JP6678570B2 - トレイ移送装置、トレイを移送するための選別機及びトレイを移送するためのエンドエフェクタ - Google Patents
トレイ移送装置、トレイを移送するための選別機及びトレイを移送するためのエンドエフェクタ Download PDFInfo
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- JP6678570B2 JP6678570B2 JP2016501853A JP2016501853A JP6678570B2 JP 6678570 B2 JP6678570 B2 JP 6678570B2 JP 2016501853 A JP2016501853 A JP 2016501853A JP 2016501853 A JP2016501853 A JP 2016501853A JP 6678570 B2 JP6678570 B2 JP 6678570B2
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- B25J15/0028—Gripping heads and other end effectors with movable, e.g. pivoting gripping jaw surfaces
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- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
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- B25J15/0206—Gripping heads and other end effectors servo-actuated comprising articulated grippers
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- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
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- H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
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- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
- H01L21/67781—Batch transfer of wafers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0267—Pallets
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
- G01N35/02—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor using a plurality of sample containers moved by a conveyor system past one or more treatment or analysis stations
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- G01N35/02—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor using a plurality of sample containers moved by a conveyor system past one or more treatment or analysis stations
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- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
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- Pallets (AREA)
Description
114 垂直駆動コラム
116 エンドエフェクタ
174 トレイを移送するためのシステム
P1 後退位置
Claims (19)
- トレイ移送装置であって、
垂直駆動コラムと、
前記垂直駆動コラムを回転させるための回転機構と、
前記垂直駆動コラムに取り付けられたエンドエフェクタであって、
前記エンドエフェクタは、前記垂直駆動コラムに取り付けられたエンドエフェクタベースと、
前記エンドエフェクタベースに取り付けられたスライドであって、前記スライドは、アームの間においてトレイを支持する複数の前記アームを有し、かつ前記トレイを前記エンドエフェクタベースの長さに沿って前記アームの間において摺動させることを可能にする、前記スライドと、
前記エンドエフェクタベースに取り付けられた駆動機構であって、前記駆動機構は、前記アームに対して前記エンドエフェクタベースの前記長さに沿って移動するように構成され、前記トレイを前記エンドエフェクタベースの前記長さに沿って直線的に摺動させ、かつ前記スライドへ前記トレイをロードさせる又は前記スライドから前記トレイをアンロードさせることを可能にする前記駆動機構と、
前記駆動機構に取り付けられたグリップアセンブリであって、前記グリップアセンブリは、
グリップ本体と、
前記グリップ本体に取り付けられ、該グリップ本体の長さに沿って移動するためのピストン機構と、
前記ピストン機構に取り付けられ、該ピストン機構が前記グリップ本体の前記長さに沿って移動する時にピボット回転するための捩りコネクタと、
前記捩りコネクタに取り付けられたアームと、
ピボット機構を通じて前記アームに取り付けられたクランプと、
ピボット機構を通じて前記クランプに取り付けられたグリップクランプであって、前記ピストン機構が、前記グリップ本体に対して前記捩りコネクタをピボット回転させるためのものであり、前記アームが、該捩りコネクタの該ピボット回転と共に延長及び後退するためのものであり、該クランプが、該アームの該延長及び後退と共に前方及び後方に移動するためのものであり、該グリップクランプが、該クランプの前方及び後方移動と共に上方及び下方に移動するためのものである前記グリップクランプと、を含む、前記グリップアセンブリと、を含む前記エンドエフェクタと、
を含むことを特徴とするトレイ移送装置。 - 前記回転機構は、360度運動で前記垂直駆動コラムを回転させるモータを含むことを特徴とする請求項1に記載のトレイ移送装置。
- 前記エンドエフェクタベースに取り付けられ、前記トレイが前記スライドに沿って摺動する時に該トレイを支持するための複数のスライド支持体を更に含むことを特徴とする請求項1に記載のトレイ移送装置。
- 前記スライドは、前記トレイを支持するためのレールを含むことを特徴とする請求項1に記載のトレイ移送装置。
- トレイ移送装置であって、
垂直駆動コラムと、
前記垂直駆動コラムを回転させるための回転機構と、
前記垂直駆動コラムに取り付けられたエンドエフェクタであって、
前記エンドエフェクタは、前記垂直駆動コラムに取り付けられたエンドエフェクタベースと、
トレイを支持するように前記エンドエフェクタベースに取り付けられたスライドであって、前記スライドは、該トレイを前記エンドエフェクタベースの長さに沿って摺動させることを可能にする、前記スライドと、
前記エンドエフェクタベースの前記長さに沿って移動するように前記エンドエフェクタベースに取り付けられた駆動機構であって、前記駆動機構は、前記トレイを前記エンドエフェクタベースの前記長さに沿って直線的に摺動させ、かつ前記スライドへ前記トレイをロードさせる又は前記スライドから前記トレイをアンロードさせることを可能にする前記駆動機構と、を含む前記エンドエフェクタとを含み、
前記駆動機構は、前記エンドエフェクタベースに摺動可能に取り付けられたコネクタブロックと、該コネクタブロックに対して固定されたスライダブロックと、該スライダブロックに対して固定された駆動板とを含み、
グリップアセンブリは、
前記駆動板に取り付けられたグリップ本体と、
前記グリップ本体に取り付けられ、該グリップ本体の長さに沿って移動するためのピストン機構と、
前記ピストン機構に取り付けられ、該ピストン機構が前記グリップ本体の前記長さに沿って移動する時にピボット回転するための捩りコネクタと、
前記捩りコネクタに取り付けられたアームと、
ピボット機構を通じて前記アームに取り付けられたクランプと、
ピボット機構を通じて前記クランプに取り付けられたグリップクランプであって、前記ピストン機構が、前記グリップ本体に対して前記捩りコネクタをピボット回転させるためのものであり、前記アームが、該捩りコネクタの該ピボット回転と共に延長及び後退するためのものであり、該クランプが、該アームの該延長及び後退と共に前方及び後方に移動するためのものであり、該グリップクランプが、該クランプの前方及び後方移動と共に上方及び下方に移動するためのものである前記グリップクランプと、
を含む、
ことを特徴とするトレイ移送装置。 - 前記グリップアセンブリは、
グリップ口部と、
光源から光を受け入れ、かつ該光を案内して前記グリップ口部内にセンサビームを形成する光ファイバケーブルと、
を含む、
ことを特徴とする請求項1に記載のトレイ移送装置。 - トレイ移送装置であって、
垂直駆動コラムと、
前記垂直駆動コラムを回転させるための回転機構と、
前記垂直駆動コラムに取り付けられたエンドエフェクタであって、
前記エンドエフェクタは、前記垂直駆動コラムに取り付けられたエンドエフェクタベースと、
トレイを支持するように前記エンドエフェクタベースに取り付けられたスライドであって、前記スライドは、前記トレイを前記エンドエフェクタベースの長さに沿って摺動させることを可能にする、前記スライドと、
前記エンドエフェクタベースの前記長さに沿って移動するように前記エンドエフェクタベースに取り付けられた駆動機構であって、前記駆動機構は、前記トレイを前記エンドエフェクタベースの前記長さに沿って直線的に摺動させ、かつ前記スライドへ前記トレイをロードさせる又は前記スライドから前記トレイをアンロードさせることを可能にし、前記駆動機構は、前記エンドエフェクタベースに摺動可能に取り付けられたコネクタブロックと、該コネクタブロックに対して固定されたスライダブロックと、該スライダブロックに対して固定された駆動板とを含む、前記駆動機構と、
グリップアセンブリであって、前記グリップアセンブリは、
前記駆動板に取り付けられ、前記トレイの縁部を受け取って該トレイに係合するためのスロットを含むグリップ本体と、
前記グリップ本体に取り付けられ、該グリップ本体と係合する時に前記トレイをロックするために該グリップ本体の長さに沿って移動するためのピストン機構と、
を含む、前記グリップアセンブリと、を含む前記エンドエフェクタとを含むことを特徴とするトレイ移送装置。 - 直線方向に摺動するように構成された前記駆動機構を駆動するためのエンドエフェクタ駆動モータを更に含むことを特徴とする請求項1に記載のトレイ移送装置。
- トレイを移送するための選別機であって、
前記トレイをカセットにロードするか又は前記トレイを前記カセットからアンロードするためのロードポート側と、
前記トレイをインデクサーにロードするか又は前記トレイを前記インデクサーからアンロードするためのインデクサー側と、
前記トレイを前記ロードポート側と前記インデクサー側の間で移送するためのトレイ移送装置であって、該インデクサー側及び該ロードポート側が、該トレイ移送装置の両側に位置付けられる前記トレイ移送装置と、
を含み、
前記トレイ移送装置は、
回転機構と、
前記回転機構に取り付けられた垂直駆動コラムと、
垂直駆動コラムに取り付けられたエンドエフェクタと、
を含み、
前記エンドエフェクタは、
エンドエフェクタベースと、
前記トレイを支持するように前記エンドエフェクタベースに取り付けられたスライドと、
前記エンドエフェクタベースに結合された直線駆動機構と、
前記直線駆動機構に取り付けられたグリップアセンブリであって、該直線駆動機構が、前記スライドに沿って水平に移動して該グリップアセンブリを水平方向に移動するためのものであり、該グリップアセンブリが、前記トレイを前記ロードポート側においてロード又はアンロードするために、又は前記トレイを前記インデクサー側においてロード又はアンロードするために該水平方向に移動する前記グリップアセンブリと、
を含む、
ことを特徴とする選別機。 - 前記回転機構は、前記垂直駆動コラム及び前記エンドエフェクタを回転させるように構成されることを特徴とする請求項9に記載の選別機。
- 前記垂直駆動コラムは、前記エンドエフェクタを垂直に上方及び下方に駆動するように構成されることを特徴とする請求項9に記載の選別機。
- 前記スライドの上又は底に位置付けられた第2のスライドを更に含むことを特徴とする請求項9に記載の選別機。
- 前記スライドは、2つのアームを含み、前記グリップアセンブリは、該スライドの該アーム間で前記トレイを摺動させて前記トレイをロード又はアンロードするために前記水平方向に移動することを特徴とする請求項9に記載の選別機。
- 前記回転機構は、シータモータを含み、前記直線駆動機構は、駆動板を含むことを特徴とする請求項9に記載の選別機。
- 前記ロードポート側は、前記選別機の壁及び前記選別機の棚を含み、
前記インデクサー側は、前記選別機の壁及び前記選別機の棚を含む、
ことを特徴とする請求項9に記載の選別機。 - 前記ロードポート側のドアと、
前記ドアに取り付けられて前記カセット内の前記トレイの有無を感知し、該ドアの移動により該有無を感知するためのものであるセンサと、
前記ドアに取り付けられて前記カセット内の前記トレイに関する情報の画像を取り込み、該ドアの前記移動により該画像を取り込むためのものであるカメラと、
を更に含むことを特徴とする請求項9に記載の選別機。 - 前記インデクサーは、該インデクサー内又は前記選別機内の前記トレイを識別する情報を読み取るように構成される読取器に取り付けられることを特徴とする請求項9に記載の選別機。
- トレイを移送するためのエンドエフェクタであって、
エンドエフェクタベースと、
前記エンドエフェクタベースに対して摺動可能な直線駆動機構と、
前記エンドエフェクタベースに取り付けられたスライドであって、前記スライドは、アームの間においてトレイを支持する複数の前記アームを有し、前記直線駆動機構が、該スライド上で前記アームの間において該トレイを移動するように構成される前記スライドと、
前記直線駆動機構に取り付けられたグリップアセンブリであって、前記グリップアセンブリは、
グリップ本体と、
前記グリップ本体に取り付けられ、該グリップ本体の長さに沿って移動するためのピストン機構と、
前記ピストン機構に取り付けられ、該ピストン機構が前記グリップ本体の前記長さに沿って移動する時にピボット回転するための捩りコネクタと、
前記捩りコネクタに取り付けられたアームと、
ピボット機構を通じて前記アームに取り付けられたクランプと、
ピボット機構を通じて前記クランプに取り付けられたグリップクランプであって、前記ピストン機構が、前記グリップ本体に対して前記捩りコネクタをピボット回転させるためのものであり、前記アームが、該捩りコネクタの該ピボット回転と共に延長及び後退するためのものであり、該クランプが、該アームの該延長及び後退と共に前方及び後方に移動するためのものであり、該グリップクランプが、該クランプの前方及び後方移動と共に上方及び下方に移動するためのものである前記グリップクランプと、を含む、前記グリップアセンブリと、を含むことを特徴とするエンドエフェクタ。 - 前記直線駆動機構は、前記エンドエフェクタベースに摺動可能に取り付けられたスライダブロックと、該スライダブロックに取り付けられたコネクタブロックと、該コネクタブロックに取り付けられた駆動板とを含む、
ことを特徴とする請求項18に記載のエンドエフェクタ。
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