WO2020026645A1 - 搬送装置及び制御方法 - Google Patents
搬送装置及び制御方法 Download PDFInfo
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- WO2020026645A1 WO2020026645A1 PCT/JP2019/024918 JP2019024918W WO2020026645A1 WO 2020026645 A1 WO2020026645 A1 WO 2020026645A1 JP 2019024918 W JP2019024918 W JP 2019024918W WO 2020026645 A1 WO2020026645 A1 WO 2020026645A1
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- container
- protective material
- mounting
- spacer
- unit
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67346—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67294—Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers
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- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
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- H01L21/67369—Closed carriers characterised by shock absorbing elements, e.g. retainers or cushions
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- H01L21/67766—Mechanical parts of transfer devices
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- H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
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- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67775—Docking arrangements
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- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
Definitions
- the present invention relates to a technique for unpacking / packing a substrate such as a semiconductor wafer.
- Patent Document 1 discloses an apparatus for automating unpacking and packing of a coin stack container using a sheet-like protective material.
- Patent Literature 2 discloses a device using a ring-shaped spacer as a protective material. The contact between the circuit formed on the semiconductor wafer and the protective material can be avoided, and the protection performance of the circuit can be improved.
- An object of the present invention is to perform unpacking / packing corresponding to each of a contact type and a non-contact type coin stack container.
- the protective material is transported.
- Transport means to A protection material mounting portion on which the protection material is loaded, A container mounting portion on which the container body of the container is mounted, Control means for controlling the transport means in a selected operation mode among a plurality of operation modes corresponding to the type of the protective material, Attaching determination means, which is selected according to the type of the protection material, and determines whether or not each of the components constituting the transporting means, the protection material mounting part, and the container mounting part is detachable, Consistency determination means for determining consistency between the selected operation mode and the determination result of the mounting determination means, A transfer device is provided.
- unpacking / packing can be performed for each of the contact type and non-contact type coin stack containers.
- FIG. 1 is a perspective view of a transport system according to an embodiment of the present invention.
- FIG. 2 is a plan view showing an internal layout of the transport system in FIG. 1.
- FIG. Explanatory drawing of a container Explanatory drawing of a container. Explanatory drawing of a spacer conveyance device. Explanatory drawing of a container mounting device. Explanatory drawing of a container mounting device. Explanatory drawing of a protective material mounting device. Explanatory drawing of a protection material conveyance robot. Explanatory drawing of a holding unit. Explanatory drawing of a holding unit.
- FIG. 12 is an explanatory diagram of a holding operation by the holding unit in FIG. 11.
- FIG. 12 is an explanatory diagram of a holding operation by the holding unit in FIG. 11.
- FIG. 12 is an explanatory diagram of a holding operation by the holding unit in FIG. 11.
- FIG. 12 is an explanatory diagram of a holding operation by the holding unit in FIG. 11.
- FIG. 12 is an explanatory diagram of
- FIG. 12 is an explanatory diagram of a holding operation by the holding unit in FIG. 11.
- FIG. 12 is an explanatory diagram of a holding operation by the holding unit in FIG. 11.
- FIG. 2 is a block diagram of a control device of the transport system in FIG. 1. Operation
- FIG. 3 is an exploded perspective view of a part of the protection material transport robot. Explanatory drawing of a holding unit.
- FIG. 3 is an exploded perspective view of a part of the protection material transport robot. Explanatory drawing of a holding unit.
- movement explanatory drawing of the conveyance system of FIG. 5 is a flowchart illustrating a processing example of a controller.
- 9 is a flowchart illustrating another example of processing of the controller.
- FIG. 9 is a plan view showing another example of the layout of the transport system.
- FIG. 9 is a plan view showing another example of the layout of the transport system.
- FIG. 9 is a plan view showing another example of the layout of the transport system.
- FIG. 1 is a perspective view of a transport system 1 according to one embodiment of the present invention.
- the transport system 1 has a function of unpacking a coin stack container and transferring a substrate (a semiconductor wafer in this case) in the coin stack container to a container such as a FOUP. Further, the transport system 1 has a function of unloading a substrate from a container such as a FOUP and packing the unloaded substrate in a coin stack container. That is, the transport system 1 is a packing system that performs unpacking / packing (unpacking operation / packing operation) of the coin stack container.
- the transport system 1 includes a substrate transport device 2 having a built-in substrate transport mechanism, a plurality of load ports 3, an aligning device 4 for aligning the substrate, and a protective material transport device 5 having a protective material transport mechanism. And an information display device 6.
- the information display device 6 is, for example, a touch-panel display, and receives input of settings for the transport system 1 and displays operation information of the transport system 1.
- FIG. 2 is a plan view showing a layout inside the transfer system 1, and the substrate transfer device 2 constitutes a transfer mechanism that transfers a substrate inside the transfer system 1.
- the substrate transfer device 2 includes a substrate transfer robot 20 provided in the internal space 2a.
- the substrate transfer robot 20 can reciprocate in the X direction by the guidance of a pair of guide members 24 extending in the X direction.
- the pair of guide members 24 are, for example, rail members, and define a movement path of the substrate transfer robot 20.
- the substrate transfer robot 20 includes a horizontal articulated mechanism 21, a base unit 22, and a traveling unit 23.
- the traveling unit 23 includes a driving mechanism that moves in the X direction along the guide member 24.
- the drive mechanism includes, for example, a drive source such as a motor and a drive transmission mechanism such as a belt transmission mechanism and a rack-pinion mechanism.
- the base unit 22 is mounted on the traveling unit 23 and includes a drive mechanism that moves up and down and turns the horizontal articulated mechanism 21.
- This drive mechanism includes, for example, a drive source such as a motor and a drive transmission mechanism such as a belt transmission mechanism, a rack-pinion mechanism, and a gear mechanism.
- the horizontal articulated mechanism 21 includes a hand 21a, an arm for moving the hand 21a in the horizontal direction, a mechanism for turning the hand 21a up and down freely, and a driving mechanism for them.
- the drive mechanism includes, for example, a drive source such as a motor and a drive transmission mechanism such as a belt transmission mechanism.
- the hand 21a is provided with a plurality of suction portions for sucking the substrate by suction of air or the like, and the substrate is sucked and held by the hand 21a during the transfer of the substrate.
- the load port 3 and the protective material transporting device 5 are provided along one side of the moving path (guide member 24) of the substrate transfer robot 20 along the moving path.
- the transport of the protective material by the protective material transport device 5 and the transport of the substrate by the substrate transport device 2 can be performed alternately, and the transport of the protective material and the transport of the substrate can be performed. Since they can be performed in parallel, the tact time can be reduced.
- loading and unloading of coin stack containers and loading and unloading of containers such as FOUPs can be performed, so that the workability of workers can be improved.
- the aligning device 4 is arranged on the other side of the moving path (guide member 24) of the substrate transfer robot 20. With this arrangement, at the time of packing, the substrate is unloaded from the load port 3 (a container opening / closing device such as a FOUP) by the substrate transfer robot 20 and is efficiently transferred to the protective material transfer device 5 via the aligning device 4. can do.
- a container opening / closing device such as a FOUP
- the aligning device 4 is arranged at a position facing the protective material transporting device 5.
- the substrate transport robot 20 just unloads the substrate from the aligning device 4 and then reverses to the rear side, directly facing the protective material transport device 5, so that positioning in the X direction is not required, resulting in displacement. There is no fear.
- FIG. 3 is a partial schematic side sectional view of the load port 3.
- the load port 3 is an opener for opening and closing the container 100.
- the container 100 is a FOUP, FOSB, SMIF, open cassette, or the like.
- the container 100 has a box-shaped container main body 101 having an opening 102 for inserting and removing a circular substrate W, which is a semiconductor wafer, on the side, and a lid (door) that is removably mounted on the opening 102 and closes the opening 102.
- FIG. 3 shows a closed position where the container 100 is closed by the lid 103 and an open position where the lid 103 is opened by the load port 3 (shown by a two-dot chain line in FIG. 3).
- the container body 100 is mounted on the mounting portion 32 with the opening 102 facing the hole 311 as shown in FIG.
- the horizontal articulated mechanism 21 of the substrate transfer device 2 can access the substrate W in the container main body 101 via the hole 311 and the opening 102.
- the mounting section 32 is provided in a table shape.
- the mounting portion 32 includes a movable dock plate 321 on which the container 100 is mounted.
- the dock plate 321 is moved by a moving mechanism (not shown) in a position close to the hole 311 of the wall body 31 (a position shown in FIG. 3); It is moved movably back and forth in the Y direction at the separated position.
- the dock plate 321 moves to a position separated from the hole 311 (retreat position), and when the container 100 is opened and closed, the dock plate 321 moves to a position close to the hole 311 (advance position). Is done.
- the load port 3 is provided with an opening / closing mechanism 33.
- the opening / closing mechanism 33 moves the holding unit (port door) 330 that holds the lid 103 and the port door 330 forward and backward in the arrow direction AY.
- a moving mechanism 331 for moving up and down to AZ.
- the substrate W is carried out of the container body 101 and the substrate W is carried into the container body 101.
- the aligning device 4 includes a centering unit 40 as shown in FIG.
- the centering unit 40 described in the present embodiment is a device for centering the substrate W, but is not limited to this.
- the centering of the substrate W and the adjustment of the notch (or orientation flat) position may be performed like an aligner commonly used in a semiconductor manufacturing apparatus.
- the centering unit 40 includes three chucks 44 in the case of the present embodiment. Each chuck 44 is driven to open and close in synchronization by an actuator (not shown). The substrate W placed on the centering unit 40 is centered, that is, centered by being gripped by the chucks 44.
- FIG. 4A is an explanatory view of a container 200 which is a coin stack container, and is a cross-sectional view thereof.
- the container 200 is a hollow body including a container main body 201 and a cover 202 serving as a lid of the container main body 201.
- a laminate of the protective material 203 and the substrate W placed on the protective material 203 is accommodated in the container 200. This laminate is placed on the container body 201, and movement in the radial direction is restricted by the peripheral wall of the container body 201.
- a concave portion 201a is formed on a bottom surface inside the container body 201 to prevent interference when a holding unit 71 described later collectively removes the protective material 203.
- the container main body 201 includes, on the bottom surface thereof, a convex portion 201c that engages with a concave portion 203a of the protective member 203 described later.
- the protection member 203 is a spacer for providing a gap between the substrates W, and is made of, for example, resin.
- the protection member 203 may be called a spacer.
- the spacer 203 is a frame-shaped member that conforms to the shape of the substrate W. In the present embodiment, since the substrate W is circular, the spacer 203 has an annular shape. However, the shape of the spacer 203 is not limited to this, and may be, for example, a rectangle or a polygon as long as the shape avoids a protection region (a circuit forming portion or the like) on the substrate W.
- a concave portion 203a is formed on the lower surface side, and a convex portion 203b and a mounting surface 203c are formed on the upper surface side.
- the protrusion 203b is an annular protrusion that engages with the recess 203a.
- the concave portion 203a of the lowermost protective material 203 is engaged with the above-mentioned convex portion 201c, and between adjacent protective materials 203, the convex portion 203b of the lower protective material 203 is replaced by the inner portion 203a of the upper protective material 203. Is engaged.
- the spacer 203 can be more stably laminated by the engagement between the concave portion 203a and the convex portion 203b.
- the mounting surface 203c is an annular flat surface on which the peripheral portion of the substrate W is mounted.
- a plurality of substrates W can be stacked in the container 200 without bringing the circuit portion of the substrate W into contact with another substrate W or the spacer 203.
- FIG. 5 is a view schematically showing the protective material transporting apparatus 5, schematically showing a state in which the exterior panel has been removed.
- the protective material transporting device 5 is a device that transports the spacer 203 as a protective material.
- the protective material transporting apparatus 5 transports the sheet-like protective material 303 described later by detaching and attaching some parts in addition to transporting the protective material 203 when the spacer 203 is used as a protective material. Is possible.
- the sheet-shaped protection member 303 may be referred to as a sheet 303 in some cases.
- the protective material transporting device 5 includes a frame 50 including a plurality of columns and beams, and each component is supported by the frame 50.
- the frame 50 has a rectangular parallelepiped outer shape that is long in the Z direction, and its internal space has a shelf 5A and a robot housing 5B arranged in the X direction.
- the frame 50 includes shelf members 50a to 50c that divide the internal space of the shelf 5A in the Z direction.
- a lower mounting portion 51c is formed by 50c.
- Each of the mounting portions 51a to 51c is provided with a horizontally opening door 5a to 5c at the front of the transport system 1 as shown in FIG.
- Each of the doors 5a to 5c is formed with a translucent window 5a 'to 5c' formed of an acrylic panel or a glass panel, and the mounting portions 51a to 51c are visible from the outside.
- the containers 200 to be unpacked or packed are placed on the placement units 51a and 51b. By opening the doors 5a and 5b, the operator can carry the container 200 in and out of the receivers 51a and 51b.
- the container 200 only the container main body 201 is placed on the placing portions 51a and 51b with the cover 202 removed.
- the transport system 1 may be provided with a cover removing mechanism, the container 200 to which the cover 202 is attached may be placed on the receivers 51a and 51b, and the cover 202 may be removed by the cover removing mechanism.
- two mounting portions 51a and 51b are provided, but may be one, or three or more.
- the spacer 203 is placed on the placement portion 51c during unpacking or packing. That is, it is a temporary storage place for the spacer 203.
- the spacer 203 is stacked on the mounting portion 51c. By opening the door 5c, the worker can carry out the spacer 203 from the placement part 51c or carry in the spacer 203 to the placement part 51c. Such an operation is performed, for example, when the spacer 203 is excessive or insufficient.
- a container placement device 52 is provided on each of the placement portions 51a and 51b, and a protective material placement device 53 is provided on the placement portion 51c.
- the container mounting device 52 and the protective material mounting device 53 will be described.
- the container placing device 52 and the protective material placing device 53 may be simply referred to as the placing device 52 and the placing device 53.
- the mounting device 52 will be described.
- FIG. 6 is a perspective view of the placing device 52
- FIG. 7 is a perspective view of the placing device 52 on which the container body 201 is mounted.
- the mounting device 52 includes a base plate 520 and a pair of guide members 521 that support the base plate 520 movably in the Y direction.
- the guide member 521 is, for example, a slide rail.
- the base plate 520 has a C-shaped outer shape that is open at the back in the Y direction, and a handle 520a is provided on the near side in the Y direction.
- a handle 520a is provided on the near side in the Y direction.
- a plurality of guide members 520 b are provided on the base plate 520. With the guidance of the plurality of guide members 520b, when the container main body 201 is placed on the base plate 520, the container main body 201 is roughly positioned with respect to the base plate 520, and rattling is prevented.
- a lift table 522 is provided at the opening of the base plate 520.
- the elevating table 522 is moved in the Z direction by the elevating mechanism 523 disposed below the elevating table 522.
- the lifting table 522 is provided with a plurality of pins 522a for positioning the container body 201.
- the pin 522a is an engagement pin for kinematic coupling, engages with an engagement portion 201b (a valley-shaped groove in the present embodiment) provided in the container main body 201, and On the other hand, the container body 201 is accurately positioned.
- the elevating table 522 is provided with sensors 522b and 522c.
- the sensor 522b is a sensor that detects whether or not the container main body 201 is placed on the elevating table 522.
- the sensor 522b is a push-button switch that is turned on by the weight of the container main body 201. It is.
- the sensor 522c is a sensor that detects attachment / detachment of an adapter 528 described later.
- the adapter 528 is a member that is mounted when a coin stack container using a sheet 303 described later is used.
- the sensor 522c is a push-button switch (occupancy sensor) that is turned ON by the weight of the adapter 528.
- the elevating table 522 is located at a retracted position lower than the base plate 520 by the elevating mechanism 523. An operator pulls out the base plate 520, places the container body 201 on the base plate 520, and then returns the base plate 520 to the original position. Thereafter, the elevating table 522 is raised by the elevating mechanism 523, and slightly lifts the container body 201 from the base plate 520. At the time of this lifting, the pins 522 a engage with the engaging portions 201 b of the container main body 201 to position the container main body 201, and the container main body 201 is supported on the lifting table 522. Note that the sensor 522c is arranged so as not to be turned ON even when the container main body 201 is supported on the elevating table 522.
- sensors 524, 526, and 527 for detecting the accommodation state of the spacer 203 and the substrate W in the container main body 201 are supported by the frame 50.
- the sensor 524 is a laser positioning sensor, and two sensors are provided in the present embodiment.
- the sensor 524 bends the direction of the laser beam by the reflection mirror 525 supported on the frame 50 via the bracket 525a, and detects the target position.
- the sensor 524 detects, for example, the height of the stacked body of the spacer 203 and the substrate W on the container body 201.
- the sensor 526 is a color sensor, and is used to determine the type of the uppermost layer member of the stacked body of the spacer 203 and the substrate W on the container main body 201.
- the sensor 527 is a laser positioning sensor, and detects the height of a stacked body including only the spacer 203 loaded on the container main body 201.
- FIG. 8 is a perspective view of the mounting device 53.
- the mounting device 53 includes a base plate 530.
- a plurality of positioning pins 531 are erected on the base plate 530. In the present embodiment, the number of the positioning pins 531 is three.
- the spacer 203 is loaded on the base plate 530 inside the three positioning pins 531.
- FIG. 4B illustrates an example of the spacer 203 loaded on the base plate 530.
- the laminated body of the spacer 203 is positioned with respect to the base plate 530.
- An opening 530a is formed in the base plate 530 at a position overlapping the inner peripheral portion of the spacer 203.
- the number of the spacers 203 to be positioned by the positioning pins 531 does not necessarily need to be all the spacers 203 constituting the stacked body 203, but it is needless to say that all the spacers 203 may be positioned.
- a sensor 532 is provided on the base plate 530.
- the sensor 532 is a sensor for detecting attachment / detachment of an adapter 534 described later.
- the adapter 534 is a member for holding a laminated body of the sheet 303 described later.
- the sensor 532 is a reflection-type optical sensor, and is disposed below an opening provided in the base plate 530.
- a sensor 533 for detecting the loaded state of the spacer 203 on the base plate 530 is provided around the mounting device 53.
- the sensor 533 is a laser positioning sensor, and detects the height of the stacked body of the spacers 203 loaded on the base plate 530.
- the sensor 533 is supported by the frame 50 via a bracket 533a.
- the robot accommodating section 5B is provided with a protective material transport robot 7.
