JP2007285756A - 熱式流量センサ - Google Patents
熱式流量センサ Download PDFInfo
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- JP2007285756A JP2007285756A JP2006110849A JP2006110849A JP2007285756A JP 2007285756 A JP2007285756 A JP 2007285756A JP 2006110849 A JP2006110849 A JP 2006110849A JP 2006110849 A JP2006110849 A JP 2006110849A JP 2007285756 A JP2007285756 A JP 2007285756A
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- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 65
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 22
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- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 19
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 19
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- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000004043 responsiveness Effects 0.000 description 2
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- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
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- 229920006015 heat resistant resin Polymers 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
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- 229910001120 nichrome Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
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- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 1
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- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
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- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
- G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
- G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
- G01F1/692—Thin-film arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
- G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
- G01F1/6983—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters adapted for burning-off deposits
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
- G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
- G01F1/699—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters by control of a separate heating or cooling element
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- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Abstract
【解決手段】被測定流体中に熱式流量センサの流量測定素子1が配置される。流量素子1は、流量を検出するための第1発熱抵抗体7と、第1発熱抵抗体7の支持体5を加熱するための第2発熱抵抗体9と、第2発熱抵抗体9の温度が第1発熱抵抗体7の温度よりも高くなるよう発熱抵抗体供給電流を制御する電流制御回路101、102と、を備える。
【選択図】図1
Description
Claims (9)
- 発熱抵抗体を用いて流体の流量を検出する熱式流量センサにおいて、
流量を検出するための第1発熱抵抗体と、前記第1発熱抵抗体の支持体を加熱するための第2発熱抵抗体と、前記第2発熱抵抗体の温度が前記第1発熱抵抗体の温度よりも高くなるよう発熱抵抗体供給電流を制御する電流制御回路と、を備えることを特徴とする熱式流量センサ。 - 請求項1記載の熱式流量センサにおいて、
前記電流制御回路は、前記第2発熱抵抗体の温度を被測定流体の流量もしくは流速に関連させて変化させる熱式流量センサ。 - 発熱抵抗体を用いて流体の流量を検出する熱式流量センサにおいて、
流量を検出するための第1発熱抵抗体と、前記第1発熱抵抗体の支持体を加熱するための第2発熱抵抗体と、前記第2発熱抵抗体の設定温度を被測定流体の流量もしくは流速に関連させて変化させる電流制御回路と、を備えることを特徴とする熱式流量センサ。 - 発熱抵抗体を用いて流体の流量を検出する熱式流量センサにおいて、
流量を検出するための第1発熱抵抗体と、前記第1発熱抵抗体の支持体を加熱するために第1発熱抵抗体の両側に配置される第2発熱抵抗体と、前記第1発熱抵抗体の支持体における第1発熱抵抗体両側の部位の温度が極小点になるよう前記第2発熱抵抗体に流れる電流を制御する電流制御回路とを備えることを特徴とする熱式流量センサ。 - 請求項1ないし4のいずれか1項において、
前記電流制御回路は、前記第2発熱抵抗体の温度が所定温度を超えないように温度制限する熱式流量センサ。 - 請求項1ないし5のいずれか1項記載の熱式流量センサにおいて、
前記第1発熱抵抗体と前記第2発熱抵抗体とは、心材に巻かれ表面が保護材で被覆された構造であり、前記第1発熱抵抗体の保護被膜と前記第2発熱抵抗体の保護被膜との間には、空隙を介在、もしくは保護被膜よりも熱伝導率の低い材料を介在させてなる熱式流量センサ。 - 請求項1ないし6のいずれか1項記載の熱式流量センサにおいて、
前記第2発熱抵抗体は、被検出流体の流れにおける前記第1発熱抵抗体の上流側以外の場所に配置される熱式流量センサ。 - 請求項1ないし7記載のいずれか1項記載の熱式流量センサにおいて、
前記第2発熱抵抗体の設定温度が、前記第1発熱抵抗体の設定温度の1.05倍から1.17倍である熱式流量センサ。 - 発熱抵抗体を用いて流体の流量を検出する熱式流量センサにおいて、
流量を検出するための第1発熱抵抗体と、前記第1発熱抵抗体を支持する第1支持体と、前記第1支持体を加熱するための第2発熱抵抗体と、前記第2発熱抵抗体を支持する第2支持体とを備え、
前記第1及び第2発熱抵抗体は熱線であり、前記第1発熱抵抗体が前記第1支持体における中央領域の外表面に巻かれ、
前記第2支持体は、前記第1発熱抵抗体の両側に位置するように前記第1支持体の外表面に嵌合固定される一対の筒状体よりなり、これらの筒状体に前記第2発熱抵抗体となる一対の巻線が巻かれ、この一対の巻線同士を接続する中間線が前記第1発熱抵抗体上でブリッジ状に掛け渡され、
前記第1発熱抵抗体の両側の導線が、前記第1支持体上で前記第2の支持体に設けた溝或いはスリットを通して第1支持体の両端に設けたリード線に接続されていることを特徴とする熱式流量センサ。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006110849A JP5080020B2 (ja) | 2006-04-13 | 2006-04-13 | 熱式流量センサ |
EP07007526.2A EP1845345B1 (en) | 2006-04-13 | 2007-04-12 | Thermal type flow sensor |
US11/734,432 US7565836B2 (en) | 2006-04-13 | 2007-04-12 | Thermal type flow sensor having a second control circuit to control a second heating resistor above the first heating temperature |
EP09001884A EP2058633B1 (en) | 2006-04-13 | 2007-04-12 | Thermal type flow sensor |
CNB2007100961530A CN100510654C (zh) | 2006-04-13 | 2007-04-13 | 热式流量传感器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006110849A JP5080020B2 (ja) | 2006-04-13 | 2006-04-13 | 熱式流量センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007285756A true JP2007285756A (ja) | 2007-11-01 |
JP5080020B2 JP5080020B2 (ja) | 2012-11-21 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006110849A Expired - Fee Related JP5080020B2 (ja) | 2006-04-13 | 2006-04-13 | 熱式流量センサ |
Country Status (4)
Country | Link |
---|---|
US (1) | US7565836B2 (ja) |
EP (2) | EP2058633B1 (ja) |
JP (1) | JP5080020B2 (ja) |
CN (1) | CN100510654C (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008292330A (ja) * | 2007-05-25 | 2008-12-04 | Hitachi Ltd | 熱式流量計と制御方法 |
JP2009270840A (ja) * | 2008-04-30 | 2009-11-19 | Hitachi Ltd | 熱式流量計 |
US7677097B2 (en) | 2007-05-29 | 2010-03-16 | Hitachi, Ltd. | Heating resistor-type gas flowmeter |
JP2010107327A (ja) * | 2008-10-30 | 2010-05-13 | Hitachi Automotive Systems Ltd | 熱式ガス流量計 |
US7814785B2 (en) | 2007-10-03 | 2010-10-19 | Hitachi, Ltd. | Thermal flow meter, thermal flow meter control method, and sensor element of thermal flow meter |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2006093589A2 (en) * | 2005-02-25 | 2006-09-08 | O.I. Corporation | Improved analyte system |
JP2007248136A (ja) * | 2006-03-14 | 2007-09-27 | Hitachi Ltd | 熱式ガス流量測定装置 |
WO2007110934A1 (ja) * | 2006-03-28 | 2007-10-04 | Shimadzu Corporation | 熱式質量流量計 |
JP4341651B2 (ja) * | 2006-07-28 | 2009-10-07 | 株式会社日立製作所 | 熱式ガス流量計 |
DE102009033231A1 (de) * | 2009-07-14 | 2011-01-27 | Continental Automotive Gmbh | Verfahren zur fahrzeugeigenen Funktionsdiagnose eines Rußsensors in einem Kraftfahrzeug und/oder zur Erkennung von weiteren Bestandteilen im Ruß |
WO2011040327A1 (ja) * | 2009-09-30 | 2011-04-07 | 株式会社堀場エステック | 流量センサ |
IL205084A (en) * | 2010-04-14 | 2017-08-31 | Vasa Applied Tech Ltd | Probe learned flow |
JP5152292B2 (ja) * | 2010-10-06 | 2013-02-27 | 株式会社デンソー | 流量計測装置 |
CN101976086A (zh) * | 2010-10-29 | 2011-02-16 | 中国兵器工业集团第二一四研究所苏州研发中心 | 氧传感器加热控制方法及采用该方法的加热控制电路 |
US9441994B2 (en) * | 2010-11-10 | 2016-09-13 | Wai Global, Inc. | Mass air flow sensor |
US11814821B2 (en) | 2011-01-03 | 2023-11-14 | Sentinel Hydrosolutions, Llc | Non-invasive thermal dispersion flow meter with fluid leak detection and geo-fencing control |
US11608618B2 (en) | 2011-01-03 | 2023-03-21 | Sentinel Hydrosolutions, Llc | Thermal dispersion flow meter with fluid leak detection and freeze burst prevention |
US9146172B2 (en) | 2011-01-03 | 2015-09-29 | Sentinel Hydrosolutions, Llc | Non-invasive thermal dispersion flow meter with chronometric monitor for fluid leak detection |
JP5969760B2 (ja) * | 2011-12-27 | 2016-08-17 | 株式会社堀場エステック | 熱式流量センサ |
JP5743922B2 (ja) * | 2012-02-21 | 2015-07-01 | 日立オートモティブシステムズ株式会社 | 熱式空気流量測定装置 |
DE102012108350B3 (de) * | 2012-09-07 | 2013-07-18 | Pierburg Gmbh | Vorrichtung und Verfahren zur Rekalibrierung eines Abgasmassenstromsensors |
JP5851973B2 (ja) * | 2012-11-02 | 2016-02-03 | 日立オートモティブシステムズ株式会社 | 熱式流量計 |
DE102013106863A1 (de) | 2013-07-01 | 2015-01-08 | Aixtron Se | Vorrichtung zum Bestimmen des Massenflusses eines in einem Trägergas transportierten Dampfs |
CN104296817B (zh) * | 2014-10-22 | 2019-02-26 | 深圳万讯自控股份有限公司 | 一种通过动态温度补偿提高热式质量流量计测量精度的方法 |
JP6380168B2 (ja) * | 2015-03-02 | 2018-08-29 | 株式会社Soken | 熱式流量センサ |
JP6825821B2 (ja) * | 2016-04-26 | 2021-02-03 | Koa株式会社 | 流量センサ |
CN106802170B (zh) * | 2016-12-30 | 2019-07-19 | 北京七星华创流量计有限公司 | 流量传感器、质量流量输送测控装置及其温漂抑制方法 |
CN110462348B (zh) * | 2017-03-30 | 2021-08-10 | 富士金公司 | 质量流量传感器、具备该质量流量传感器的质量流量计以及具备该质量流量传感器的质量流量控制器 |
DE102017120941A1 (de) * | 2017-09-11 | 2019-03-14 | Endress + Hauser Wetzer Gmbh + Co. Kg | Thermisches Durchflussmessgerät |
CN108020283A (zh) * | 2017-12-01 | 2018-05-11 | 中国计量大学 | 一种双速度探头热式气体质量流量计及其测量方法 |
CN107844133A (zh) * | 2017-12-20 | 2018-03-27 | 北京创昱科技有限公司 | 一种质量流量控制器 |
JP6566062B2 (ja) * | 2018-02-22 | 2019-08-28 | オムロン株式会社 | 流量測定装置 |
WO2020213551A1 (ja) * | 2019-04-16 | 2020-10-22 | 智一 池野 | 流速センサ |
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2006
- 2006-04-13 JP JP2006110849A patent/JP5080020B2/ja not_active Expired - Fee Related
-
2007
- 2007-04-12 EP EP09001884A patent/EP2058633B1/en not_active Expired - Fee Related
- 2007-04-12 US US11/734,432 patent/US7565836B2/en not_active Expired - Fee Related
- 2007-04-12 EP EP07007526.2A patent/EP1845345B1/en not_active Expired - Fee Related
- 2007-04-13 CN CNB2007100961530A patent/CN100510654C/zh not_active Expired - Fee Related
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JPS59162414A (ja) * | 1983-03-07 | 1984-09-13 | Hitachi Ltd | 熱線式空気流量計 |
JPS6063421A (ja) * | 1983-09-17 | 1985-04-11 | Mitsubishi Electric Corp | 感熱形流量検出器 |
JPH04291115A (ja) * | 1991-03-20 | 1992-10-15 | Hitachi Ltd | 熱式空気流量計 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2008292330A (ja) * | 2007-05-25 | 2008-12-04 | Hitachi Ltd | 熱式流量計と制御方法 |
US7677097B2 (en) | 2007-05-29 | 2010-03-16 | Hitachi, Ltd. | Heating resistor-type gas flowmeter |
US7814785B2 (en) | 2007-10-03 | 2010-10-19 | Hitachi, Ltd. | Thermal flow meter, thermal flow meter control method, and sensor element of thermal flow meter |
JP2009270840A (ja) * | 2008-04-30 | 2009-11-19 | Hitachi Ltd | 熱式流量計 |
US7954373B2 (en) | 2008-04-30 | 2011-06-07 | Hitachi, Ltd. | Thermal type flow meter |
JP2010107327A (ja) * | 2008-10-30 | 2010-05-13 | Hitachi Automotive Systems Ltd | 熱式ガス流量計 |
Also Published As
Publication number | Publication date |
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EP2058633B1 (en) | 2012-03-21 |
US20070251315A1 (en) | 2007-11-01 |
JP5080020B2 (ja) | 2012-11-21 |
CN100510654C (zh) | 2009-07-08 |
EP1845345A3 (en) | 2008-01-02 |
CN101055203A (zh) | 2007-10-17 |
US7565836B2 (en) | 2009-07-28 |
EP1845345B1 (en) | 2016-11-02 |
EP1845345A2 (en) | 2007-10-17 |
EP2058633A1 (en) | 2009-05-13 |
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