FR2739976B1 - Structure de terminaison, dispositif a semi-conducteur, et leurs procedes de fabrication - Google Patents
Structure de terminaison, dispositif a semi-conducteur, et leurs procedes de fabricationInfo
- Publication number
- FR2739976B1 FR2739976B1 FR9612435A FR9612435A FR2739976B1 FR 2739976 B1 FR2739976 B1 FR 2739976B1 FR 9612435 A FR9612435 A FR 9612435A FR 9612435 A FR9612435 A FR 9612435A FR 2739976 B1 FR2739976 B1 FR 2739976B1
- Authority
- FR
- France
- Prior art keywords
- semiconductor device
- manufacturing methods
- termination structure
- termination
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/402—Field plates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/765—Making of isolation regions between components by field effect
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1095—Body region, i.e. base region, of DMOS transistors or IGBTs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7811—Vertical DMOS transistors, i.e. VDMOS transistors with an edge termination structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0638—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for preventing surface leakage due to surface inversion layer, e.g. with channel stopper
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
- H01L29/0692—Surface layout
- H01L29/0696—Surface layout of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
- H01L29/41766—Source or drain electrodes for field effect devices with at least part of the source or drain electrode having contact below the semiconductor surface, e.g. the source or drain electrode formed at least partially in a groove or with inclusions of conductor inside the semiconductor
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
- Bipolar Transistors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US507695P | 1995-10-11 | 1995-10-11 | |
US668895P | 1995-11-14 | 1995-11-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2739976A1 FR2739976A1 (fr) | 1997-04-18 |
FR2739976B1 true FR2739976B1 (fr) | 1999-04-02 |
Family
ID=26673893
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR9612435A Expired - Fee Related FR2739976B1 (fr) | 1995-10-11 | 1996-10-11 | Structure de terminaison, dispositif a semi-conducteur, et leurs procedes de fabrication |
Country Status (8)
Country | Link |
---|---|
US (1) | US5940721A (fr) |
JP (1) | JP3069054B2 (fr) |
KR (1) | KR100214408B1 (fr) |
DE (1) | DE19641838A1 (fr) |
FR (1) | FR2739976B1 (fr) |
GB (1) | GB2306249B (fr) |
IT (1) | IT1285780B1 (fr) |
SG (1) | SG47184A1 (fr) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3502531B2 (ja) * | 1997-08-28 | 2004-03-02 | 株式会社ルネサステクノロジ | 半導体装置の製造方法 |
US6022790A (en) * | 1998-08-05 | 2000-02-08 | International Rectifier Corporation | Semiconductor process integration of a guard ring structure |
US6355508B1 (en) * | 1998-09-02 | 2002-03-12 | Micron Technology, Inc. | Method for forming electrostatic discharge protection device having a graded junction |
US7098506B2 (en) | 2000-06-28 | 2006-08-29 | Renesas Technology Corp. | Semiconductor device and method for fabricating the same |
JP2000196075A (ja) * | 1998-12-25 | 2000-07-14 | Hitachi Ltd | 半導体装置及びその製造方法 |
US6642558B1 (en) * | 2000-03-20 | 2003-11-04 | Koninklijke Philips Electronics N.V. | Method and apparatus of terminating a high voltage solid state device |
US6833984B1 (en) | 2000-05-03 | 2004-12-21 | Rambus, Inc. | Semiconductor module with serial bus connection to multiple dies |
US6781203B2 (en) * | 2001-11-09 | 2004-08-24 | International Rectifier Corporation | MOSFET with reduced threshold voltage and on resistance and process for its manufacture |
US6744117B2 (en) * | 2002-02-28 | 2004-06-01 | Motorola, Inc. | High frequency semiconductor device and method of manufacture |
US6721189B1 (en) * | 2002-03-13 | 2004-04-13 | Rambus, Inc. | Memory module |
JP2003318395A (ja) * | 2002-04-19 | 2003-11-07 | Hitachi Ltd | 半導体装置の製造方法 |
US20050259368A1 (en) * | 2003-11-12 | 2005-11-24 | Ted Letavic | Method and apparatus of terminating a high voltage solid state device |
JP5128100B2 (ja) * | 2006-09-29 | 2013-01-23 | 三菱電機株式会社 | 電力用半導体装置 |
JP2007036299A (ja) * | 2006-11-13 | 2007-02-08 | Renesas Technology Corp | 半導体装置及びその製造方法 |
JP5353093B2 (ja) * | 2008-07-15 | 2013-11-27 | 株式会社デンソー | 半導体装置の製造方法 |
US20110084332A1 (en) * | 2009-10-08 | 2011-04-14 | Vishay General Semiconductor, Llc. | Trench termination structure |
US9269765B2 (en) * | 2013-10-21 | 2016-02-23 | Panasonic Intellectual Property Management Co., Ltd. | Semiconductor device having gate wire disposed on roughened field insulating film |
US9543208B2 (en) | 2014-02-24 | 2017-01-10 | Infineon Technologies Ag | Method of singulating semiconductor devices using isolation trenches |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3012430A1 (de) * | 1980-03-31 | 1981-10-08 | Siemens AG, 1000 Berlin und 8000 München | Planare halbleiteranordnung mit erhoehter durchbruchsspannung |
US4414560A (en) * | 1980-11-17 | 1983-11-08 | International Rectifier Corporation | Floating guard region and process of manufacture for semiconductor reverse conducting switching device using spaced MOS transistors having a common drain region |
US4412242A (en) * | 1980-11-17 | 1983-10-25 | International Rectifier Corporation | Planar structure for high voltage semiconductor devices with gaps in glassy layer over high field regions |
DE3382294D1 (de) * | 1982-02-22 | 1991-07-04 | Toshiba Kawasaki Kk | Mittel zum verhindern des durchbruchs einer isolierschicht in halbleiteranordnungen. |
US4532534A (en) * | 1982-09-07 | 1985-07-30 | Rca Corporation | MOSFET with perimeter channel |
US4966858A (en) * | 1989-11-02 | 1990-10-30 | Motorola, Inc. | Method of fabricating a lateral semiconductor structure including field plates for self-alignment |
JP2934325B2 (ja) * | 1990-05-02 | 1999-08-16 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
US5240872A (en) * | 1990-05-02 | 1993-08-31 | Mitsubishi Denki Kabushiki Kaisha | Method of manufacturing semiconductor device having interconnection layer contacting source/drain regions |
US5404040A (en) * | 1990-12-21 | 1995-04-04 | Siliconix Incorporated | Structure and fabrication of power MOSFETs, including termination structures |
US5304831A (en) * | 1990-12-21 | 1994-04-19 | Siliconix Incorporated | Low on-resistance power MOS technology |
IT1254799B (it) * | 1992-02-18 | 1995-10-11 | St Microelectronics Srl | Transistore vdmos con migliorate caratteristiche di tenuta di tensione. |
US5430324A (en) * | 1992-07-23 | 1995-07-04 | Siliconix, Incorporated | High voltage transistor having edge termination utilizing trench technology |
IT1272567B (it) * | 1992-09-15 | 1997-06-23 | Int Rectifier Corp | Dispositivo transistore di potenza, dotato di una regione ultraprofonda a concentrazione maggiorata |
TW290735B (fr) * | 1994-01-07 | 1996-11-11 | Fuji Electric Co Ltd | |
JP2870402B2 (ja) * | 1994-03-10 | 1999-03-17 | 株式会社デンソー | 絶縁ゲート型電界効果トランジスタ |
-
1996
- 1996-10-03 US US08/725,566 patent/US5940721A/en not_active Expired - Lifetime
- 1996-10-10 DE DE19641838A patent/DE19641838A1/de not_active Ceased
- 1996-10-10 GB GB9621156A patent/GB2306249B/en not_active Expired - Fee Related
- 1996-10-10 IT IT96MI002099A patent/IT1285780B1/it active IP Right Grant
- 1996-10-11 JP JP8305443A patent/JP3069054B2/ja not_active Expired - Lifetime
- 1996-10-11 FR FR9612435A patent/FR2739976B1/fr not_active Expired - Fee Related
- 1996-10-11 KR KR1019960045804A patent/KR100214408B1/ko not_active IP Right Cessation
- 1996-10-11 SG SG1996010853A patent/SG47184A1/en unknown
Also Published As
Publication number | Publication date |
---|---|
GB2306249B (en) | 1999-11-17 |
FR2739976A1 (fr) | 1997-04-18 |
JP3069054B2 (ja) | 2000-07-24 |
JPH09172175A (ja) | 1997-06-30 |
GB2306249A (en) | 1997-04-30 |
KR970024163A (ko) | 1997-05-30 |
KR100214408B1 (ko) | 1999-08-02 |
DE19641838A1 (de) | 1997-06-05 |
SG47184A1 (en) | 1998-03-20 |
GB9621156D0 (en) | 1996-11-27 |
IT1285780B1 (it) | 1998-06-18 |
ITMI962099A1 (it) | 1998-04-10 |
US5940721A (en) | 1999-08-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |