JP6080167B2 - 薄膜トランジスタ用途に用いられる砒化ガリウムに基づく材料 - Google Patents
薄膜トランジスタ用途に用いられる砒化ガリウムに基づく材料 Download PDFInfo
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- JP6080167B2 JP6080167B2 JP2013531928A JP2013531928A JP6080167B2 JP 6080167 B2 JP6080167 B2 JP 6080167B2 JP 2013531928 A JP2013531928 A JP 2013531928A JP 2013531928 A JP2013531928 A JP 2013531928A JP 6080167 B2 JP6080167 B2 JP 6080167B2
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- gaas
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- thin film
- film transistor
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Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
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Description
また、本願は以下に記載する態様を含む。
(態様1)
薄膜トランジスタ構造であって、
基板上に配置されたゲート絶縁体層と、
前記ゲート絶縁体層上に配置されたGaAsに基づく層と、
前記GaAsに基づく層に隣接して配置されたソース−ドレイン金属電極層と
を含む薄膜トランジスタ構造。
(態様2)
前記GaAsに基づく層と前記ソース−ドレイン金属電極層との間に配置された、ドープされたGaAs層
をさらに含む、態様1に記載の構造。
(態様3)
前記ドープされたGaAs層が、その内部に形成されたp−型ドーパント又はn−型ドーパントを含む、態様2に記載の構造。
(態様4)
前記p−型ドーパントが、金属亜鉛ドーパント、ジメチル亜鉛(DMZ)、ジエチル亜鉛(DEZ)、金属マグネシウムドーパント、シクロペンタジエニルマグネシウム、炭素塩化物(CCl 4 )、又は炭素臭化物(CBr 4 )からなる群より選択され、前記n−型ドーパントが、H 2 S、イオウ、シラン(SiH 4 )、ジシラン(Si 2 H 6 )、H 2 Se、及びSeからなる群より選択される、態様3に記載の構造。
(態様5)
前記GaAsに基づく層が、溶液に基づくGaAs含有前駆体から作製される、態様1に記載の構造。
(態様6)
前記溶液に基づくGaAs含有前駆体が、(NMe 2 ) 2 GaAs t BuH、Me 2 GaAs(NMe 2 ) 2 、Me 2 GaAs(SiMePh 2 ) 2 、Me 2 GaAs(SiPh 3 ) 2 、Et 2 GaAs(SiMe 2 Cy) 2 、及びMe 2 GaAs(SiMe 2 Cy) 2 からなる群より選択されるGaAs含有前駆体を含む、態様5に記載の構造。
(態様7)
前記ソース−ドレイン金属電極層上部に配置されるパッシベーション層
をさらに含む、態様1に記載の構造。
(態様8)
前記ゲート絶縁体層が、酸化ケイ素(SiO 2 )、酸窒化ケイ素(SiON)、若しくは窒化ケイ素(SiN)、高−k材料、又はHfO 2 からなる群より選択される誘電体層から作製される、態様1に記載の構造。
(態様9)
薄膜トランジスタ構造を形成する方法であって、
その上に配置された誘電体層を有する基板を処理チャンバ内に提供することと、
溶媒中に配置されたGaAs含有前駆体を前記処理チャンバに供給することと、
GaAsに基づく層を前記基板上に形成するために、前記GaAs含有前駆体の溶媒を前記処理チャンバ内で蒸発させることと、
薄膜トランジスタ構造を形成するために、前記GaAsに基づく層に隣接してソース−ドレイン金属電極層を形成することと
を含む方法。
(態様10)
前記GaAs含有前駆体が、(NMe 2 ) 2 GaAs t BuH、Me 2 GaAs(NMe 2 ) 2 、Me 2 GaAs(SiMePh 2 ) 2 、Me 2 GaAs(SiPh 3 ) 2 、Et 2 GaAs(SiMe 2 Cy) 2 、及びMe 2 GaAs(SiMe 2 Cy) 2 からなる群より選択される、態様9に記載の方法。
(態様11)
前記GaAs含有前駆体の溶媒を蒸発させることが、前記基板上に形成されたGaAsに基づく層をアニールすることをさらに含む、態様9に記載の方法。
(態様12)
前記ソース−ドレイン金属電極層を形成する前に、ドープされたGaAs層を前記GaAsに基づく層上に形成すること
をさらに含む、態様9に記載の方法。
(態様13)
前記ドープされたGaAs層が、同層中に形成されるp−型ドーパント又はn−型ドーパントを含む、態様12に記載の方法。
(態様14)
