DE3864639D1 - Regelschaltung fuer laseroszillator. - Google Patents

Regelschaltung fuer laseroszillator.

Info

Publication number
DE3864639D1
DE3864639D1 DE8888901931T DE3864639T DE3864639D1 DE 3864639 D1 DE3864639 D1 DE 3864639D1 DE 8888901931 T DE8888901931 T DE 8888901931T DE 3864639 T DE3864639 T DE 3864639T DE 3864639 D1 DE3864639 D1 DE 3864639D1
Authority
DE
Germany
Prior art keywords
laseroscillator
control circuit
circuit
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8888901931T
Other languages
English (en)
Inventor
Etsuo Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fanuc Corp
Original Assignee
Fanuc Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=13325633&utm_source=***_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3864639(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Fanuc Corp filed Critical Fanuc Corp
Application granted granted Critical
Publication of DE3864639D1 publication Critical patent/DE3864639D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/102—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
    • H01S3/104—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation in gas lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
DE8888901931T 1987-03-20 1988-02-19 Regelschaltung fuer laseroszillator. Expired - Lifetime DE3864639D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP62066777A JP2651147B2 (ja) 1987-03-20 1987-03-20 レーザー発振器制御回路
PCT/JP1988/000184 WO1988007274A1 (en) 1987-03-20 1988-02-19 Laser oscillator control circuit

Publications (1)

Publication Number Publication Date
DE3864639D1 true DE3864639D1 (de) 1991-10-10

Family

ID=13325633

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888901931T Expired - Lifetime DE3864639D1 (de) 1987-03-20 1988-02-19 Regelschaltung fuer laseroszillator.

Country Status (6)

Country Link
US (1) US4890291A (de)
EP (1) EP0308511B2 (de)
JP (1) JP2651147B2 (de)
KR (1) KR890700948A (de)
DE (1) DE3864639D1 (de)
WO (1) WO1988007274A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2204442B (en) * 1987-05-06 1992-01-08 Ferranti Plc Radio-frequency excited gas laser
JP2647598B2 (ja) * 1992-03-27 1997-08-27 動力炉・核燃料開発事業団 レーザーシステムの出力制御方法
US5463650A (en) * 1992-07-17 1995-10-31 Kabushiki Kaisha Komatsu Seisakusho Apparatus for controlling output of an excimer laser device
JPH07273387A (ja) * 1994-03-31 1995-10-20 Fanuc Ltd 出力波形制御方式
US5764505A (en) * 1996-01-23 1998-06-09 Cymer, Inc. Gas discharge laser control systems using multiple CPU's with shared memory on a common bus
US5657334A (en) * 1996-02-15 1997-08-12 Cymer, Inc. External high voltage control for a laser system
JP3292125B2 (ja) * 1997-03-21 2002-06-17 三菱電機株式会社 ガスレーザ加工機

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3806829A (en) * 1971-04-13 1974-04-23 Sys Inc Pulsed laser system having improved energy control with improved power supply laser emission energy sensor and adjustable repetition rate control features
JPS55148480A (en) * 1979-05-08 1980-11-19 Mitsubishi Electric Corp Laser device
JPS56144587A (en) * 1980-04-11 1981-11-10 Toshiba Corp Pulse laser waveform controller
JPS57183088A (en) * 1981-05-08 1982-11-11 Sumitomo Electric Ind Ltd Laser controller with pulse repetition
JPS6030269A (ja) * 1983-07-29 1985-02-15 Nec Corp ファクシミリ装置
JPS60223179A (ja) * 1984-04-20 1985-11-07 Mitsubishi Electric Corp レ−ザ発振器
JPH107693A (ja) * 1996-03-25 1998-01-13 Yoshitomi Fine Chem Kk 新規糖誘導体、その製造法、リパーゼ活性測定用試薬およびリパーゼ活性測定方法

Also Published As

Publication number Publication date
JPS63232476A (ja) 1988-09-28
EP0308511B1 (de) 1991-09-04
KR890700948A (ko) 1989-04-28
US4890291A (en) 1989-12-26
EP0308511B2 (de) 1995-04-26
JP2651147B2 (ja) 1997-09-10
WO1988007274A1 (en) 1988-09-22
EP0308511A1 (de) 1989-03-29
EP0308511A4 (de) 1989-02-23

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8366 Restricted maintained after opposition proceedings
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee