JPH037882Y2 - - Google Patents
Info
- Publication number
- JPH037882Y2 JPH037882Y2 JP1984122622U JP12262284U JPH037882Y2 JP H037882 Y2 JPH037882 Y2 JP H037882Y2 JP 1984122622 U JP1984122622 U JP 1984122622U JP 12262284 U JP12262284 U JP 12262284U JP H037882 Y2 JPH037882 Y2 JP H037882Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- sample moving
- ball
- small balls
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 7
- 239000004809 Teflon Substances 0.000 description 4
- 229920006362 Teflon® Polymers 0.000 description 4
- 238000005096 rolling process Methods 0.000 description 4
- 239000004519 grease Substances 0.000 description 3
- 230000005284 excitation Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12262284U JPS6136954U (ja) | 1984-08-10 | 1984-08-10 | 電子顕微鏡等における試料移動装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12262284U JPS6136954U (ja) | 1984-08-10 | 1984-08-10 | 電子顕微鏡等における試料移動装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6136954U JPS6136954U (ja) | 1986-03-07 |
JPH037882Y2 true JPH037882Y2 (de) | 1991-02-27 |
Family
ID=30681378
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12262284U Granted JPS6136954U (ja) | 1984-08-10 | 1984-08-10 | 電子顕微鏡等における試料移動装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6136954U (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6394486B2 (ja) * | 2015-05-08 | 2018-09-26 | 株式会社島津製作所 | X線発生装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS564237A (en) * | 1979-06-26 | 1981-01-17 | Jeol Ltd | Method of moving sample stage in exposure to electron beam |
JPS5611842A (en) * | 1979-07-09 | 1981-02-05 | Nippon Telegr & Teleph Corp <Ntt> | Sample shifting device |
-
1984
- 1984-08-10 JP JP12262284U patent/JPS6136954U/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS564237A (en) * | 1979-06-26 | 1981-01-17 | Jeol Ltd | Method of moving sample stage in exposure to electron beam |
JPS5611842A (en) * | 1979-07-09 | 1981-02-05 | Nippon Telegr & Teleph Corp <Ntt> | Sample shifting device |
Also Published As
Publication number | Publication date |
---|---|
JPS6136954U (ja) | 1986-03-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0788861A1 (de) | Unterstützungseinheit und Mechanismus für einen Tisch mit mehreren Freiheitsgraden | |
JPH07119814B2 (ja) | 微小運動用調節装置 | |
JPH037882Y2 (de) | ||
JPH0744857B2 (ja) | 圧電回転装置 | |
EP0357748B1 (de) | Gerat und verfahren zur spannungsfreien lagerung optischer bauteile | |
US6707877B2 (en) | Positioning mechanism providing precision 2-axis rotation, 1-axis translation adjustment | |
DE60204303T2 (de) | Verfahren und vorrichtung zur oberflächenorientierung | |
JPS6335989U (de) | ||
JPS6244942A (ja) | 回転傾斜試料ホルダ | |
JPS5832196Y2 (ja) | 電子顕微鏡等用試料ホルダ−軸受構造 | |
JP3590946B2 (ja) | 多自由度加工ステージ装置 | |
JPS5948509B2 (ja) | 電子顕微鏡等の試料傾斜装置 | |
EP0363473A1 (de) | Vorrichtung zur spannungsfreien lagerung eines optischen bauteils | |
JPH0326478Y2 (de) | ||
JPH0539559Y2 (de) | ||
JP3713926B2 (ja) | 焼き嵌め方法及びその装置、ならびに冷やし嵌め方法及びその装置 | |
JPS62136742A (ja) | 電子顕微鏡等の絞り装置 | |
SU956272A1 (ru) | Шарова опора исполнительного органа | |
JPS61209833A (ja) | Xyステ−ジ | |
JP2021518581A (ja) | 顕微鏡ステージ及びステージ移動機構 | |
JP2960980B2 (ja) | 電子顕微鏡の試料移動装置 | |
JPH1012172A (ja) | 電子顕微鏡用試料ステージ | |
JPS5837940B2 (ja) | 試料微動装置 | |
JP3463236B2 (ja) | 直動機構 | |
JPH04107405A (ja) | レンズ鏡筒 |