- the protection material transport robot 7 is a robot that transports the spacer 203 between the receiver 51a or 51b and the receiver 51c.
- the protection material transport robot 7 will be described with reference to FIGS.
- FIG. 9 is an explanatory diagram of the protection material transport robot 7, and is a perspective view thereof.
- the protection material transfer robot 7 may be simply referred to as a transfer robot 7.
- the transfer robot 7 includes a holding unit 70, a holding unit 71, and a moving unit 72.
- Each of the holding units 70 and 71 is a unit for holding the spacer 203, and the moving unit 72 supports the holding units 70 and 71 and moves them between the mounting portion 51a or 51b and the mounting portion 51c. Unit.
- the holding unit 70 and the holding unit 71 are arranged so as to overlap in the Z direction. This contributes to downsizing of the protective material transporting device 5 in the X and Y directions.
- the moving unit 72 includes a moving unit 721 that rotatably supports the holding unit 70, a moving unit 722 that rotatably supports the holding unit 71, and a moving unit 720 that moves the moving units 721 and 722 together.
- the moving units 721 and 722 are separate units for the holding units 70 and 71, and the moving unit 720 is a unit common to the holding units 70 and 71.
- the moving unit 720 includes a column member 7200 extending in the Z direction.
- a guide groove 7201 for guiding the movement of the slider 7202 is provided on a side portion of the column member 7200.
- the guide groove 7201 guides the movement of the slider 7202 in the Z direction.
- the slider 7202 is a plate-shaped member having a thickness in the X direction, and moves up and down along the guide groove 7201.
- the driving unit 7205 includes a driving source of a driving mechanism for moving the slider 7202 up and down, in particular.
- This drive mechanism includes a drive source such as a motor, and a transmission mechanism (for example, a ball screw mechanism or a belt transmission mechanism) that converts the rotational drive of the drive source into a linear motion in the Z direction and transmits the linear motion to the slider 7202.
- a part of the transmission mechanism is built in the column member 7200.
- the base member 7203 supporting the moving unit 721 and the base member 7204 supporting the moving unit 722 are fixed to the slider 7202.
- Each of the base members 7203 and 7204 is a plate-shaped member having a thickness in the Z direction, and is fixed so as to be perpendicular to the slider 7202 and overlap in the Z direction.
- the moving unit 721 is a unit that supports the holding unit 70 so as to be rotatable in the horizontal direction.
- the moving unit 721 includes an arm member 7210, a rotation support portion 7211 that rotatably supports the arm member 7210, and a drive unit 7212.
- the arm member 7210 is a member extending in the horizontal direction.
- the holding unit 70 is supported at one end of the arm member 7210, and the other end is supported by the rotation support portion 7211.
- the rotation support portion 7211 is a mechanism that rotatably supports the arm member 7210 about a rotation center axis Z1 in the Z direction, and is fixed to a rotor connected to the arm member 7210 and a base member 7203, and is rotated.
- the drive unit 7212 includes a drive source such as a motor, and a transmission mechanism (for example, a belt transmission mechanism or a gear mechanism) that transmits the driving force of the drive source to the rotor of the rotation support unit 7211.
- a drive source such as a motor
- a transmission mechanism for example, a belt transmission mechanism or a gear mechanism
- the moving unit 722 is a unit that supports the holding unit 71 so as to be rotatable in the horizontal direction.
- the moving unit 722 includes an arm member 7220, a rotation support portion 7221 that rotatably supports the arm member 7220, and a drive unit 7222.
- the arm member 7220 is a member extending in the horizontal direction.
- the holding unit 71 is supported at one end of the arm member 7220, and the other end is supported by the rotation support portion 7221.
- the rotation support portion 7221 is a mechanism that rotatably supports the arm member 7220 around a rotation center axis Z1 in the Z direction, and is fixed to a rotor connected to the arm member 7220 and a base member 7204, and is rotated. And a support portion for supporting the child rotatably about the Z1 axis.
- the drive unit 7222 includes a drive source such as a motor, and a transmission mechanism (for example, a belt transmission mechanism or a gear mechanism) that transmits the driving force of the drive source to the rotor of the rotation support unit 7221.
- the moving units 721 and 722 are arranged offset in the Z direction, and have a coaxial rotation center axis Z1. Therefore, space saving and miniaturization of the protective material transporting device 5 in the X and Y directions can be achieved.
- the drive unit 7212 is arranged below the base member 7203, and in the upper moving unit 722, the drive unit 7222 is arranged above the base member 704. Thereby, the moving units 721 and 722 can be arranged closer to the Z direction.
- the moving units 721 and 722 independently rotate the corresponding holding units 70 and 71 in the horizontal direction within a range of 90 degrees.
- FIG. 5 shows a rotation position when the holding units 70 and 71 are located in the shelf 5A. This turning position is called an operating position.
- FIG. 2 shows a rotation position where the holding units 70 and 71 are rotated 90 degrees from the operation position and are located outside the shelf 5A. This rotation position is called an elevating position.
- the arrow D in FIG. 2 indicates the rotation direction of the holding units 70 and 71.
- FIG. 10 is an explanatory view of the holding unit 70, and is a perspective view of the holding unit 70 shown together with the arm member 7210 and the rotation support member 7211.
- the holding unit 70 includes a plate-shaped rectangular base member 700 having a thickness in the Z direction, and a plurality of support members 701 extending radially from four corners of the base member 700.
- a suction portion 702 is supported at the tip of each support member 701.
- the suction unit 702 of the present embodiment is a nozzle member that is connected to a negative pressure source (not shown) and suctions air from an opening at the lower end thereof.
- the four suction portions 702 are arranged on an imaginary circle having the same diameter as the spacer 203 so as to suction the upper surface of the spacer 203 (the upper surface of the spacer 203d in the present embodiment).
- Four spacers 702 can hold one spacer 203 in a horizontal posture.
- the number of the suction portions 702 may be other than four.
- the holding method of the spacer 203 may be a holding method other than suction (for example, holding).
- FIG. 11 is an explanatory diagram of the holding unit 71, and is a perspective view of the holding unit 71 shown together with the arm member 7220 and the rotation support member 7221.
- the configuration of the arm member 7220 in the present embodiment will be further described.
- the arm member 7220 has a two-member configuration of a base member 7220a and a tip member 7220b, and is detachably connected to each other.
- the holding unit 71 and the tip-side member 7220b constitute an arm member that becomes one exchange unit.
- this arm member is replaced as a unit. Details will be described later.
- the holding unit 71 includes a plate-shaped and circular base member 710 having a thickness in the Z direction, and three support members 711 extending radially from the base member 710 in three directions.
- the base member 710 is connected to the arm member 7220 via a plurality of suspension shafts 710a. Accordingly, when the stacked body of the spacers 203 is collectively held, interference between the stacked body of the spacers 203 and the arm member 7220 can be avoided.
- an engagement member 713 is supported via a displacement unit 712.
- the displacement unit 712 displaces the engagement member 713 so as to be able to expand and contract in the radial direction of the base member 710 (the longitudinal direction of the support member 711) as indicated by an arrow A1 in FIG.
- the position where the engaging member 713 is displaced radially outward is referred to as an engaged position, and the position where the engaging member 713 is displaced inward is referred to as a retracted position.
- the displacement unit 712 is an air cylinder that expands and contracts in the longitudinal direction of the support member 711.
- a total of three engaging members 713 are provided.
- the three engaging members 713 are provided at equal intervals (equal angles) in the circumferential direction on an imaginary circle centered on the base member 710.
- this virtual circle corresponds to the inner circumferential circle of the spacer 203, and therefore, the three engaging members 713 are provided at equal intervals in the circumferential direction of the spacer 203. .
- the engagement member 713 has a main body 7130 having a substantially rectangular parallelepiped outer shape extending in the Z direction.
- the outer peripheral portion 7130a of the main body 7130 has a curved surface along the inner peripheral surface of the stacked body of the spacer 203.
- the engagement member 713 has a flange-shaped engagement portion 7131 extending outward at the lower end of the main body 7130 (the lower end of the outer peripheral portion 7130a). When the stacked body of the spacers 203 is collectively held, the engaging portion 7131 comes into contact with the lowermost spacer 203 from below to scoop up the stacked body.
- FIGS. 12A to 13B show an example of an operation of holding the stacked body 203S of the spacers 203 collectively by the holding unit 71.
- FIG. The stacked body 203S of the spacers 203 is formed, for example, by stacking several tens of spacers 203 as shown in FIG. 4B.
- the stacked body 203S may be placed on the container main body 201 in the placement section 51a or 51b, or may be placed on the base plate 530 of the placement device 53.
- the holding unit 71 is moved by the moving unit 73 above the stacked body 203S as shown in FIG. 12A. At this time, the holding unit 71 is located at the operating position, and the holding unit 70 is located at the elevating position. The holding unit 71 is lowered by the moving unit 73 into the internal space of the stacked body 203S as shown in FIG. 12B with the respective engagement members 713 located at the retracted positions.
- the engaging portion 7131 enters the concave portion 201a (see FIG. 4A).
- the engaging portion 7131 enters the opening 530a (see FIGS. 4B and 8).
- FIG. 13A is a view of the state in which the holding unit 71 is lowered, as viewed from above the stacked body 203S. From this state, as shown in FIG. 13B, the displacement unit 712 is driven to displace the engagement member 713 to the engagement position. Thereby, the stacked body 203S is held by the three holding members 713 from the inside. Specifically, the engaging portion 7131 enters below the lowermost spacer 203 of the stacked body 203S, and the stacked body 203S is placed on the three engaging portions 7131. Thereby, it is possible to move the stacked body 203S in a state where the stacked body 203S is lifted at a time, and the stacked body 203S is held.
- each outer peripheral portion 7130a of the three engaging members 713 contacts the inner peripheral surface of the stacked body 203S.
- the adjacent spacers 203 constituting the stacked body 203S are hardly displaced in the radial direction due to the engagement between the convex portions 203b and the concave portions 203a, but the height of the outer peripheral portion 7130a (the height in the Z direction) is reduced. If the height of the stacked body 203S is 2/3 or more, preferably 3/4 or more, the entire stacked body 203S can be held more stably.
- FIG. 14 is a block diagram of the control device 8 of the transport system 1.
- the control device 8 includes a host controller 8a for controlling the entire system, a controller 8b for controlling the substrate transfer device 2, a controller 8c for controlling the load port 3, a controller 8d for controlling the aligning device 4, and a protective material. And a controller 8e for controlling the transport device 5, which are communicably connected to each other.
- the controllers 8b to 8e include, for example, a PLC (Programmable Logic Controller), and an input / output interface for relaying signals between the PLC and sensors and actuators.
- the host controller 8a performs these controls by communicating with the controllers 8b to 8e, and executes unpacking and packing of the substrate W.
- Control example> A control example of the transport system 1 by the control device 8 will be described. Here, an example of unpacking and packing of the substrate W will be described. First, an example of unpacking will be described.
- the unpacking is performed by separating the spacer 203 and the substrate W from the stacked body of the spacer 203 and the substrate W placed on the container body 201 on the receiver 51a or 51b (on the receiver 52). This is an operation of alternately taking out one by one.
- the protection material transport robot 7 takes out the spacer 203 and loads it on the receiver 51c.
- the substrate transport robot 20 takes out the substrate W and transfers the substrate W to the container 100 on the load port 3.
- a stacked body 203S of the spacers 203 is formed on the mounting portion 51c.
- the protection material transport robot 7 transports the stacked body 203S to the container body 201 on the mounting portion 51a or 51b in a lump. The efficiency of unpacking can be improved by this batch transport.
- FIGS. 15A and 15B show a process in which the protective material transport robot 7 takes out the uppermost spacer 203 from the stacked body of the spacer 203 and the substrate W.
- the holding units 70 and 71 of the protection material transport robot 7 are located at the elevation position.
- the protection material transport robot 7 is operated, the holding unit 70 is rotated to the operating position, and is positioned on the uppermost spacer 203.
- the holding unit 70 is raised and rotated to return the holding unit 70 to the elevating position as shown in FIG. 16A.
- the holding unit 71 also moves up and down.
- the substrate transfer robot 20 extends the horizontal multi-joint mechanism 21, positions the hand 21a on the substrate W, lowers the horizontal multi-joint mechanism 21 by the base unit 22, and sucks the substrate W with the hand 21a. I do. After that, the horizontal multi-joint mechanism 21 is raised by the base unit 22, the horizontal multi-joint mechanism 21 is bent, and the substrate W is taken out. Subsequently, after the hand 21a is rotated by 180 ° to invert the substrate W, the substrate transport robot 20 is moved to a position directly facing the load port 3 as shown in FIG. 16B.
- the substrate transfer robot 20 is operated to extend the horizontal articulated mechanism 21, and at the same time, extend the hand 21 a into the container 100 on the load port 3, and transfer the substrate W into the container 100.
- the lid of the container 100 is opened in advance by the load port 3.
- the holding unit 70 holding the spacer 203 is lowered to the height of the mounting portion 51c as shown in FIG. Then, as shown in FIG. 18, the holding unit 70 is rotated to the operating position, and the holding unit 70 is further lowered. At that time, the holding unit 71 remains at the elevating position. Thereafter, the holding of the spacer 203 by the holding unit 70 is released, and the spacer 203 is transferred onto the mounting portion 51c (on the mounting device 53). Thereafter, the holding unit 70 is turned to the elevating position again.
- the protection material transport robot 7 is further moved up and positioned at the height of the mounting portion 51a. Then, with the start of the traveling of the substrate transport robot 20, the next spacer 203 is sucked and transferred.
- the spacer 203 is transferred onto the receiver 51c by the protective material transfer robot 7 and the substrate W is transferred to the container 100 by the substrate transfer robot 20 by the same procedure.
- a stacked body 203S of the spacers 203 is formed on the mounting portion 51c as shown in FIG.
- the stacked body 203S is returned by the protective material transport robot 7 onto the container main body 201 on the mounting section 51a.
- the holding unit 71 is lowered and rotated to the operating position, and the holding unit 71 is positioned above the stacked body 203S.
- the holding unit 70 remains in the elevating position.
- the holding unit 71 is lowered inside the stacked body 203S, and the stacked body 203S is held by the holding unit 71.
- the stacked body 203S held by the holding unit 71 is collectively transported to the container main body 201 on the mounting portion 51a.
- the holding unit 71 is raised, rotated to the elevating position, the mounting portion 51a is raised to the height, and rotated to the operating position, and as shown in FIG.
- the holding unit 71 and the stacked body 203S are moved upward.
- the holding unit 71 into the container main body 201 and releasing the holding of the stacked body 203S the stacked body 203S is transferred to the container main body 201.
- packing is the reverse operation of unpacking, and spacers 203 and substrates W are alternately stacked one by one on the container body 201 on the receiver 51a or 51b (on the receiver 52). Operation.
- the protective material transport robot 7 transports the stacked body 203S of the spacers 203 from the container body 201 in the receiver 51a to the receiver 51c in a lump. The efficiency of packing can be improved by this batch transport.
- the protection material transport robot 7 takes out one spacer 203 from the stacked body 203S on the mounting portion 51c and transfers it to the container main body 201.
- the substrate transfer robot 20 takes out the substrate W from the container 100 on the load port 3 and delivers the taken out substrate W to the aligner 40.
- the substrate W is centered by the aligner 40.
- the centered substrate W is taken out of the aligner 40 by the substrate transfer robot 20 and transferred to the container body 201.
- the transfer of the spacer 203 and the transfer of the substrate W to the container main body 201 are alternately and repeatedly performed, and a laminate of the spacer 203 and the substrate W is formed in the container main body 201.
- FIGS. 23A to 27B An example of packing will be specifically described with reference to FIGS. 23A to 27B.
- the formation of a laminate of the spacer 203 and the substrate W on the container body 201 on the mounting portion 51a (on the mounting device 52) will be described.
- the same procedure is used when a laminate of the spacer 203 and the substrate W is formed in the container main body 201 on the mounting portion 51b.
- the holding unit 71 is rotated to the operating position so that the holding unit 71 is located on the stacked body 203S.
- the holding unit 70 remains at the elevating position.
- the holding unit 71 is lowered into the stacked body 203S, and the displacement unit 712 is driven to extend the engagement member 713 to the engagement position.
- the stacked body 203S is held by each support member 711.
- the holding unit 71 is raised and the holding unit 71 is turned to the elevating position as shown in FIG. 23B.
- the substrate transfer robot 20 prepares to take out the substrate W from the container 100 on the load port 3.
- the holding unit 71 is lowered to the height of the mounting portion 51c and rotated to the work position. After that, as shown in FIG. 24, the holding unit 71 is lowered inside the positioning pins 531 on the base plate 530. After that, the holding of the stacked body 203S by the holding unit 71 is released, and the stacked body 203S is transferred onto the mounting portion 51c. In this way, the stacked body 203S is conveyed collectively.
- the operation proceeds to the operation of holding one spacer 203 by the holding unit 70.
- the holding unit 71 is turned to the elevating position, and the holding unit 70 is turned to the operating position.
- the holding unit 70 is lowered to the inside of each positioning pin 531 on the base plate 530 and suction is performed, and the uppermost spacer 203 of the stacked body 203S is held by the holding unit 71.
- the holding unit 70 is lowered to the inside of each positioning pin 531 on the base plate 530 and suction is performed, and the uppermost spacer 203 of the stacked body 203S is held by the holding unit 71.
- the holding unit 70 is lowered to the inside of each positioning pin 531 on the base plate 530 and suction is performed, and the uppermost spacer 203 of the stacked body 203S is held by the holding unit 71.
- only one spacer 203 at the top is held.
- the holding unit 70 is raised to the height of the container main body 201 as shown in FIG. As shown in FIG. 27A, the holding unit 70 is rotated to the operating position, and is further lowered to transfer the spacer 203 onto the container body 201.
- the substrate transfer robot 20 takes out the substrate W from the container 100 on the load port 3. Then, the removed substrate W is transferred to the aligner 40. The substrate W is centered by the aligner 40. The centered substrate W is taken out of the aligner 40 by the substrate transfer robot 20, and as shown in FIG. 27B, the substrate transfer robot 20 transfers the substrate W onto the spacer 203 mounted on the container body 201. .
- the spacer 203 is transferred from the receiver 51c to the container main body 201 by the protective material transfer robot 7, and the substrate W is transferred from the container 100 by the substrate transfer robot 20 via the aligner 40 to the container main body.
- the laminate is transferred to the container body 201, and a laminate of the spacer 203 and the substrate W is formed in the container main body 201.
- the worker takes out the container main body 201 from the protective material transporting device 5 and attaches the cover 202 to the container main body 201, whereby the packing of the coin stack container 200 is completed.
- the present invention is not particularly limited to this embodiment, and a mechanism for automatically attaching the cover 202 to the container body 201 may be provided in the protective material transport device 5 itself.
- the coin stack container 200 in which the packing is completed is taken out of the protective material transporting device 5.
- all the spacers 203 may not be transported all at once, but may be transported in batches a plurality of times. . Further, at the time of the batch transfer, one spacer 203 may be left in the container main body 201 without transferring all the spacers 203 from above the container main body 201 to the mounting portion 51c.
- FIG. 28 is an explanatory view of a container 300 which is a contact type coin stack container, and is a sectional view thereof.
- the container 300 is a hollow body including a container main body 301 and a cover 302 serving as a lid of the container main body 301.
- a stacked body in which sheets 303 serving as a protective material and substrates W are alternately stacked is accommodated in the container 300. This laminate is placed on the container main body 301, and movement in the radial direction is restricted by the peripheral wall of the container main body 201.
- a cushion 304 is provided on the bottom and top of the container 300.
- the sheet 303 is a spacer that comes into full contact with the adjacent substrate W, and is made of paper, for example.
- the sheet 303 has a circular shape along the shape of the substrate W, and has a larger diameter than the substrate W.
- the protective material transporting apparatus 5 can handle the sheet 303 and the container 300 by exchanging or removing some of the components.
- FIG. 29 is an explanatory diagram of the replacement structure of the holding unit 71
- FIG. 30 is an explanatory diagram of the holding unit 74.
- the holding unit 70 is not used for conveying the sheet 303. Therefore, when transporting the sheet 303, the holding unit 70 does not need to be particularly removed, but may be configured to be removable and may be removed.
- the arm member 7220 in the present embodiment has a two-member structure of the base member 7220a and the distal member 7220b, and is detachably connected to each other.
- FIG. 29 shows a state where the base member 7220a and the distal member 7220b are separated.
- a positioning portion 7220c is formed on the base member 7220a.
- the positioning portion 7220c is formed in a concave shape, and by fitting the end portion 7220e of the distal end member 7220b to the inner peripheral wall and the bottom wall thereof, the root member 7220a and the distal member 7220b are fitted. Are positioned.
- the end 7220e has a shape that matches the shape of the positioning portion 7220c.
- a screw hole is formed in the positioning portion 7220c, and the root member 7220a and the distal member 7220b are fixed by a plurality of bolts V.
- the holding unit 74 includes a plate-shaped rectangular base member 740 having a thickness in the Z direction, and a plurality of support members 741 extending radially from the base member 740.
- the suction portion 742 is supported at the tip of each support member 741.
- the suction portion 742 of the present embodiment is a nozzle member that is connected to a negative pressure source (not shown) and sucks air from an opening at the lower end thereof.
- the six suction portions 742 are arranged on an imaginary circle having a smaller diameter than the sheet 303 so as to suck the upper surface of the sheet 303.
- the number of the suction portions 742 may be other than six.
- the holding method of the sheet 303 may be a holding method other than suction (for example, a chuck using the Bernoulli effect or Coanda effect).
- the tip member 7220b 'to which the holding unit 74 is attached has a crank shape.
- the end 7220e 'of the tip member 7220b' has a shape matching the positioning portion 7220c, and the root member 7220a and the tip member 7220b 'are fixed by a plurality of bolts V, similarly to the tip member 7220b. .
- the holding unit 71 constitutes one exchange unit as an arm member integrated with the tip member 7220b.
- the holding unit 74 constitutes one exchange unit as an arm member integrated with the tip member 7220b '.
- the tip member 7220b to which the holding unit 71 is attached and the tip member 7220b 'to which the holding unit 74 is attached are provided with sensors 7223, 7223' and a relay connector 7224 to which signal lines of the sensors 7223, 7223 'are connected, respectively. ing.
- the sensors 7223 and 7223 ′ are sensors that detect whether the base member 7220a and the tip member 7220b or 7220b ′ are connected, that is, whether the holding unit 71 or the holding unit 74 is mounted.
- the relay connector 7224 includes a plurality of connection portions C1 to which signal lines of various sensor components including the sensors 7223 and 7223 'are connected, and a connection portion C2 to which a harness for electrically connecting the relay connector 7224 and the controller 8e is connected. And Each terminal of each connection part C1 and each terminal of the connection part C2 are electrically connected internally.
- the connection portion C1 includes a connection portion to which a signal line of the sensor 7223 for detecting the attachment of the holding unit 71 is connected, and a connection portion to which a signal line of the sensor 7223 'for detecting the attachment of the holding unit 74 is connected, The detection results of the sensors 7223 and 7223 'are output to the controller 8e from different terminals of the connection section C2.
- FIG. 31 is a perspective view of the lifting table 522 and the adapter 528 of the mounting device 52.
- the adapter 528 is a rectangular plate-like member as a whole.
- An engagement portion (not shown) for engaging with the pin 522a is formed on the bottom surface of the adapter 528, and the adapter 528 is positioned by the engagement between the engagement portion and the pin 522a.
- On the upper surface of the adapter 528 a plurality of positioning members 528a for positioning the container main body 301 with the adapter 528 are provided.
- the adapter 528 is provided with a plurality of sensor dogs 528b.
- the sensor dog 528b is supported movably in the Z direction, and penetrates the adapter 528 in the Z direction.
- the sensor dog 528b is arranged at a position corresponding to the sensor 522b of the lifting table 522.
- the sensor dog 528b is pushed downward by the weight of the container body 301, and the sensor 522b is turned on. That is, the sensor 522b can detect whether or not the container main body 301 is mounted on the adapter 528 via the sensor dog 528b.
- the attachment of the adapter 528 to the lifting table 522 is detected by the sensor 522c.
- FIG. 32 is a perspective view of the mounting device 53 and the adapter 534.
- the adapter 534 includes a base plate 534a on which the stacked body of the sheets 303 is placed, and a plurality of guide members 534b that stand on the base plate 534a and guide the stacked body of the sheets 303 from outside.
- the base plate 534a is formed with a notch 534a for engaging with the positioning pin 531 of the mounting device 53 and preventing interference, and the adapter 534 is positioned with respect to the mounting device 53 by the positioning pin 531.
- the attachment of the adapter 534 is detected by the sensor 532.
- FIG. 33 is an explanatory diagram of an input port.
- the input ports P1 to P5 are illustrated.
- the input port P1 is a port to which the detection result of the sensor 7223 is input
- the input port P2 is a port to which the detection result of the sensor 7223 'is input
- the input ports P3 and P4 are the ports of the receivers 51a and 51b.
- Unpacking and packing The unpacking and packing of the container 300 will be described. First, unpacking will be described.
- Unpacking the container 300 is basically the same as unpacking the container 200. That is, the unpacking is performed by combining the sheet 303 and the substrate W from the stacked body of the sheet 303 and the substrate W placed on the container body 301 on the placing portion 51a or 51b (on the placing device 52). This is an operation of alternately taking out each other. However, the sheet 303 is discarded without being reused. This operation will be described with reference to FIGS.
- FIG. 34 shows an operation of taking out the sheet 303 from the container main body 301 on the mounting portion 51a.
- the container main body 301 is mounted on the mounting device 52 via the adapter 528.
- a holding unit 74 is mounted on the protection material transport robot 7 instead of the holding unit 71.
- the holding unit 74 is rotated to the operating position by the moving unit 72 and positioned above the container main body 301, and then lowered to suck and hold the uppermost sheet 303.
- the holding unit 74 is raised as shown in FIG. 34, and the operation proceeds to an operation of discarding the held sheet 303.
- the sheet 303 is put into a disposal box 90 previously set in the transport system 1 by an operator.
- a guide plate (chute) 91 for guiding the sheet 303 to be thrown into the waste box 90 is installed on the upper side of the waste box 90 by an operator in advance.
- the holding unit 74 holding the sheet 303 is moved down to the elevating position by the moving unit 72 and then lowered. As shown in FIG. 35, after the holding unit 70 is rotated to the working position to open the space below the holding unit 74, the holding unit 74 releases the holding of the sheet 303. The sheet 303 falls naturally on the guide plate 91 and is collected in the waste box 90.
- the packing of the container 300 is basically the same as the packing of the container 200. That is, the packing is an operation of alternately stacking the sheets 303 and the substrates W one by one on the container main body 301 on the mounting portion 51a or 51b (on the mounting device 52). However, sheet 303 supplies a new sheet. This operation will be described with reference to FIG.
- a new stacked body 303S of sheets 303 is prepared in the mounting device 53 via the adapter 534.
- the uppermost sheet 303 is taken out of the stacked body 303S by the holding unit 74 and is transferred to the container main body 301 by the holding unit 74.
- the holding unit 74 is rotated to the operation position by the moving unit 72 and is positioned above the stacked body 303S, and is then lowered to suck and hold the uppermost sheet 303. Subsequently, the holding unit 74 is raised as shown in FIG. 36, and the operation proceeds to an operation of transporting the held sheet 303 to the container main body 301.
- the transport of the sheet 303 to the container body 301 is the same as the transport of the spacer 203.
- unpacking / packing can be performed for each of the contact type and non-contact type coin stack containers.
