DE69414324T2 - Elektrobeschichtungsverfahren - Google Patents
ElektrobeschichtungsverfahrenInfo
- Publication number
- DE69414324T2 DE69414324T2 DE69414324T DE69414324T DE69414324T2 DE 69414324 T2 DE69414324 T2 DE 69414324T2 DE 69414324 T DE69414324 T DE 69414324T DE 69414324 T DE69414324 T DE 69414324T DE 69414324 T2 DE69414324 T2 DE 69414324T2
- Authority
- DE
- Germany
- Prior art keywords
- electroplating process
- electroplating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/42—Plated through-holes or plated via connections
- H05K3/423—Plated through-holes or plated via connections characterised by electroplating method
- H05K3/424—Plated through-holes or plated via connections characterised by electroplating method by direct electroplating
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/03—Metal processing
- H05K2203/0353—Making conductive layer thin, e.g. by etching
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/42—Plated through-holes or plated via connections
- H05K3/425—Plated through-holes or plated via connections characterised by the sequence of steps for plating the through-holes or via connections in relation to the conductive pattern
- H05K3/427—Plated through-holes or plated via connections characterised by the sequence of steps for plating the through-holes or via connections in relation to the conductive pattern initial plating of through-holes in metal-clad substrates
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electroplating Methods And Accessories (AREA)
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
- Chemically Coating (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Manufacturing Of Printed Wiring (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/104,801 US5374346A (en) | 1993-08-09 | 1993-08-09 | Electroplating process and composition |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69414324D1 DE69414324D1 (de) | 1998-12-10 |
DE69414324T2 true DE69414324T2 (de) | 1999-05-12 |
Family
ID=22302464
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69414324T Expired - Fee Related DE69414324T2 (de) | 1993-08-09 | 1994-06-27 | Elektrobeschichtungsverfahren |
Country Status (4)
Country | Link |
---|---|
US (1) | US5374346A (de) |
EP (1) | EP0638669B1 (de) |
JP (1) | JP3357473B2 (de) |
DE (1) | DE69414324T2 (de) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5738776A (en) * | 1996-01-19 | 1998-04-14 | Shipley Company, L.L.C. | Electroplating process |
US5762777A (en) * | 1996-05-02 | 1998-06-09 | Persee Chemical Co. Ltd. | Process of directly electroplating onto a nonconductive substrate |
US6265020B1 (en) | 1999-09-01 | 2001-07-24 | Shipley Company, L.L.C. | Fluid delivery systems for electronic device manufacture |
JP2002223056A (ja) * | 2001-01-26 | 2002-08-09 | Hitachi Kokusai Electric Inc | 回路パターン形成方法 |
JP4843164B2 (ja) * | 2001-08-21 | 2011-12-21 | 日本リーロナール有限会社 | 銅−樹脂複合材料の形成方法 |
US20030064158A1 (en) * | 2001-10-03 | 2003-04-03 | Thirkeldsen C. G. | Method and apparatus for improving corrosion resistance of chrome plated material |
US6808751B2 (en) * | 2001-10-03 | 2004-10-26 | Industrial Hard Chrome | Method for improving corrosion resistance of chrome plated material |
US20060065622A1 (en) * | 2004-09-27 | 2006-03-30 | Floyd Philip D | Method and system for xenon fluoride etching with enhanced efficiency |
JP4797611B2 (ja) * | 2005-12-09 | 2011-10-19 | 富士通株式会社 | 電気めっき方法、磁気ヘッド用コイルの製造方法及び半導体装置の製造方法 |
US7711239B2 (en) | 2006-04-19 | 2010-05-04 | Qualcomm Mems Technologies, Inc. | Microelectromechanical device and method utilizing nanoparticles |
US7623287B2 (en) * | 2006-04-19 | 2009-11-24 | Qualcomm Mems Technologies, Inc. | Non-planar surface structures and process for microelectromechanical systems |
EP2104948A2 (de) | 2007-02-20 | 2009-09-30 | Qualcomm Mems Technologies, Inc. | Ausrüstung und verfahren zur mems-ätzung |
US7719752B2 (en) | 2007-05-11 | 2010-05-18 | Qualcomm Mems Technologies, Inc. | MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same |
US7569488B2 (en) | 2007-06-22 | 2009-08-04 | Qualcomm Mems Technologies, Inc. | Methods of making a MEMS device by monitoring a process parameter |
RU2471210C2 (ru) | 2007-07-25 | 2012-12-27 | Квалкомм Мемс Текнолоджис, Инк. | Дисплеи на основе микроэлектромеханических систем и способы их изготовления |
US8023191B2 (en) * | 2008-05-07 | 2011-09-20 | Qualcomm Mems Technologies, Inc. | Printable static interferometric images |
US8547626B2 (en) * | 2010-03-25 | 2013-10-01 | Qualcomm Mems Technologies, Inc. | Mechanical layer and methods of shaping the same |
EP2556403A1 (de) | 2010-04-09 | 2013-02-13 | Qualcomm Mems Technologies, Inc. | Mechanische schicht einer elektromechanischen vorrichtung und verfahren zu ihrer herstellung |
US8963159B2 (en) | 2011-04-04 | 2015-02-24 | Qualcomm Mems Technologies, Inc. | Pixel via and methods of forming the same |
US9134527B2 (en) | 2011-04-04 | 2015-09-15 | Qualcomm Mems Technologies, Inc. | Pixel via and methods of forming the same |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3035859A1 (de) * | 1980-09-23 | 1982-05-06 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur aetztechnischen und/oder galvanischen herstellung von ringzonen in engen bohrungen |
US4478883A (en) * | 1982-07-14 | 1984-10-23 | International Business Machines Corporation | Conditioning of a substrate for electroless direct bond plating in holes and on surfaces of a substrate |
US4605471A (en) * | 1985-06-27 | 1986-08-12 | Ncr Corporation | Method of manufacturing printed circuit boards |
US5108786A (en) * | 1989-05-01 | 1992-04-28 | Enthone-Omi, Inc. | Method of making printed circuit boards |
US5007968A (en) * | 1989-07-28 | 1991-04-16 | Chemcut Corporation | Process and apparatus for treating articles of substantial thickness |
US5071517A (en) * | 1989-11-21 | 1991-12-10 | Solution Technology Systems | Method for directly electroplating a dielectric substrate and plated substrate so produced |
JPH0494591A (ja) * | 1990-08-10 | 1992-03-26 | Cmk Corp | スルーホールを有するプリント配線板の製造方法 |
US5207888A (en) * | 1991-06-24 | 1993-05-04 | Shipley Company Inc. | Electroplating process and composition |
-
1993
- 1993-08-09 US US08/104,801 patent/US5374346A/en not_active Expired - Fee Related
-
1994
- 1994-06-27 EP EP94109878A patent/EP0638669B1/de not_active Expired - Lifetime
- 1994-06-27 DE DE69414324T patent/DE69414324T2/de not_active Expired - Fee Related
- 1994-08-08 JP JP20602994A patent/JP3357473B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE69414324D1 (de) | 1998-12-10 |
JP3357473B2 (ja) | 2002-12-16 |
EP0638669A1 (de) | 1995-02-15 |
EP0638669B1 (de) | 1998-11-04 |
JPH07180089A (ja) | 1995-07-18 |
US5374346A (en) | 1994-12-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |