DE69226553T2 - Vorrichtung und Verfahren zur Belichtung mittels Ladungsträgerstrahlen - Google Patents

Vorrichtung und Verfahren zur Belichtung mittels Ladungsträgerstrahlen

Info

Publication number
DE69226553T2
DE69226553T2 DE69226553T DE69226553T DE69226553T2 DE 69226553 T2 DE69226553 T2 DE 69226553T2 DE 69226553 T DE69226553 T DE 69226553T DE 69226553 T DE69226553 T DE 69226553T DE 69226553 T2 DE69226553 T2 DE 69226553T2
Authority
DE
Germany
Prior art keywords
exposure
charge carrier
carrier beams
beams
charge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69226553T
Other languages
English (en)
Other versions
DE69226553D1 (de
Inventor
Hiroshi Yasuda
Yasushi Takahashi
Kiichi Sakamoto
Akio Yamada
Yoshihisa Ose
Junichi Kai
Shunsuke Fueki
Kenichi Kawashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Semiconductor Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Publication of DE69226553D1 publication Critical patent/DE69226553D1/de
Application granted granted Critical
Publication of DE69226553T2 publication Critical patent/DE69226553T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
    • H01J37/3177—Multi-beam, e.g. fly's eye, comb probe
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04—Means for controlling the discharge
    • H01J2237/043—Beam blanking
    • H01J2237/0435—Multi-aperture

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Electron Beam Exposure (AREA)
DE69226553T 1991-03-13 1992-03-13 Vorrichtung und Verfahren zur Belichtung mittels Ladungsträgerstrahlen Expired - Fee Related DE69226553T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP4803791 1991-03-13
JP9732191 1991-04-26

Publications (2)

Publication Number Publication Date
DE69226553D1 DE69226553D1 (de) 1998-09-17
DE69226553T2 true DE69226553T2 (de) 1998-12-24

Family

ID=26388248

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69226553T Expired - Fee Related DE69226553T2 (de) 1991-03-13 1992-03-13 Vorrichtung und Verfahren zur Belichtung mittels Ladungsträgerstrahlen

Country Status (4)

Country Link
US (1) US5260579A (de)
EP (1) EP0508151B1 (de)
KR (1) KR950002578B1 (de)
DE (1) DE69226553T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9880215B2 (en) 2014-09-03 2018-01-30 Nuflare Technology, Inc. Inspection method for blanking device for blanking multi charged particle beams

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JP2001283756A (ja) 2000-03-31 2001-10-12 Canon Inc 電子光学系アレイ、これを用いた荷電粒子線露光装置ならびにデバイス製造方法
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9880215B2 (en) 2014-09-03 2018-01-30 Nuflare Technology, Inc. Inspection method for blanking device for blanking multi charged particle beams
DE102015216682B4 (de) 2014-09-03 2018-08-02 Nuflare Technology, Inc. Inspektionsverfahren für ausblendvorrichtung für das ausblenden von mehreren geladenen partikelstrahlen

Also Published As

Publication number Publication date
DE69226553D1 (de) 1998-09-17
EP0508151A1 (de) 1992-10-14
EP0508151B1 (de) 1998-08-12
KR920018836A (ko) 1992-10-22
US5260579A (en) 1993-11-09
KR950002578B1 (ko) 1995-03-23

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