前記p−型のドーパントが、金属亜鉛ドーパント、ジメチル亜鉛(DMZ)、ジエチル亜鉛(DEZ)、金属マグネシウムドーパント、シクロペンタジエニルマグネシウム、炭素塩化物(CCl 4 )、又は炭素臭化物(CBr 4 )からなる群より選択され、前記n−型のドーパントが、H 2 S、イオウ、シラン(SiH 4 )、ジシラン(Si 2 H 6 )、H 2 Se及びSeからなる群より選択される、態様13に記載の方法。
(態様15)
電気流体力学ジェットシステム内に基板を提供することと、
前記基板上に複数のGaAs液滴を印刷することであって、前記GaAs液滴が、前記システム内に配置された溶液に基づくGaAs前駆体から供給されることと
を含む、GaAsに基づく材料を基板上に形成する方法。
Claims (12)
- 薄膜トランジスタ構造であって、
基板上に配置されたゲート絶縁体層と、
前記ゲート絶縁体層上に配置された多結晶GaAsに基づく層であって、該GaAsに基づく層は、GaAs含有前駆体を含む溶液から作成された、GaAsに基づく層であって、該多結晶GaAsに基づく層はGa元素とAs元素との比率が1.0:0.8と1:1.2の間にあるGaAsに基づく層と、
前記GaAsに基づく層に隣接して配置されたソース−ドレイン金属電極層と、
を含み、
前記GaAs含有前駆体が、(NMe 2 ) 2 GaAs t BuH、Me 2 GaAs(NMe 2 ) 2 、Me 2 GaAs(SiMePh 2 ) 2 、Me 2 GaAs(SiPh 3 ) 2 、Et 2 GaAs(SiMe 2 Cy) 2 、及びMe 2 GaAs(SiMe 2 Cy) 2 からなる群より選択されるGaAs含有前駆体を含む、薄膜トランジスタ構造。 - 前記GaAsに基づく層と前記ソース−ドレイン金属電極層との間に配置された、ドープされたGaAs層
をさらに含む、請求項1に記載の薄膜トランジスタ構造。 - 前記ドープされたGaAs層が、その内部に形成されたp−型ドーパント又はn−型ドーパントを含む、請求項2に記載の薄膜トランジスタ構造。
- 前記p−型ドーパントが、金属亜鉛ドーパント、ジメチル亜鉛(DMZ)、ジエチル亜鉛(DEZ)、金属マグネシウムドーパント、シクロペンタジエニルマグネシウム、炭素塩化物(CCl4)、又は炭素臭化物(CBr4)からなる群より選択され、前記n−型ドーパントが、H2S、イオウ、シラン(SiH4)、ジシラン(Si2H6)、H2Se、及びSeからなる群より選択される、請求項3に記載の薄膜トランジスタ構造。
- 前記ソース−ドレイン金属電極層上部に配置されるパッシベーション層
をさらに含む、請求項1に記載の薄膜トランジスタ構造。 - 前記ゲート絶縁体層が、酸化ケイ素(SiO2)、酸窒化ケイ素(SiON)、若しくは窒化ケイ素(SiN)、高−k材料、又はHfO2からなる群より選択される誘電体層から作製される、請求項1に記載の薄膜トランジスタ構造。
- 薄膜トランジスタ構造を形成する方法であって、
その上に配置された誘電体層を有する基板を処理チャンバ内に提供することと、
溶媒中に配置されたGaAs含有前駆体を前記処理チャンバに供給することと、
GaAsに基づく層を前記基板上に形成するために、前記GaAs含有前駆体の溶媒を前記処理チャンバ内で蒸発させることと、
薄膜トランジスタ構造を形成するために、前記GaAsに基づく層に隣接してソース−ドレイン金属電極層を形成することと
を含み、
前記GaAs含有前駆体が、(NMe2)2GaAstBuH、Me2GaAs(NMe2)2、Me2GaAs(SiMePh2)2、Me2GaAs(SiPh3)2、Et2GaAs(SiMe2Cy)2、及びMe2GaAs(SiMe2Cy)2からなる群より選択される、方法。 - 前記GaAs含有前駆体の溶媒を蒸発させることが、前記基板上に形成されたGaAsに基づく層をアニールすることをさらに含む、請求項7に記載の方法。
- 前記ソース−ドレイン金属電極層を形成する前に、ドープされたGaAs層を前記GaAsに基づく層上に形成すること
をさらに含む、請求項7に記載の方法。 - 前記ドープされたGaAs層が、同層中に形成されるp−型ドーパント又はn−型ドーパントを含む、請求項9に記載の方法。
- 前記p−型ドーパントが、金属亜鉛ドーパント、ジメチル亜鉛(DMZ)、ジエチル亜鉛(DEZ)、金属マグネシウムドーパント、シクロペンタジエニルマグネシウム、炭素塩化物(CCl4)、又は炭素臭化物(CBr4)からなる群より選択され、前記n−型ドーパントが、H2S、イオウ、シラン(SiH4)、ジシラン(Si2H6)、H2Se及びSeからなる群より選択される、請求項10に記載の方法。
- 電気流体力学ジェットシステム内に基板を提供することと、
前記基板上に複数のGaAs液滴を印刷することであって、前記GaAs液滴が、前記システム内に配置された溶液に基づくGaAs前駆体から供給されることと
を含む、GaAsに基づく材料を基板上に形成する方法であって、前記溶液に基づくGaAsに基づく前駆体が(NMe2)2GaAstBuH、Me2GaAs(NMe2)2、Me2GaAs(SiMePh2)2、Me2GaAs(SiPh3)2、Et2GaAs(SiMe2Cy)2、及びMe2GaAs(SiMe2Cy)2からなる群より選択される、方法。
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Families Citing this family (42)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20110099422A (ko) * | 2010-03-02 | 2011-09-08 | 삼성전자주식회사 | 박막 트랜지스터 및 이의 제조 방법 |
US8936965B2 (en) * | 2010-11-26 | 2015-01-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9018517B2 (en) * | 2011-11-07 | 2015-04-28 | International Business Machines Corporation | Silicon heterojunction photovoltaic device with wide band gap emitter |
TWI442587B (zh) * | 2011-11-11 | 2014-06-21 | Hon Hai Prec Ind Co Ltd | 外殼面板及使用該外殼面板的電子設備 |
US20130337636A1 (en) * | 2012-06-14 | 2013-12-19 | Thomas Kuech | Carbon doping of gallium arsenide via hydride vapor phase epitaxy |
WO2014052901A2 (en) * | 2012-09-29 | 2014-04-03 | Precursor Energetics, Inc. | Processes for photovoltaic absorbers with compositional gradients |
CN104798208B (zh) * | 2012-10-19 | 2018-07-10 | 佐治亚科技研究公司 | 在碳纳米管的定向阵列上形成的多层涂层 |
US8853438B2 (en) * | 2012-11-05 | 2014-10-07 | Dynaloy, Llc | Formulations of solutions and processes for forming a substrate including an arsenic dopant |
WO2014124109A1 (en) * | 2013-02-07 | 2014-08-14 | First Solar | Semiconductor material surface treatment with laser |
JP6097147B2 (ja) * | 2013-05-16 | 2017-03-15 | 日本放送協会 | Mimo−ofdm受信装置及び測定装置 |
CN105518838B (zh) * | 2013-07-02 | 2019-11-26 | 雅达公司 | 使用快速热加工形成异质外延层以除去晶格位错 |
US9443728B2 (en) * | 2013-08-16 | 2016-09-13 | Applied Materials, Inc. | Accelerated relaxation of strain-relaxed epitaxial buffers by use of integrated or stand-alone thermal processing |
US9136355B2 (en) * | 2013-12-03 | 2015-09-15 | Intermolecular, Inc. | Methods for forming amorphous silicon thin film transistors |
US20160322224A1 (en) | 2013-12-30 | 2016-11-03 | Dow Global Technologies Llc | Processes for using flux agents to form polycrystalline group iii-group v compounds from single source organometallic precursors |
CN104795298B (zh) | 2014-01-20 | 2017-02-22 | 清华大学 | 电子发射装置及显示器 |
CN104795292B (zh) | 2014-01-20 | 2017-01-18 | 清华大学 | 电子发射装置、其制备方法及显示器 |
CN104795300B (zh) | 2014-01-20 | 2017-01-18 | 清华大学 | 电子发射源及其制备方法 |
CN104795294B (zh) | 2014-01-20 | 2017-05-31 | 清华大学 | 电子发射装置及电子发射显示器 |
CN104795297B (zh) | 2014-01-20 | 2017-04-05 | 清华大学 | 电子发射装置及电子发射显示器 |
CN104795296B (zh) | 2014-01-20 | 2017-07-07 | 清华大学 | 电子发射装置及显示器 |
CN104795295B (zh) | 2014-01-20 | 2017-07-07 | 清华大学 | 电子发射源 |
CN104795293B (zh) | 2014-01-20 | 2017-05-10 | 清华大学 | 电子发射源 |
CN104795291B (zh) | 2014-01-20 | 2017-01-18 | 清华大学 | 电子发射装置、其制备方法及显示器 |
CN104051542B (zh) * | 2014-06-23 | 2016-10-05 | 上海和辉光电有限公司 | 有机发光显示装置及其薄膜晶体管 |
JP6368594B2 (ja) * | 2014-09-09 | 2018-08-01 | シャープ株式会社 | 光電変換素子 |
CN104681630B (zh) * | 2015-03-24 | 2018-04-03 | 京东方科技集团股份有限公司 | 薄膜晶体管及其制备方法、阵列基板和显示面板 |
CN104934330A (zh) * | 2015-05-08 | 2015-09-23 | 京东方科技集团股份有限公司 | 一种薄膜晶体管及其制备方法、阵列基板和显示面板 |
US9583649B2 (en) | 2015-06-22 | 2017-02-28 | International Business Machines Corporation | Thin film solar cell backside contact manufacturing process |
CN105161523B (zh) * | 2015-08-13 | 2018-09-25 | 京东方科技集团股份有限公司 | 一种电极、薄膜晶体管、阵列基板及显示设备 |
US10096471B2 (en) * | 2016-08-04 | 2018-10-09 | Lam Research Corporation | Partial net shape and partial near net shape silicon carbide chemical vapor deposition |
US20180148588A1 (en) * | 2016-11-29 | 2018-05-31 | United Technologies Corporation | High temperature inks for electronic and aerospace applications |
US10457148B2 (en) | 2017-02-24 | 2019-10-29 | Epic Battery Inc. | Solar car |
WO2018187384A1 (en) | 2017-04-03 | 2018-10-11 | Epic Battery Inc. | Modular solar battery |
JP7391296B2 (ja) * | 2017-10-07 | 2023-12-05 | 株式会社Flosfia | 成膜方法 |
US10431695B2 (en) | 2017-12-20 | 2019-10-01 | Micron Technology, Inc. | Transistors comprising at lease one of GaP, GaN, and GaAs |
US10825816B2 (en) | 2017-12-28 | 2020-11-03 | Micron Technology, Inc. | Recessed access devices and DRAM constructions |
US10319586B1 (en) | 2018-01-02 | 2019-06-11 | Micron Technology, Inc. | Methods comprising an atomic layer deposition sequence |
US10734527B2 (en) | 2018-02-06 | 2020-08-04 | Micron Technology, Inc. | Transistors comprising a pair of source/drain regions having a channel there-between |
US11127572B2 (en) | 2018-08-07 | 2021-09-21 | Silfex, Inc. | L-shaped plasma confinement ring for plasma chambers |
US11038027B2 (en) | 2019-03-06 | 2021-06-15 | Micron Technology, Inc. | Integrated assemblies having polycrystalline first semiconductor material adjacent conductively-doped second semiconductor material |
US11489082B2 (en) | 2019-07-30 | 2022-11-01 | Epic Battery Inc. | Durable solar panels |
RU2727124C1 (ru) * | 2020-02-05 | 2020-07-20 | Общество с ограниченной ответственностью "МеГа Эпитех" | Способ получения низколегированного слоя GaAs методом жидкофазной эпитаксии |
Family Cites Families (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA1140032A (en) * | 1978-03-07 | 1983-01-25 | Marc M. Faktor | Growth of semiconductor compounds |
US4594264A (en) * | 1984-11-20 | 1986-06-10 | Hughes Aircraft Company | Method for forming gallium arsenide from thin solid films of gallium-arsenic complexes |
US4923524A (en) | 1985-05-06 | 1990-05-08 | Chronar Corp. | Wide ranging photovoltaic laminates comprising particulate semiconductors |
DE3676019D1 (de) * | 1985-09-03 | 1991-01-17 | Daido Steel Co Ltd | Epitaktische gallium-arsenid-halbleiterscheibe und verfahren zu ihrer herstellung. |
JPH02181976A (ja) * | 1989-01-09 | 1990-07-16 | Daido Steel Co Ltd | 太陽電池 |
US4975299A (en) | 1989-11-02 | 1990-12-04 | Eastman Kodak Company | Vapor deposition process for depositing an organo-metallic compound layer on a substrate |
US5084128A (en) * | 1990-10-23 | 1992-01-28 | E. I. Du Pont De Nemours And Company | Low-temperature synthesis of group III-group V semiconductors |
JP2719230B2 (ja) * | 1990-11-22 | 1998-02-25 | キヤノン株式会社 | 光起電力素子 |
JPH1092747A (ja) * | 1996-09-13 | 1998-04-10 | Hamamatsu Photonics Kk | 非晶質GaAs薄膜の製造方法および非晶質GaAsTFTの製造方法 |
US5920105A (en) * | 1996-09-19 | 1999-07-06 | Fujitsu Limited | Compound semiconductor field effect transistor having an amorphous gas gate insulation layer |
JP4189610B2 (ja) * | 1998-05-08 | 2008-12-03 | ソニー株式会社 | 光電変換素子およびその製造方法 |
JP3753605B2 (ja) * | 2000-11-01 | 2006-03-08 | シャープ株式会社 | 太陽電池およびその製造方法 |
JP3716755B2 (ja) * | 2001-04-05 | 2005-11-16 | 株式会社日立製作所 | アクティブマトリクス型表示装置 |
JP3790500B2 (ja) * | 2002-07-16 | 2006-06-28 | ユーディナデバイス株式会社 | 電界効果トランジスタ及びその製造方法 |
US6839507B2 (en) * | 2002-10-07 | 2005-01-04 | Applied Materials, Inc. | Black reflector plate |
JP2005003730A (ja) * | 2003-06-09 | 2005-01-06 | Canon Inc | 画像形成装置 |
JP2005268719A (ja) * | 2004-03-22 | 2005-09-29 | Sharp Corp | 薄膜太陽電池 |
US7473943B2 (en) * | 2004-10-15 | 2009-01-06 | Nanosys, Inc. | Gate configuration for nanowire electronic devices |
