JP2012049268A - 半導体基板の製造方法 - Google Patents
半導体基板の製造方法 Download PDFInfo
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- JP2012049268A JP2012049268A JP2010188836A JP2010188836A JP2012049268A JP 2012049268 A JP2012049268 A JP 2012049268A JP 2010188836 A JP2010188836 A JP 2010188836A JP 2010188836 A JP2010188836 A JP 2010188836A JP 2012049268 A JP2012049268 A JP 2012049268A
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- H01—ELECTRIC ELEMENTS
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
- H01L21/76879—Filling of holes, grooves or trenches, e.g. vias, with conductive material by selective deposition of conductive material in the vias, e.g. selective C.V.D. on semiconductor material, plating
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76871—Layers specifically deposited to enhance or enable the nucleation of further layers, i.e. seed layers
- H01L21/76876—Layers specifically deposited to enhance or enable the nucleation of further layers, i.e. seed layers for deposition from the gas phase, e.g. CVD
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- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
- H01L21/76883—Post-treatment or after-treatment of the conductive material
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- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/53204—Conductive materials
- H01L23/53276—Conductive materials containing carbon, e.g. fullerenes
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic System
- H01L21/28556—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic System by chemical means, e.g. CVD, LPCVD, PECVD, laser CVD
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- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/10—Applying interconnections to be used for carrying current between separate components within a device
- H01L2221/1068—Formation and after-treatment of conductors
- H01L2221/1094—Conducting structures comprising nanotubes or nanowires
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Abstract
【解決手段】半導体基板における層間絶縁膜内のビアホール内にカーボンナノチューブを形成した後、基板全体をフッ化処理することにより、カーボンナノチューブが存在するビアホールにのみ埋め込み膜が形成され、その後に基板全体の平坦化処理のために基板を研磨する工程において、層間絶縁膜が局所的に研磨されることを防止する。
【選択図】 図2−3
Description
以下、本発明の実施例について図1−1から図3を用いて説明する。
図2−1から図2−3は本発明の実施例2に係る半導体基板の各製造工程を示す図である。
実施例3を、図3を用いて説明する。実施例3においては、実施例1に係る図1−1(d)に示す工程または実施例2に係る図2−3(k)に示す工程以外は実施例1または実施例2のいずれの工程を用いてもよい。すなわち、実施例3においては、図3(a)に示すように、実施例1における図1−1(d)、実施例2における図2−3(k)で説明したフッ化処理工程で、フッ素系ガスによるプラズマ処理ではなく、フッ素ガスを基板1の表面に吹きつけて、またはフローさせて、基板1の表面をフッ化させるものである。
2: 下層配線
3: 層間絶縁膜
4: メタルバリア層
5: 触媒層1
6: 触媒層2
7: カーボンナノチューブ
8: 埋め込み膜
9: 上部電極
10:研磨孔
11:ビア孔
12、13:レジスト層
Claims (9)
- 基板上に第一の配線層を形成する工程と、前記配線層上に対応したビアホールを有する層間絶縁膜を形成する工程と、前記ビアホール内にカーボンナノチューブを形成する工程と、前記基板全体をフッ化処理する工程と、前記カーボンナノチューブが存在する前記ビアホールに埋め込み膜を形成する工程と、前記基板全体の平坦化処理のために前記基板を研磨する工程と、
を有することを特徴とする半導体基板の製造方法。 - 前記カーボンナノチューブを形成する行程において、カーボンナノチューブを気相成長法により成長させることを特徴とする請求項1記載の半導体基板の製造方法。
- 前記カーボンナノチューブを形成する工程において、少なくとも炭化水素ガスを含むガスから成るプラズマを用いることを特徴とする請求項2記載の半導体基板の製造方法。
- 前記カーボンナノチューブと前記第1の配線層との間に触媒金属層が存在することを特徴とする請求項1記載の半導体基板の製造方法。
- 前記触媒金属層はコバルト、ニッケル、鉄のいずれかの金属或いは、いずれかの金属を含む合金からなることを特徴とする請求項4記載の半導体基板の製造方法。
- 前記フッ化処理する工程において少なくともフッ素を含むガスからなるプラズマを用いることを特徴とする請求項1記載の半導体基板の製造方法。
- 前記フッ化処理する工程において少なくともフッ素を含むガスを前記基板全体に吹き付け、またはフローさせることを特徴とする請求項1記載の半導体基板の製造方法。
- 前記埋め込み膜を形成する工程において、加熱により硬化する材料を前記基板に塗布した後、加熱により前記埋め込み膜を形成することを特徴とする請求項1記載の半導体基板の製造方法。
- 前記埋め込み膜を形成する工程において、紫外線照射により硬化する材料を前記基板に塗布した後、紫外線照射により前記埋め込み膜を形成することを特徴とする請求項1記載の半導体基板の製造方法。
Priority Applications (2)
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JP2010188836A JP5468496B2 (ja) | 2010-08-25 | 2010-08-25 | 半導体基板の製造方法 |
US13/041,543 US8198193B2 (en) | 2010-08-25 | 2011-03-07 | Manufacturing method of semiconductor substrate |
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JP2010188836A JP5468496B2 (ja) | 2010-08-25 | 2010-08-25 | 半導体基板の製造方法 |
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JP2012049268A true JP2012049268A (ja) | 2012-03-08 |
JP5468496B2 JP5468496B2 (ja) | 2014-04-09 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012186208A (ja) * | 2011-03-03 | 2012-09-27 | Ulvac Japan Ltd | 配線形成方法、及び配線形成装置 |
JP2014127646A (ja) * | 2012-12-27 | 2014-07-07 | Toshiba Corp | 配線及び半導体装置の製造方法 |
JP2015126179A (ja) * | 2013-12-27 | 2015-07-06 | 株式会社荏原製作所 | 研磨終点検出方法、及び研磨終点検出装置 |
JP6077076B1 (ja) * | 2015-09-11 | 2017-02-08 | 株式会社東芝 | グラフェン配線構造及びグラフェン配線構造の作製方法 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
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TWI514348B (zh) * | 2006-09-29 | 2015-12-21 | Semiconductor Energy Lab | 顯示裝置和電子裝置 |
US8283786B2 (en) * | 2007-12-21 | 2012-10-09 | Advanced Micro Devices, Inc. | Integrated circuit system with contact integration |
US8716863B2 (en) * | 2011-07-13 | 2014-05-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Structure and method for high performance interconnect |
US9431346B2 (en) * | 2013-04-30 | 2016-08-30 | GlobalFoundries, Inc. | Graphene-metal E-fuse |
JP5951568B2 (ja) * | 2013-08-29 | 2016-07-13 | 株式会社東芝 | 半導体装置及びその製造方法 |
US9318439B2 (en) * | 2014-03-21 | 2016-04-19 | Taiwan Semiconductor Manufacturing Company Ltd. | Interconnect structure and manufacturing method thereof |
CN105226006B (zh) * | 2014-06-12 | 2019-01-22 | 中芯国际集成电路制造(上海)有限公司 | 互连结构的形成方法 |
CN107726971A (zh) * | 2016-08-11 | 2018-02-23 | 清华大学 | 应变传感器 |
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JP2005150151A (ja) * | 2003-11-11 | 2005-06-09 | Seiko Epson Corp | 半導体装置の絶縁膜形成方法及び半導体装置 |
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JP2010177405A (ja) * | 2009-01-29 | 2010-08-12 | Toshiba Corp | カーボンナノチューブ及びその製造方法 |
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JPH04364253A (ja) | 1990-12-20 | 1992-12-16 | Omron Corp | 光ピックアップ装置 |
JP2004273376A (ja) * | 2003-03-12 | 2004-09-30 | Sony Corp | 冷陰極電界電子放出表示装置 |
JP4364253B2 (ja) | 2007-04-05 | 2009-11-11 | 株式会社東芝 | 配線、電子装置及び電子装置の製造方法 |
-
2010
- 2010-08-25 JP JP2010188836A patent/JP5468496B2/ja not_active Expired - Fee Related
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- 2011-03-07 US US13/041,543 patent/US8198193B2/en active Active
Patent Citations (6)
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JP2005150151A (ja) * | 2003-11-11 | 2005-06-09 | Seiko Epson Corp | 半導体装置の絶縁膜形成方法及び半導体装置 |
JP2006286929A (ja) * | 2005-03-31 | 2006-10-19 | Nippon Zeon Co Ltd | 樹脂膜保持基板の製造方法及びその利用 |
JP2008041954A (ja) * | 2006-08-07 | 2008-02-21 | Fujitsu Ltd | カーボン配線構造およびその製造方法 |
JP2008210954A (ja) * | 2007-02-26 | 2008-09-11 | Fujitsu Ltd | カーボンナノチューブバンプ構造体とその製造方法、およびこれを用いた半導体装置 |
JP2008258187A (ja) * | 2007-03-30 | 2008-10-23 | Fujitsu Ltd | 電子デバイス及びその製造方法 |
JP2010177405A (ja) * | 2009-01-29 | 2010-08-12 | Toshiba Corp | カーボンナノチューブ及びその製造方法 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2012186208A (ja) * | 2011-03-03 | 2012-09-27 | Ulvac Japan Ltd | 配線形成方法、及び配線形成装置 |
JP2014127646A (ja) * | 2012-12-27 | 2014-07-07 | Toshiba Corp | 配線及び半導体装置の製造方法 |
JP2015126179A (ja) * | 2013-12-27 | 2015-07-06 | 株式会社荏原製作所 | 研磨終点検出方法、及び研磨終点検出装置 |
JP6077076B1 (ja) * | 2015-09-11 | 2017-02-08 | 株式会社東芝 | グラフェン配線構造及びグラフェン配線構造の作製方法 |
US9924593B2 (en) | 2015-09-11 | 2018-03-20 | Kabushiki Kaisha Toshiba | Graphene wiring structure and method for manufacturing graphene wiring structure |
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US20120052680A1 (en) | 2012-03-01 |
US8198193B2 (en) | 2012-06-12 |
JP5468496B2 (ja) | 2014-04-09 |
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