- the protective material transporting apparatus 5 of the present embodiment can correspond to each of the contact-type and non-contact-type coin stack containers by exchanging and detaching some parts. Since the replacement and detachment of parts are performed by an operator, the operation of unpacking / packing is not performed properly unless the type of coin stack container to be used (in other words, the type of protective material) and the parts do not match. Therefore, in the present embodiment, the consistency of the components is automatically determined.
- FIG. 37 is a flowchart showing an example of the processing, and shows an example of processing executed by the controller 8e that controls the protective material transporting device 5.
- FIG. 37 shows an example of processing in which the operator sets the operation mode of the protective material transport device 5 in advance.
- S1 an operation mode setting is accepted.
- the setting method may be any method, in the present embodiment, the type of operation mode is displayed on the information display device 6, and the operator can select the operation mode.
- FIG. 37 also shows a display example. In the illustrated example, four types of operation modes are shown.
- Ring: Packing is an operation mode for packing the non-contact type coin stack container 200, and the type of the protective material is the spacer 203.
- Ring: unpacking is an operation mode for unpacking the non-contact type coin stack container 200, and the type of protection material is the spacer 203.
- Sheet: Packing is an operation mode in which packing is performed on the contact-type coin stack container 300, and the type of the protective material is the sheet 303.
- Sheet: unpacking is an operation mode for unpacking the contact-type coin stack container 300, and the type of the protective material is the sheet 303.
- the attachment is determined in S2.
- the attachment / detachment of the components of the protection material transport robot 7 and the mounting portions 51a to 51c corresponding to the type of the protection material is determined. Specifically, it is determined which of the holding unit 71 and the holding unit 74 is attached to the protection material transport robot 7.
- the attachment / detachment of the adapter 528 is determined for the receivers 51a and 51b.
- the attachment / detachment of the adapter 534 is determined for the mounting portion 51c.
- the operation mode selected in S1 is compared with the result of the attachment determination in S2 to determine the consistency.
- the relationship between each operation mode and the state of a normal component is as follows. ⁇ "Ring: packing” Attaching the holding unit 71 and not attaching the adapters 528 and 534 ⁇ "Ring: unpacking” Attaching the holding unit 71 and not attaching the adapters 528 and 534 ⁇ "Sheet: Packing” Attaching the holding unit 74 and attaching the adapters 528 and 534 ⁇ "Seat: unpacking” The holding unit 74 is attached, and the adapters 528, 534 are attached. In the "sheet: unpacking" mode, the attachment / detachment of the adapter 534 may be ignored.
- the subsequent processing branches depending on whether or not the result of the consistency determination in S3 is a match. If they match, the process proceeds to S5, and the operation of the protective material transporting device 5 in the selected operation mode is permitted. After that, a transport operation or the like in the selected operation mode is started by an operation start instruction of the worker. If they do not match, the process proceeds to S6, where the operator is notified that there is an error in the attachment / detachment of the parts, and the operation of the protection material transporting device 5 in the selected operation mode is prohibited.
- the notification can be made by display or voice, for example. In the case of display, it may be displayed on the information display device 6.
- the adapters 528 and 534 are used, and the spacer 203 is used as the default type of protective material.
- the default protective material is the sheet 303 and the adapter is attached when unpacking / packing the spacer 203, that is, the non-contact type coin stack container.
- FIG. 38 is a flowchart showing an example of the process, which is an example of a process executed by the controller 8e.
- the determination timing is, for example, when there is an instruction to start the operation of unpacking or packing, or when the system is started.
- a mounting determination is performed. This is the same process as S2 in FIG.
- the consistency between the components is determined.
- the alignment is performed. It is determined that it has not been done. Further, for example, when the attachment of the holding unit 74 is detected and the attachment of the adapter 528 is not detected, it is determined that there is no matching.
- S14 the subsequent processing branches depending on whether or not the result of the consistency determination in S13 is a match. If they match, the process proceeds to S15, and the operation of the protective material transport device 5 is permitted. If they do not match, the process proceeds to S16, and the same processing as in S6 of FIG. 37 is performed.
- FIG. 39 shows an example.
- the robot housing portions 5B are arranged on both sides of the shelf 5A in the X direction.
- One of the two robot housing sections 5B is provided with a holding unit 70, a moving unit 721 for rotating the holding unit 70, and a moving unit 720 for moving the moving unit 721 up and down, and the other is provided with a holding unit. 71, a moving unit 722 for rotating the moving unit, and a moving unit 720 for moving the moving unit 722 up and down.
- the moving units 70 and 71 can not only rotate independently but also move up and down independently. Then, the holding units 70 and 71 can access the spacer 203 in the common shelf 5A.
- the placement unit 51c is disposed below the placement units 51a and 51b, but the placement unit 51c may be disposed above the placement units 51a and 51b. Further, the placing section 51c may be arranged between the placing section 51a and the placing section 51b.
- the placement section 51c may be arranged offset from the placement sections 51a and 51b in the horizontal direction.
- 40 and 41 show an example thereof.
- FIG. 40 shows an example in which the placement unit 51c is laterally offset with respect to the placement units 51a and 51b within the rotation range of the holding units 70 and 71, and the placement of the placement unit 51c is indicated by a broken line.
- the mounting portion 51c may be arranged at the same height as one of the mounting portions 51a and 51b.
- the mounting portion 51c may be arranged at a height different from the height of the mounting portions 51a and 51b.
- the mounting portion 51c shown by the two-dot chain line is on the vertical movement trajectory at the elevation position of the holding units 70 and 71.
- the horizontal arrangement of the mounting portion 51c is not limited to this.
- the rotatable range of the holding units 70 and 71 about the rotation center axis Z1 is a trajectory R indicated by a dashed line
- an arbitrary position on the trajectory R can be appropriately selected, and a peripheral position corresponding to the selected position is determined. What is necessary is just to design a structure.
- the mounting portion 51c may be arranged at the same height as one of the mounting portions 51a and 51b.
- the placement section 51c may be arranged at a different height from the placement sections 51a and 51b.
- FIG. 41 shows an example in which the mounting portions 51a to 51c are arranged side by side at the same height.
- the receivers 51a to 51c are arranged side by side in the X direction, and the receiver 51c is disposed between the receiver 51a and the receiver 51b.
- the arrangement direction and the arrangement order of the placement units 51a to 51c are not limited to this.
- the protection material transport robot 7 further includes a configuration (moving unit 723) capable of reciprocating in the X direction.
- the moving unit 723 is a traveling body that moves in the X direction along a pair of rail-shaped guide members 723a extending in the X direction.
- the driving mechanism of the moving unit 723 can be configured by a driving mechanism such as a motor and a driving force transmission mechanism such as a ball screw mechanism and a belt transmission mechanism.
- the moving unit 720 is mounted on the moving unit 723, and the moving units 721 and 722 are moved up and down by the moving unit 720. Therefore, the holding units 70 and 71 can rotate by the moving units 721 and 722, move up and down by the moving unit 720, and move horizontally in the X direction by the moving unit 723.
- the positions of the holding units 70 and 71 in FIG. 41 correspond to the elevating position in the above embodiment, and are positions above the pair of guide members 723a.
- the operating position of the holding units 70 and 71 in the example of FIG. 41 is a position above the mounting portion 51a, 51b, or 51c, which is rotated counterclockwise by 90 degrees from the position illustrated in FIG.
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Abstract
Description
容器内に保護材と基板の積層体を形成する梱包動作、及び、容器内の前記積層体から前記保護材と前記基板を交互に取り出す解梱動作の各動作の際に、前記保護材を搬送する搬送手段と、
前記保護材が積載される保護材載置部と、
前記容器の容器本体部が載置される容器載置部と、
前記保護材の種類に対応した複数の動作モードのうち、選択された動作モードにて前記搬送手段を制御する制御手段と、
前記保護材の種類に対応して選択され、かつ、前記搬送手段、前記保護材載置部及び前記容器載置部を構成する各部品の脱着を判定する装着判定手段と、
選択された前記動作モードと前記装着判定手段の判定結果との整合性を判定する整合性判定手段と、を備える、
ことを特徴とする搬送装置が提供される。
図1は本発明の一実施形態に係る搬送システム1の斜視図である。搬送システム1は、コインスタック容器のアンパッキングを行って、コインスタック容器内の基板(ここでは半導体ウエハ)をFOUP等の容器に移載する機能を有する。また、搬送システム1は、FOUP等の容器から基板を搬出し、搬出した基板をコインスタック容器においてパッキングする機能を有する。すなわち、搬送システム1は、コインスタック容器のアンパッキング/パッキング(解梱動作/梱包動作)を行うパッキングシステムである。
図2を参照して基板搬送装置2の構成について説明する。図2は搬送システム1の内部のレイアウトを示す平面図であり、基板搬送装置2は、搬送システム1の内部において基板を搬送する搬送機構を構成する。基板搬送装置2は、その内部空間2aに設けられた基板搬送ロボット20を備える。基板搬送ロボット20は、X方向に延設された一対の案内部材24の案内によってX方向に往復可能となっている。一対の案内部材24は例えばレール部材であり、基板搬送ロボット20の移動通路を画定する。
図3を参照してロードポート3の構成について説明する。図3はロードポート3の部分概略側断面図である。ロードポート3は容器100を開閉するオープナである。容器100は、FOUP、FOSB、SMIFまたはオープンカセット等である。容器100は、半導体ウエハである円形の基板Wを出し入れする開口部102を側部に有する箱状の容器本体101と、開口部102に着脱自在に装着され、開口部102を塞ぐ蓋(ドア)103と、を有する。なお、図3は、容器100が蓋103で塞がれた閉位置と、ロードポート3により蓋103が開放された開位置(図3中に二点鎖線で図示)とを示している。
アライニング装置4は、図2に示すようにセンタリングユニット40を含む。本実施の形態において挙げるセンタリングユニット40は基板Wのセンタリングを行う装置であるが、これに限定するものではない。例えば、半導体製造装置で慣用的に用いられているアライナのように、基板Wのセンタリングとノッチ(又はオリエンテーションフラット)位置の調整を行うものであってもよい。
図4Aはコインスタック容器である容器200の説明図であり、その断面図である。容器200は、容器本体部201と容器本体部201の蓋となるカバー202とを含む中空体である。保護材203と保護材203に載置された基板Wの積層体が容器200内に収容される。この積層体は容器本体部201上に載置されており、容器本体部201の周壁によって径方向への移動が規制されている。容器本体部201の内部の底面には、後述する保持ユニット71が保護材203を一括取り出しする際の干渉を防ぐための凹部201aが形成されている。また、容器本体部201は、その底面に、後述する保護材203の凹部203aに係合する凸部201cを備える。
図1、図2、図5を参照して保護材搬送装置5について説明する。図5は保護材搬送装置5の概略を示す図であり、外装パネルを取り外した状態を模式的に示している。保護材搬送装置5は保護材であるスペーサ203を搬送する装置である。本実施形態の場合、保護材搬送装置5はスペーサ203を保護材として用いた場合における保護材203の搬送の他、一部の部品の脱着によって、後述するシート状の保護材303も搬送することが可能である。シート状の保護材303のことをシート303と呼ぶ場合がある。
フレーム50は、棚部5Aの内部空間をZ方向に区画する棚部材50a~50cを含み、棚部材50aにより上段の載置部51aが、棚部材50bにより中段の載置部51bが、棚部材50cにより下段の載置部51cが形成されている。載置部51a~51cを上下に配置することで、保護材搬送装置5のフットプリントを小さくすることができる。
ロボット収容部5Bには、保護材搬送ロボット7が設けられている。保護材搬送ロボット7は、スペーサ203を載置部51a又は51bと、載置部51cとの間で搬送するロボットである。図1、図5、図9を参照して保護材搬送ロボット7について説明する。図9は保護材搬送ロボット7の説明図であり、その斜視図である。以下、保護材搬送ロボット7を単に搬送ロボット7と呼ぶ場合がある。
図14は搬送システム1の制御装置8のブロック図である。制御装置8は、システム全体の制御を司るホストコントローラ8aと、基板搬送装置2を制御するコントローラ8bと、ロードポート3を制御するコントローラ8cと、アライニング装置4を制御するコントローラ8dと、保護材搬送装置5を制御するコントローラ8eとを含み、これらは互いに通信可能に接続されている。コントローラ8b~8eは、例えば、PLC(プログラマブルロジックコントローラ)、センサやアクチュエータとPLCとの間の信号を中継する入出力インタフェースを含む。ホストコントローラ8aは、各コントローラ8b~8eとの通信により、これらの制御を行い、基板Wのアンパッキングやパッキングを実行する。
制御装置8による搬送システム1の制御例を説明する。ここでは、基板Wのアンパッキングとパッキングの例を説明する。まず、アンパッキングの例について説明する。
アンパッキングの例について説明する。概説すると、アンパッキングは、載置部51a又は51b上(載置装置52上)の容器本体部201に載置されているスペーサ203及び基板Wの積層体から、スペーサ203と基板Wとを一つずつ交互に取り出す動作である。本実施形態では、保護材搬送ロボット7がスペーサ203を取り出し、載置部51cへ積載する。また、基板搬送ロボット20が基板Wを取り出し、ロードポート3上の容器100へ基板Wを移載する。アンパッキングが進むにつれて載置部51cにはスペーサ203の積層体203Sが形成される。最後に、保護材搬送ロボット7が積層体203Sを載置部51a又は51b上の容器本体部201に一括して搬送する。この一括搬送によって、アンパッキングの効率化を図れる。
パッキングの例について説明する。概説すると、パッキングは、アンパッキングの逆の動作であり、載置部51a又は51b上(載置装置52上)の容器本体部201に、スペーサ203と基板Wとを一つずつ交互に積載する動作である。本実施形態では、まず、保護材搬送ロボット7が、載置部51aにおける容器本体部201からスペーサ203の積層体203Sを、載置部51c上へ一括して搬送する。この一括搬送によって、パッキングの効率化を図ることができる。次に、保護材搬送ロボット7が載置部51c上の積層体203Sからスペーサ203を一つ取り出し、容器本体部201に移載する。
本実施形態の保護材搬送装置5は、上述した非接触式のコインスタック容器200以外に、接触式のコインスタック容器にも対応可能となっている。図28は接触式のコインスタック容器である容器300の説明図であり、その断面図である。容器300は、容器本体部301と容器本体部301の蓋となるカバー302とを含む中空体である。保護材であるシート303と基板Wとが交互に積層された積層体が容器300内に収容される。この積層体は容器本体部301上に載置されており、容器本体部201の周壁によって径方向への移動が規制されている。容器300の底部と天部にはクッション304が設けられている。
保護材搬送装置5は、容器300のアンパッキング、パッキングを行う際に、一部の部品を交換或いは脱着することで、シート303や容器300に対応することができる。
シート303に対応する場合、保持ユニット71をシート303の保持に対応した保持ユニット74に交換する。図29は保持ユニット71の交換構造の説明図であり、図30は保持ユニット74の説明図である。なお、保持ユニット70はシート303の搬送には用いない。このため、シート303の搬送の際、保持ユニット70は特に取り外す必要は無いが、取り外し可能に構成しておき、取り外すようにしてもよい。
容器300をアンパッキング、パッキングの対象とする場合、容器本体部301をアダプタ528を介して載置装置52に載置する。アダプタ528は載置装置52の昇降テーブル522に装着される。図31は載置装置52の昇降テーブル522とアダプタ528の斜視図である。
本実施形態の場合、シート303は再利用せず、アンパッキングの際に廃棄する。パッキングの際には、シート303を新たに供給する。このため、載置装置53には、シート303のマガジンとなるアダプタ534を装着する。図32は載置装置53とアダプタ534の斜視図である。
後述するように、本実施形態では、保持ユニット70、74の装着、アダプタ528、534の脱着を自動判定する。そのため、コントローラ8eの入力ポートには、これらの検知結果が入力されるポートが割り当てられている。図33は入力ポートの説明図である。
容器300のアンパッキング、パッキングについて説明する。まず、アンパッキングについて説明する。
上記の通り、本実施形態の保護材搬送装置5では、一部の部品の交換、脱着により接触式及び非接触式の各コインスタック容器に対応可能である。部品の交換、脱着は作業者が行うため、使用するコインスタック容器の種類(換言すると保護材の種類)と、部品が整合していないと、アンパッキング/パッキングの動作が適切に行われない。そこで、本実施形態では部品の整合性を自動判定する。図37はその処理例を示すフローチャートであり、保護材搬送装置5を制御するコントローラ8eが実行する処理例を示している。
○「リング:パッキング」
保持ユニット71を装着、アダプタ528、534を非装着
○「リング:アンパッキング」
保持ユニット71を装着、アダプタ528、534を非装着
○「シート:パッキング」
保持ユニット74を装着、アダプタ528、534を装着
○「シート:アンパッキング」
保持ユニット74を装着、アダプタ528、534を装着
なお、「シート:アンパッキング」モードにおいては、アダプタ534の脱着は不問としてもよい。
○保持ユニット71を装着、アダプタ528、534を非装着
○保持ユニット74を装着、アダプタ528、534を装着
