DE69122910D1 - Verfahren zur Kupfer-Elektroplattierung - Google Patents
Verfahren zur Kupfer-ElektroplattierungInfo
- Publication number
- DE69122910D1 DE69122910D1 DE69122910T DE69122910T DE69122910D1 DE 69122910 D1 DE69122910 D1 DE 69122910D1 DE 69122910 T DE69122910 T DE 69122910T DE 69122910 T DE69122910 T DE 69122910T DE 69122910 D1 DE69122910 D1 DE 69122910D1
- Authority
- DE
- Germany
- Prior art keywords
- electroplating process
- copper electroplating
- copper
- electroplating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/38—Electroplating: Baths therefor from solutions of copper
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/24—Reinforcing the conductive pattern
- H05K3/241—Reinforcing the conductive pattern characterised by the electroplating method; means therefor, e.g. baths or apparatus
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S205/00—Electrolysis: processes, compositions used therein, and methods of preparing the compositions
- Y10S205/92—Electrolytic coating of circuit board or printed circuit, other than selected area coating
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2162192A JPH0452296A (ja) | 1990-06-20 | 1990-06-20 | 銅めっき方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69122910D1 true DE69122910D1 (de) | 1996-12-05 |
DE69122910T2 DE69122910T2 (de) | 1997-05-07 |
Family
ID=15749751
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69122910T Expired - Fee Related DE69122910T2 (de) | 1990-06-20 | 1991-06-12 | Verfahren zur Kupfer-Elektroplattierung |
Country Status (6)
Country | Link |
---|---|
US (1) | US5143593A (de) |
EP (1) | EP0462943B1 (de) |
JP (1) | JPH0452296A (de) |
KR (1) | KR920000974A (de) |
DE (1) | DE69122910T2 (de) |
MY (1) | MY129999A (de) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69219484D1 (de) * | 1992-09-15 | 1997-06-05 | Atr Wire & Cable Co | Verfahren und vorrichtung zur elektrolytischen beschichtung mit kupfer |
US5908540A (en) * | 1997-08-07 | 1999-06-01 | International Business Machines Corporation | Copper anode assembly for stabilizing organic additives in electroplating of copper |
US6024856A (en) * | 1997-10-10 | 2000-02-15 | Enthone-Omi, Inc. | Copper metallization of silicon wafers using insoluble anodes |
DE19834353C2 (de) * | 1998-07-30 | 2000-08-17 | Hillebrand Walter Gmbh & Co Kg | Alkalisches Zink-Nickelbad |
JP2000256896A (ja) * | 1999-03-11 | 2000-09-19 | Ebara Corp | めっき装置 |
JP2000256898A (ja) * | 1999-03-03 | 2000-09-19 | Permelec Electrode Ltd | ウェーハの銅めっき方法 |
TW539652B (en) * | 2000-09-04 | 2003-07-01 | Tsurumi Soda Kk | Material for copper electroplating, method for manufacturing same and copper electroplating method |
WO2002031228A1 (en) * | 2000-10-10 | 2002-04-18 | Learonal Japan Inc. | Copper electroplating using insoluble anode |
US6451375B1 (en) * | 2001-01-05 | 2002-09-17 | International Business Machines Corporation | Process for depositing a film on a nanometer structure |
US6784104B2 (en) * | 2001-07-27 | 2004-08-31 | Texas Instruments Incorporated | Method for improved cu electroplating in integrated circuit fabrication |
TWI227952B (en) * | 2002-05-02 | 2005-02-11 | Mykrolis Corp | Device and method for increasing mass transport at liquid-solid diffusion boundary layer |
DE10261493A1 (de) * | 2002-12-23 | 2004-07-08 | METAKEM Gesellschaft für Schichtchemie der Metalle mbH | Anode zur Galvanisierung |
US7100954B2 (en) | 2003-07-11 | 2006-09-05 | Nexx Systems, Inc. | Ultra-thin wafer handling system |
JP2007046092A (ja) * | 2005-08-09 | 2007-02-22 | Hyomen Shori System:Kk | シート状ワークの銅めっき装置および方法 |
JP4957906B2 (ja) * | 2007-07-27 | 2012-06-20 | 上村工業株式会社 | 連続電気銅めっき方法 |
JP5110269B2 (ja) * | 2007-08-09 | 2012-12-26 | 上村工業株式会社 | 電気銅めっき方法 |
CN101275252B (zh) * | 2007-12-26 | 2011-02-16 | 梧州三和新材料科技有限公司 | 一种连续电镀的装置及用途 |
TWI384925B (zh) * | 2009-03-17 | 2013-02-01 | Advanced Semiconductor Eng | 內埋式線路基板之結構及其製造方法 |
US9068272B2 (en) * | 2012-11-30 | 2015-06-30 | Applied Materials, Inc. | Electroplating processor with thin membrane support |
KR101451483B1 (ko) * | 2012-12-28 | 2014-10-15 | 삼성전기주식회사 | 전해도금 장치 |
CN103388172B (zh) * | 2013-07-22 | 2016-06-22 | 苏州昕皓新材料科技有限公司 | 一种快速判断电镀添加剂性能的方法 |
CN109056002B (zh) * | 2017-07-19 | 2022-04-15 | 叶旖婷 | 一种通孔隔离法酸性电镀铜工艺及其装置 |
CN111074307A (zh) * | 2020-01-04 | 2020-04-28 | 安徽工业大学 | 一种隔膜电解法镀铜镀液稳定工艺 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3769179A (en) * | 1972-01-19 | 1973-10-30 | Kewanee Oil Co | Copper plating process for printed circuits |
IL43733A (en) * | 1973-12-03 | 1976-06-30 | Yeda Res & Dev | Method of electrodeposition of metals using catalyzed hydrogen |
US4469564A (en) * | 1982-08-11 | 1984-09-04 | At&T Bell Laboratories | Copper electroplating process |
JPS6063987A (ja) * | 1983-09-17 | 1985-04-12 | 沖電気工業株式会社 | 印刷配線基板の製造方法 |
JPH0679922B2 (ja) * | 1988-09-30 | 1994-10-12 | 松下冷機株式会社 | 厨芥収納庫 |
-
1990
- 1990-06-20 JP JP2162192A patent/JPH0452296A/ja active Pending
-
1991
- 1991-06-12 EP EP91830259A patent/EP0462943B1/de not_active Expired - Lifetime
- 1991-06-12 DE DE69122910T patent/DE69122910T2/de not_active Expired - Fee Related
- 1991-06-18 MY MYPI91001086A patent/MY129999A/en unknown
- 1991-06-18 US US07/716,870 patent/US5143593A/en not_active Expired - Fee Related
- 1991-06-19 KR KR1019910010123A patent/KR920000974A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
EP0462943B1 (de) | 1996-10-30 |
JPH0452296A (ja) | 1992-02-20 |
EP0462943A1 (de) | 1991-12-27 |
DE69122910T2 (de) | 1997-05-07 |
KR920000974A (ko) | 1992-01-29 |
US5143593A (en) | 1992-09-01 |
MY129999A (en) | 2007-05-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |