WO2014119658A1 - 感圧センサ - Google Patents

感圧センサ Download PDF

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Publication number
WO2014119658A1
WO2014119658A1 PCT/JP2014/052083 JP2014052083W WO2014119658A1 WO 2014119658 A1 WO2014119658 A1 WO 2014119658A1 JP 2014052083 W JP2014052083 W JP 2014052083W WO 2014119658 A1 WO2014119658 A1 WO 2014119658A1
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WO
WIPO (PCT)
Prior art keywords
electrode
substrate
electrode layer
pressure
spacer
Prior art date
Application number
PCT/JP2014/052083
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English (en)
French (fr)
Japanese (ja)
Inventor
泰之 立川
Original Assignee
株式会社フジクラ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社フジクラ filed Critical 株式会社フジクラ
Priority to CN201480003666.0A priority Critical patent/CN104884920B/zh
Priority to JP2014559737A priority patent/JP5938111B2/ja
Publication of WO2014119658A1 publication Critical patent/WO2014119658A1/ja

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0044—Constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements

Definitions

  • the present invention relates to a resistance type pressure sensitive sensor.
  • a resistance type pressure sensitive sensor For the designated countries that are allowed to be incorporated by reference, the contents described in Japanese Patent Application No. 2013-19176 filed in Japan on February 4, 2013 are incorporated herein by reference. Part of the description.
  • a pressure-sensitive device in which a contact portion is formed by arranging a conductor layer and a resistor layer so as to overlap each other between a first substrate and a second substrate, and the first and second substrates are fixed by an adhesive member.
  • Patent Document 1 A pressure-sensitive device in which a contact portion is formed by arranging a conductor layer and a resistor layer so as to overlap each other between a first substrate and a second substrate, and the first and second substrates are fixed by an adhesive member.
  • the adhesive member is formed thinner than the thickness dimension of the contact portion. For this reason, a force always acts on the first and second substrates in the direction of separation in the vicinity of the contact portion, whereby the substrates are partially separated from each other, and the pressure-sensitive characteristics change from the initial values. There is a problem that there are cases.
  • the thickness of the contact part varies, the initial load applied between the contact parts also differs from the design value. There is a problem that characteristics deviate from design values.
  • the problem to be solved by the present invention is to provide a pressure-sensitive sensor capable of detecting a minute load and ensuring stable pressure-sensitive characteristics for a long period of time.
  • a pressure-sensitive sensor includes a first substrate, a second substrate facing the first substrate, and a first electrode provided on a first surface of the first substrate.
  • a second electrode provided on the second surface of the second substrate so as to face the first electrode, and an opening at a position corresponding to the first electrode and the second electrode.
  • the total thickness of the insertion portion is substantially the same as the thickness of the spacer, and the part of the first electrode or the first substrate is the thickness of the spacer.
  • One surface is in contact, and a part of the second electrode is in contact with the other surface of the spacer, and the first electrode and the second electrode , In the region containing, and said second surface to the first surface is substantially parallel.
  • the insertion portion may be separated from an inner wall surface of the opening.
  • the first electrode includes a main body including the insertion portion, and a low-profile portion provided around the main body and having a height lower than the main body.
  • the low profile portion may be in contact with one surface of the spacer.
  • the main body is provided so as to cover the first electrode layer provided on the first substrate and the first electrode layer, and the electric power of the first electrode layer is provided.
  • a second electrode layer having an electrical resistance value higher than the resistance value, and the low profile portion may include at least one of the first electrode layer or the second electrode layer.
  • the thickness of the first electrode layer is different from the thickness of the second electrode layer, and the low profile portion is the thickness of the first electrode layer or the thickness of the second electrode layer.
  • an electrode layer having a thickness substantially equal to the larger thickness may be provided.
  • the low profile portion may be continuously formed in a radial direction from the main body portion.
  • the low profile portion may be a dummy electrode formed to be spaced apart from the main body portion in the radial direction.
  • At least one of the first electrode and the second electrode may have a surface layer containing elastic beads.
  • a pressure-sensitive sensor includes a first substrate, a second substrate facing the first substrate, a first electrode provided on the first substrate, and the first substrate.
  • a second electrode provided on the second substrate so as to face the electrode, and an opening at a position corresponding to the first electrode and the second electrode,
  • a spacer interposed between the first substrate and the second substrate, wherein at least one of the first electrode and the second electrode has an insertion portion inserted into the opening.
  • the thickness is substantially the same as the thickness of the spacer, the first substrate is in contact with one surface of the spacer, and a part of the second electrode is formed on the spacer.
  • the total thickness of the is characterized a portion corresponding to the opening in the first electrode, and a portion corresponding to the opening in the second electrode, the total thickness and substantially equal.
  • a pressure-sensitive sensor includes a first substrate, a second substrate facing the first substrate, a first electrode provided on the first substrate, and the first substrate.
  • a second electrode provided on the second substrate so as to face the electrode, and an opening at a position corresponding to the first electrode and the second electrode, A spacer interposed between the first substrate and the second substrate, wherein at least one of the first electrode and the second electrode has an insertion portion inserted into the opening.
  • the thickness is substantially the same as the thickness of the spacer, a portion of the first electrode is in contact with one side of the spacer, and a portion of the second electrode is A portion in contact with the other surface of the spacer, a portion in contact with the one surface of the spacer in the first electrode;
  • the total thickness of the portion of the two electrodes in contact with the other surface of the spacer and the spacer corresponds to the portion corresponding to the opening in the first electrode and the opening in the second electrode.
  • a total thickness of the portion to be processed is characterized by being substantially equal.
  • a pressure-sensitive sensor includes a first substrate, a second substrate facing the first substrate, a first electrode provided on the first substrate, and the first substrate.
  • a second electrode provided on the second substrate so as to face the electrode, and an opening at a position corresponding to the first electrode and the second electrode,
  • a spacer interposed between the first substrate and the second substrate, wherein at least one of the first electrode and the second electrode has an insertion portion inserted into the opening.
  • the thickness is substantially the same as the thickness of the spacer, and the first electrode is provided around the main body including the insertion portion and the main body.
  • a pressure-sensitive sensor includes a first substrate, a second substrate facing the first substrate, a first electrode provided on the first substrate, and the first substrate.
  • a second electrode provided on the second substrate so as to face the electrode, and an opening at a position corresponding to the first electrode and the second electrode,
  • a spacer interposed between the first substrate and the second substrate, wherein at least one of the first electrode and the second electrode has an insertion portion inserted into the opening.
  • the thickness is substantially the same as the thickness of the spacer, and the first electrode is provided around the main body including the insertion portion and the main body.
  • the second electrode has a second body portion facing the insertion portion
  • a second low-profile portion provided around the second main-body portion and having a height lower than that of the second main-body portion, and the low-profile portion contacts one surface of the spacer.
  • the second low profile portion is in contact with the other surface of the spacer, and the total thickness of the low profile portion, the second low profile portion, and the spacer is determined by the main body portion and the first profile.
  • the total thickness of the two main body portions is substantially equal.
  • the insertion portion since the insertion portion is held in the vicinity of the second electrode provided on the second substrate, various loads including a minute load can be detected.
  • the insertion portion has a thickness substantially the same as the thickness of the spacer, and the first portion of the first substrate in the region including the first electrode and the second electrode. Since the second surface of the second substrate and the second surface of the second substrate are substantially parallel, there is no force acting in the direction of separating the first and second substrates.
  • the initial load applied between the contact portions depends only on the thickness of the insertion portion, and is affected by the variation in the thickness of the second electrode. The stable initial pressure-sensitive characteristics can be ensured. Therefore, stable pressure sensitive characteristics can be ensured for a long period of time.
  • FIG. 1 is a cross-sectional view showing a pressure-sensitive sensor according to the first embodiment of the present invention.
  • FIG. 2 is a cross-sectional view showing a pressure-sensitive sensor according to the second embodiment of the present invention.
  • FIG. 3 is a cross-sectional view showing a modification of the pressure-sensitive sensor according to the second embodiment of the present invention.
  • FIG. 4 is a sectional view showing a pressure-sensitive sensor according to the third embodiment of the present invention.
  • FIG. 5 is a sectional view showing a pressure-sensitive sensor according to the fourth embodiment of the present invention.
  • FIG. 6 is a cross-sectional view illustrating a pressure-sensitive sensor of Comparative Example 2.
  • FIG. 7 is a graph showing the relationship between the load of the pressure sensor and the resistance value.
  • FIG. 8 is a graph showing the change with time of the relationship between the load and the resistance value in the pressure-sensitive sensor of the second embodiment.
  • FIG. 9 is a graph showing the change with time of the relationship between the load and the resistance value in the pressure-sensitive sensor of the first embodiment.
  • FIG. 10 is a graph showing changes over time in the relationship between the load and the resistance value in the pressure-sensitive sensor of Comparative Example 2.
  • FIG. 1 is a cross-sectional view showing a pressure-sensitive sensor 1 according to this embodiment.
  • the pressure-sensitive sensor 1 in the present embodiment includes a first substrate 2, a second substrate 3 that faces the first substrate 2, and a first surface 21 of the first substrate 2.
  • the first electrode 4 provided on the second electrode 5, the second electrode 5 provided on the second surface 31 of the second substrate 3 so as to face the first electrode 4, and the first substrate And a spacer 6 interposed between the second electrode 5 and the second electrode 5.
  • the first substrate 2 and the second substrate 3 are flexible insulating films, for example, polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyimide resin (PI) or polyetherimide resin ( PEI) and the like.
  • PET polyethylene terephthalate
  • PEN polyethylene naphthalate
  • PI polyimide resin
  • PEI polyetherimide resin
  • the first electrode 4 is composed of a first electrode layer 41 and a second electrode layer 42 as shown in FIG.
  • the second electrode 5 is also composed of a third electrode layer 51 and a fourth electrode layer 52 as shown in FIG.
  • the first electrode 4 and the second electrode 5 have a circular shape, a triangular shape, a quadrangular shape, or the like in plan view.
  • the first electrode layer 41 is formed by printing and curing a conductive paste such as a silver paste, a gold paste, or a copper paste on the first surface 21 of the first substrate 2.
  • the third electrode layer 51 is also formed by printing and curing a conductive paste similar to the material used for the first electrode layer 41 on the second surface 31 of the second substrate 3. Yes.
  • Specific printing methods for forming the first electrode layer 41 and the third electrode layer 51 include a screen printing method, a gravure offset printing method, an ink jet method, and the like. The same printing method is used for all electrode layers formed from the conductive paste described below.
  • the second electrode layer 42 is printed and cured on the first surface 21 of the first substrate 2 so as to cover the first electrode layer 41 described above. It is formed by that.
  • the fourth electrode layer 52 is also printed with a conductive paste on the second surface 31 of the second substrate 3 so as to cover the third electrode layer 51 described above. It is formed by curing.
  • the second electrode layer 42 and the fourth electrode layer 52 have a higher electrical resistance than the first electrode layer 41 and the third electrode layer 51, and the second electrode layer 42 and the second electrode layer 51
  • a carbon paste or the like can be exemplified.
  • the first electrode layer 41 and the third electrode layer 51 are formed relatively thinner than the second electrode layer 42 and the fourth electrode layer 52, but are not particularly limited thereto. The thickness may be the same or may be formed thick.
  • the first electrode 4 is all inserted into an opening 61 of a spacer 6 to be described later, and the first electrode 4 in this example is an example of an insertion portion in the present invention. It corresponds to.
  • the first electrode 4 in this embodiment is separated from the inner wall surface of the opening 61 of the spacer 6. Thereby, the pressing operation of the pressure-sensitive sensor 1 can be performed smoothly, and thickness variations that are likely to occur at the end of the first electrode 4 in the radial direction (left-right direction in FIG. 1) can be absorbed. .
  • the second electrode 5 is provided so as to face the first electrode 4, is wider than an opening 61 of the spacer 6 described later, and is in contact with the periphery of the opening 61 in the vicinity of the outer peripheral portion.
  • it is good also as a structure which provides a convex part in the approximate center of the 2nd electrode 5, and the said convex part opposes the 1st electrode 4.
  • the method for forming the first to fourth electrode layers 41, 42, 51, 52 is not particularly limited.
  • the electrode layer may be formed by forming a plating layer on the surface of the substrate, forming a resist pattern by photolithography, and then performing an etching process.
  • the first electrode 4 is composed of two electrode layers 41 and 42
  • the second electrode 5 is also composed of two electrode layers 51 and 52.
  • both the first electrode 4 and the second electrode 5, or one of the first electrode 4 and the second electrode 5 may be composed of a single electrode layer. There may be two or more electrode layers.
  • the spacer 6 is a member that defines the distance between the first electrode 4 and the second electrode 5 by being interposed between the first substrate 2 and the second electrode 5, and includes polyethylene terephthalate (PET), It is formed from an insulating material such as polyethylene naphthalate (PEN), polyimide resin (PI), or polyetherimide resin (PEI).
  • PET polyethylene terephthalate
  • PEN polyethylene naphthalate
  • PI polyimide resin
  • PEI polyetherimide resin
  • the upper surface 62 of the spacer 6 is in contact with the first surface 21 of the first substrate 2, and the lower surface 63 of the spacer 6 is in contact with the second electrode 5.
  • the upper surface 62 of the spacer 6 in this embodiment corresponds to an example of one surface of the spacer in the present invention
  • the lower surface 63 of the spacer 6 in this embodiment corresponds to an example of the other surface of the spacer in the present invention.
  • the spacer 6 is provided with an opening 61 larger than the first electrode 4 so as to correspond to the first electrode layer 41. Further, the thickness of the spacer 6 is substantially equal to the thickness of the first electrode 4. For this reason, the entire first electrode 4 is accommodated in the opening 61 of the spacer 6.
  • the pressure-sensitive sensor 1 includes the first substrate 2 provided with the first electrode 4 on the first surface 21, the spacer 6, and the second surface 31 on the second surface 31.
  • the second substrate 3 provided with the electrode 5 is laminated, and the first substrate 2 and the spacer 6 and between the second electrode 5 and the spacer 6 are fixed with an adhesive or the like. Has been. And in the area
  • adhesive materials include acrylic resin-based, urethane resin-based, and silicone resin-based adhesive materials.
  • the region D including the first electrode 4 and the second electrode 5 includes a minimum continuous region D1 surrounding the first electrode 4 and a minimum region surrounding the second electrode 5 in plan view. Of the continuous area D2, it means the larger area (D2 in this example).
  • the first electrode 4 and the second electrode 5 are connected to a pressure detection device (not shown).
  • a pressure detection device not shown.
  • the spacer 6 is sandwiched between the first surface 21 of the first substrate 2 and the second electrode 5.
  • the thickness of the first electrode 4 provided on the first substrate 2 is substantially equal to the thickness of the spacer 6.
  • the entire first electrode 4 is accommodated in the opening 61 of the spacer 6, at the periphery of the opening 61, where the pressing force applied to the pressure sensor 1 is easily concentrated.
  • the first electrode 4 is not narrowed between the first substrate 2 and the spacer 6. Thereby, the time-dependent deterioration of the 1st electrode 4 can be suppressed and the durability of the pressure-sensitive sensor 1 can be improved.
  • the first surface 21 and the second surface 31 are substantially parallel. For this reason, the said board
  • the first electrode 4 has a thickness substantially the same as the thickness of the spacer 6, and a part of the second electrode 5 is in contact with the spacer 6, the first electrode 4 is between the contact portions.
  • the applied initial load depends only on the thickness of the first electrode 4 and is hardly affected by variations in the thickness of the second electrode 5. As a result, stable initial pressure sensitive characteristics can be ensured.
  • the initial load is equal to the thickness of the spacer 6. It depends on the relationship with the thickness of the insertion portion inserted into the opening of the spacer 6. For this reason, when all of the first electrode and the second electrode become insertion portions, the initial load is affected by the thickness variation of both the first electrode 4 and the second electrode 5, As a result, the value of the initial pressure sensitivity characteristic may deviate from the design value.
  • the spacer 6 since the spacer 6 is interposed between the first substrate 2 and the second electrode 5, the insertion portion is only the first electrode 4, and the second electrode 5 Even if the thickness varies, the initial load is not affected. That is, the initial load is affected only by the first electrode 4, and a relatively stable initial pressure sensitive characteristic can be ensured.
  • FIG. 2 is a cross-sectional view showing a pressure-sensitive sensor 1B in the second embodiment of the present invention
  • FIG. 3 is a cross-sectional view showing a pressure-sensitive sensor showing a modification of the second embodiment of the present invention.
  • the pressure-sensitive sensor 1B according to the second embodiment is the same as the first embodiment described above except that the first electrode 4B and the spacer 6B are different, and therefore, only the portions that are different from the first embodiment. Parts that are the same as those of the first embodiment will be described with the same reference numerals as those of the first embodiment, and description thereof will be omitted.
  • the first electrode 4 ⁇ / b> B in the present embodiment includes a main body 43 and a flange 44 formed continuously from the main body 43 in the radial direction.
  • the main body 43 of the first electrode 4B is formed to cover the first electrode layer 41 provided on the first surface 21 of the first substrate 2 and the first electrode layer 41. 2 electrode layers 421.
  • the flange portion 44 of the first electrode 4B is formed around the main body portion 43 on the first surface 21 of the first substrate 2, and is composed of only the second electrode layer 422.
  • the layer structure of the main body 43 and the flange 44 is not particularly limited.
  • the first electrode layer 41B is formed on the first surface 21 of the first substrate 2, and the first electrode layer is formed on the lower surface of the first electrode layer 41B in the drawing.
  • a second electrode layer 421B having a width relatively narrower than 41B may be formed.
  • the overlapping portion of the first electrode layer 41B and the second electrode layer 421B in the first electrode 4B constitutes the main body portion 43, and the first electrode layer 41B includes the second electrode layer 421B.
  • a portion protruding in the radial direction forms a flange portion 44.
  • the flange portion 44 in the present embodiment corresponds to an example of a low profile portion in the present invention.
  • the second electrode layer 421 of the main body 43 and the second electrode layer 422 of the flange 44 are formed by simultaneously printing and curing as the second electrode layer 42.
  • the main body 43 has an insertion portion 40 that protrudes downward in FIG. 2 from the flange portion 44.
  • the spacer 6 ⁇ / b> B is sandwiched between the flange portion 44 and the fourth electrode layer 52 in the second electrode 5.
  • the spacer 6B the same material as the spacer 6 can be used.
  • the main-body part 43 and the 2nd electrode 5 in the 1st electrode 4B can be hold
  • the first surface 21 and the second surface 31 are substantially parallel in the region D including the first electrode 4B and the second electrode 5, Even if the pressure sensor 1B is used over a long period of time, stable pressure sensitive characteristics can be ensured.
  • the regions D1 and D2 correspond to the region D described above.
  • the thickness W3 of the insertion portion 40 has substantially the same thickness as the spacer thickness W5, and substantially depends only on the thickness W4 of the first electrode layer 41. Further, a spacer 6 ⁇ / b> B is sandwiched between the flange portion 44 and the second electrode 5. For this reason, the initial load applied between the contact portions depends only on the thickness W4 of the first electrode layer 41, and is hardly affected by variations in the thicknesses of the other electrode layers. As a result, stable initial pressure sensitive characteristics can be ensured. Further, the insertion portion 40B of the first electrode 4B in this embodiment is also separated from the inner wall surface of the opening 61 of the spacer 6B. Accordingly, the pressure sensor 1B can be smoothly pressed, and the thickness variation of the end portion of the insertion portion 40B is absorbed in the radial direction of the first electrode 4B (left and right direction in FIG. 2). can do.
  • the flange portion 44 formed around the main body portion 43 is formed, and the flange portion 44 can also be used as a pressure sensor, so that the resistance change of the pressure sensor can be increased. It becomes possible and pressure-sensitive characteristics are improved.
  • FIG. 4 is a cross-sectional view showing a pressure-sensitive sensor 1C according to the third embodiment of the present invention.
  • the pressure-sensitive sensor 1C in the third embodiment is the same as the second embodiment described above except that the first electrode 4C is different, only the parts different from the second embodiment will be described.