JP2006287070A (ja) * | 2005-04-01 | 2006-10-19 | Seiko Epson Corp | 半導体装置の製造方法、および電子機器の製造方法 |
JP5078246B2 (ja) * | 2005-09-29 | 2012-11-21 | 株式会社半導体エネルギー研究所 | 半導体装置、及び半導体装置の作製方法 |
GB0522027D0 (en) * | 2005-10-28 | 2005-12-07 | Nanoco Technologies Ltd | Controlled preparation of nanoparticle materials |
CN101401195B (zh) * | 2006-03-28 | 2010-11-03 | 夏普株式会社 | 半导体元件的转印方法和半导体装置的制造方法以及半导体装置 |
EP1892769A2 (en) * | 2006-08-25 | 2008-02-27 | General Electric Company | Single conformal junction nanowire photovoltaic devices |
TWI312580B (en) * | 2006-09-04 | 2009-07-21 | Taiwan Tft Lcd Associatio | A thin film transistor, manufacturing method of a active layer thereof and liquid crystal display |
US20100096004A1 (en) * | 2006-10-25 | 2010-04-22 | Unidym, Inc. | Solar cell with nanostructure electrode(s) |
JP5442453B2 (ja) * | 2007-02-15 | 2014-03-12 | マサチューセッツ インスティテュート オブ テクノロジー | 凹凸化された表面を備えた太陽電池 |
JP2009164161A (ja) * | 2007-12-28 | 2009-07-23 | Panasonic Corp | 電界効果トランジスタ |
CN101471394A (zh) * | 2007-12-29 | 2009-07-01 | 中国科学院上海硅酸盐研究所 | 铜铟镓硫硒薄膜太阳电池光吸收层的制备方法 |
KR20090108853A (ko) * | 2008-04-14 | 2009-10-19 | 삼성전자주식회사 | 무기물 패턴 형성용 조성물 및 그를 이용한 무기물패턴형성 방법 |
US20100012170A1 (en) * | 2008-07-20 | 2010-01-21 | Varonides Argyrios C | High Efficiency Solar Cell |
KR101540341B1 (ko) * | 2008-10-17 | 2015-07-30 | 삼성전자주식회사 | 패널 구조체, 패널 구조체를 포함하는 표시장치 및 이들의 제조방법 |
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TWI565063B (zh) | 2017-01-01 |
US20120080092A1 (en) | 2012-04-05 |
KR101875159B1 (ko) | 2018-07-06 |
TW201220501A (en) | 2012-05-16 |
WO2012044978A3 (en) | 2012-06-21 |
JP5881714B2 (ja) | 2016-03-09 |
CN103189999B (zh) | 2015-12-02 |
US8846437B2 (en) | 2014-09-30 |
CN103189991B (zh) | 2016-02-17 |
WO2012044978A2 (en) | 2012-04-05 |
KR101892115B1 (ko) | 2018-08-27 |
TWI594451B (zh) | 2017-08-01 |
US9780223B2 (en) | 2017-10-03 |
JP2013543659A (ja) | 2013-12-05 |
KR20130121103A (ko) | 2013-11-05 |
CN103189991A (zh) | 2013-07-03 |
TW201222863A (en) | 2012-06-01 |
WO2012044980A3 (en) | 2012-06-14 |
WO2012044980A2 (en) | 2012-04-05 |
US20120080753A1 (en) | 2012-04-05 |
KR20130091767A (ko) | 2013-08-19 |
CN103189999A (zh) | 2013-07-03 |
US20160322509A1 (en) | 2016-11-03 |
JP2014500610A (ja) | 2014-01-09 |
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