例えば、保持ユニット71の装着が検知され、アダプタ528の装着も検知された場合は、整合していないと判定される。また、例えば、保持ユニット74の装着が検知され、アダプタ528の装着が検知されない場合は、整合しないと判定される。
(保持ユニットと移動ユニット)
上記実施形態では、保持ユニット70と保持ユニット71とで、これらを上下に移動する移動ユニット720を共通とした保護材搬送装置5を例示したが、移動ユニット720を保持ユニット70、71に個別に設けることも可能である。図39はその一例を示す。図39の例は棚部5AのX方向の両側にロボット収容部5Bをそれぞれ配置している。
上記実施形態では、載置部51a及び51bに対して、載置部51cを下方に配置したが、載置部51cを載置部51a、51bの上方に配置してもよい。また、載置部51cを載置部51aと載置部51bとの間に配置してもよい。
Claims (18)
- 容器内に保護材と基板の積層体を形成する梱包動作、及び、容器内の前記積層体から前記保護材と前記基板を交互に取り出す解梱動作の各動作の際に、前記保護材を搬送する搬送手段と、
前記保護材が積載される保護材載置部と、
前記容器の容器本体部が載置される容器載置部と、
前記保護材の種類に対応した複数の動作モードのうち、選択された動作モードにて前記搬送手段を制御する制御手段と、
前記保護材の種類に対応して選択され、かつ、前記搬送手段、前記保護材載置部及び前記容器載置部を構成する各部品の脱着を判定する装着判定手段と、
選択された前記動作モードと前記装着判定手段の判定結果との整合性を判定する整合性判定手段と、を備える、
ことを特徴とする搬送装置。 - 請求項1に記載の搬送装置であって、
前記保護材の種類は、シートと枠状のスペーサであり、
前記搬送手段は、
一つの前記スペーサを保持する第一の保持手段と、
前記搬送手段を構成する前記部品として、選択的に装着される第二の保持手段と、を備え、
前記第二の保持手段は、
前記シートを保持するシート保持手段か、又は、
積層された複数の前記スペーサを一括して保持するスペーサ保持手段であり、
前記装着判定手段は、前記シート保持手段と前記スペーサ保持手段とのどちらが装着されているかを判定する、
ことを特徴とする搬送装置。 - 請求項2に記載の搬送装置であって、
前記スペーサ保持手段は、
積層された前記スペーサを内側から保持する複数の保持部材と、
前記複数の保持部材を支持し、拡縮自在に変位させる変位手段と、を備え、
それぞれの前記保持部材は、その下端に、外側に延設される鍔状の係合部を、を備える、
ことを特徴とする搬送装置。 - 請求項3に記載の搬送装置であって、
前記スペーサが円環形状を有し、
前記複数の保持部材は、前記スペーサの周方向に等間隔で配置され、
それぞれの前記保持部材は、積層された前記スペーサの内周面に沿って当接する外周部を含み、該外周部の下端に前記係合部を有する、
ことを特徴とする搬送装置。 - 請求項2に記載の搬送装置であって、
前記搬送手段は、
前記第一の保持手段を回動自在に支持する第一の移動ユニットと、
前記第二の保持手段を回動自在に支持する第二の移動ユニットと、
前記第一の移動ユニット及び前記第二の移動ユニットをともに移動する第三の移動手段と、を含み、
前記第三の移動手段は、前記第一の移動ユニット及び前記第二の移動ユニットを上下に移動させ、
前記第一の移動ユニット及び前記第二の移動ユニットは、上下方向にオフセットして配置され、かつ、それぞれの回動の中心軸を同軸上に配置した、
ことを特徴とする搬送装置。 - 請求項2に記載の搬送装置であって、
前記シート保持手段の装着を検知するセンサを、前記装着判定手段に電気的に接続するための第一の接続手段を備え、
前記スペーサ保持手段の装着を検知するセンサを、前記装着判定手段に電気的に接続するための第二の接続手段を備え、
前記装着判定手段は、
前記第一の接続手段からの電気信号が入力される第一の入力ポート、及び、前記第二の接続手段からの電気信号が入力される第二の入力ポートを備え、かつ、
前記第一の入力ポートまたは前記第二の入力ポートのどちらに電気信号が入力されたかによって、前記シート保持手段または前記スペーサ保持手段のどちらの装着かを判定する、
ことを特徴とする搬送装置。 - 請求項5に記載の搬送装置であって、
前記第二の移動ユニットは、前記第二の保持手段を位置決めする位置決め部を備える、
ことを特徴とする搬送装置。 - 請求項2に記載の搬送装置であって、
前記シート保持手段は、前記シートの上面を吸着する複数の吸着部を備える、
ことを特徴とする搬送装置。 - 請求項2に記載の搬送装置であって、
前記第一の保持手段は、
前記スペーサの上面を吸着する複数の吸着部を備える、
ことを特徴とする搬送装置。 - 請求項1に記載の搬送装置であって、
前記保護材の種類は、シートと枠状のスペーサであり、
前記保護材載置部を構成する前記部品として、着脱自在なアダプタを備え、
前記保護材載置部には、前記アダプタを装着しない場合に、前記シート又は前記スペーサの一方が積載可能であり、
前記保護材載置部には、前記アダプタを装着することで、前記シート又は前記スペーサの他方が積載可能であり
前記装着判定手段は、前記アダプタの装着の有無を判定する、
ことを特徴とする搬送装置。 - 請求項1に記載の搬送装置であって、
前記保護材の種類は、シートと枠状のスペーサであり、
前記容器載置部を構成する前記部品として、着脱自在なアダプタを備え、
前記容器載置部には、前記アダプタを装着しない場合に、前記シート用の容器本体部又は前記スペーサ用の容器本体部の一方が積載可能であり、
前記容器載置部には、前記アダプタを装着することで、前記シート用の容器本体部又は前記スペーサ用の容器本体部の他方が載置可能であり
前記装着判定手段は、前記アダプタの装着の有無を判定する、
ことを特徴とする搬送装置。 - 請求項1に記載の搬送装置であって、
前記整合性判定手段が、整合しないと判定した場合に、これを報知する報知手段を備える、
ことを特徴とする搬送装置。 - 請求項1に記載の搬送装置であって、
前記制御手段は、前記整合性判定手段が整合すると判定したことを条件として、前記搬送手段を動作させる、
ことを特徴とする搬送装置。 - 容器内に保護材と基板の積層体を形成する梱包動作、及び、容器内の前記積層体から前記保護材と前記基板を交互に取り出す解梱動作の各動作の際に、複数種類の中から選択される前記保護材に対応して動作モードが設定される制御手段と、
選択された前記保護材に対応して脱着され、該保護材が載置される保護材載置部材と、
選択された前記保護材に対応して脱着され、前記容器の容器本体部が載置される容器載置部材と、
選択された前記保護材に対応して選択され、前記保護材を保持するアーム部材を含み、該保護材を搬送する搬送手段と、
前記保護材載置部材及び前記容器載置部材の脱着および装着されている前記アーム部材の種類を判定する装着判定手段と、
前記装着判定手段による前記保護材載置部材及び前記容器載置部材の脱着および前記アーム部材の種類の整合性を判定する整合性判定手段と、を備える、
ことを特徴とする搬送装置。 - 容器本体部に保護材と基板の積層体を形成した後、該容器本体部に容器カバーを被せる梱包動作を行う装置の制御方法であって、
前記装置は、
前記保護材を搬送する搬送手段と、
前記保護材が積載される保護材載置部と、
前記容器本体部が載置される容器載置部と、を備え、
前記制御方法は、
前記保護材の種類に対応して選択され、かつ、前記搬送手段、前記保護材載置部及び前記容器載置部を構成する各部品の脱着を判定する装着判定工程と、
前記保護材の種類に対応して設定される動作モードの設定と前記装着判定工程の判定結果との整合性を判定する整合性判定工程と、
前記整合性判定工程において整合性が肯定されたとき、設定された前記動作モードで前記梱包動作を行うべく、前記装置を制御する制御工程と、を備える、
ことを特徴とする制御方法。 - 容器本体部に保護材と基板の積層体を形成した後、該容器本体部に容器カバーを被せる梱包動作を行う装置の制御方法であって、
前記装置は、
前記保護材の種類に対応して脱着され、該保護材が載置される保護材載置部材と、
前記保護材の種類に対応して脱着され、前記容器本体部が載置される容器載置部材と、
前記保護材の種類に対応して選択され、前記保護材を保持するアーム部材を含み、該保護材を搬送する搬送手段と、を備え、
前記制御方法は、
前記保護材載置部材及び前記容器載置部材の脱着および装着されている前記アーム部材の種類を判定する装着判定工程と、
前記装着判定工程による前記保護材載置部材及び前記容器載置部材の脱着および前記アーム部材の種類の整合性を判定する整合性判定工程と、
前記整合性判定工程において整合性が肯定されたとき、前記梱包動作を行うべく、前記装置を制御する制御工程と、を備える、
ことを特徴とする制御方法。 - 保護材と基板の積層体が収容される容器から容器カバーを取り外した後、前記保護材と前記基板を交互に取り出す解梱動作を行う装置の制御方法であって、
前記装置は、
前記保護材を搬送する搬送手段と、
前記保護材が積載される保護材載置部と、
前記容器の容器本体部が載置される容器載置部と、を備え、
前記制御方法は、
前記保護材の種類に対応して選択され、かつ、前記搬送手段、前記保護材載置部及び前記容器載置部を構成する各部品の脱着を判定する装着判定工程と、
前記保護材の種類に対応して設定される動作モードの設定と前記装着判定工程の判定結果との整合性を判定する整合性判定工程と、
前記整合性判定工程において整合性が肯定されたとき、設定された前記動作モードで前記解梱動作を行うべく、前記装置を制御する制御工程と、を備える、
ことを特徴とする制御方法。 - 保護材と基板の積層体が収容される容器から容器カバーを取り外した後、前記保護材と前記基板を交互に取り出す解梱動作を行う装置の制御方法であって、
前記装置は、
前記保護材の種類に対応して脱着され、該保護材が載置される保護材載置部材と、
前記保護材の種類に対応して脱着され、前記容器の容器本体部が載置される容器載置部材と、
前記保護材の種類に対応して選択され、前記保護材を保持するアーム部材を含み、該保護材を搬送する搬送手段と、を備え、
前記制御方法は、
前記保護材載置部材及び前記容器載置部材の脱着および装着されている前記アーム部材の種類を判定する装着判定工程と、
前記装着判定工程による前記保護材載置部材及び前記容器載置部材の脱着および前記アーム部材の種類の整合性を判定する整合性判定工程と、
前記整合性判定工程において整合性が肯定されたとき、前記解梱動作を行うべく、前記装置を制御する制御工程と、を備える、
ことを特徴とする制御方法。
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