JP5442453B2 - 凹凸化された表面を備えた太陽電池 - Google Patents
凹凸化された表面を備えた太陽電池 Download PDFInfo
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- JP5442453B2 JP5442453B2 JP2009549630A JP2009549630A JP5442453B2 JP 5442453 B2 JP5442453 B2 JP 5442453B2 JP 2009549630 A JP2009549630 A JP 2009549630A JP 2009549630 A JP2009549630 A JP 2009549630A JP 5442453 B2 JP5442453 B2 JP 5442453B2
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Classifications
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
- H01L31/02363—Special surface textures of the semiconductor body itself, e.g. textured active layers
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C18/18—Pretreatment of the material to be coated
- C23C18/1851—Pretreatment of the material to be coated of surfaces of non-metallic or semiconducting in organic material
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Description
米国仮出願60/901,511号(2006年2月15日出願、発明の名称「自己整合型マスクを用いた太陽電池の光捕捉および金属化(Solar Cell Light Trapping and Metallization Using Self-Aligning Mask)」)および米国仮出願61/011,933号(2008年1月23日出願、発明の名称「毛細管現象を用いて、処理を方向付け、ならびに、前面および裏面の両面に自己整合型マスクを位置づけた太陽電池の光捕捉および金属化(SOLAR CELL LIGHT TRAPPING AND METALLIZATION USING CAPILLARY ACTION TO DIRECT TREATMENT AND LOCATE SELF-ALIGNING MASKS ON BOTH FRONT AND BACK SURFACES)の利益を主張し、各々の全開示を参照して、本願に完全に組み込む。
本願中に開示された発明は、半導体光電池を構成および製造する全く新しい方法に関する。本発明によるセルは、様々な理由により凹凸化されまたは成形された表面を有するが、この理由には、製造を容易にすること、平坦面を有するセルよりも効率を高めること、および、電極を収納することが含まれる。吸収領域中に凹凸体を形成することにより、凹凸体を形成しない際には反射によりセルの外側へ損失されるであろう太陽エネルギーの損失を低減するが、これは、セル中により多くの光を獲得することにより、かつ、セル内で光を捕捉することにより行われる。凹凸体の1つの形態は、平行に伸びる溝および畝である。別の形態はピラミッド形状である。別の形状は、陥没部である。セルは、また、発生させられた電荷を収集しかつこれを伝導するための金属化領域を有する。
ここで、開示された発明の簡単な概要を提示する。より詳細な概要は、以下に、請求項の直前に示される。本願中に開示された発明は、生産経路に沿った全段階で、加工中の品のトポグラフィを考慮することを含み、可能であれば、半導体光電池の表面上のどの位置がある特定の加工を受けるか、またどの位置がこのような処理を受けないかを決めるトポグラフィを生かしたプロセスを用いることを含む。この一例として、相互連結されたチャンネル網を設け、このチャンネル網が縁により取り囲まれ、その後他の領域がある。有用なプロセスの1つの段階は、このチャンネル網内で液体を用いて遂行されるが、周囲の領域では、液体流動の障壁が原因で、これがない。発明のある実施形態のプロセスは、網内に堆積された液体が、所望の位置に流れ、所望しない位置を回避するように遂行される。したがって、加工中の品のトポグラフィが、加工中の品への処理の選択と結びついて、遂行される工程の効果を決める。
完成品である凹凸化された光電池10を、図1の平面図および図1の線A−Aに沿って拡大された等角斜視図である図1Aで概略図示する。光電池10は、4つの光捕捉エリア12を有し、これらがバスワイヤ48で分離されている。各バスワイヤは、母線導体16上方にある。各エリア12は、約50個の領域14からなり、これらの領域は1対の母線16と一対の格子線18(本願中、フィンガーと称することもある。)により境界付けられている。各セル10は、約156mm平方の四角形である(セルは、四角形である必要はないが、これは便利な良い形状である)。通常、この種のセルは、約25〜70mm×156mmの領域12を3つないし4つ有する。(これは、母線16が2つあるか、3つあるかに依存する。)エリア12は約40〜数百の領域14を含み、各領域は約0.5〜2mm×約30〜70mmである。
Claims (25)
- a.凹凸化された半導体表面を形成する工程と、
b.前記半導体に関連する接合部を形成する工程と、
c.前記表面の第1ゾーンに液体を塗布する工程であって、前記塗布は、少なくとも部分的には前記表面構成によって導かれ、前記液体は、前記第1ゾーンと連続している前記表面の第2ゾーンからは排除されたままであり、前記排除が、少なくとも部分的には、前記表面構成が原因で生じるような工程と、
