KR890700948A - 레이저발진기 제어회로 - Google Patents

레이저발진기 제어회로

Info

Publication number
KR890700948A
KR890700948A KR1019880701499A KR880701499A KR890700948A KR 890700948 A KR890700948 A KR 890700948A KR 1019880701499 A KR1019880701499 A KR 1019880701499A KR 880701499 A KR880701499 A KR 880701499A KR 890700948 A KR890700948 A KR 890700948A
Authority
KR
South Korea
Prior art keywords
control circuit
laser oscillator
oscillator control
laser
circuit
Prior art date
Application number
KR1019880701499A
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=13325633&utm_source=***_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=KR890700948(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed filed Critical
Publication of KR890700948A publication Critical patent/KR890700948A/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/102—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
    • H01S3/104—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation in gas lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
KR1019880701499A 1987-03-20 1988-11-19 레이저발진기 제어회로 KR890700948A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP62066777A JP2651147B2 (ja) 1987-03-20 1987-03-20 レーザー発振器制御回路
PCT/JP1988/000184 WO1988007274A1 (en) 1987-03-20 1988-02-19 Laser oscillator control circuit

Publications (1)

Publication Number Publication Date
KR890700948A true KR890700948A (ko) 1989-04-28

Family

ID=13325633

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019880701499A KR890700948A (ko) 1987-03-20 1988-11-19 레이저발진기 제어회로

Country Status (6)

Country Link
US (1) US4890291A (ko)
EP (1) EP0308511B2 (ko)
JP (1) JP2651147B2 (ko)
KR (1) KR890700948A (ko)
DE (1) DE3864639D1 (ko)
WO (1) WO1988007274A1 (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2204442B (en) * 1987-05-06 1992-01-08 Ferranti Plc Radio-frequency excited gas laser
JP2647598B2 (ja) * 1992-03-27 1997-08-27 動力炉・核燃料開発事業団 レーザーシステムの出力制御方法
US5463650A (en) * 1992-07-17 1995-10-31 Kabushiki Kaisha Komatsu Seisakusho Apparatus for controlling output of an excimer laser device
JPH07273387A (ja) * 1994-03-31 1995-10-20 Fanuc Ltd 出力波形制御方式
US5764505A (en) * 1996-01-23 1998-06-09 Cymer, Inc. Gas discharge laser control systems using multiple CPU's with shared memory on a common bus
US5657334A (en) * 1996-02-15 1997-08-12 Cymer, Inc. External high voltage control for a laser system
JP3292125B2 (ja) * 1997-03-21 2002-06-17 三菱電機株式会社 ガスレーザ加工機

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3806829A (en) * 1971-04-13 1974-04-23 Sys Inc Pulsed laser system having improved energy control with improved power supply laser emission energy sensor and adjustable repetition rate control features
JPS55148480A (en) * 1979-05-08 1980-11-19 Mitsubishi Electric Corp Laser device
JPS56144587A (en) * 1980-04-11 1981-11-10 Toshiba Corp Pulse laser waveform controller
JPS57183088A (en) * 1981-05-08 1982-11-11 Sumitomo Electric Ind Ltd Laser controller with pulse repetition
JPS6030269A (ja) * 1983-07-29 1985-02-15 Nec Corp ファクシミリ装置
JPS60223179A (ja) * 1984-04-20 1985-11-07 Mitsubishi Electric Corp レ−ザ発振器
JPH107693A (ja) * 1996-03-25 1998-01-13 Yoshitomi Fine Chem Kk 新規糖誘導体、その製造法、リパーゼ活性測定用試薬およびリパーゼ活性測定方法

Also Published As

Publication number Publication date
EP0308511A1 (en) 1989-03-29
JPS63232476A (ja) 1988-09-28
US4890291A (en) 1989-12-26
EP0308511B2 (en) 1995-04-26
WO1988007274A1 (en) 1988-09-22
EP0308511B1 (en) 1991-09-04
EP0308511A4 (en) 1989-02-23
JP2651147B2 (ja) 1997-09-10
DE3864639D1 (de) 1991-10-10

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application