DE3619888A1 - Verfahren zur herstellung von siliciumnitrid - Google Patents

Verfahren zur herstellung von siliciumnitrid

Info

Publication number
DE3619888A1
DE3619888A1 DE19863619888 DE3619888A DE3619888A1 DE 3619888 A1 DE3619888 A1 DE 3619888A1 DE 19863619888 DE19863619888 DE 19863619888 DE 3619888 A DE3619888 A DE 3619888A DE 3619888 A1 DE3619888 A1 DE 3619888A1
Authority
DE
Germany
Prior art keywords
silicon nitride
polycarbosilane
frm
whisker
ammonia
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19863619888
Other languages
German (de)
English (en)
Inventor
Toshikatsu Ishikawa
Haruo Teranishi
Hiroshi Ichikawa
Shiro Mitsuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Carbon Co Ltd
Original Assignee
Nippon Carbon Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Carbon Co Ltd filed Critical Nippon Carbon Co Ltd
Publication of DE3619888A1 publication Critical patent/DE3619888A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/589—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained from Si-containing polymer precursors or organosilicon monomers
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/005—Growth of whiskers or needles
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/38—Nitrides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Structural Engineering (AREA)
  • Inorganic Fibers (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Ceramic Products (AREA)
DE19863619888 1985-06-21 1986-06-13 Verfahren zur herstellung von siliciumnitrid Withdrawn DE3619888A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60134350A JPS61295298A (ja) 1985-06-21 1985-06-21 窒化ケイ素の製造方法

Publications (1)

Publication Number Publication Date
DE3619888A1 true DE3619888A1 (de) 1987-01-02

Family

ID=15126305

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19863619888 Withdrawn DE3619888A1 (de) 1985-06-21 1986-06-13 Verfahren zur herstellung von siliciumnitrid

Country Status (5)

Country Link
JP (1) JPS61295298A (fr)
CA (1) CA1247326A (fr)
DE (1) DE3619888A1 (fr)
FR (1) FR2583734B1 (fr)
GB (1) GB2178417B (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3707225A1 (de) * 1987-03-06 1988-09-15 Wacker Chemie Gmbh Verfahren zur herstellung von siliciumcarbidfaser

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5814290A (en) * 1995-07-24 1998-09-29 Hyperion Catalysis International Silicon nitride nanowhiskers and method of making same
CN102659086B (zh) * 2012-05-04 2014-08-20 中国人民解放军国防科学技术大学 一种氮化硅纳米纤维毡的制备方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4097294A (en) * 1976-08-23 1978-06-27 The United States Of America As Represented By The Secretary Of The Navy Preparation of ceramics
EP0200326A1 (fr) * 1985-04-01 1986-11-05 Dow Corning Corporation Procédé de préparation de matériaux céramiques avec des teneurs en carbone réduites

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3399979A (en) * 1963-11-01 1968-09-03 Union Carbide Corp Process for producing metal nitride fibers, textiles and shapes

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4097294A (en) * 1976-08-23 1978-06-27 The United States Of America As Represented By The Secretary Of The Navy Preparation of ceramics
EP0200326A1 (fr) * 1985-04-01 1986-11-05 Dow Corning Corporation Procédé de préparation de matériaux céramiques avec des teneurs en carbone réduites

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3707225A1 (de) * 1987-03-06 1988-09-15 Wacker Chemie Gmbh Verfahren zur herstellung von siliciumcarbidfaser

Also Published As

Publication number Publication date
GB2178417B (en) 1988-10-26
FR2583734A1 (fr) 1986-12-26
GB8613939D0 (en) 1986-07-16
JPH0477719B2 (fr) 1992-12-09
JPS61295298A (ja) 1986-12-26
CA1247326A (fr) 1988-12-28
GB2178417A (en) 1987-02-11
FR2583734B1 (fr) 1990-08-31

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8139 Disposal/non-payment of the annual fee