d.前記表面の第1ゾーンと第2ゾーン内で双方同時ではなく、第1ゾーンまたは第2ゾーンのうちいずれか一方のゾーン内で、前記表面と液体または前記表面の金属層同士の合金化反応、接着反応または化学反応を起こさせる工程と、
を含む光起電装置の製造方法。 - さらに、前記半導体表面に、前記半導体から電力を収集し、かつさらに電気系に配電することができる金属被覆を塗布する工程を含む請求項1に記載の方法。
- 前記液体は、反応性液体を含み、化学反応が前記第1ゾーンで起きる請求項1に記載の方法。
- さらに、前記第1ゾーン内で、化学反応が原因で化学的に修正された材料の体積体を作る工程を含み、前記体積体は前記半導体との電気コンタクトを有する請求項3に記載の方法。
- さらに、前記第1ゾーンは、光起電装置の金属化領域を有する請求項3に記載の方法。
- さらに、前記第1ゾーンは、光起電装置の母線領域と光起電装置の格子線領域とを有する請求項5に記載の方法。
- さらに、前記第1ゾーンは、光起電装置の格子線領域を有する請求項5に記載の方法。
- さらに、前記化学反応は、前記第1ゾーン内で金属被覆部を形成する請求項3に記載の方法。
- さらに、前記化学反応は、前記第1ゾーン内で、具体的には無電解メッキによる金属膜の形成を可能にする触媒を用いた触媒反応である請求項3に記載の方法。
- さらに、前記化学反応は、前記第1ゾーン内で無電解メッキにより金属被覆部を形成する請求項3に記載の方法。
- さらに、前記化学反応は、前記第1ゾーン内で、有機金属材料を用いて金属被覆部を形成する請求項3に記載の方法。
- 前記半導体は、シリコン、ゲルマニウムおよびヒ化ガリウムからなる群より選択される請求項1に記載の方法。
- 前記凹凸化された表面の前記第1ゾーンは、第1部分と第2部分とを有する少なくとも1つのチャンネルを有する請求項1に記載の方法。
- 前記半導体表面は、半導体ウェハーの面を有する請求項1に記載の方法。
- 前記凹凸化された半導体表面は、凹凸化された基板により支持されている半導体薄膜を有する請求項1に記載の方法。
- 前記半導体表面は、凹凸化されたスーパーストレートにより支持された半導体薄膜を有する請求項1に記載の方法。
- 前記スーパーストレートは、ガラスを有する請求項16に記載の方法。
- 前記サブストレート(基板)は、ガラスを有する請求項16に記載の方法。
- 前記液体は、遮断材料を含有し、化学反応が前記第2ゾーンで生じる請求項1に記載の方法。
- 前記遮断材料は、塗布後に硬化する請求項19に記載の方法。
- さらに、前記液体を塗布する工程の前に、前記第1ゾーンおよび前記第2ゾーンを反射防止材料で被覆する工程を含み、ここで、前記遮断材料を塗布する工程は、化学エッチャントから前記反射防止被覆部を保護する材料を塗布する工程を含む請求項19に記載の方法。
- さらに、除去液体を前記第1ゾーンおよび第2ゾーンに塗布する工程を含み、前記除去液体は、前記除去液体が前記反射防止材料と接触するゾーンからは、前記反射防止材料を除去し、これにより前記反射防止材料は、前記第2ゾーンからは除去され、遮断材料が塗布された前記第1ゾーンからは除去されない請求項21に記載の方法。
- さらに、
a.第1ゾーンおよび第2ゾーンに、第2活性材料を塗布する工程と、
b.前記第2ゾーンにおいて、化学反応を起こす工程と、
を含み、
ここで、前記第1ゾーンでは、前記遮断材料の存在が原因で前記化学反応が起こらない請求項19に記載の方法。 - 前記第2活性材料は、反射防止被覆部媒体、無電解メッキ触媒、無電解メッキ用化学物質、反射防止材料、および、電気メッキ用化学物質からなる群から選択される請求項23に記載の方法。
- 前記第1液体は、続く被覆部が前記半導体表面に対して確実に結合することを塞ぐ材料であり、更に以下の、
a.第1ゾーンおよび第2ゾーンを続く被覆部のために露出する工程であって、前記続く被覆部は、該第2ゾーンで生じる化学反応によって前記第2ゾーンに強力に接着され、前記第1液体による被覆部の存在が原因で、前記第1ゾーンには弱く接着されるような工程と、
b.前記半導体の第1ゾーンから前記続く被覆部を除去する工程と
を含む請求項19記載の光起電装置の製造方法。
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US90151107P | 2007-02-15 | 2007-02-15 | |
US60/901,511 | 2007-02-15 | ||
US1193308P | 2008-01-23 | 2008-01-23 | |
US61/011,933 | 2008-01-23 | ||
PCT/US2008/002058 WO2008100603A1 (en) | 2007-02-15 | 2008-02-15 | Solar cells with textured surfaces |
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HK1141141A1 (en) | 2010-10-29 |
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WO2008100603A1 (en) | 2008-08-21 |
US20110045627A1 (en) | 2011-02-24 |
EP2122690A4 (en) | 2013-08-21 |
CN101657906B (zh) | 2014-09-17 |
EP2122690A1 (en) | 2009-11-25 |
KR20100014403A (ko) | 2010-02-10 |
MY158347A (en) | 2016-09-30 |
KR101484737B1 (ko) | 2015-01-22 |
JP2014096597A (ja) | 2014-05-22 |
US8569099B2 (en) | 2013-10-29 |
US8257998B2 (en) | 2012-09-04 |
US20130045561A1 (en) | 2013-02-21 |
US20140141561A1 (en) | 2014-05-22 |
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