JPS61295298A - 窒化ケイ素の製造方法 - Google Patents

窒化ケイ素の製造方法

Info

Publication number
JPS61295298A
JPS61295298A JP60134350A JP13435085A JPS61295298A JP S61295298 A JPS61295298 A JP S61295298A JP 60134350 A JP60134350 A JP 60134350A JP 13435085 A JP13435085 A JP 13435085A JP S61295298 A JPS61295298 A JP S61295298A
Authority
JP
Japan
Prior art keywords
frm
silicon nitride
whisker
furnace
polycarbosilane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60134350A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0477719B2 (fr
Inventor
Toshiisa Ishikawa
石川 敏功
Haruo Teranishi
寺西 春夫
Hiroshi Ichikawa
宏 市川
Shiro Kono
光野 司朗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Carbon Co Ltd
Original Assignee
Nippon Carbon Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Carbon Co Ltd filed Critical Nippon Carbon Co Ltd
Priority to JP60134350A priority Critical patent/JPS61295298A/ja
Priority to GB08613939A priority patent/GB2178417B/en
Priority to DE19863619888 priority patent/DE3619888A1/de
Priority to CA000512074A priority patent/CA1247326A/fr
Priority to FR868608925A priority patent/FR2583734B1/fr
Publication of JPS61295298A publication Critical patent/JPS61295298A/ja
Publication of JPH0477719B2 publication Critical patent/JPH0477719B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/589Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained from Si-containing polymer precursors or organosilicon monomers
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/005Growth of whiskers or needles
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10Inorganic compounds or compositions
    • C30B29/38Nitrides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Structural Engineering (AREA)
  • Inorganic Fibers (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Ceramic Products (AREA)
JP60134350A 1985-06-21 1985-06-21 窒化ケイ素の製造方法 Granted JPS61295298A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP60134350A JPS61295298A (ja) 1985-06-21 1985-06-21 窒化ケイ素の製造方法
GB08613939A GB2178417B (en) 1985-06-21 1986-06-09 Process for production of silicon nitride
DE19863619888 DE3619888A1 (de) 1985-06-21 1986-06-13 Verfahren zur herstellung von siliciumnitrid
CA000512074A CA1247326A (fr) 1985-06-21 1986-06-20 Procede de production de nitrure de silicium
FR868608925A FR2583734B1 (fr) 1985-06-21 1986-06-20 Procede pour la production de nitrure de silicium a partir de polycarbosilane.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60134350A JPS61295298A (ja) 1985-06-21 1985-06-21 窒化ケイ素の製造方法

Publications (2)

Publication Number Publication Date
JPS61295298A true JPS61295298A (ja) 1986-12-26
JPH0477719B2 JPH0477719B2 (fr) 1992-12-09

Family

ID=15126305

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60134350A Granted JPS61295298A (ja) 1985-06-21 1985-06-21 窒化ケイ素の製造方法

Country Status (5)

Country Link
JP (1) JPS61295298A (fr)
CA (1) CA1247326A (fr)
DE (1) DE3619888A1 (fr)
FR (1) FR2583734B1 (fr)
GB (1) GB2178417B (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3707225A1 (de) * 1987-03-06 1988-09-15 Wacker Chemie Gmbh Verfahren zur herstellung von siliciumcarbidfaser
US5814290A (en) * 1995-07-24 1998-09-29 Hyperion Catalysis International Silicon nitride nanowhiskers and method of making same
CN102659086B (zh) * 2012-05-04 2014-08-20 中国人民解放军国防科学技术大学 一种氮化硅纳米纤维毡的制备方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3399979A (en) * 1963-11-01 1968-09-03 Union Carbide Corp Process for producing metal nitride fibers, textiles and shapes
US4097294A (en) * 1976-08-23 1978-06-27 The United States Of America As Represented By The Secretary Of The Navy Preparation of ceramics
US4761389A (en) * 1985-04-01 1988-08-02 Dow Corning Corporation Process for preparing ceramic materials with reduced carbon levels

Also Published As

Publication number Publication date
DE3619888A1 (de) 1987-01-02
GB2178417B (en) 1988-10-26
FR2583734A1 (fr) 1986-12-26
GB8613939D0 (en) 1986-07-16
JPH0477719B2 (fr) 1992-12-09
CA1247326A (fr) 1988-12-28
GB2178417A (en) 1987-02-11
FR2583734B1 (fr) 1990-08-31

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