JPH0326478Y2 - - Google Patents
Info
- Publication number
- JPH0326478Y2 JPH0326478Y2 JP1983058435U JP5843583U JPH0326478Y2 JP H0326478 Y2 JPH0326478 Y2 JP H0326478Y2 JP 1983058435 U JP1983058435 U JP 1983058435U JP 5843583 U JP5843583 U JP 5843583U JP H0326478 Y2 JPH0326478 Y2 JP H0326478Y2
- Authority
- JP
- Japan
- Prior art keywords
- stage
- direction moving
- substrate
- convex portion
- moving member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 12
- 230000003287 optical effect Effects 0.000 description 6
- 238000000386 microscopy Methods 0.000 description 4
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Microscoopes, Condenser (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5843583U JPS6033685U (ja) | 1983-04-19 | 1983-04-19 | 傾角ステージ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5843583U JPS6033685U (ja) | 1983-04-19 | 1983-04-19 | 傾角ステージ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6033685U JPS6033685U (ja) | 1985-03-07 |
| JPH0326478Y2 true JPH0326478Y2 (de) | 1991-06-07 |
Family
ID=30188713
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5843583U Granted JPS6033685U (ja) | 1983-04-19 | 1983-04-19 | 傾角ステージ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6033685U (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2869977B2 (ja) * | 1988-09-06 | 1999-03-10 | 日本電気株式会社 | 半導体集積回路の断面観察用治具 |
| KR101193532B1 (ko) * | 2010-10-26 | 2012-10-19 | 송무헌 | 핸들몸체의 방향이 편중된 스테이지 |
| JP6401979B2 (ja) * | 2014-09-04 | 2018-10-10 | オリンパス株式会社 | 顕微鏡システム |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS533807U (de) * | 1976-06-29 | 1978-01-13 |
-
1983
- 1983-04-19 JP JP5843583U patent/JPS6033685U/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS533807U (de) * | 1976-06-29 | 1978-01-13 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6033685U (ja) | 1985-03-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6175336A (ja) | 立体カメラ | |
| CA1270474A (en) | Support apparatus for an optical observation device | |
| JPH0326478Y2 (de) | ||
| JP2931342B2 (ja) | 光走査装置における結像レンズ保持装置 | |
| US8209766B2 (en) | Scanning probe microscope capable of measuring samples having overhang structure | |
| US7088505B2 (en) | Microscope and focusing device for a microscope | |
| CN114114581A (zh) | 用于光学设备的调节架 | |
| JPS6116167B2 (de) | ||
| JP2520950Y2 (ja) | 二光束干渉用対物レンズ | |
| JP3897893B2 (ja) | 変位拡大装置およびこれを用いた微小領域走査装置 | |
| JP2539541B2 (ja) | 電子顕微鏡試料傾斜装置 | |
| JP2000298239A (ja) | 顕微鏡用ｚ軸微動機構 | |
| JP2604942Y2 (ja) | 対物レンズ交換機構 | |
| JPS5948509B2 (ja) | 電子顕微鏡等の試料傾斜装置 | |
| JPH06194579A (ja) | 直線微動調整可能なステージ | |
| JPH043294Y2 (de) | ||
| JPH0343648Y2 (de) | ||
| JPH0232602B2 (de) | ||
| JPS63127218A (ja) | 光線変向ミラ−の方向調整装置 | |
| JP2001504241A (ja) | 後付け可能な鏡筒中間部材 | |
| JPH0497209A (ja) | 物体の保持機構 | |
| JPS6244453Y2 (de) | ||
| JPS62136743A (ja) | 電子顕微鏡等の絞り装置 | |
| JPH0560935A (ja) | 光フアイバ光線入射位置調整装置 | |
| JPH0825135B2 (ja) | ワ−ク支持装置 |