  • symbol same as 2nd Embodiment is attached
  • the first electrode 4 ⁇ / b> C in the present embodiment includes a first detection electrode 45 and a first dummy electrode that is formed to be radially separated from the first detection electrode 45. 46.
  • the first detection electrode 45 includes a first electrode layer 41 provided on the first surface 21 of the first substrate 2 and a second electrode formed so as to cover the first electrode layer 41. It is comprised from the electrode layer 421B.
  • the first dummy electrode 46 is formed around the first detection electrode 45 on the first surface 21 of the first substrate 2 and is composed of only the second electrode layer 422B.
  • the second electrode layer 422B can be formed in a manner similar to that of the second electrode layer.
  • the layer configuration of the first dummy electrode 46 is not limited to the second electrode layer 422B.
  • the first dummy electrode 46 may be composed of only the first electrode layer 41 or may be composed of two layers of the first electrode layer 41 and the second electrode layer 422B.
  • the first dummy electrode 46 in the present embodiment corresponds to an example of a low profile portion of the present invention.
  • a spacer 6 ⁇ / b> C is sandwiched between the first dummy electrode 46 and the second electrode 5.
  • the spacer 6C the same material as the spacer 6 can be used.
  • the first surface 21 and the second surface 31 are substantially parallel in the region D including the first electrode 4C and the second electrode 5, Even if the pressure-sensitive sensor 1C is used over a long period of time, stable pressure-sensitive characteristics can be ensured.
  • the regions D1 and D2 correspond to the region D described above.
  • the thickness W8 of the insertion portion 40B has substantially the same thickness as the spacer thickness W9, and substantially depends only on the thickness W4 of the first electrode layer 41. Further, a spacer 6C is sandwiched between the flange portion 422B and the second electrode 5. For this reason, the initial load applied between the contact portions depends only on the thickness W4 of the first electrode layer 41, and is hardly affected by variations in the thicknesses of the other electrode layers. As a result, stable initial pressure sensitive characteristics can be ensured. Further, the insertion portion 40B of the first electrode 4C in the present embodiment is also separated from the inner wall surface of the opening 61 of the spacer 6C. Thereby, the pressure operation of the pressure sensor 1C can be performed smoothly, and the thickness variation of the end portion of the insertion portion 40B in the radial direction of the first electrode 4C (left and right direction in FIG. 4) is absorbed. Can do.
  • FIG. 5 is a sectional view showing a pressure-sensitive sensor 1D according to the fourth embodiment of the present invention.
  • the pressure sensor 1D in the fourth embodiment is the same as the third embodiment described above except that the second electrode 5B is different, so only the parts different from the third embodiment will be described.
  • symbol same as 3rd Embodiment or 1st Embodiment is attached
  • the second electrode 5 ⁇ / b> B in the present embodiment includes a second detection electrode 53 provided so as to face the first detection electrode 45, and the second detection electrode 53. And a second dummy electrode 54 provided away from the second dummy electrode 54.
  • the second detection electrode 53 includes a third electrode layer 511 provided on the second surface 31 of the second substrate 3 and a fourth electrode formed so as to cover the third electrode layer 511.
  • the electrode layer 521 is configured.
  • the second dummy electrode 54 is formed around the second detection electrode 53 on the second surface 31 of the second substrate 3.
  • the second dummy electrode 54 includes a third electrode layer 512 provided on the second surface 31 of the second substrate 3, and a fourth electrode formed so as to cover the third electrode layer 512.
  • the electrode layer 522 is configured. Note that the third electrode layers 511 and 512 are formed using the same material and method as the third electrode layer 51, and the fourth electrode layers 521 and 522 are similar to the fourth electrode layer 52. .
  • the second dummy electrode 54 is not limited to the above configuration, and may include only the third electrode layer 512 or the fourth electrode layer 522.
  • the second detection electrode 53 has a width equal to that of the first detection electrode 45, but is not particularly limited thereto.
  • the second dummy electrode 54 has a width equal to that of the first dummy electrode 46, but is not particularly limited thereto.
  • the first surface 21 and the second surface 31 are substantially parallel.
  • the regions D1 and D2 correspond to the region D described above.
  • the configuration described in the first to fourth embodiments may be reversed upside down.
  • the second electrode may be provided on the first surface 21 of the first substrate 2 and the first electrode may be provided on the second surface 31 of the second substrate 3.
  • At least one of the first electrode and the second electrode is printed on the surface of the electrode by a method such as printing using a conductive paste in which beads having high elasticity such as nylon are dispersed. A layer containing may be formed.
  • the surface of the electrode has a concavo-convex shape as much as elastic beads are contained on the surface of the electrode. For this reason, the resistance change between the first and second electrodes becomes gentle with respect to the change in the load applied to the pressure sensor, and the load can be detected more accurately.
  • the initial load may be more easily different from the design value.
  • the electrode layer in contact with the spacer 6 is hardly affected by variations in the thickness of the electrode layer. For this reason, it is possible to realize accurate load detection based on the above-described gentle resistance change while maintaining this effect.
  • Example 1 In Example 1, a pressure-sensitive sensor as shown in FIG.
  • first substrate 2 polyethylene terephthalate having a thickness of 100 [ ⁇ m] is used as the first substrate 2, and silver paste (FA-353, manufactured by Saitokura Kasei Co., Ltd.) is applied to the first substrate 2 by screen printing.
  • the first electrode layer 41 having a thickness of 10 [ ⁇ m] and a diameter of 6 [mm] was formed by printing and curing by thermal drying at a temperature of 150 ° C. for 30 minutes.
  • first electrode layer 41 Next, the same printing is performed on the first electrode layer 41 using a carbon paste (BTU-500 k Co., Ltd., Asahi Chemical Research Laboratories), and then thermally dried at a temperature of 150 ° C. for 60 minutes to be cured.
  • a third electrode layer 51 having a thickness of 10 [ ⁇ m] and a diameter of 7.5 [mm] was formed as the second substrate 3 under the same conditions as the first substrate 2.
  • a fourth electrode layer 52 having a thickness of 10 [ ⁇ m] and a diameter of 8 [mm] is formed under the same conditions as those of the second electrode layer 42, and this is combined with the third electrode layer 51 to form the second electrode layer 52.
  • the electrode 5 was obtained.
  • a double-sided adhesive sheet (TL-410S-02 made by Lintec Co., Ltd.) having a thickness of 7 [mm] provided with an opening 61 having a diameter of 7 [mm] is used as the spacer 6B, and the center of the opening 61 is the first electrode. It was affixed on the edge part of the 1st electrode 4B so that it might correspond to the center of 4B. And the pressure sensor 1B was produced by sticking the 2nd board
  • the first test is the following load and resistance measurement test. Specifically, the first electrode 4B and the second electrode 5 of the pressure-sensitive sensor 1B are connected to a pressure detecting device, and an actuator of ⁇ 20 mm, rubber hardness 20 degrees, and a flat silicon rubber actuator is 1 mm / min. The relationship between load and resistance value was measured at speed.
  • the second test is a test for confirming the change with time of the relationship between the load and the resistance value. Specifically, under the above conditions, the relationship between the load and the resistance value immediately after the production of the pressure sensor 1B is measured, and the relationship between the load and the resistance value 200 hours after the production of the pressure sensor 1B is obtained. It was measured.
  • Example 2 ⁇ Example 2> In Example 2, the flange portion 44 of the first electrode 4B is omitted, and a double-sided pressure-sensitive adhesive sheet (manufactured by Lintec Corporation) having a thickness of 10 [ ⁇ m] is used as the spacer 6, and the diameter of the first electrode layer 41 is 5 [ mm], the diameter of the second electrode layer 42 was 6 [mm], the diameter of the third electrode layer 51 was 8 [mm], and the diameter of the fourth electrode layer 52 was 9 [mm]. Except for this, a pressure-sensitive sensor 1 having the configuration as shown in FIG.
  • This pressure sensor 1 was also subjected to the above two tests under the same conditions as in Example 1.
  • Example 3 a pressure-sensitive sensor 1D having a structure as shown in FIG. 5 was produced.
  • a first electrode layer 41 having a thickness of 10 [ ⁇ m] and a diameter of 4 [mm] was formed on the first substrate 2 by the same method as in Example 1.
  • a second electrode layer 421B having a thickness of 10 [ ⁇ m] and a diameter of 4.5 [mm] is formed on the first electrode layer 41, and 3 from the center of the second electrode layer 421B.
  • the second electrode layer 422B is formed so that the center of the second electrode layer 422B having a width of 2.0 [mm] comes to a place separated by .5 [mm].
  • a third electrode layer 511 having a thickness of 10 [ ⁇ m] and a diameter of 4 [mm] is formed on the second substrate 3 in the same manner as in Example 1, and the third electrode layer 511 is formed.
  • the third electrode layer 512B was formed so that the center of the third electrode layer 512 having a width of 1.0 [mm] comes to a place away from the center by 3.5 [mm].
  • a fourth electrode layer 521 having a thickness of 10 [ ⁇ m] and a diameter of 4.5 [mm] is formed on the third electrode layer 511, and has a thickness of 10 [ ⁇ m] and a width of 2.0 [mm].
  • the fourth electrode layer 522 was formed over the third electrode layer 512.
  • a pressure-sensitive sensor 1D was manufactured by sticking the second substrate 3 to the first substrate 2 in the same manner as in Example 1.
  • Comparative Example 1 a pressure-sensitive sensor having the same configuration as that of Example 1 except that the first electrode had the same configuration as that of the second electrode 5 was produced.
  • Comparative Example 3 In Comparative Example 3, the configuration as described in FIG. 2 of Patent Document 1 described above is the same as that in Example 1 except that the spacer is attached not on the first electrode but on the first substrate. A pressure-sensitive sensor was prepared.
  • Example 1 The measurement results of Example 1 are shown in FIG. 7, FIG. 8 and Table 1
  • the measurement results of Example 2 are shown in FIG. 7, FIG. 9 and Table 1
  • the measurement results of Example 3 are shown in FIG. 7 shows the measurement results of No. 1
  • the measurement results of Comparative Example 2 are shown in FIGS. 7, 10 and Table 1
  • the measurement results of Comparative Example 3 are shown in FIG.
  • the resistance value of the pressure-sensitive sensor of Example 1 when the load was 0 N was about 100,000 ⁇
  • the resistance value when the load was 5 N was about 300 ⁇
  • the resistance value of the pressure sensor of Example 2 at a load of 0 N was about 12000 ⁇
  • the resistance value at a load of 5N was about 1050 ⁇
  • the resistance value of the pressure-sensitive sensor of Example 3 at a load of 0 N was about 100,000 ⁇
  • the resistance value at a load of 5N was about 1050 ⁇ .
  • the pressure sensor of Comparative Example 1 had no change in resistance value until the load reached about 1 N, and the applied load could not be detected.
  • the resistance values of the pressure sensitive sensors of Comparative Example 2 and Comparative Example 3 at a load of 5 N are about 300 ⁇ , which is similar to the pressure sensitive sensor 1B of Example 1, while the resistance values at a load of 0 N are about 300 ⁇ , respectively. 1500 ⁇ and about 1100 ⁇ .
  • the amount of change in resistance value of the pressure sensitive sensors of Comparative Examples 2 and 3 at a load of 0N to 5N is significantly smaller than the amount of change of resistance value of the pressure sensitive sensors of Examples 1 to 3 at a load of 0N to 5N. I understood.
  • the pressure-sensitive sensors of Example 1 and Example 2 have the characteristics of the load and resistance immediately after fabrication, and the load and resistance after 200 hours from fabrication. No significant difference was observed between the characteristics of the values and the time-dependent changes in the characteristics of the load and resistance were found to be small.
  • the pressure-sensitive sensor of Comparative Example 2 is between the characteristics of the load and resistance value immediately after fabrication and the load and resistance value after 200 hours from fabrication. Differences were observed, and it was found that changes with time in the characteristics of the load and the resistance value were large.
  • a minute load can be accurately detected as a larger change in resistance value, and stable pressure-sensitive characteristics can be ensured even when used over a long period of time. It was confirmed that it was possible.

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  • Chemical & Material Sciences (AREA)
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  • Force Measurement Appropriate To Specific Purposes (AREA)
PCT/JP2014/052083 2013-02-04 2014-01-30 感圧センサ WO2014119658A1 (ja)

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