JP2014500610A - 砒化ガリウム吸収層を有する高効率太陽電池デバイス - Google Patents
砒化ガリウム吸収層を有する高効率太陽電池デバイス Download PDFInfo
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- JP2014500610A JP2014500610A JP2013531926A JP2013531926A JP2014500610A JP 2014500610 A JP2014500610 A JP 2014500610A JP 2013531926 A JP2013531926 A JP 2013531926A JP 2013531926 A JP2013531926 A JP 2013531926A JP 2014500610 A JP2014500610 A JP 2014500610A
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Abstract
Description
Claims (15)
- 太陽電池デバイスを形成する方法であって、
基板の表面上部に、第1の種類のドーパントがドープされている第1の層を形成することと、
前記第1の層上に、GaAsに基づく層を形成することと、
前記GaAsに基づく層上に、第2の種類のドーパントがドープされている第2の層を形成することと
を含む方法。 - 前記GaAsに基づく層を形成することが、
溶媒中に配置されたGaAs含有前駆体を処理チャンバに供給することと
前記GaAsに基づく層を前記基板上に形成するために、前記GaAs含有前駆体の溶媒を処理チャンバ内で蒸発させることと
を含む、請求項1に記載の方法。 - 前記GaAs含有前駆体が、(NMe2)2GaAstBuH、Me2GaAs(NMe2)2、Me2GaAs(SiMePh2)2、Me2GaAs(SiPh3)2、Et2GaAs(SiMe2Cy)2、及びMe2GaAs(SiMe2Cy)2からなる群より選択される、請求項2に記載の方法。
- 前記基板上に形成された、前記GaAsに基づく層をアニールすることをさらに含む、請求項2に記載の方法。
- 前記第1の種類のドーパントがp−型のドーパントであり、前記第2の種類のドーパントがn−型のドーパントである、請求項1に記載の方法。
- 前記第1の層が、シリコン含有層又はGaAsに基づく層であり、前記第2の層が、シリコン含有層又はGaAsに基づく層である、請求項1に記載の方法。
- 前記p−型のドーパントが、金属亜鉛ドーパント、ジメチル亜鉛(DMZ)、ジエチル亜鉛(DEZ)、金属マグネシウムドーパント、シクロペンタジエニルマグネシウム、炭素塩化物(CCl4)又は炭素臭化物(CBr4)のうち少なくとも1種を含み、前記n−型のドーパントが、H2S、イオウ、シラン(SiH4)、ジシラン(Si2H6)、H2Se、Se等のうち少なくとも1種を含む、請求項6に記載の方法。
- 前記第1の層がp−型アモルファスシリコン層であり、前記第2の層がn−型アモルファスシリコン層である、請求項1に記載の方法。
- 前記基板上に前記第1の層を形成する前に、前記基板の表面上部に複数のカーボンナノチューブを形成することをさらに含む、請求項1に記載の方法。
- 前記複数のカーボンナノチューブをGaAs層で充填することをさらに含む、請求項9に記載の方法。
- 太陽電池デバイスで使用するのに適する構造であって、
基板上に配置された、第1の種類のドーパントがドープされた第1の層と、
前記第1の層の上部に形成された、GaAsに基づく層と、
前記GaAsに基づく層上に形成された第2の層と
を含む構造。 - 前記第1の種類のドーパントが、金属亜鉛ドーパント、ジメチル亜鉛(DMZ)、ジエチル亜鉛(DEZ)、金属マグネシウムドーパント、シクロペンタジエニルマグネシウム、炭素塩化物(CCl4)、又は炭素臭化物(CBr4)のうち少なくとも1種を含むp−型のドーパントであり、前記第2の種類のドーパントが、H2S、イオウ、シラン(SiH4)、ジシラン(Si2H6)、H2Se、Se等のうち少なくとも1種を含むn−型のドーパントである、請求項11に記載の構造。
- 前記第1の層がp−型シリコン含有層であり、前記第2の層がn−型シリコン含有層である、請求項11に記載の構造。
- 前記基板上に形成された前記GaAsに基づく層が、ドープされた第3の種類のドーパントを含み、前記第3の種類のドーパントがp−型のドーパント又は−型のドーパントである、請求項11に記載の構造。
- 前記GaAsに基づく層が、溶液に基づくGaAs前駆体により作製される、請求項11に記載の構造。
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US61/468,918 | 2011-03-29 | ||
PCT/US2011/054301 WO2012044978A2 (en) | 2010-10-01 | 2011-09-30 | High efficiency solar cell device with gallium arsenide absorber layer |
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WO2012044980A2 (en) | 2012-04-05 |
US8846437B2 (en) | 2014-09-30 |
KR101875159B1 (ko) | 2018-07-06 |
TWI594451B (zh) | 2017-08-01 |
TWI565063B (zh) | 2017-01-01 |
CN103189999A (zh) | 2013-07-03 |
WO2012044980A3 (en) | 2012-06-14 |
TW201220501A (en) | 2012-05-16 |
CN103189999B (zh) | 2015-12-02 |
US9780223B2 (en) | 2017-10-03 |
TW201222863A (en) | 2012-06-01 |
KR20130091767A (ko) | 2013-08-19 |
KR20130121103A (ko) | 2013-11-05 |
WO2012044978A2 (en) | 2012-04-05 |
CN103189991B (zh) | 2016-02-17 |
JP6080167B2 (ja) | 2017-02-15 |
JP2013543659A (ja) | 2013-12-05 |
US20120080753A1 (en) | 2012-04-05 |
US20160322509A1 (en) | 2016-11-03 |
US20120080092A1 (en) | 2012-04-05 |
KR101892115B1 (ko) | 2018-08-27 |
JP5881714B2 (ja) | 2016-03-09 |
WO2012044978A3 (en) | 2012-06-21 |
CN103189991A (zh) | 2013-07-03 |
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