JP2019212766A - 荷電粒子ビーム描画装置及び荷電粒子ビーム描画方法 - Google Patents
荷電粒子ビーム描画装置及び荷電粒子ビーム描画方法 Download PDFInfo
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/20—Masks or mask blanks for imaging by charged particle beam [CPB] radiation, e.g. by electron beam; Preparation thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/10—Lenses
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/76—Patterning of masks by imaging
- G03F1/78—Patterning of masks by imaging by charged particle beam [CPB], e.g. electron beam patterning of masks
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2004—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/7025—Size or form of projection system aperture, e.g. aperture stops, diaphragms or pupil obscuration; Control thereof
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
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- G03F7/70258—Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70275—Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
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- H—ELECTRICITY
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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- H—ELECTRICITY
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- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
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- H—ELECTRICITY
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- H—ELECTRICITY
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/304—Controlling tubes
- H01J2237/30455—Correction during exposure
- H01J2237/30461—Correction during exposure pre-calculated
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Abstract
Description
Δpos=C×B×I×h/V0
110 制御計算機
111 ショットデータ生成部
112 描画制御部
140 レンズ制御回路
150 検出回路
208 対物レンズ
210 静電レンズ
250 Zセンサ
Claims (5)
- 荷電粒子ビームを放出する放出部と、
前記荷電粒子ビームを成形する第1アパーチャと、
前記荷電粒子ビームを前記第1アパーチャに照明する照明レンズと、
前記第1アパーチャを透過した荷電粒子ビームを成形する第2アパーチャと、
前記第1アパーチャを透過した荷電粒子ビームを前記第2アパーチャに投影する投影レンズと、
前記第2アパーチャを透過した荷電粒子ビームの焦点を合わせる磁界型レンズである対物レンズと、
描画対象の基板の表面高さに合わせて荷電粒子ビームの焦点補正を行う静電レンズと、
を備え、
前記静電レンズは前記対物レンズ内に配置され、該静電レンズの電極には正の電圧が印加され、該電極の上端における該対物レンズの磁場の強さが所定値以下となることを特徴とする荷電粒子ビーム描画装置。 - 前記対物レンズの磁場の強さが前記所定値より大きくなる領域に前記電極の少なくとも一部が延在していることを特徴とする請求項1に記載の荷電粒子ビーム描画装置。
- 前記電極の下端における前記対物レンズの磁場の強さが前記所定値以下となることを特徴とする請求項2に記載の荷電粒子ビーム描画装置。
- 前記静電レンズは、上段電極、中段電極及び下段電極の3段の電極を有し、
前記上段電極及び前記下段電極には0Vの電圧が印加され、前記中段電極に前記正の電圧が印加されることを特徴とする請求項1乃至3のいずれか1項に記載の荷電粒子ビーム描画装置。 - 荷電粒子ビームを放出する工程と、
磁界型レンズである対物レンズを用いて、前記荷電粒子ビームの焦点を合わせて描画対象の基板に前記荷電粒子ビームを照射してパターンを形成する工程と、
前記対物レンズ内に配置された静電レンズを用いて、前記基板の表面高さに合わせて前記荷電粒子ビームの焦点補正を行う工程と、
を備え、
前記静電レンズの電極に正の電圧を印加し、
前記電極の上端における前記対物レンズの磁場の強さが所定値以下となるように、該対物レンズのコイルに電流を供給することを特徴とする荷電粒子ビーム描画方法。
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JP2018107945A JP2019212766A (ja) | 2018-06-05 | 2018-06-05 | 荷電粒子ビーム描画装置及び荷電粒子ビーム描画方法 |
TW108116502A TWI733111B (zh) | 2018-06-05 | 2019-05-14 | 帶電粒子束描繪裝置及帶電粒子束描繪方法 |
KR1020190061882A KR102255028B1 (ko) | 2018-06-05 | 2019-05-27 | 하전 입자 빔 묘화 장치 및 하전 입자 빔 묘화 방법 |
CN201910480018.9A CN110571116B (zh) | 2018-06-05 | 2019-06-04 | 带电粒子束描绘装置以及带电粒子束描绘方法 |
US16/430,507 US10998164B2 (en) | 2018-06-05 | 2019-06-04 | Charged particle beam writing apparatus and charged particle beam writing method |
JP2023148240A JP2023160972A (ja) | 2018-06-05 | 2023-09-13 | 荷電粒子ビーム描画装置及び荷電粒子ビーム描画方法 |
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JP (2) | JP2019212766A (ja) |
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Cited By (1)
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US12009175B2 (en) | 2021-04-13 | 2024-06-11 | Nuflare Technology, Inc. | Charged particle beam writing apparatus |
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JP2014127568A (ja) * | 2012-12-26 | 2014-07-07 | Nuflare Technology Inc | 荷電粒子ビーム描画装置 |
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US12009175B2 (en) | 2021-04-13 | 2024-06-11 | Nuflare Technology, Inc. | Charged particle beam writing apparatus |
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CN110571116A (zh) | 2019-12-13 |
US10998164B2 (en) | 2021-05-04 |
CN110571116B (zh) | 2023-09-01 |
JP2023160972A (ja) | 2023-11-02 |
TW202004821A (zh) | 2020-01-16 |
KR20190138583A (ko) | 2019-12-13 |
KR102255028B1 (ko) | 2021-05-24 |
TWI733111B (zh) | 2021-07-11 |
US20190371565A1 (en) | 2019-12-05 |
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