2178417B (en) 1988-10-26
CA1247326A (fr) 1988-12-28
GB8613939D0 (en) 1986-07-16
DE3619888A1 (de) 1987-01-02
FR2583734A1 (fr) 1986-12-26
JPH0477719B2 (fr) 1992-12-09
JPS61295298A (ja) 1986-12-26
GB2178417A (en) 1987-02-11

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Legal Events

Date Code Title Description
ST Notification of lapse